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    Methods of making field effect transistor structure with partially isolated source/drain junctions
    1.
    发明授权
    Methods of making field effect transistor structure with partially isolated source/drain junctions 失效
    具有部分隔离的源极/漏极结的场效应晶体管结构的方法

    公开(公告)号：US06541343B1

    公开(公告)日：2003-04-01

    申请号：US09474836

    申请日：1999-12-30

    申请人： Anand S. Murthy ,  Robert S. Chau ,  Patrick Morrow ,  Robert S. McFadden

    发明人： Anand S. Murthy ,  Robert S. Chau ,  Patrick Morrow ,  Robert S. McFadden

    IPC分类号： H01L21336

    CPC分类号： H01L29/66628 ,  H01L29/0653 ,  H01L29/66636

    摘要： A microelectronic structure includes at least one source/drain terminal of a first conductivity type that is partially isolated from a region of semiconductor material of a second conductivity type. In a further aspect of the invention, a process for forming a microelectronic structure, such as a MOSFET, having at least one source/drain terminal of a first conductivity type that is partially isolated from a region of semiconductor material of a second conductivity type includes forming a recess having a surface, forming a dielectric material over a portion of the surface of the recess, and back-filling the recess to form a source/drain terminal.

    摘要翻译： 微电子结构包括与第二导电类型的半导体材料的区域部分隔离的第一导电类型的至少一个源极/漏极端子。 在本发明的另一方面，用于形成诸如MOSFET的微电子结构的方法具有至少一个与第二导电类型的半导体材料的区域部分隔离的第一导电类型的源极/漏极端子，包括 形成具有表面的凹部，在所述凹部的所述表面的一部分上形成电介质材料，并且对所述凹部进行后填充以形成源极/漏极端子。

    Method of fabricating a field effect transistor structure with abrupt source/drain junctions
    2.
    发明授权
    Method of fabricating a field effect transistor structure with abrupt source/drain junctions 有权
    制造具有突然的源极/漏极结的场效应晶体管结构的方法

    公开(公告)号：US07436035B2

    公开(公告)日：2008-10-14

    申请号：US10917722

    申请日：2004-08-12

    申请人： Anand S. Murthy ,  Robert S. Chau ,  Patrick Morrow ,  Chia-Hong Jan ,  Paul Packan

    发明人： Anand S. Murthy ,  Robert S. Chau ,  Patrick Morrow ,  Chia-Hong Jan ,  Paul Packan

    IPC分类号： H01L29/72

    CPC分类号： H01L29/66636 ,  H01L21/02532 ,  H01L21/0262 ,  H01L21/2022 ,  H01L29/0646 ,  H01L29/0847 ,  H01L29/1083 ,  H01L29/16 ,  H01L29/161 ,  H01L29/165 ,  H01L29/41766 ,  H01L29/41783 ,  H01L29/4925 ,  H01L29/66477 ,  H01L29/66492 ,  H01L29/665 ,  H01L29/66545 ,  H01L29/66621 ,  H01L29/66628 ,  H01L29/7834 ,  H01L29/7848

    摘要： Microelectronic structures embodying the present invention include a field effect transistor (FET) having highly conductive source/drain extensions. Formation of such highly conductive source/drain extensions includes forming a passivated recess which is back filled by epitaxial deposition of doped material to form the source/drain junctions. The recesses include a laterally extending region that underlies a portion of the gate structure. Such a lateral extension may underlie a sidewall spacer adjacent to the vertical sidewalls of the gate electrode, or may extend further into the channel portion of a FET such that the lateral recess underlies the gate electrode portion of the gate structure. In one embodiment the recess is back filled by an in-situ epitaxial deposition of a bilayer of oppositely doped material. In this way, a very abrupt junction is achieved that provides a relatively low resistance source/drain extension and further provides good off-state subthreshold leakage characteristics. Alternative embodiments can be implemented with a back filled recess of a single conductivity type.

