公开(公告)号：US20230238266A1

公开(公告)日：2023-07-27

申请号：US17584322

申请日：2022-01-25

Applicant: Applied Materials, Inc.

Inventor： Patricia Schulze ,  Gregory John Freeman ,  Michael Kutney ,  Arunkumar Ramachandraiah ,  Chih Chung Chou ,  Zhaozhao Zhu ,  Ozkan Celik

IPC: H01L21/68 ,  H01L21/687 ,  H01L21/683 ,  G01B11/24

CPC classification number: H01L21/681 ,  H01L21/68721 ,  H01L21/6831 ,  G01B11/24 ,  G01B2210/56

Abstract: An apparatus includes a substrate holder, a first actuator to rotate the substrate holder, a second actuator to move the substrate holder linearly, a first sensor to generate one or more first measurements or images of the substrate, a second sensor to generate one or more second measurements of target positions on the substrate, and a processing device. The processing device estimates a position of the substrate on the substrate holder and causes the first actuator to rotate the substrate holder about a first axis. The rotation causes an offset between a field of view of the second sensor and a target position on the substrate due to the substrate not being centered on the substrate holder. The processing device causes the second actuator to move the substrate holder linearly along a second axis to correct the offset. The processing device determines a profile across a surface of the substrate based on the one or more second measurements of the target positions.

公开(公告)号：US12159802B2

公开(公告)日：2024-12-03

申请号：US17683938

申请日：2022-03-01

Applicant: APPLIED MATERIALS, INC.

Inventor： Srinivas Poshatrahalli Gopalakrishna ,  Paul B. Reuter ,  Devendra Channappa Holeyannavar ,  Douglas B. Baumgarten ,  Sushant S. Koshti ,  Arunkumar Ramachandraiah ,  Narayanan Ramachandran

IPC: H01L21/677 ,  B25J9/16

Abstract: The disclosure describes devices, systems, and methods for integrating load locks into a factory interface footprint space. A factory interface for an electronic device manufacturing system can include a load port for receiving a substrate carrier. The load port can include a frame adapted for connecting the load port to a factory interface, the frame comprising a transport opening through which one or more substrates are capable of being transported between the substrate carrier and the factory interface. The load port can also include an actuator coupled to the frame, and a load port door coupled to the actuator and configured to seal the transport opening. The frame height can be greater than the height of the load port door, and less than 2.5 times the height of the load port door.

公开(公告)号：US11353381B1

公开(公告)日：2022-06-07

申请号：US16946195

申请日：2020-06-09

Applicant: Applied Materials, Inc.

Inventor： Devendra Channappa Holeyannavar ,  Dean C. Hruzek ,  Arunkumar Ramachandraiah ,  Jeffrey C. Hudgens ,  Shivaraj Manjunath Nara ,  Paul B. Reuter

IPC: G01N1/24 ,  H05K1/18 ,  H04W4/38 ,  G01N1/22 ,  G01N1/28 ,  G01N27/12 ,  G01N1/20 ,  G01N1/10 ,  G01N1/04

Abstract: A detector disc includes a disc body having a bottom disc and a top cover, the top cover including a first aperture. A sensor is disposed inside the disc body and positioned to be exposed to an external environment via the first aperture in the top cover. The solid state sensor is adapted to detect levels of chemical gas contaminants and output a detection signal based on detected levels of the chemical gas contaminants. A microcontroller is disposed on the PCB and adapted to generate measurement data from the detected levels of the chemical gas contaminants embodied within the detection signal. A wireless communication circuit is disposed on the PCB, the wireless communication circuit adapted to transmit the measurement data wirelessly to a wireless access point device.

公开(公告)号：US20250069926A1

公开(公告)日：2025-02-27

申请号：US18236554

申请日：2023-08-22

Applicant: Applied Materials, Inc.

Inventor： Arunkumar Ramachandraiah ,  Paul Reuter ,  Devendra Holeyannavar ,  Steven Trey Tindel ,  Dean Hruzek ,  Jeffrey Hudgens ,  Maureen Breiling ,  Venkatesh Chinnaplar Rajappa ,  Micah E. Klaeser ,  Benjamin Johnston ,  Alton Wang ,  Wei Siang Chao ,  Chandrakant Sapkale ,  Shiva Prasad Kota ,  Latha Ramesh

IPC: H01L21/677 ,  B25J11/00 ,  G03F7/00 ,  H01L21/67 ,  H01L21/687

Abstract: Integrated substrate processing systems are disclosed that are able to achieve high-volume processing of substrates (e.g., greater than 120 substrates per hour) using environmentally sensitive processes and/or tools, such as photolithography processes and/or tools. In some embodiments, for example, the integrated substrate processing system may include an EFEM and a processing tool enclosure that are coupled together to form an integrated processing environment. The integrated substrate processing system may operate to maintain substantially uniform conditions (e.g., at a uniform temperature and relative humidity) throughout the integrated environment, and in some embodiments, may utilize an external air source, such as a remote air module (RAM), in order to do so. In some embodiments, high-volume processing of substrates may be further facilitated by employing specialized substrate handling robots and/or specially adapting the EFEM and/or processing tool enclosure.

公开(公告)号：US20240339347A1

公开(公告)日：2024-10-10

申请号：US18747417

申请日：2024-06-18

Applicant: Applied Materials, Inc.

