中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

6 records (took 0.014 seconds)

    METHODS AND APPARATUS FOR RECOVERING HEAT FROM PROCESSING SYSTEMS
    1.
    发明申请
    METHODS AND APPARATUS FOR RECOVERING HEAT FROM PROCESSING SYSTEMS 审中-公开
    从加工系统回收热量的方法和装置

    公开(公告)号：US20100096110A1

    公开(公告)日：2010-04-22

    申请号：US12579472

    申请日：2009-10-15

    Applicant: Andreas Neuber ,  Daniel O. Clark

    Inventor： Andreas Neuber ,  Daniel O. Clark

    IPC: F28D15/00 ,  F25B30/00

    CPC classification number: H01L21/67017 ,  Y02P70/605

    Abstract: Methods and apparatus for recovering heat from disposed effluents are disclosed herein. In some embodiments, an apparatus may include a first process chamber configured for gaseous or liquid processes; a second process chamber configured for liquid processes; and a heat pump having a compressor and a first heat exchanger, wherein the compressor is configured to use a first effluent exhausted from the first process chamber and wherein the first heat exchanger having first and second sides configured to transfer heat therebetween, wherein the first side is configured to flow a liquid reagent therethrough and into the second process chamber, and wherein the second side is configured to flow the pressurized first effluent from the first process chamber therethrough. In some embodiments, a heater may be disposed between the heat pump and the second process chamber to further heat the liquid reagent prior to entering the second process chamber.

    Abstract translation: 本文公开了从处置的废水中回收热量的方法和装置。 在一些实施例中，装置可以包括被配置用于气态或液体过程的第一处理室; 配置用于液体处理的第二处理室; 以及具有压缩机和第一热交换器的热泵，其中所述压缩机构造成使用从所述第一处理室排出的第一流出物，并且其中所述第一热交换器具有被配置为在其间传热的第一和第二侧，其中所述第一侧 被配置为使液体试剂流过其中并进入第二处理室，并且其中第二侧构造成使来自第一处理室的加压的第一流出物流过其中。 在一些实施例中，加热器可以设置在热泵和第二处理室之间，以在进入第二处理室之前进一步加热液体试剂。

    Method and apparatus for controlling a processing system
    3.
    发明授权
    Method and apparatus for controlling a processing system 有权
    用于控制处理系统的方法和装置

    公开(公告)号：US09080576B2

    公开(公告)日：2015-07-14

    申请号：US13359899

    申请日：2012-01-27

    Applicant: Youssef Loldj ,  Jay J. Jung ,  Mehran Moalem ,  Paul E. Fisher ,  Joshua Putz ,  Andreas Neuber

    Inventor： Youssef Loldj ,  Jay J. Jung ,  Mehran Moalem ,  Paul E. Fisher ,  Joshua Putz ,  Andreas Neuber

    IPC: F04B49/06 ,  F04D27/00 ,  F04D19/04 ,  F17D3/00

    CPC classification number: F04D27/004 ,  F04D19/04 ,  F17D3/00 ,  H01L21/67017 ,  H01L21/6719 ,  H01L21/67253 ,  Y10T137/0396

    Abstract: Methods and apparatus for controlling a processing system are provided herein. In some embodiments, a method of controlling a processing system may include operating a vacuum pump coupled to a process chamber at a first baseline pump idle speed selected to maintain the process chamber at a pressure equal to a first baseline pump idle pressure; monitoring the pressure in the process chamber while operating the vacuum pump at the first baseline pump idle speed; and determining whether the first baseline pump idle pressure can be maintained in the process chamber when the vacuum pump is operating at the first baseline pump idle speed.

    Abstract translation: 本文提供了用于控制处理系统的方法和装置。 在一些实施例中，一种控制处理系统的方法可以包括以选择为将处理室维持在等于第一基准泵空闲压力的压力的第一基准泵空转速度下操作联接到处理室的真空泵; 在第一基准泵怠速下操作真空泵时监测处理室中的压力; 以及当所述真空泵以所述第一基准泵怠速运转时，确定所述处理室中是否能够维持所述第一基准泵怠速压力。

    FACTORY RESOURCE OPTIMIZATION IDENTIFICATION PROCESS AND SYSTEM
    4.
    发明申请
    FACTORY RESOURCE OPTIMIZATION IDENTIFICATION PROCESS AND SYSTEM 审中-公开
    工厂资源优化识别流程与系统

    公开(公告)号：US20100249968A1

    公开(公告)日：2010-09-30

    申请号：US12730969

    申请日：2010-03-24

    Applicant: Andreas Neuber ,  Parth Sethia ,  Parris C.M. Hawkins ,  Krishna Vepa ,  Raymond Murray

    Inventor： Andreas Neuber ,  Parth Sethia ,  Parris C.M. Hawkins ,  Krishna Vepa ,  Raymond Murray

    IPC: G06F19/00 ,  G06F3/048

    CPC classification number: G06Q50/04 ,  G06Q10/06 ,  Y02P90/30

    Abstract: A method and system for factory resource optimization identification is described herein. In one embodiment, an expected usage rate is determined for a resource in a manufacturing facility and an actual usage rate is determined for the resource in the manufacturing facility. A comparison between the expected usage rate and the actual usage rate is facilitated. A determination is made, based on the comparison, of whether a variance between the expected usage rate and the actual usage rate exceeds a threshold. A notification is provided if the variance exceeds the threshold.

    Abstract translation: 本文描述了用于工厂资源优化识别的方法和系统。 在一个实施例中，为制造设施中的资源确定预期使用率，并且确定制造设施中的资源的实际使用率。 预期使用率与实际使用率之间的比较是有利的。 基于比较来确定预期使用率和实际使用率之间的差异是否超过阈值。 如果方差超过阈值，则提供通知。

Patent Agency Ranking