公开(公告)号：US20120256692A1

公开(公告)日：2012-10-11

申请号：US13439362

申请日：2012-04-04

申请人： Aritsugu YAJIMA ,  Shogo INABA ,  Ryuji KIHARA

发明人： Aritsugu YAJIMA ,  Shogo INABA ,  Ryuji KIHARA

IPC分类号： H03L7/083

CPC分类号： H03B5/30 ,  H03B2200/0022 ,  H03L7/099 ,  H03L7/183

摘要： An oscillator includes: a substrate; a reference oscillation circuit including a first MEMS oscillator disposed above the substrate, the reference oscillation circuit outputting a first oscillation signal; at least one voltage-controlled oscillation circuit including a second MEMS oscillator disposed above the substrate, the oscillation frequency of the at least one voltage-controlled oscillation circuit being controlled based on a control signal, the at least one voltage-controlled oscillation circuit outputting a second oscillation signal; a frequency division circuit dividing the frequency of the second oscillation signal and outputting a frequency division signal; and a phase-comparison circuit outputting the control signal based on a phase difference between the frequency division signal and the first oscillation signal, wherein the first MEMS oscillator and the second MEMS oscillator each have a first electrode and a second electrode, the second electrode has a movable part disposed so as to face the first electrode.

摘要翻译： 振荡器包括：基板; 参考振荡电路，包括设置在所述衬底上方的第一MEMS振荡器，所述参考振荡电路输出第一振荡信号; 至少一个压控振荡电路，其包括设置在所述衬底上方的第二MEMS振荡器，所述至少一个压控振荡电路的振荡频率基于控制信号进行控制，所述至少一个压控振荡电路输出 第二振荡信号; 分频电路，分频第二振荡信号的频率并输出分频信号; 以及相位比较电路，其基于所述分频信号和所述第一振荡信号之间的相位差输出所述控制信号，其中，所述第一MEMS振荡器和所述第二MEMS振荡器各自具有第一电极和第二电极，所述第二电极具有 以与第一电极相对的方式设置的可动部。

公开(公告)号：US20110148537A1

公开(公告)日：2011-06-23

申请号：US12974258

申请日：2010-12-21

申请人： Toru WATANABE ,  Shogo INABA ,  Ryuji KIHARA

发明人： Toru WATANABE ,  Shogo INABA ,  Ryuji KIHARA

IPC分类号： H03B5/30

CPC分类号： H03B5/30 ,  H03H3/0072 ,  H03H9/2457

摘要： An oscillator includes: a plurality of MEMS vibrators formed on a substrate; and an oscillator configuration circuit connected to the plurality of MEMS vibrators, wherein the plurality of MEMS vibrators each have a beam structure, and the respective beam structures are different, whereby their resonant frequencies are different.

摘要翻译： 振荡器包括：形成在基板上的多个MEMS振动器; 以及连接到所述多个MEMS振动器的振荡器配置电路，其中所述多个MEMS振子各自具有波束结构，并且所述各个波束结构不同，由此它们的谐振频率不同。

公开(公告)号：US20110306153A1

公开(公告)日：2011-12-15

申请号：US13215468

申请日：2011-08-23

申请人： Ryuji KIHARA ,  Shogo INABA

发明人： Ryuji KIHARA ,  Shogo INABA

IPC分类号： H01L21/66 ,  H01L21/00

CPC分类号： H03H3/0077 ,  H03H9/2457 ,  H03H2009/02496 ,  H03H2009/02511

摘要： A method of manufacturing an MEMS device includes: forming a covering structure having an MEMS structure and a hollow portion, which is located on a periphery of the MEMS structure and is opened to an outside, on a substrate; and performing surface etching for the MEMS structure in a gas phase by supplying an etching gas to the periphery of the MEMS structure from the outside.