    摘要翻译： 体现本发明的微电子结构包括具有高导电性的源极/漏极延伸的场效应晶体管（FET）。 形成这种高导电的源极/漏极延伸部分包括形成钝化的凹槽，其通过掺杂材料的外延沉积而填充以形成源极/漏极结。 凹部包括在栅极结构的一部分下面的横向延伸的区域。 这种横向延伸部可以位于与栅电极的垂直侧壁相邻的侧壁间隔物的下面，或者可以进一步延伸到FET的沟道部分中，使得侧向凹槽位于栅极结构的栅电极部分的下方。 在一个实施例中，通过相对掺杂材料的双层的原位外延沉积来将凹部反向填充。 以这种方式，实现了非常突然的结，其提供相对较低的电阻源极/漏极延伸并进一步提供良好的截止阈值泄漏特性。 替代实施例可以用单导电类型的后填充凹槽来实现。

    Field effect transistor structure with abrupt source/drain junctions
    4.
    发明授权
    Field effect transistor structure with abrupt source/drain junctions 有权
    具有突发的源极/漏极结的场效应晶体管结构

    公开(公告)号：US07682916B2

    公开(公告)日：2010-03-23

    申请号：US12231172

    申请日：2008-08-28

    申请人： Anand S. Murthy ,  Robert S. Chau ,  Patrick Morrow ,  Chia-Hong Jan ,  Paul Packan

    发明人： Anand S. Murthy ,  Robert S. Chau ,  Patrick Morrow ,  Chia-Hong Jan ,  Paul Packan

    IPC分类号： H01L21/336

    CPC分类号： H01L29/66636 ,  H01L21/02532 ,  H01L21/0262 ,  H01L21/2022 ,  H01L29/0646 ,  H01L29/0847 ,  H01L29/1083 ,  H01L29/16 ,  H01L29/161 ,  H01L29/165 ,  H01L29/41766 ,  H01L29/41783 ,  H01L29/4925 ,  H01L29/66477 ,  H01L29/66492 ,  H01L29/665 ,  H01L29/66545 ,  H01L29/66621 ,  H01L29/66628 ,  H01L29/7834 ,  H01L29/7848

    摘要： Microelectronic structures embodying the present invention include a field effect transistor (FET) having highly conductive source/drain extensions. Formation of such highly conductive source/drain extensions includes forming a passivated recess which is back filled by epitaxial deposition of doped material to form the source/drain junctions. The recesses include a laterally extending region that underlies a portion of the gate structure. Such a lateral extension may underlie a sidewall spacer adjacent to the vertical sidewalls of the gate electrode, or may extend further into the channel portion of a FET such that the lateral recess underlies the gate electrode portion of the gate structure. In one embodiment the recess is back filled by an in-situ epitaxial deposition of a bilayer of oppositely doped material. In this way, a very abrupt junction is achieved that provides a relatively low resistance source/drain extension and further provides good off-state subthreshold leakage characteristics. Alternative embodiments can be implemented with a back filled recess of a single conductivity type.

    摘要翻译： 体现本发明的微电子结构包括具有高导电性的源极/漏极延伸的场效应晶体管（FET）。 形成这种高导电的源极/漏极延伸部分包括形成钝化的凹槽，其通过掺杂材料的外延沉积而填充以形成源极/漏极结。 凹部包括在栅极结构的一部分下面的横向延伸的区域。 这种横向延伸部可以位于与栅电极的垂直侧壁相邻的侧壁间隔物的下面，或者可以进一步延伸到FET的沟道部分中，使得侧向凹槽位于栅极结构的栅电极部分的下方。 在一个实施例中，通过相对掺杂材料的双层的原位外延沉积来将凹部反向填充。 以这种方式，实现了非常突然的结，其提供相对较低的电阻源极/漏极延伸并进一步提供良好的截止阈值泄漏特性。 替代实施例可以用单导电类型的后填充凹槽来实现。