Inventor： Patricia Schulze ,  Gregory John Freeman ,  Michael Kutney ,  Arunkumar Ramachandraiah ,  Chih Chung Chou ,  Zhaozhao Zhu ,  Ozkan Celik

IPC: H01L21/68 ,  G01B11/24 ,  H01L21/683 ,  H01L21/687

CPC classification number: H01L21/681 ,  G01B11/24 ,  H01L21/6831 ,  H01L21/68721 ,  G01B2210/56

Abstract: An optical measurement device comprises a substrate holder to secure a substrate, a plurality of actuators to move the substrate holder relative to a plurality of axes, a first sensor to generate one or more first measurements or images of a first plurality of target positions on the substrate, and a second sensor to generate one or more second measurements of a second plurality of target positions on the substrate. The optical measurement device further comprises a plate, wherein the substrate holder, the plurality of actuators, the first sensor and the second sensor are each mounted to the plate, and wherein the plate provides vibration isolation from a factory interface to which the optical measurement device mounts. The optical measurement device further comprises a processing device that executes instructions to control the plurality of actuators and process the first measurements or images and the second measurements.

公开(公告)号：US20220285193A1

公开(公告)日：2022-09-08

申请号：US17683938

申请日：2022-03-01

Applicant: APPLIED MATERIALS, INC.

Inventor： Srinivas Poshatrahalli Gopalakrishna ,  Paul B. Reuter ,  Devendra Channappa Holeyannavar ,  Douglas B. Baumgarten ,  Sushant S. Koshti ,  Arunkumar Ramachandraiah ,  Narayanan Ramachandran

IPC: H01L21/677 ,  B25J9/16

Abstract: The disclosure describes devices, systems, and methods for integrating load locks into a factory interface footprint space. A factory interface for an electronic device manufacturing system can include a load port for receiving a substrate carrier. The load port can include a frame adapted for connecting the load port to a factory interface, the frame comprising a transport opening through which one or more substrates are capable of being transported between the substrate carrier and the factory interface. The load port can also include an actuator coupled to the frame, and a load port door coupled to the actuator and configured to seal the transport opening. The frame height can be greater than the height of the load port door, and less than 2.5 times the height of the load port door.

公开(公告)号：US12148647B2

公开(公告)日：2024-11-19

申请号：US17584322

申请日：2022-01-25

Applicant: Applied Materials, Inc.

Inventor： Patricia Schulze ,  Gregory John Freeman ,  Michael Kutney ,  Arunkumar Ramachandraiah ,  Chih Chung Chou ,  Zhaozhao Zhu ,  Ozkan Celik

IPC: H01L21/68 ,  G01B11/24 ,  H01L21/683 ,  H01L21/687

Abstract: An apparatus includes a substrate holder, a first actuator to rotate the substrate holder, a second actuator to move the substrate holder linearly, a first sensor to generate one or more first measurements or images of the substrate, a second sensor to generate one or more second measurements of target positions on the substrate, and a processing device. The processing device estimates a position of the substrate on the substrate holder and causes the first actuator to rotate the substrate holder about a first axis. The rotation causes an offset between a field of view of the second sensor and a target position on the substrate due to the substrate not being centered on the substrate holder. The processing device causes the second actuator to move the substrate holder linearly along a second axis to correct the offset. The processing device determines a profile across a surface of the substrate based on the one or more second measurements of the target positions.

公开(公告)号：US12142508B2

公开(公告)日：2024-11-12

申请号：US17499109

申请日：2021-10-12

Applicant: APPLIED MATERIALS, INC.

Inventor： Sushant S. Koshti ,  Paul B. Reuter ,  David Phillips ,  Jacob Newman ,  Andrew J. Constant ,  Michael R. Rice ,  Shay Assaf ,  Srinivas Poshatrahalli Gopalakrishna ,  Devendra Channappa Holeyannavar ,  Douglas B. Baumgarten ,  Arunkumar Ramachandraiah ,  Narayanan Ramachandran

IPC: H01L21/677 ,  B65G1/04 ,  H01L21/687

Abstract: A factory interface for an electronic device manufacturing system can include a load lock disposed within the interior volume of a factory interface and a factory interface robot disposed within the interior volume of the factory interface. The factory interface robot can be configured to transfer substrates between a first set of substrate carriers and the first load lock. The factory interface robot can comprise a vertical tower, a plurality of links, and an end effector.

公开(公告)号：US20230113673A1

公开(公告)日：2023-04-13

申请号：US17499109

申请日：2021-10-12

Applicant: APPLIED MATERIALS, INC.

Inventor： Sushant S. Koshti ,  Paul B. Reuter ,  David Phillips ,  Jacob Newman ,  Andrew J. Constant ,  Michael R. Rice ,  Shay Assaf ,  Srinivas Poshatrahalli Gopalakrishna ,  Devendra Channappa Holeyannavar ,  Douglas B. Baumgarten ,  Arunkumar Ramachandraiah ,  Narayanan Ramachandran

IPC: H01L21/677 ,  H01L21/687 ,  B65G1/04

Abstract: A factory interface for an electronic device manufacturing system can include a load lock disposed within the interior volume of a factory interface and a factory interface robot disposed within the interior volume of the factory interface. The factory interface robot can be configured to transfer substrates between a first set of substrate carriers and the first load lock. The factory interface robot can comprise a vertical tower, a plurality of links, and an end effector.