公开(公告)号：US20070169324A1

公开(公告)日：2007-07-26

申请号：US11624092

申请日：2007-01-17

申请人： Aritsugu YAJIMA ,  Takamitsu HIGUCHI ,  Yoshikazu KASUYA

发明人： Aritsugu YAJIMA ,  Takamitsu HIGUCHI ,  Yoshikazu KASUYA

IPC分类号： H01L41/00 ,  H04R17/00

CPC分类号： H03H3/08 ,  H03H9/02574 ,  H03H9/0585 ,  H03H9/1071 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49155 ,  Y10T29/49156

摘要： A method for manufacturing a surface acoustic wave element having an interdigital transducer (IDT) electrode formed on a semiconductor substrate includes a) forming an insulation layer on a surface of an active side of the semiconductor substrate, b) forming a base layer on a whole surface of the insulation layer, c) planarizing a surface of the base layer, d) forming a piezoelectric member on a planarized surface of the base layer, e) forming the IDT electrode on a surface of the piezoelectric member, and f) forming a bank being higher than a height from the surface of the base layer to the surface of the IDT electrode on a peripheral of the surface of the base layer so as to surround the piezoelectric member.

摘要翻译： 一种制造具有形成在半导体基板上的叉指式换能器（IDT）电极的声表面波元件的方法包括：a）在半导体基板的有源侧的表面上形成绝缘层，b）整体形成基底层 所述绝缘层的表面，c）平坦化所述基层的表面，d）在所述基底层的平坦化表面上形成压电元件，e）在所述压电元件的表面上形成所述IDT电极，以及f） 在基底层的表面的周边上高于从基底表面到IDT电极的表面的高度，以包围该压电元件。

公开(公告)号：US20120256692A1

公开(公告)日：2012-10-11

申请号：US13439362

申请日：2012-04-04

申请人： Aritsugu YAJIMA ,  Shogo INABA ,  Ryuji KIHARA

发明人： Aritsugu YAJIMA ,  Shogo INABA ,  Ryuji KIHARA

IPC分类号： H03L7/083

CPC分类号： H03B5/30 ,  H03B2200/0022 ,  H03L7/099 ,  H03L7/183

摘要： An oscillator includes: a substrate; a reference oscillation circuit including a first MEMS oscillator disposed above the substrate, the reference oscillation circuit outputting a first oscillation signal; at least one voltage-controlled oscillation circuit including a second MEMS oscillator disposed above the substrate, the oscillation frequency of the at least one voltage-controlled oscillation circuit being controlled based on a control signal, the at least one voltage-controlled oscillation circuit outputting a second oscillation signal; a frequency division circuit dividing the frequency of the second oscillation signal and outputting a frequency division signal; and a phase-comparison circuit outputting the control signal based on a phase difference between the frequency division signal and the first oscillation signal, wherein the first MEMS oscillator and the second MEMS oscillator each have a first electrode and a second electrode, the second electrode has a movable part disposed so as to face the first electrode.

摘要翻译： 振荡器包括：基板; 参考振荡电路，包括设置在所述衬底上方的第一MEMS振荡器，所述参考振荡电路输出第一振荡信号; 至少一个压控振荡电路，其包括设置在所述衬底上方的第二MEMS振荡器，所述至少一个压控振荡电路的振荡频率基于控制信号进行控制，所述至少一个压控振荡电路输出 第二振荡信号; 分频电路，分频第二振荡信号的频率并输出分频信号; 以及相位比较电路，其基于所述分频信号和所述第一振荡信号之间的相位差输出所述控制信号，其中，所述第一MEMS振荡器和所述第二MEMS振荡器各自具有第一电极和第二电极，所述第二电极具有 以与第一电极相对的方式设置的可动部。

公开(公告)号：US20080068105A1

公开(公告)日：2008-03-20

申请号：US11847632

申请日：2007-08-30

申请人： Aritsugu YAJIMA

发明人： Aritsugu YAJIMA

IPC分类号： H03B5/30

CPC分类号： H03B5/326 ,  H03B5/368

摘要： A surface acoustic wave oscillator includes: a cross-coupled circuit including first and second active elements differentially connected to first and second output terminals; first and second surface acoustic wave elements having different resonance frequencies and connected to the cross-coupled circuit in parallel; a first variable capacitance circuit including a first variable capacitance element and changing the resonance frequency of the first surface acoustic wave element; and a second variable capacitance circuit including a second variable capacitance element and changing the resonance frequency of the second surface acoustic wave element, wherein the first surface acoustic wave element is connected to the first variable capacitance circuit, the second surface acoustic wave element is connected to the second variable capacitance circuit, and oscillating outputs from combining outputs of the first and second surface acoustic wave elements are outputted by the cross-coupled circuit.

摘要翻译： 声表面波振荡器包括：交叉耦合电路，包括与第一和第二输出端子差分连接的第一和第二有源元件; 具有不同谐振频率的第一和第二表面声波元件并联连接到交叉耦合电路; 包括第一可变电容元件并改变第一表面声波元件的谐振频率的第一可变电容电路; 以及包括第二可变电容元件并改变第二弹性表面波元件的共振频率的第二可变电容电路，其中第一声表面波元件连接到第一可变电容电路，第二声表面波元件连接到 第二可变电容电路和来自第一和第二声表面波元件的组合输出的振荡输出由交叉耦合电路输出。

公开(公告)号：US20120235760A1

公开(公告)日：2012-09-20

申请号：US13422323

申请日：2012-03-16

申请人： Aritsugu YAJIMA

发明人： Aritsugu YAJIMA

IPC分类号： H03B5/30

CPC分类号： H03B5/30 ,  H03B2200/0012 ,  H03B2200/0052

摘要： An oscillation circuit includes a plurality of MEMS vibrators each having a first terminal and a second terminal, and having respective resonant frequencies different from each other, an amplifier circuit (an inverting amplifier circuit) having an input terminal and an output terminal, and a connection circuit adapted to connect the first terminal of one of the MEMS vibrators and the input terminal to each other, and the second terminal of the MEMS vibrator and the output terminal to each other to thereby connect the one of the MEMS vibrators and the amplifier circuit (the inverting amplifier circuit) to each other.

摘要翻译： 振荡电路包括多个具有第一端子和第二端子的MEMS振子，并且具有各自的谐振频率彼此不同的放大器电路（反相放大器电路），具有输入端子和输出端子，以及连接 适于将MEMS振动器中的一个的第一端子和输入端子彼此连接，并且将MEMS振动器的第二端子和输出端子彼此连接，从而将MEMS振动器和放大器电路之一 反相放大器电路）。

公开(公告)号：US20090072917A1

公开(公告)日：2009-03-19

申请号：US12037562

申请日：2008-02-26

申请人： Aritsugu YAJIMA ,  Takehiko ADACHI

发明人： Aritsugu YAJIMA ,  Takehiko ADACHI

IPC分类号： H03B5/12

CPC分类号： H03B5/326

摘要： An oscillation circuit includes a cross-coupled circuit having a first active element and a second active element which are differentially connected to each other. The oscillation circuit oscillates in a resonance frequency of a resonator connected between the first active element and the second active element.

摘要翻译： 振荡电路包括具有彼此差分连接的第一有源元件和第二有源元件的交叉耦合电路。 振荡电路以连接在第一有源元件和第二有源元件之间的谐振器的谐振频率振荡。