摘要翻译： 一种制造MEMS器件的方法包括：在基板上形成具有MEMS结构的覆盖结构和位于MEMS结构的外围并向外部敞开的中空部分; 并且通过从外部向MEMS结构的外围提供蚀刻气体，在气相中对MEMS结构进行表面蚀刻。

公开(公告)号：US20100178717A1

公开(公告)日：2010-07-15

申请号：US12684248

申请日：2010-01-08

申请人： Ryuji KIHARA ,  Shogo INABA

发明人： Ryuji KIHARA ,  Shogo INABA

IPC分类号： H01L21/66

CPC分类号： H03H3/0077 ,  H03H9/2457 ,  H03H2009/02496 ,  H03H2009/02511

摘要： A method of manufacturing an MEMS device includes: forming a covering structure having an MEMS structure and a hollow portion, which is located on a periphery of the MEMS structure and is opened to an outside, on a substrate; and performing surface etching for the MEMS structure in a gas phase by supplying an etching gas to the periphery of the MEMS structure from the outside.

摘要翻译： 一种制造MEMS器件的方法包括：在基板上形成具有MEMS结构的覆盖结构和位于MEMS结构的外围并向外部敞开的中空部分; 并且通过从外部向MEMS结构的外围提供蚀刻气体，在气相中对MEMS结构进行表面蚀刻。

公开(公告)号：US20120127683A1

公开(公告)日：2012-05-24

申请号：US13359965

申请日：2012-01-27

申请人： Shogo INABA ,  Akira SATO

发明人： Shogo INABA ,  Akira SATO

IPC分类号： H05K7/06

CPC分类号： B81B3/0075 ,  H01L24/05 ,  H01L2224/05554 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/15788 ,  H01L2924/00

摘要： An electronic device includes a substrate, a functional structural body formed on the substrate and a covering structure for defining a cavity part having the functional structural body disposed therein, wherein the covering structure is provided with a side wall provided on the substrate and comprising an interlayer insulating layer surrounding the cavity part and a wiring layer; a first covering layer covering an upper portion of the cavity part and having an opening penetrating through the cavity part and composed of a laminated structure including a corrosion-resistant layer; and a second covering layer for closing the opening.

摘要翻译： 电子设备包括基板，形成在基板上的功能结构体和用于限定具有设置在其中的功能结构体的空腔部分的覆盖结构，其中覆盖结构设置有设置在基板上的侧壁， 围绕空腔部分的绝缘层和布线层; 覆盖所述空腔部的上部的第一覆盖层，具有穿过所述空腔部的开口，由包含耐腐蚀层的层叠结构构成的第一覆盖层; 以及用于封闭开口的第二覆盖层。

公开(公告)号：US20080035458A1

公开(公告)日：2008-02-14

申请号：US11832038

申请日：2007-08-01

申请人： Toru WATANABE ,  Akira SATO ,  Shogo INABA ,  Takeshi MORI

发明人： Toru WATANABE ,  Akira SATO ,  Shogo INABA ,  Takeshi MORI

IPC分类号： H01H57/00 ,  H01H11/00

CPC分类号： H01H59/0009 ,  H01C10/50 ,  Y10T29/49105

摘要： A micro-electro mechanical system (MEMS) switch includes a fixed electrode formed on a substrate, and a movable electric resistor formed on the substrate, the movable electric resistor serving as an electric resistor that divides an electric potential where the MEMS switch is set to a conduction state.

摘要翻译： 微机电系统（MEMS）开关包括形成在基板上的固定电极和形成在基板上的可移动电阻器，可移动电阻器用作将MEMS开关设置为的电位分开的电阻器 导通状态。

公开(公告)号：US20130027146A1

公开(公告)日：2013-01-31

申请号：US13550950

申请日：2012-07-17

申请人： Shogo INABA

发明人： Shogo INABA

IPC分类号： H03B1/00

CPC分类号： H03H9/2457 ,  B81B3/007 ,  B81B2201/014 ,  H03H3/0072 ,  H03H2009/02283 ,  H03H2009/02456 ,  H03H2009/02511

摘要： A MEMS vibrator includes: a substrate; a first electrode disposed above the substrate; and a second electrode disposed in a state where at least one portion of the second electrode has a space between the first electrode and the second electrode, and having a beam portion capable of vibrating, in the thickness direction of the substrate, with electrostatic force and a supporting portion supporting one edge of the beam portion and disposed above the substrate, wherein a supporting side face of the supporting portion supporting the one edge has a bending portion which bends in plan view from the thickness direction of the substrate, and the one edge is supported by the supporting side face including the bending portion.

