公开(公告)号：US10101231B2

公开(公告)日：2018-10-16

申请号：US13516423

申请日：2010-11-11

申请人： Anh Tuan Tham ,  Rafael Teipen ,  Michael Philipps

发明人： Anh Tuan Tham ,  Rafael Teipen ,  Michael Philipps

IPC分类号： G01L9/00 ,  G01L9/08 ,  G01L13/02 ,  G01L19/04 ,  G01L19/06

摘要： A pressure sensor includes a sensor body with a sensor chamber in the interior, at least a first separating membrane, forming a first separating membrane chamber connected with the sensor body. A measuring membrane divides the sensor chamber into two chamber portions. A pressure transfer liquid, with which the first separating membrane chamber, the first chamber portion and a channel therebetween are filled, in order to transfer a pressure to the measuring membrane; wherein the pressure sensor is specified for a temperature range between a minimum temperature and a maximum temperature, as well as for a pressure range. At the minimum temperature, the pressure transfer liquid volume in the first chamber portion, the first channel and the first separating membrane chamber is sufficient over the total pressure range to transfer the pressure to the measuring membrane, without the first separating membrane coming to rest, and that when, in the case of overload at maximum temperature, the entire pressure transfer liquid volume moves out of the first separating membrane chamber into the first chamber portion, and is accommodated by the measuring membrane, the measuring membrane experiences no plastic deformation.

公开(公告)号：US20120265455A1

公开(公告)日：2012-10-18

申请号：US13516423

申请日：2010-10-11

申请人： Anh Tuan Tham ,  Rafael Teipen ,  Michael Philipps

发明人： Anh Tuan Tham ,  Rafael Teipen ,  Michael Philipps

IPC分类号： G01L7/10 ,  G01L9/12 ,  G06F19/00

CPC分类号： G01L13/025 ,  G01L9/0044 ,  G01L19/04 ,  G01L19/0618

摘要： A pressure sensor includes a sensor body with a sensor chamber in the interior, at least a first separating membrane, forming a first separating membrane chamber connected with the sensor body. A measuring membrane divides the sensor chamber into two chamber portions. A pressure transfer liquid, with which the first separating membrane chamber, the first chamber portion and a channel therebetween are filled, in order to transfer a pressure to the measuring membrane; wherein the pressure sensor is specified for a temperature range between a minimum temperature and a maximum temperature, as well as for a pressure range. At the minimum temperature, the pressure transfer liquid volume in the first chamber portion, the first channel and the first separating membrane chamber is sufficient over the total pressure range to transfer the pressure to the measuring membrane, without the first separating membrane coming to rest, and that when, in the case of overload at maximum temperature, the entire pressure transfer liquid volume moves out of the first separating membrane chamber into the first chamber portion, and is accommodated by the measuring membrane, the measuring membrane experiences no plastic deformation.

摘要翻译： 压力传感器包括在内部具有传感器室的传感器主体，至少第一分离膜，形成与传感器主体连接的第一分离膜室。 测量膜将传感器室分成两个室部分。 一个压力传送液体，第一分离膜室，第一室部分和它们之间的通道用来填充压力传送液体，以将压力传递到测量膜; 其中压力传感器被规定在最低温度和最高温度之间的温度范围以及压力范围内。 在最低温度下，第一室部分，第一通道和第一分离膜室中的压力传送液体体积在总压力范围内是足够的，以将压力传递到测量膜，而没有第一分离膜静止， 并且当在最高温度下过载的情况下，整个压力转移液体积从第一分离膜室移出到第一室部分中，并且由测量膜容纳，测量膜不会发生塑性变形。

公开(公告)号：US09054222B2

公开(公告)日：2015-06-09

申请号：US14007704

申请日：2012-02-10

申请人： Anh Tuan Tham ,  Frank Passler ,  Rafael Teipen

发明人： Anh Tuan Tham ,  Frank Passler ,  Rafael Teipen

IPC分类号： H01L29/84 ,  G01L9/00 ,  G01L13/02 ,  G01L19/14 ,  H01L23/473

CPC分类号： H01L29/84 ,  G01L9/0073 ,  G01L13/025 ,  G01L19/143 ,  G01L19/147 ,  H01L23/473 ,  H01L2924/0002 ,  H01L2924/00

摘要： A pressure difference sensor includes a capsule, which has a ceramic capsule body. The capsule has a transducer seat in its interior, wherein there is arranged in the transducer seat a semiconductor pressure measuring transducer core, which has a measuring membrane body and at least one support body. The measuring membrane body is connected pressure-tightly with the at least one support body, which has a pressure inlet opening. Ducts extend respectively from an outer surface of the capsule into the transducer seat, wherein the pressure inlet opening communicates with the first duct A side of the measuring membrane is contactable with a pressure through the pressure inlet opening, wherein the support body contacts a joint, which surrounds the first pressure inlet opening and the opening of the first duct into the transducer seat and is connected pressure-tightly with a wall of the transducer seat, and wherein a second side of the measuring membrane is hydraulically isolated from its first side and communicates with the second duct.

