公开(公告)号：US20130093001A1

公开(公告)日：2013-04-18

申请号：US13436192

申请日：2012-03-30

申请人： Anup Bhalla ,  Daniel Ng ,  Tiesheng Li ,  Sik K. Lui

发明人： Anup Bhalla ,  Daniel Ng ,  Tiesheng Li ,  Sik K. Lui

IPC分类号： H01L29/78

CPC分类号： H01L29/66712 ,  H01L29/0878 ,  H01L29/1095 ,  H01L29/402 ,  H01L29/41741 ,  H01L29/41775 ,  H01L29/42368 ,  H01L29/42372 ,  H01L29/42376 ,  H01L29/66719 ,  H01L29/66727 ,  H01L29/7802 ,  H01L29/7811 ,  H01L29/7827

摘要： This invention discloses a new switching device that includes a drain disposed on a first surface and a source region disposed near a second surface of a semiconductor opposite the first surface. An insulated gate electrode is disposed on top of the second surface for controlling a source to drain current and a source electrode is interposed into the insulated gate electrode for substantially preventing a coupling of an electrical field between the gate electrode and an epitaxial region underneath the insulated gate electrode. The source electrode further covers and extends over the insulated gate for covering an area on the second surface of the semiconductor to contact the source region, An epitaxial layer is disposed above and having a different dopant concentration than the drain region. The gate electrode is insulated from the source electrode by an insulation layer having a thickness depending on a Vgsmax rating of the vertical power device.

摘要翻译： 本发明公开了一种新的开关装置，其包括设置在第一表面上的漏极和设置在与第一表面相对的半导体的第二表面附近的源极区域。 绝缘栅电极设置在第二表面的顶部，用于控制源极到漏极电流，并且源电极插入到绝缘栅电极中，用于基本上防止栅极电极和绝缘栅极之间的外延区域之间的电场的耦合 栅电极。 源极电极进一步覆盖并延伸在绝缘栅上，用于覆盖半导体的第二表面上的区域以接触源极区。外延层设置在漏极区之上并且具有不同掺杂剂浓度。 栅极通过具有取决于垂直功率器件的Vgsmax额定值的厚度的绝缘层与源电极绝缘。

公开(公告)号：US08963233B2

公开(公告)日：2015-02-24

申请号：US13436192

申请日：2012-03-30

申请人： Anup Bhalla ,  Daniel Ng ,  Tiesheng Li ,  Sik K. Lui

发明人： Anup Bhalla ,  Daniel Ng ,  Tiesheng Li ,  Sik K. Lui

IPC分类号： H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L29/78 ,  H01L29/40 ,  H01L29/417 ,  H01L29/423 ,  H01L29/66 ,  H01L29/08

CPC分类号： H01L29/66712 ,  H01L29/0878 ,  H01L29/1095 ,  H01L29/402 ,  H01L29/41741 ,  H01L29/41775 ,  H01L29/42368 ,  H01L29/42372 ,  H01L29/42376 ,  H01L29/66719 ,  H01L29/66727 ,  H01L29/7802 ,  H01L29/7811 ,  H01L29/7827

摘要： This invention discloses a new switching device that includes a drain disposed on a first surface and a source region disposed near a second surface of a semiconductor opposite the first surface. An insulated gate electrode is disposed on top of the second surface for controlling a source to drain current and a source electrode is interposed into the insulated gate electrode for substantially preventing a coupling of an electrical field between the gate electrode and an epitaxial region underneath the insulated gate electrode. The source electrode further covers and extends over the insulated gate for covering an area on the second surface of the semiconductor to contact the source region, An epitaxial layer is disposed above and having a different dopant concentration than the drain region. The gate electrode is insulated from the source electrode by an insulation layer having a thickness depending on a Vgsmax rating of the vertical power device.

