公开(公告)号：US20120279299A1

公开(公告)日：2012-11-08

申请号：US13459618

申请日：2012-04-30

申请人： Arnaud WALTHER ,  Bernard Diem ,  Philippe Robert ,  Jérôme Willemin

发明人： Arnaud WALTHER ,  Bernard Diem ,  Philippe Robert ,  Jérôme Willemin

IPC分类号： G01P15/14 ,  H05K13/00

CPC分类号： G01C19/5762 ,  G01C19/5712

摘要： Gyrometer comprising a substrate and an inertial mass suspended above the substrate, the inertial mass comprising an excitation part and a detection part, means of moving the excitation part in at least one direction contained in the plane of said inertial mass, and capacitive detection means detecting movement of said detection part outside the plane of said mass, said capacitive detection means comprising at least one suspended electrode, located above the detection part located facing the substrate so as to form a variable capacitor with said detection part, said electrode being held above said detection part by at least one pillar passing through the inertial mass.

摘要翻译： 气液分析仪包括基板和悬浮在基板上方的惯性质量块，惯性质量块包括激励部分和检测部分，在包含在所述惯性质量平面中的至少一个方向上移动激发部分的装置，以及电容检测装置检测装置 所述检测部件在所述质量平面外移动，所述电容性检测装置包括至少一个悬置电极，位于面向衬底的检测部分上方，以便与所述检测部分形成可变电容器，所述电极保持在所述检测部分上方 通过至少一个通过惯性块的支柱的检测部分。

公开(公告)号：US20110219875A1

公开(公告)日：2011-09-15

申请号：US13045934

申请日：2011-03-11

申请人： Arnaud WALTHER ,  Guillaume JOURDAN ,  Philippe ROBERT

发明人： Arnaud WALTHER ,  Guillaume JOURDAN ,  Philippe ROBERT

IPC分类号： G01P15/02 ,  G01P15/125 ,  G01P15/09 ,  G01P15/105 ,  G01P15/12 ,  G01P15/097

CPC分类号： G01P15/123 ,  B81B3/0051 ,  B81B2201/0235 ,  B81B2203/0163 ,  B81B2203/051 ,  G01P15/0802

摘要： A MEMS or NEMS device for detecting a force following a given direction, comprising a support (4) and at least one seismic mass (2) capable of moving under the effect of the force to be measured in the direction of said force, and means (10) for detecting the movement of said seismic mass (2), said seismic mass being articulated relative to the support by at least one pivot link, and means capable of varying the distance between the axis (Z) of the pivot link and the center of gravity (G) of the exertion of the force on said seismic mass.

摘要翻译： 一种用于检测沿给定方向的力的MEMS或NEMS装置，包括支撑件（4）和能够在所述力的方向上在待测量力的作用下移动的至少一个地震块（2），以及装置 （10），用于检测所述地震块（2）的运动，所述地震质量通过至少一个枢轴连杆相对于所述支撑件铰接，以及能够改变所述枢转连杆的轴线（Z）与所述支架之间的距离的装置 重力（G）对所述地震块的力的作用。

公开(公告)号：US20120017693A1

公开(公告)日：2012-01-26

申请号：US13186697

申请日：2011-07-20

申请人： Philippe ROBERT ,  Arnaud WALTHER

发明人： Philippe ROBERT ,  Arnaud WALTHER

IPC分类号： G01L9/00 ,  G01L7/00

CPC分类号： H04R19/005 ,  B81B3/0021 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81B2203/051 ,  H04R9/08 ,  H04R11/04 ,  H04R19/04

摘要： A pressure sensor of the MEMS and/or NEMS type is disclosed, including: at least one first deformable cavity (20) to receive pressure variations from an ambient atmosphere, this first deformable cavity being made in a first substrate and including at least one mobile or deformable wall (25), arranged at least partially in the plane parallel to the first substrate, called plane of the sensor, pressure variations from an ambient atmosphere being transmitted to said cavity, a detector (24, 24′) for detecting a displacement or deformation, in the plane of the sensor, of said mobile or deformable wall, under the effect of a pressure variation of the ambient atmosphere.