摘要翻译： 压差传感器包括具有陶瓷胶囊主体的胶囊。 胶囊在其内部具有换能器座，其中在换能器座中布置有半导体压力测量换能器芯，其具有测量膜主体和至少一个支撑体。 测量膜体与至少一个具有压力入口的支撑体压力连接。 管道分别从胶囊的外表面延伸到换能器座中，其中与测量膜的第一管道A侧连通的压力入口开口与通过压力入口开口的压力接触，其中支撑体接触接头， 其围绕第一压力入口和第一导管的开口进入换能器座，并且与换能器座的壁压力连接，并且其中测量膜的第二侧与其第一侧液压隔离并且连通 与第二个管道。

公开(公告)号：US20140021563A1

公开(公告)日：2014-01-23

申请号：US14007704

申请日：2012-02-10

申请人： Anh Tuan Tham ,  Frank Passler ,  Rafael Teipen

发明人： Anh Tuan Tham ,  Frank Passler ,  Rafael Teipen

IPC分类号： H01L29/84

CPC分类号： H01L29/84 ,  G01L9/0073 ,  G01L13/025 ,  G01L19/143 ,  G01L19/147 ,  H01L23/473 ,  H01L2924/0002 ,  H01L2924/00

摘要： A pressure difference sensor includes a capsule, which has a ceramic capsule body. The capsule has a transducer seat in its interior, wherein there is arranged in the transducer seat a semiconductor pressure measuring transducer core, which has a measuring membrane body and at least one support body. The measuring membrane body is connected pressure-tightly with the at least one support body, which has a pressure inlet opening. Ducts extend respectively from an outer surface of the capsule into the transducer seat, wherein the pressure inlet opening communicates with the first duct A side of the measuring membrane is contactable with a pressure through the pressure inlet opening, wherein the support body contacts a joint, which surrounds the first pressure inlet opening and the opening of the first duct into the transducer seat and is connected pressure-tightly with a wall of the transducer seat, and wherein a second side of the measuring membrane is hydraulically isolated from its first side and communicates with the second duct.

摘要翻译： 压差传感器包括具有陶瓷胶囊主体的胶囊。 胶囊在其内部具有换能器座，其中在换能器座中布置有半导体压力测量换能器芯，其具有测量膜主体和至少一个支撑体。 测量膜体与至少一个具有压力入口的支撑体压力连接。 管道分别从胶囊的外表面延伸到换能器座中，其中与测量膜的第一管道A侧连通的压力入口开口与通过压力入口开口的压力接触，其中支撑体接触接头， 其围绕第一压力入口和第一导管的开口进入换能器座，并且与换能器座的壁压力连接，并且其中测量膜的第二侧与其第一侧液压隔离并且连通 与第二个管道。

公开(公告)号：US20130047738A1

公开(公告)日：2013-02-28

申请号：US13696453

申请日：2011-04-14

申请人： Anh Tuan Tham ,  Dieter Stolze ,  Rafael Teipen

发明人： Anh Tuan Tham ,  Dieter Stolze ,  Rafael Teipen

IPC分类号： B81C1/00 ,  C01B33/02 ,  G01L9/00

CPC分类号： G01L19/0618 ,  B81C1/00103 ,  B81C2201/0143 ,  G01L7/082 ,  Y10T428/24479

摘要： A method for the manufacture of a platform having a membrane bed includes providing a platform body, which comprises silicon; and removing silicon material from a surface of the platform body by means of laser ablation. Preferably, this is followed by oxidizing the ablated surface and then etching the oxidized surface. In an example of the invention, a resulting pressure sensor comprises two platforms, each with a membrane bed having a contour for supporting a measuring membrane, wherein the contour essentially corresponds to a bend line of the measuring membrane.

摘要翻译： 一种用于制造具有膜床的平台的方法，包括提供包括硅的平台体; 以及通过激光烧蚀从平台体的表面去除硅材料。 优选地，随后氧化烧蚀表面，然后蚀刻氧化表面。 在本发明的一个实例中，所得到的压力传感器包括两个平台，每个平台具有用于支撑测量膜的轮廓的膜床，其中轮廓基本上对应于测量膜的弯曲线。

公开(公告)号：US20120279310A1

公开(公告)日：2012-11-08

申请号：US13503804

申请日：2010-10-07

申请人： Timo Kober ,  Michael Philipps ,  Dieter Stolze ,  Anh Tuan Tham ,  Roland Werthschutzky

发明人： Timo Kober ,  Michael Philipps ,  Dieter Stolze ,  Anh Tuan Tham ,  Roland Werthschutzky