摘要翻译： 本发明公开了一种新的开关装置，其包括设置在第一表面上的漏极和设置在与第一表面相对的半导体的第二表面附近的源极区域。 绝缘栅电极设置在第二表面的顶部，用于控制源极到漏极电流，并且源电极插入到绝缘栅电极中，用于基本上防止栅极电极和绝缘栅极之间的外延区域之间的电场的耦合 栅电极。 源极电极进一步覆盖并延伸在绝缘栅上，用于覆盖半导体的第二表面上的区域以接触源极区。外延层设置在漏极区之上并且具有不同掺杂剂浓度。 栅极通过具有取决于垂直功率器件的Vgsmax额定值的厚度的绝缘层与源电极绝缘。

公开(公告)号：US20160247899A1

公开(公告)日：2016-08-25

申请号：US14629229

申请日：2015-02-23

申请人： Anup Bhalla ,  Daniel Ng ,  Tiesheng Li ,  Sik K. Lui

发明人： Anup Bhalla ,  Daniel Ng ,  Tiesheng Li ,  Sik K. Lui

IPC分类号： H01L29/66 ,  H01L29/06 ,  H01L29/10 ,  H01L29/423 ,  H01L21/3213 ,  H01L29/08

CPC分类号： H01L29/66712 ,  H01L29/0878 ,  H01L29/1095 ,  H01L29/402 ,  H01L29/41741 ,  H01L29/41775 ,  H01L29/42368 ,  H01L29/42372 ,  H01L29/42376 ,  H01L29/66719 ,  H01L29/66727 ,  H01L29/7802 ,  H01L29/7811 ,  H01L29/7827

摘要： This invention discloses a new switching device supported on a semiconductor that includes a drain disposed on a first surface and a source region disposed near a second surface of said semiconductor opposite the first surface. The switching device further includes an insulated gate electrode disposed on top of the second surface for controlling a source to drain current. The switching device further includes a source electrode interposed into the insulated gate electrode for substantially preventing a coupling of an electrical field between the gate electrode and an epitaxial region underneath the insulated gate electrode. The source electrode further covers and extends over the insulated gate for covering an area on the second surface of the semiconductor to contact the source region. The semiconductor substrate further includes an epitaxial layer disposed above and having a different dopant concentration than the drain region. The insulated gate electrode further includes an insulation layer for insulating the gate electrode from the source electrode wherein the insulation layer having a thickness depending on a Vgsmax rating of the vertical power device.

摘要翻译： 本发明公开了一种支撑在半导体上的新开关装置，其包括设置在第一表面上的漏极和设置在与第一表面相对的所述半导体的第二表面附近的源极区域。 开关装置还包括设置在第二表面顶部的用于控制源极到漏极电流的绝缘栅电极。 开关装置还包括插入到绝缘栅电极中的源电极，用于基本上防止栅电极和绝缘栅电极下方的外延区之间的电场的耦合。 源电极进一步覆盖并延伸在绝缘栅上，以覆盖半导体的第二表面上的区域以接触源区。 半导体衬底还包括设置在漏极区以上且具有与漏极区不同的掺杂浓度的外延层。 绝缘栅电极还包括用于使栅电极与源电极绝缘的绝缘层，其中绝缘层的厚度取决于垂直功率器件的Vgsmax等级。

公开(公告)号：US08597998B2

公开(公告)日：2013-12-03

申请号：US13604286

申请日：2012-09-05

申请人： Anup Bhalla ,  Sik K. Lui ,  Tiesheng Li

发明人： Anup Bhalla ,  Sik K. Lui ,  Tiesheng Li

IPC分类号： H01L21/336

CPC分类号： H01L29/7813 ,  H01L29/1095 ,  H01L29/4236 ,  H01L29/456 ,  H01L29/47 ,  H01L29/66727 ,  H01L29/66734 ,  H01L29/7806 ,  H01L29/7811

摘要： Fabricating a semiconductor device includes forming a mask on a substrate having a top substrate surface; forming a gate trench in the substrate, through the mask; depositing gate material in the gate trench; removing the mask to leave a gate structure; implanting a body region; implanting a source region; forming a source body contact trench having a trench wall and a trench bottom; forming a plug in the source body contact trench, wherein the plug extends below a bottom of the body region; and disposing conductive material in the source body contact trench, on top of the plug.

