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公开(公告)号：US06481558B1
公开(公告)日：2002-11-19
申请号：US09467093
申请日：1999-12-10
IPC分类号： B65G3700
CPC分类号： H01L21/67775 , H01L21/67706 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67763 , H01L21/67766 , H01L21/67769
摘要： A transfer system and method for moving an article between a conveyor and a workstation. The transfer system includes an elevator system having a lift device configured to engage the article carried by a conveyor and raise the article above the conveyor. The lift device is movable between a stand-by position with the lift device positioned for the movement of articles past the lift device along the conveyor, and an actuated position with the lift device holding the article above the conveyor. The transfer system also includes a support assembly for supporting the article vicinal a workstation. The support assembly including a shelf for retaining the article at the workstation and a displacement mechanism for moving the shelf between the conveyor and the lift device. The method includes moving a support to engage the article and lift the article above the conveyor, extending a load port shelf to the conveyor and inserting the shelf between the article and the conveyor. After the shelf is extended, the method includes moving the support to deposit the article onto the shelf, and after the step of moving the support, the method includes retracting the shelf to the load port.
摘要翻译： 一种用于在输送机和工作站之间移动物品的转移系统和方法。 传送系统包括具有提升装置的升降机系统，该提升装置构造成接合由输送机承载的物品，并将物品提升在输送机上方。 提升装置可在备用位置与可移动装置之间移动，该提升装置定位成用于使物品沿输送机移动通过提升装置;以及致动位置，其中提升装置将物品保持在输送机上方。 传送系统还包括用于将物品支撑在工作站附近的支撑组件。 支撑组件包括用于将物品保持在工作站处的搁板和用于在输送机和提升装置之间移动货架的移动机构。 该方法包括移动支撑件以接合物品并将物品提升在输送机上方，将装载端口架延伸到输送机并将货架插入物品与输送机之间。 在架子扩展之后，该方法包括移动支架以将物品放置在搁板上，并且在移动支撑件的步骤之后，该方法包括将搁板缩回到装载端口。
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公开(公告)号：US06468021B1
公开(公告)日：2002-10-22
申请号：US09461498
申请日：1999-12-14
IPC分类号： B65G1558
CPC分类号： H01L21/67775 , H01L21/67706 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67763 , H01L21/67766 , H01L21/67769
摘要： An integrated intra-bay transfer, storage and delivery system is provided for moving an article between a conveyor and a station such as a work station. The system includes a transfer assembly which includes a lift mechanism and a displacement mechanism. The transfer assembly transfers the article between the conveyor system and a buffer or storage station for storage of the article. A delivery robot transfers the article between the buffer or storage station and a work station for delivery to the station. The robot includes a vertical movement mechanism and a horizontal movement mechanism. The robot also includes an arm that is adapted to grip the article, particularly an article of a standard configuration having a mushroom-shaped handle on top. The arm engages the handle and lifts the article or transport pod from the storage station to a load port of the work station. In one embodiment, the arm includes a C-shaped adaptation that passively engages the handle from a side thereof. In other embodiments, the arm includes an actuator coupled to an assembly that actively grips the handle from above. Advantages of the invention include the ability to safely move the transport pod from a elevated storage station to the lower placed storage stations or load ports of a work station.
摘要翻译： 提供了一种集成的舱内转移，储存和输送系统，用于在输送机和诸如工作站的工位之间移动物品。 该系统包括一个转移组件，它包括一个升降机构和一个排量机构。 传送组件将物品在输送系统和缓冲器或储存站之间传送以存储物品。 递送机器人将物品在缓冲器或存储站和工作站之间传送以传送到站。 机器人包括垂直移动机构和水平移动机构。 机器人还包括适于夹紧物品的臂，特别是具有在顶部上具有蘑菇形手柄的标准配置的物品。 手臂接合手柄，将物品或运输吊舱从储存站提升到工作站的装载端口。 在一个实施例中，臂包括从其侧面被动地接合手柄的C形适配件。 在其他实施例中，臂包括联接到组件的致动器，该组件从上方主动地握住手柄。 本发明的优点包括将运输舱从高架存储站安全地移动到工作站的下部放置的储存站或负载端口的能力。
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公开(公告)号：US07841820B2
公开(公告)日：2010-11-30
申请号：US11938236
申请日：2007-11-09
IPC分类号： B65G54/02
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67775 , H01L21/68707 , Y10S414/139
摘要： The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.