IPC分类号： G01L9/00 ,  C03B23/203 ,  C03B23/025

CPC分类号： G01L9/0042 ,  C03B23/0026 ,  G01L19/0618

摘要： The pressure sensor of the invention includes at least one platform, at least one measuring membrane 30, and a transducer, wherein the measuring membrane comprises a semiconductor material, wherein the measuring membrane, enclosing a pressure chamber, is secured on the platform, wherein the measuring membrane is contactable with at least one pressure and is elastically deformable in a pressure-dependent manner, wherein the transducer provides an electrical signal dependent on deformation of the measuring membrane, wherein the platform has a membrane bed, on which the measuring membrane lies in the case of overload, in order to support the measuring membrane, wherein the membrane bed 21 has a glass layer 20, whose surface faces the measuring membrane and forms a wall of the pressure chamber, wherein the surface of the glass layer has a contour, which is suitable for supporting the measuring membrane 30 in the case of overload, characterized in that the contour of the membrane bed 21 is obtainable by a sagging of an unsupported region of a glass plate at increased temperature, due to the force of gravity on the unsupported region of the glass plate, and subsequent cooling of the glass plate.

摘要翻译： 本发明的压力传感器包括至少一个平台，至少一个测量膜30和换能器，其中测量膜包括半导体材料，其中包围压力室的测量膜固定在平台上，其中， 测量膜可与至少一个压力接触并且以压力依赖的方式弹性变形，其中换能器提供取决于测量膜的变形的电信号，其中平台具有膜床，测量膜位于该膜片上 过载的情况，为了支撑测量膜，其中膜床21具有玻璃层20，玻璃层20的表面面向测量膜并形成压力室的壁，其中玻璃层的表面具有轮廓， 其适用于在过载的情况下支撑测量膜30，其特征在于，膜床21的轮廓是 由于玻璃板的未支撑区域上的重力，以及随后的玻璃板的冷却，在升高的温度下通过玻璃板的未支撑区域的下垂可以获得。

公开(公告)号：US08402836B2

公开(公告)日：2013-03-26

申请号：US12735098

申请日：2008-12-12

申请人： Wolfgang Dannhauer ,  Michael Philipps ,  Friedrich Schwabe ,  Dieter Stolze ,  Anh Tuan Tham

发明人： Wolfgang Dannhauer ,  Michael Philipps ,  Friedrich Schwabe ,  Dieter Stolze ,  Anh Tuan Tham

IPC分类号： G01L13/02

CPC分类号： G01L19/0609 ,  G01L9/0073 ,  G01L13/026

摘要： A pressure difference measuring cell for registering pressure difference between a first pressure and a second pressure, comprises: an elastic measuring arrangement having at least one measuring membrane, or diaphragm, that comprises silicon; a platform, which is pressure-tightly connected with the elastic measuring arrangement; a first hydraulic path for transferring a first pressure onto a first surface section of the elastic measuring arrangement; and a second hydraulic path for transferring a second pressure onto a second surface section of the elastic measuring arrangement. The first pressure opposes the second pressure, and the elastic deflection of the measuring arrangement is a measure for the difference between the first and the second pressure, wherein the pressure difference measuring cell has additionally at least one hydraulic throttle, characterized in that the at least one hydraulic throttle comprises porous silicon.

摘要翻译： 用于记录第一压力和第二压力之间的压力差的压差测量单元包括：弹性测量装置，其具有包括硅的至少一个测量膜或隔膜; 与弹性测量装置压力连接的平台; 用于将第一压力转移到弹性测量装置的第一表面部分上的第一液压路径; 以及用于将第二压力传递到弹性测量装置的第二表面部分上的第二液压路径。 所述第一压力与所述第二压力相反，并且所述测量装置的弹性挠度是所述第一和第二压力之间的差值的量度，其中所述压差测量单元还具有至少一个液压节流阀，其特征在于，所述至少一个 一个液压油门包括多孔硅。

公开(公告)号：US08490494B2

公开(公告)日：2013-07-23

申请号：US13125413

申请日：2009-08-12

申请人： Davide Parrotto ,  Anh Tuan Tham ,  Frank Passler ,  Olaf Krusemark ,  Ulrich Buder

发明人： Davide Parrotto ,  Anh Tuan Tham ,  Frank Passler ,  Olaf Krusemark ,  Ulrich Buder

IPC分类号： G01L7/00

CPC分类号： G01L19/0645 ,  G01L19/147

摘要： A relative pressure sensor for registering pressure of a medium relative to surrounding atmospheric pressure includes: a pressure measuring cell having a measuring membrane and a platform, wherein pressure of the medium can act on a first side of the measuring membrane facing away from the platform, and wherein the platform has a reference air opening, through which surrounding atmospheric pressure can act on a second side of the measuring membrane facing the platform. A support body, through which a reference air duct extends between a first surface section and a second surface section of the support body is provided, wherein the pressure measuring cell is affixed to the support body with a pressure resistant, bonded adhesive. The reference air opening communicates with the reference air duct, in order to form a reference air path to the measuring membrane, wherein the bonded adhesive surrounds the reference air path, and the relative pressure sensor further includes a shield element, which protects the bonded adhesive from direct contact with reference air.