摘要翻译： 制造半导体器件包括在具有顶部衬底表面的衬底上形成掩模; 通过掩模在衬底中形成栅极沟槽; 在栅极沟槽中沉积栅极材料; 取下面罩离开门结构; 植入人体区域; 植入源区; 形成具有沟槽壁和沟槽底部的源体接触沟槽; 在源体接触沟槽中形成插塞，其中插头延伸到身体区域的底部下方; 并且在所述源体接触沟槽中，在所述插头的顶部上设置导电材料。

公开(公告)号：US08288229B2

公开(公告)日：2012-10-16

申请号：US13043721

申请日：2011-03-09

申请人： Anup Bhalla ,  Sik K. Lui ,  Tiesheng Li

发明人： Anup Bhalla ,  Sik K. Lui ,  Tiesheng Li

IPC分类号： H01L21/336

CPC分类号： H01L29/7813 ,  H01L29/1095 ,  H01L29/4236 ,  H01L29/456 ,  H01L29/47 ,  H01L29/66727 ,  H01L29/66734 ,  H01L29/7806 ,  H01L29/7811

摘要： Fabricating a semiconductor device includes forming a hard mask on the substrate having a top substrate surface; forming a gate trench in the substrate, through the hard mask; depositing gate material in the gate trench; removing the hard mask to leave a gate structure; implanting a body region; implanting a source region; forming a source body contact trench having a trench wall and a trench bottom; and disposing an anti-punch through implant along at least a section of the trench wall but not along the trench bottom.

摘要翻译： 制造半导体器件包括在具有顶部衬底表面的衬底上形成硬掩模; 通过硬掩模在衬底中形成栅极沟槽; 在栅极沟槽中沉积栅极材料; 去除硬掩模离开门结构; 植入人体区域; 植入源区; 形成具有沟槽壁和沟槽底部的源体接触沟槽; 以及沿着所述沟槽壁的至少一部分而不是沿着所述沟槽底部布置抗穿孔植入物。

公开(公告)号：US08163618B2

公开(公告)日：2012-04-24

申请号：US12658450

申请日：2010-02-09

申请人： Anup Bhalla ,  Daniel Ng ,  Tiesheng Li ,  Sik K. Lui

发明人： Anup Bhalla ,  Daniel Ng ,  Tiesheng Li ,  Sik K. Lui

IPC分类号： H01L21/336

CPC分类号： H01L29/66712 ,  H01L29/0878 ,  H01L29/1095 ,  H01L29/402 ,  H01L29/41741 ,  H01L29/41775 ,  H01L29/42368 ,  H01L29/42372 ,  H01L29/42376 ,  H01L29/66719 ,  H01L29/66727 ,  H01L29/7802 ,  H01L29/7811 ,  H01L29/7827

摘要： This invention discloses a new switching device supported on a semiconductor that includes a drain disposed on a first surface and a source region disposed near a second surface of said semiconductor opposite the first surface. The switching device further includes an insulated gate electrode disposed on top of the second surface for controlling a source to drain current. The switching device further includes a source electrode interposed into the insulated gate electrode for substantially preventing a coupling of an electrical field between the gate electrode and an epitaxial region underneath the insulated gate electrode. The source electrode further covers and extends over the insulated gate for covering an area on the second surface of the semiconductor to contact the source region. The semiconductor substrate further includes an epitaxial layer disposed above and having a different dopant concentration than the drain region. The insulated gate electrode further includes an insulation layer for insulating the gate electrode from the source electrode wherein the insulation layer having a thickness depending on a Vgsmax rating of the vertical power device.

摘要翻译： 本发明公开了一种支撑在半导体上的新开关装置，其包括设置在第一表面上的漏极和设置在与第一表面相对的所述半导体的第二表面附近的源极区域。 开关装置还包括设置在第二表面顶部的用于控制源极到漏极电流的绝缘栅电极。 开关装置还包括插入到绝缘栅电极中的源电极，用于基本上防止栅电极和绝缘栅电极下方的外延区之间的电场的耦合。 源电极进一步覆盖并延伸在绝缘栅上，以覆盖半导体的第二表面上的区域以接触源区。 半导体衬底还包括设置在漏极区以上且具有与漏极区不同的掺杂浓度的外延层。 绝缘栅电极还包括用于使栅电极与源电极绝缘的绝缘层，其中绝缘层的厚度取决于垂直功率器件的Vgsmax等级。