摘要翻译： 本发明是一种晶片传送系统，其在隔离环境中的室之间输送各个晶片。 在一个实施例中，晶片由在运输箱内行进的晶片梭运送。 运输箱的内部与周围的晶片制造设备的大气条件隔离。 因此，单个晶片可以在整个晶片制造设备中运输，而不必为整个设备保持洁净室环境。 晶片梭可以通过各种技术来推动，例如但不限于磁悬浮或空气轴承。 晶片梭可能同时传送多于一个晶片。 运输箱的内部也可以在真空下，充满气体，或经过过滤的空气。
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公开(公告)号：US07100340B2
公开(公告)日：2006-09-05
申请号：US10087638
申请日：2002-03-01
IPC分类号： H01J5/02
CPC分类号： H01L21/68707 , H01L21/67766 , H01L21/67775 , H01L21/67778 , Y10S414/135
摘要： The present invention is a unified spine structure that EFEM components, such as a wafer handling robot and a SMIF pod advance assembly, may mount to. The frame includes multiple vertical struts that are mounted to an upper support member and a lower support member. Structurally tying the vertical struts to the support members creates a rigid body to support the EFEM components. The vertical struts also provide a common reference that the EFEM components may align with. This eliminates the need for each EFEM component to align with respect to each other. Thus, if one EFEM component is removed it will not affect the alignment and calibration of the remaining secured EFEM components. The unified frame also creates an isolated storage area for the SMIF pod door and the port door within the environment that is isolated from the outside ambient conditions.
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公开(公告)号：US07066707B1
公开(公告)日：2006-06-27
申请号：US10087400
申请日：2002-03-01
IPC分类号： B65G49/07
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67775 , H01L21/68707 , Y10S414/137
摘要： An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts to the front of a tool associated with a semiconductor process. The front end components, including the load port assemblies, prealigners and workpiece handling robot, are mounted to the plate to provide precise and repeatable positioning of the front end components with respect to each other.
摘要翻译： 公开了一种用于工具前端的工件处理和/或检查的集成系统。 该系统包括一体式结构的刚性构件，例如安装到与半导体工艺相关联的工具的前部的金属板。 包括负载端口组件，预对准器和工件处理机器人的前端部件安装到板上，以提供前端部件相对于彼此的精确和可重复的定位。
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公开(公告)号：US06494308B2
公开(公告)日：2002-12-17
申请号：US09781060
申请日：2001-02-08
IPC分类号： B65G2500
CPC分类号： H01L21/67706 , B65G13/04 , B65G37/02 , H01L21/67727 , H01L21/6773 , Y10S414/14
摘要： A system for transporting articles. The transport system includes a conveyor system which includes a transport device for carrying articles between workstations and a drive rail and a support rail for supporting the transport device. The drive rail includes a drive system for propelling the transport device between workstations. At least one shoe carried by the transport device rides on the support rail for movably supporting the transport device on the support rail. The transport system also includes a protective container including a housing having an interior compartment for supporting a plurality of articles. The bottom surface of the housing is configured to engage the drive system such that actuation of the drive system propels the housing along the drive and support rails. At least one shoe carried by the housing is configured to ride on the support rail of the conveyor system to movably support the housing on the support rail. The transport system also includes the method of transporting articles including the steps of providing a transport device for holding at least one article and having at least one shoe, positioning the transport device with the base of the device supported on a drive rail and the shoe supported on a support rail, and actuating a drive system carried by the drive rail to propel the transport device along the drive rail and support rail.
摘要翻译： 运输物品的系统 输送系统包括输送系统，该输送机系统包括用于在工作站和驱动轨道之间运送物品的运送装置和用于支撑输送装置的支撑轨道。 驱动轨道包括用于在工作站之间推动运输装置的驱动系统。 由运送装置承载的至少一个鞋子可以在支撑轨道上移动地支撑在支撑轨道上的运送装置。 运输系统还包括保护容器，其包括具有用于支撑多个物品的内部隔室的壳体。 壳体的底表面构造成接合驱动系统，使得驱动系统的致动沿驱动器和支撑轨道推动壳体。 由壳体承载的至少一个鞋被构造成骑在输送机系统的支撑轨道上以将壳体可移动地支撑在支撑轨道上。 运输系统还包括输送物品的方法，包括提供用于保持至少一个物品并具有至少一个鞋的运输装置的步骤，将运送装置定位在装置的底座支撑在驱动轨道上，鞋支撑 并且驱动由驱动轨道承载的驱动系统，以沿着驱动轨道和支撑轨道推进输送装置。
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7.发明授权公开(公告)号：US08882433B2
公开(公告)日：2014-11-11
申请号：US12780846
申请日：2010-05-14
IPC分类号： B65G1/133 , H01L21/677
CPC分类号： H01L21/67766 , B65G2201/0297 , H01L21/67733 , H01L21/67736 , H01L21/67769 , H01L21/67775 , Y10S414/14
摘要： A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves are coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions. The rail has at least some sections that are linear and some sections that are nonlinear and the sections are arranged in a loop. Example configurations of the storage system can include one or more of stationary shelves, extended horizontal tracks for hoists, conveyors at the level of the storage system assembly, and a manual loading station. The hoist, with an extended horizontal track can therefore interface with the manual loading station.