摘要翻译： 用于记录介质相对于周围大气压的压力的相对压力传感器包括：具有测量膜和平台的压力测量单元，其中所述介质的压力可以作用在所述测量膜的远离所述平台的第一侧上， 并且其中所述平台具有参考空气开口，周围大气压力可通过所述参考空气开口作用在面向所述平台的所述测量膜的第二侧上。 提供了一种支撑体，通过该支撑体，参考空气管道在支撑体的第一表面部分和第二表面部分之间延伸，其中压力测量单元用耐压粘合的粘合剂固定到支撑体上。 参考空气开口与参考空气管道连通，以便形成到测量膜的参考空气路径，其中粘合的粘合剂围绕参考空气路径，并且相对压力传感器还包括屏蔽元件，其保护粘合的粘合剂 与参考空气直接接触。

公开(公告)号：US08304844B2

公开(公告)日：2012-11-06

申请号：US12734545

申请日：2008-11-07

申请人： Igor Getman ,  Dieter Stolze ,  Anh Tuan Tham

发明人： Igor Getman ,  Dieter Stolze ,  Anh Tuan Tham

IPC分类号： H01L27/14 ,  H01L29/84

CPC分类号： G01L19/147

摘要： A pressure measuring device having a pedestal, an intermediate piece of semiconductor arranged on the pedestal and, connected with the pedestal and arranged on the intermediate piece and connected with the intermediate piece, a semiconductor pressure sensor having a support and a measuring membrane, or diaphragm. The pressure measuring device offers reliable protection of the sensitive measuring membrane, or diaphragm, against mechanical distortions. Provided extending in the interior of the intermediate piece is an annular cavity, which surrounds a first cylindrical section and, pedestal end thereof, a second cylindrical section of the intermediate piece. The second cylindrical section has a greater outer diameter than the first cylindrical section. The cavity is open on an end of the intermediate piece toward the pedestal. The second cylindrical section has an end face facing the pedestal and lying on an end face of the pedestal, for forming a connecting area, via which the intermediate piece is mechanically connected with the pedestal.

摘要翻译： 一种具有基座的压力测量装置，布置在基座上的中间片半导体，并与基座连接并布置在中间件上并与中间件连接，具有支撑件和测量膜或隔膜的半导体压力传感器 。 压力测量装置提供对敏感测量膜或隔膜的可靠保护，防止机械扭曲。 提供在中间件的内部延伸的是环形空腔，其环绕第一圆柱形部分及其基座端部，中间件的第二圆柱形部分。 第二圆柱形部分具有比第一圆柱形部分更大的外径。 空腔在中间件的端部朝向底座打开。 第二圆柱形部分具有面向基座的端面并且位于基座的端面上，用于形成连接区域，中间件通过该连接区域与基座机械连接。

公开(公告)号：US20100140725A1

公开(公告)日：2010-06-10

申请号：US12449821

申请日：2008-03-04

申请人： Igor Getman ,  Dieter Stolze ,  Anh Tuan Tham

发明人： Igor Getman ,  Dieter Stolze ,  Anh Tuan Tham

IPC分类号： H01L29/84 ,  H01L21/30

CPC分类号： G01L9/0055 ,  G01L9/0042

摘要： A piezoresistive pressure sensor is especially suitable for measuring smaller pressures and has a small linearity error. The pressure sensor is manufactured from a BESOI wafer having first and second silicon layers and an oxide layer arranged therebetween. The pressure sensor includes, formed from the first silicon layer of the BESOI wafer, an active layer, in which piezoresistive elements are doped, and, formed from the second silicon layer of the BESOI wafer, a membrane carrier, which externally surrounds a cavity in the second silicon layer, via which a membrane forming region of the active layer and an oxide layer associated therewith are exposed, wherein, in an outer edge of the region of the oxide layer exposed by the cavity, a groove is provided surrounding the region.

摘要翻译： 压阻式压力传感器特别适用于测量较小的压力并具有较小的线性误差。 压力传感器由具有第一和第二硅层并且布置在其间的氧化物层的BESOI晶片制造。 压力传感器包括由BESOI晶片的第一硅层形成的有源层，其中掺杂了压阻元件，并且由BESOI晶片的第二硅层形成膜载体，膜载体外部包围空腔 通过该第二硅层，有源层的膜形成区域和与其相关联的氧化物层被暴露，其中在由空腔暴露的氧化物层的区域的外边缘中围绕该区域设置凹槽。