摘要翻译： MEMS振动器包括：基板; 设置在所述基板上方的第一电极; 以及第二电极，其设置在所述第二电极的至少一部分具有在所述第一电极和所述第二电极之间的空间的状态下，并且具有能够在所述基板的厚度方向上以静电力振动的光束部分， 支撑部分，其支撑梁部分的一个边缘并且设置在基板上方，其中支撑所述一个边缘的支撑部分的支撑侧面具有从基板的厚度方向在平面图中弯曲的弯曲部分，并且所述一个边缘 由包括弯曲部的支撑侧面支撑。

公开(公告)号：US20110254110A1

公开(公告)日：2011-10-20

申请号：US13170628

申请日：2011-06-28

申请人： Toru WATANABE ,  Akira SATO ,  Shogo INABA ,  Takeshi MORI

发明人： Toru WATANABE ,  Akira SATO ,  Shogo INABA ,  Takeshi MORI

IPC分类号： H01L29/84

CPC分类号： B81B3/0086 ,  B81B2201/0271

摘要： A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode.

摘要翻译： 微机电系统（MEMS）器件包括半导体衬底，包括固定电极的MEMS和通过绝缘层形成在半导体衬底上的可移动电极，以及形成在固定电极下方的半导体衬底中的阱。 井是n型井和p型井之一。 p型阱对固定电极施加正电压，而n型阱对固定电极施加负电压。

公开(公告)号：US20110241136A1

公开(公告)日：2011-10-06

申请号：US13079988

申请日：2011-04-05

申请人： Shogo INABA

发明人： Shogo INABA

IPC分类号： H01L29/84

CPC分类号： B81B3/0081 ,  B81B2207/99 ,  H01L23/5256 ,  H01L2924/0002 ,  H01L2924/00

摘要： A MEMS device includes a substrate, an insulating layer section formed above the substrate and having a cavity, a functional element contained in the cavity, and a fuse element contained in the cavity and electrically connected with the functional element. It is preferable that the fuse element is spaced apart from the substrate.

摘要翻译： MEMS器件包括衬底，形成在衬底上方并具有空腔的绝缘层部分，包含在空腔中的功能元件和容纳在腔中并与功能元件电连接的熔丝元件。 优选地，熔丝元件与基板间隔开。

公开(公告)号：US20080105951A1

公开(公告)日：2008-05-08

申请号：US11875383

申请日：2007-10-19

申请人： Akira SATO ,  Toru WATANABE ,  Shogo INABA ,  Takeshi MORI

发明人： Akira SATO ,  Toru WATANABE ,  Shogo INABA ,  Takeshi MORI

IPC分类号： H01L29/06 ,  H01L21/30

CPC分类号： B81C1/00246 ,  B81B2207/015 ,  B81B2207/07 ,  B81C2203/0136 ,  B81C2203/0714 ,  B81C2203/0735 ,  H01L21/7682 ,  H01L24/05 ,  H01L2924/14 ,  H01L2924/00

摘要： An electronic device, including a substrate, a functional structure constituting a functional element formed on the substrate, and a cover structure forming a cavity portion in which the functional structure is disposed, is disclosed. In the electronic device, the cover structure includes a laminated structure of an interlayer insulating film and a wiring layer, the laminated structure being formed on the substrate in such a way that it surrounds the cavity portion, and the cover structure has an upside cover portion covering the cavity portion from above, the upside cover portion being formed with part of the wiring layer that is disposed above the functional structure.

摘要翻译： 公开了一种电子设备，包括基板，构成在基板上形成的功能元件的功能结构，以及形成其中设置有功能结构的空腔部分的盖结构。 在电子设备中，盖结构包括层间绝缘膜和布线层的叠层结构，层叠结构以包围空腔部分的方式形成在基板上，并且盖结构具有上侧盖部分 从上方覆盖空腔部分，上侧盖部分形成有设置在功能结构上方的布线层的一部分。