摘要翻译： 公开了一种用于操作存储系统的存储系统和方法。 存储系统包括存储系统组件，该存储系统组件位于高于用于装载和卸载待处理衬底的工具的高度的高度。 存储系统本地存储一个或多个基板容器。 存储系统组件包括多个存放架，并且多个存放架中的每一个具有用于支撑容器的具有搁板特征的搁板。 多个存放架中的每一个都联接到链条以使得能够进行水平移动，并且每个存储架都进一步联接到轨道以使得能够引导到一个或多个位置。 电动机联接到用于移动链条的驱动链轮，使得多个存放架中的每一个沿着轨道一起移动到一个或多个位置。 轨道具有至少一些是线性的部分，并且一些部分是非线性的，并且这些部分被布置成循环。 存储系统的示例配置可以包括一个或多个固定架，用于起重机的延伸水平轨道，存储系统组件的水平面处的输送机以及手动装载站。 具有延伸水平轨道的起重机因此可与手动装载站接口。
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公开(公告)号：US20120213614A1
公开(公告)日：2012-08-23
申请号：US12943198
申请日：2010-11-10
IPC分类号： H01L21/677
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67775 , H01L21/68707 , Y10S414/139
摘要： The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.
摘要翻译： 本发明是一种晶片传送系统，其在隔离环境中的室之间输送各个晶片。 在一个实施例中，晶片由在运输箱内传播的晶片梭运送。 运输箱的内部与周围的晶片制造设备的大气条件隔离。 因此，单个晶片可以在整个晶片制造设备中运输，而不必为整个设备保持洁净室环境。 晶片梭可以通过各种技术来推动，例如但不限于磁悬浮或空气轴承。 晶片梭可能同时传送多于一个晶片。 运输箱的内部也可以在真空下，充满气体，或经过过滤的空气。
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9.发明申请公开(公告)号：US20100290873A1
公开(公告)日：2010-11-18
申请号：US12780846
申请日：2010-05-14
IPC分类号： B65G1/133 , B65G1/00 , B65G1/06 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67766 , B65G2201/0297 , H01L21/67733 , H01L21/67736 , H01L21/67769 , H01L21/67775 , Y10S414/14
摘要： A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves are coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions. The rail has at least some sections that are linear and some sections that are nonlinear and the sections are arranged in a loop. Example configurations of the storage system can include one or more of stationary shelves, extended horizontal tracks for hoists, conveyors at the level of the storage system assembly, and a manual loading station. The hoist, with an extended horizontal track can therefore interface with the manual loading station.
摘要翻译： 公开了一种用于操作存储系统的存储系统和方法。 存储系统包括存储系统组件，该存储系统组件位于高于用于装载和卸载待处理衬底的工具的高度的高度。 存储系统本地存储一个或多个基板容器。 存储系统组件包括多个存放架，并且多个存放架中的每一个具有用于支撑容器的具有搁板特征的搁板。 多个存放架中的每一个都联接到链条以实现水平移动，并且每个存储架都进一步联接到轨道以使得能够引导到一个或多个位置。 电动机联接到用于移动链条的驱动链轮，使得多个存放架中的每一个沿着轨道一起移动到一个或多个位置。 轨道具有至少一些是线性的部分，并且一些部分是非线性的，并且这些部分被布置成循环。 存储系统的示例配置可以包括一个或多个固定架，用于起重机的延伸水平轨道，存储系统组件的水平面处的输送机以及手动装载站。 具有延伸水平轨道的起重机因此可与手动装载站接口。
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10.发明申请METHOD AND APPARATUS FOR PROVIDING FLAT PANEL DISPLAY ENVIRONMENTAL ISOLATION 审中-公开用于提供平板显示器的方法和装置环境隔离公开(公告)号：US20090016862A1
公开(公告)日：2009-01-15
申请号：US12172084
申请日：2008-07-11
IPC分类号： H01L21/02
CPC分类号： H01L21/67363 , H01L21/67369 , H01L21/67383 , H01L21/67766 , H01L21/67778
摘要： A container for supporting substrates for processing is provided. The container includes a base, a top, and side panels connecting the base and the top. A support structure is disposed in the container. The support structure is configured to support the substrates within the container. The support structure has rows of multiple tensile members extending across a width of the container. Each row of the multiple tensile members is configured to support a substrate, wherein one of the side panels includes a moveable flexible membrane enabling access into the container. A support structure for the flexible membrane includes a synchronization mechanism for synchronizing movement of the flexible membrane with a door of a receiving module of a processing tool or a door of the processing tool.
摘要翻译： 提供了用于支撑用于处理的基板的容器。 容器包括连接底座和顶部的底座，顶部和侧面板。 支撑结构设置在容器中。 支撑结构构造成支撑容器内的基底。 支撑结构具有穿过容器宽度延伸的多个拉伸构件的行。 多个拉伸构件的每一列被构造成支撑基底，其中一个侧板包括能够进入容器的可移动柔性膜。 柔性膜的支撑结构包括同步机构，用于使柔性膜与处理工具的接收模块的门或加工工具的门的移动同步。
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