公开(公告)号：US20220013379A1

公开(公告)日：2022-01-13

申请号：US17345253

申请日：2021-06-11

Applicant: Apple Inc.

Inventor： Antoine Manens ,  Dariusz Golda ,  Hyeun-Su Kim

IPC: H01L21/67 ,  H01L25/075 ,  H01L33/62 ,  B65G47/90 ,  B41F16/00

Abstract: Mass transfer tools and methods for high density transfer of arrays of micro devices are described. In an embodiment, a mass transfer tool includes a micro pick up array with an array of transfer heads arranged in clusters. The clusters of transfer heads can be used to pick up a high density group of micro devices followed by sequential placement onto a receiving substrate.

公开(公告)号：US11948815B2

公开(公告)日：2024-04-02

申请号：US17345253

申请日：2021-06-11

Applicant: Apple Inc.

Inventor： Antoine Manens ,  Dariusz Golda ,  Hyeun-Su Kim

IPC: H01L21/67 ,  B65G47/90 ,  H01L25/075 ,  H01L33/62 ,  B41F16/00

CPC classification number: H01L21/67144 ,  B65G47/90 ,  H01L25/0753 ,  H01L33/62 ,  B41F16/00 ,  H01L2933/0066

Abstract: Mass transfer tools and methods for high density transfer of arrays of micro devices are described. In an embodiment, a mass transfer tool includes a micro pick up array with an array of transfer heads arranged in clusters. The clusters of transfer heads can be used to pick up a high density group of micro devices followed by sequential placement onto a receiving substrate.

公开(公告)号：US20220135400A1

公开(公告)日：2022-05-05

申请号：US17345266

申请日：2021-06-11

Applicant: Apple Inc.

Inventor： Antoine Manens

IPC: B81C99/00 ,  H01L25/075 ,  H05K13/04 ,  H05K13/08

Abstract: Mass transfer tools and methods for high density transfer of arrays of micro devices are described. In an embodiment, a mass transfer tool includes a plurality of articulating transfer head assemblies coupled with a main translation track, where each articulating transfer head assembly is translatable along the main translation track between a donor substrate stage and a receiving substrate stage.

公开(公告)号：US11820651B2

公开(公告)日：2023-11-21

申请号：US17345266

申请日：2021-06-11

Applicant: Apple Inc.

Inventor： Antoine Manens

IPC: B81C99/00 ,  H01L25/075 ,  H05K13/04 ,  H05K13/08

CPC classification number: B81C99/002 ,  H01L25/0753 ,  H05K13/0413 ,  H05K13/0812

Abstract: Mass transfer tools and methods for high density transfer of arrays of micro devices are described. In an embodiment, a mass transfer tool includes a plurality of articulating transfer head assemblies coupled with a main translation track, where each articulating transfer head assembly is translatable along the main translation track between a donor substrate stage and a receiving substrate stage.