公开(公告)号：US20110207276A1

公开(公告)日：2011-08-25

申请号：US13043721

申请日：2011-03-09

申请人： Anup Bhalla ,  Sik K. Lui ,  Tiesheng Li

发明人： Anup Bhalla ,  Sik K. Lui ,  Tiesheng Li

IPC分类号： H01L21/336

CPC分类号： H01L29/7813 ,  H01L29/1095 ,  H01L29/4236 ,  H01L29/456 ,  H01L29/47 ,  H01L29/66727 ,  H01L29/66734 ,  H01L29/7806 ,  H01L29/7811

摘要： Fabricating a semiconductor device includes forming a hard mask on the substrate having a top substrate surface; forming a gate trench in the substrate, through the hard mask; depositing gate material in the gate trench; removing the hard mask to leave a gate structure; implanting a body region; implanting a source region; forming a source body contact trench having a trench wall and a trench bottom; and disposing an anti-punch through implant along at least a section of the trench wall but not along the trench bottom.

摘要翻译： 制造半导体器件包括在具有顶部衬底表面的衬底上形成硬掩模; 通过硬掩模在衬底中形成栅极沟槽; 在栅极沟槽中沉积栅极材料; 去除硬掩模离开门结构; 植入人体区域; 植入源区; 形成具有沟槽壁和沟槽底部的源体接触沟槽; 以及沿着所述沟槽壁的至少一部分而不是沿着所述沟槽底部布置抗穿孔植入物。

公开(公告)号：US07659570B2

公开(公告)日：2010-02-09

申请号：US11125506

申请日：2005-05-09

申请人： Anup Bhalla ,  Daniel Ng ,  Tiesheng Li ,  Sik K. Lui

发明人： Anup Bhalla ,  Daniel Ng ,  Tiesheng Li ,  Sik K. Lui

IPC分类号： H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113

CPC分类号： H01L29/66712 ,  H01L29/0878 ,  H01L29/1095 ,  H01L29/402 ,  H01L29/41741 ,  H01L29/41775 ,  H01L29/42368 ,  H01L29/42372 ,  H01L29/42376 ,  H01L29/66719 ,  H01L29/66727 ,  H01L29/7802 ,  H01L29/7811 ,  H01L29/7827

摘要： This invention discloses a new switching device supported on a semiconductor that includes a drain disposed on a first surface and a source region disposed near a second surface of said semiconductor opposite the first surface. The switching device further includes an insulated gate electrode disposed on top of the second surface for controlling a source to drain current. The switching device further includes a source electrode interposed into the insulated gate electrode for substantially preventing a coupling of an electrical field between the gate electrode and an epitaxial region underneath the insulated gate electrode. The source electrode further covers and extends over the insulated gate for covering an area on the second surface of the semiconductor to contact the source region. The semiconductor substrate further includes an epitaxial layer disposed above and having a different dopant concentration than the drain region. The insulated gate electrode further includes an insulation layer for insulating the gate electrode from the source electrode wherein the insulation layer having a thickness depending on a Vgsmax rating of the vertical power device.

摘要翻译： 本发明公开了一种支撑在半导体上的新开关装置，其包括设置在第一表面上的漏极和设置在与第一表面相对的所述半导体的第二表面附近的源极区域。 开关装置还包括设置在第二表面顶部的用于控制源极到漏极电流的绝缘栅电极。 开关装置还包括插入到绝缘栅电极中的源电极，用于基本上防止栅电极和绝缘栅电极下方的外延区之间的电场的耦合。 源电极进一步覆盖并延伸在绝缘栅上，以覆盖半导体的第二表面上的区域以接触源区。 半导体衬底还包括设置在漏极区以上且具有与漏极区不同的掺杂浓度的外延层。 绝缘栅电极还包括用于使栅电极与源电极绝缘的绝缘层，其中绝缘层的厚度取决于垂直功率器件的Vgsmax等级。