    FIELD EFFECT TRANSISTOR STRUCTURE WITH ABRUPT SOURCE/DRAIN JUNCTIONS
    6.
    发明申请
    FIELD EFFECT TRANSISTOR STRUCTURE WITH ABRUPT SOURCE/DRAIN JUNCTIONS 有权
    具有冲击源/漏联结的场效应晶体管结构

    公开(公告)号：US20100133595A1

    公开(公告)日：2010-06-03

    申请号：US12700637

    申请日：2010-02-04

    申请人： Anand S. Murthy ,  Robert S. Chau ,  Patrick Morrow ,  Chia-Hong Jan ,  Paul Packan

    发明人： Anand S. Murthy ,  Robert S. Chau ,  Patrick Morrow ,  Chia-Hong Jan ,  Paul Packan

    IPC分类号： H01L29/78

    CPC分类号： H01L29/66636 ,  H01L21/02532 ,  H01L21/0262 ,  H01L21/2022 ,  H01L29/0646 ,  H01L29/0847 ,  H01L29/1083 ,  H01L29/16 ,  H01L29/161 ,  H01L29/165 ,  H01L29/41766 ,  H01L29/41783 ,  H01L29/4925 ,  H01L29/66477 ,  H01L29/66492 ,  H01L29/665 ,  H01L29/66545 ,  H01L29/66621 ,  H01L29/66628 ,  H01L29/7834 ,  H01L29/7848

    摘要： Microelectronic structures embodying the present invention include a field effect transistor (FET) having highly conductive source/drain extensions. Formation of such highly conductive source/drain extensions includes forming a passivated recess which is back filled by epitaxial deposition of doped material to form the source/drain junctions. The recesses include a laterally extending region that underlies a portion of the gate structure. Such a lateral extension may underlie a sidewall spacer adjacent to the vertical sidewalls of the gate electrode, or may extend further into the channel portion of a FET such that the lateral recess underlies the gate electrode portion of the gate structure. In one embodiment the recess is back filled by an in-situ epitaxial deposition of a bilayer of oppositely doped material. In this way, a very abrupt junction is achieved that provides a relatively low resistance source/drain extension and further provides good off-state subthreshold leakage characteristics. Alternative embodiments can be implemented with a back filled recess of a single conductivity type.

    摘要翻译： 体现本发明的微电子结构包括具有高导电性的源极/漏极延伸的场效应晶体管（FET）。 形成这种高导电的源极/漏极延伸部分包括形成钝化的凹槽，其通过掺杂材料的外延沉积而填充以形成源极/漏极结。 凹部包括在栅极结构的一部分下面的横向延伸的区域。 这种横向延伸部可以位于与栅电极的垂直侧壁相邻的侧壁间隔物的下面，或者可以进一步延伸到FET的沟道部分中，使得侧向凹槽位于栅极结构的栅电极部分的下方。 在一个实施例中，通过相对掺杂材料的双层的原位外延沉积来将凹部反向填充。 以这种方式，实现了非常突然的结，其提供相对较低的电阻源极/漏极延伸并进一步提供良好的截止阈值泄漏特性。 替代实施例可以用单导电类型的后填充凹槽来实现。

    Field effect transistor structure with abrupt source/drain junctions
    7.
    发明申请
    Field effect transistor structure with abrupt source/drain junctions 有权
    具有突发的源极/漏极结的场效应晶体管结构

    公开(公告)号：US20090011565A1

    公开(公告)日：2009-01-08

    申请号：US12231172

    申请日：2008-08-28

    申请人： Anand S. Murthy ,  Robert S. Chau ,  Patrick Morrow ,  Chia-Hong Jan ,  Paul Packan

    发明人： Anand S. Murthy ,  Robert S. Chau ,  Patrick Morrow ,  Chia-Hong Jan ,  Paul Packan