公开(公告)号：US09806175B2

公开(公告)日：2017-10-31

申请号：US14629229

申请日：2015-02-23

申请人： Anup Bhalla ,  Daniel Ng. ,  Tiesheng Li ,  Sik K. Lui

发明人： Anup Bhalla ,  Daniel Ng. ,  Tiesheng Li ,  Sik K. Lui

IPC分类号： H01L21/337 ,  H01L29/66 ,  H01L29/423 ,  H01L29/78 ,  H01L29/08 ,  H01L29/10

CPC分类号： H01L29/66712 ,  H01L29/0878 ,  H01L29/1095 ,  H01L29/402 ,  H01L29/41741 ,  H01L29/41775 ,  H01L29/42368 ,  H01L29/42372 ,  H01L29/42376 ,  H01L29/66719 ,  H01L29/66727 ,  H01L29/7802 ,  H01L29/7811 ,  H01L29/7827

摘要： This invention discloses a new switching device supported on a semiconductor that includes a drain disposed on a first surface and a source region disposed near a second surface of said semiconductor opposite the first surface. The switching device further includes an insulated gate electrode disposed on top of the second surface for controlling a source to drain current. The switching device further includes a source electrode interposed into the insulated gate electrode for substantially preventing a coupling of an electrical field between the gate electrode and an epitaxial region underneath the insulated gate electrode. The source electrode further covers and extends over the insulated gate for covering an area on the second surface of the semiconductor to contact the source region. The semiconductor substrate further includes an epitaxial layer disposed above and having a different dopant concentration than the drain region. The insulated gate electrode further includes an insulation layer for insulating the gate electrode from the source electrode wherein the insulation layer having a thickness depending on a Vgsmax rating of the vertical power device.

公开(公告)号：US20100148246A1

公开(公告)日：2010-06-17

申请号：US12658450

申请日：2010-02-09

申请人： Anup Bhalla ,  Daniel Ng ,  Tiesheng Li ,  Sik K. Lui

发明人： Anup Bhalla ,  Daniel Ng ,  Tiesheng Li ,  Sik K. Lui

IPC分类号： H01L29/78 ,  H01L21/336

CPC分类号： H01L29/66712 ,  H01L29/0878 ,  H01L29/1095 ,  H01L29/402 ,  H01L29/41741 ,  H01L29/41775 ,  H01L29/42368 ,  H01L29/42372 ,  H01L29/42376 ,  H01L29/66719 ,  H01L29/66727 ,  H01L29/7802 ,  H01L29/7811 ,  H01L29/7827

摘要： This invention discloses a new switching device supported on a semiconductor that includes a drain disposed on a first surface and a source region disposed near a second surface of said semiconductor opposite the first surface. The switching device further includes an insulated gate electrode disposed on top of the second surface for controlling a source to drain current. The switching device further includes a source electrode interposed into the insulated gate electrode for substantially preventing a coupling of an electrical field between the gate electrode and an epitaxial region underneath the insulated gate electrode. The source electrode further covers and extends over the insulated gate for covering an area on the second surface of the semiconductor to contact the source region. The semiconductor substrate further includes an epitaxial layer disposed above and having a different dopant concentration than the drain region. The insulated gate electrode further includes an insulation layer for insulating the gate electrode from the source electrode wherein the insulation layer having a thickness depending on a Vgsmax rating of the vertical power device.

摘要翻译： 本发明公开了一种支撑在半导体上的新开关装置，其包括设置在第一表面上的漏极和设置在与第一表面相对的所述半导体的第二表面附近的源极区域。 开关装置还包括设置在第二表面顶部的用于控制源极到漏极电流的绝缘栅电极。 开关装置还包括插入到绝缘栅电极中的源电极，用于基本上防止栅电极和绝缘栅电极下方的外延区之间的电场的耦合。 源电极进一步覆盖并延伸在绝缘栅上，以覆盖半导体的第二表面上的区域以接触源区。 半导体衬底还包括设置在漏极区以上且具有与漏极区不同的掺杂浓度的外延层。 绝缘栅电极还包括用于使栅电极与源电极绝缘的绝缘层，其中绝缘层的厚度取决于垂直功率器件的Vgsmax等级。