    IPC分类号： H01L21/336

    CPC分类号： H01L29/66636 ,  H01L21/02532 ,  H01L21/0262 ,  H01L21/2022 ,  H01L29/0646 ,  H01L29/0847 ,  H01L29/1083 ,  H01L29/16 ,  H01L29/161 ,  H01L29/165 ,  H01L29/41766 ,  H01L29/41783 ,  H01L29/4925 ,  H01L29/66477 ,  H01L29/66492 ,  H01L29/665 ,  H01L29/66545 ,  H01L29/66621 ,  H01L29/66628 ,  H01L29/7834 ,  H01L29/7848

    摘要： Microelectronic structures embodying the present invention include a field effect transistor (FET) having highly conductive source/drain extensions. Formation of such highly conductive source/drain extensions includes forming a passivated recess which is back filled by epitaxial deposition of doped material to form the source/drain junctions. The recesses include a laterally extending region that underlies a portion of the gate structure. Such a lateral extension may underlie a sidewall spacer adjacent to the vertical sidewalls of the gate electrode, or may extend further into the channel portion of a FET such that the lateral recess underlies the gate electrode portion of the gate structure. In one embodiment the recess is back filled by an in-situ epitaxial deposition of a bilayer of oppositely doped material. In this way, a very abrupt junction is achieved that provides a relatively low resistance source/drain extension and further provides good off-state subthreshold leakage characteristics. Alternative embodiments can be implemented with a back filled recess of a single conductivity type.

    摘要翻译： 体现本发明的微电子结构包括具有高导电性的源极/漏极延伸的场效应晶体管（FET）。 形成这种高导电的源极/漏极延伸部分包括形成钝化的凹槽，其通过掺杂材料的外延沉积而填充以形成源极/漏极结。 凹部包括在栅极结构的一部分下面的横向延伸的区域。 这种横向延伸部可以位于与栅电极的垂直侧壁相邻的侧壁间隔物的下面，或者可以进一步延伸到FET的沟道部分中，使得侧向凹槽位于栅极结构的栅电极部分的下方。 在一个实施例中，通过相对掺杂材料的双层的原位外延沉积来将凹部反向填充。 以这种方式，实现了非常突然的结，其提供相对较低的电阻源极/漏极延伸并进一步提供良好的截止阈值泄漏特性。 替代实施例可以用单导电类型的后填充凹槽来实现。

    Method of making a semiconductor transistor
    9.
    发明授权
    Method of making a semiconductor transistor 有权
    制造半导体晶体管的方法

    公开(公告)号：US06812086B2

    公开(公告)日：2004-11-02

    申请号：US10197041

    申请日：2002-07-16

    申请人： Anand S. Murthy ,  Boyan Boyanov ,  Ravindra Soman ,  Robert S. Chau

    发明人： Anand S. Murthy ,  Boyan Boyanov ,  Ravindra Soman ,  Robert S. Chau

    IPC分类号： H01L218238

    CPC分类号： H01L29/66477 ,  H01L21/2254 ,  H01L21/823814 ,  H01L21/823835 ,  H01L29/165 ,  H01L29/41783 ,  H01L29/456 ,  H01L29/66628 ,  H01L29/66636 ,  H01L29/7834

    摘要： Transistors are manufactured by growing germanium source and drain regions, implanting dopant impurities into the germanium, and subsequently annealing the source and drain regions so that the dopant impurities diffuse through the germanium. The process is simpler than a process wherein germanium is insitu doped with p-type or n-type impurities. The dopant impurities diffuse easily through the germanium but not easily through underlying silicon, so that an interface between the germanium and silicon acts as a diffusion barrier and ensures positioning of the dopant atoms in the regions of the device where they improve transistor performance.

    摘要翻译： 晶体管通过生长锗源极和漏极区域，将掺杂杂质注入到锗中并随后对源极和漏极区域进行退火来制造，使得掺杂剂杂质扩散通过锗。 该方法比其中锗掺杂有p型或n型杂质的方法简单。 掺杂剂杂质易于通过锗扩散，但不容易通过下面的硅，使得锗和硅之间的界面充当扩散势垒，并确保掺杂剂原子在其中提高晶体管性能的区域中的位置。