摘要翻译： 公开了一种MEMS和/或NEMS类型的压力传感器，包括：至少一个第一可变形空腔（20），用于接收来自环境大气的压力变化，该第一可变形空腔由第一衬底制成并且包括至少一个移动 或可变形壁（25），其至少部分地布置在平行于第一基板的平面中，称为传感器的平面，来自传递到所述空腔的环境大气的压力变化，用于检测位移的检测器（24,24'） 或在环境气氛的压力变化的影响下，在传感器的平面中，所述移动或可变形壁的变形。

公开(公告)号：US20120006123A1

公开(公告)日：2012-01-12

申请号：US13177033

申请日：2011-07-06

申请人： Arnaud WALTHER ,  Philippe ROBERT

发明人： Arnaud WALTHER ,  Philippe ROBERT

IPC分类号： G01L1/00

CPC分类号： G01C19/5712

摘要： The present invention relates to an inertial rotary movement microsensor for detecting a rotational movement around what is referred to as an axis of rotation (X), provided with a part that is movable relative to a fixed part, the movable part comprising an excitation mass configured to undergo an oscillating movement in an excitation direction (Z) by an exciter so as to generate a Coriolis force induced by the rotational movement, a detection mass kinematically connected to the excitation mass by a linkage configured to transmit the Coriolis force at least partly without transmitting the oscillating movement around the excitation axis at least partly, a detector configured to measure the Coriolis force transmitted to the detection mass, characterized in that the detector is provided with at least one strain gauge suspended between the detection mass and an anchoring part integral with the fixed part.Application to the technologies known as MEMS.

摘要翻译： 本发明涉及一种惯性旋转运动微传感器，用于检测围绕所述旋转轴线（X）的旋转运动，所述旋转轴线设置有相对于固定部分可移动的部分，所述可动部件包括激励质量配置 通过激励器在激励方向（Z）上进行振荡运动，以产生由旋转运动引起的科里奥利力;运动学上通过连杆构造的运动学连接到激发质量的检测质量，所述连接被配置为至少部分地传递科里奥利力而没有 至少部分地绕所述激励轴线传递所述振荡运动;检测器，被配置为测量传递到所述检测质量块的科里奥利力，其特征在于，所述检测器设置有悬置在所述检测质量块和与 固定部分。 应用于称为MEMS的技术。

公开(公告)号：US20120279300A1

公开(公告)日：2012-11-08

申请号：US13459592

申请日：2012-04-30

申请人： Arnaud WALTHER

发明人： Arnaud WALTHER

IPC分类号： G01P3/44

CPC分类号： G01P15/08 ,  G01C19/5712 ,  G01C19/5747 ,  G01P15/18

摘要： Inertial unit for the measurement of accelerations and/or rotations comprising four sensors, spread out on two intersecting axes, each sensor comprising two inertial masses, each inertial mass comprising a moveable excitation part and a moveable detection part, the moveable excitation parts of a sensor being separate from those of the other sensors, said unit also comprising means for exciting the excitation parts of the sensors and means for detecting the movement of the detection parts, the two inertial masses of each sensor) being mechanically coupled, the four sensors being coupled by elastically deformable mechanical coupling means and able to transmit the excitation vibrations from one axis to the other.

摘要翻译： 用于测量包括四个传感器的加速度和/或旋转的惯性单元，分布在两个相交轴上，每个传感器包括两个惯性质量块，每个惯性质量块包括可移动激励部分和可移动检测部分，传感器的可移动激励部分 所述单元还包括用于激励传感器的激励部分的装置和用于检测检测部件的运动的装置，每个传感器的两个惯性质量传感器）机械耦合，四个传感器耦合 通过可弹性变形的机械联接装置并且能够将激励振动从一个轴传递到另一个轴。

公开(公告)号：US20100295546A1

公开(公告)日：2010-11-25

申请号：US12710675

申请日：2010-02-23

申请人： Arnaud WALTHER ,  Robert CUCHET ,  Jérôme DELAMARE ,  Aline MSAED ,  Jean-Baptiste ALBERTINI

发明人： Arnaud WALTHER ,  Robert CUCHET ,  Jérôme DELAMARE ,  Aline MSAED ,  Jean-Baptiste ALBERTINI

IPC分类号： G01R33/02 ,  H01L21/30

CPC分类号： G01R33/022 ,  G01R33/028 ,  G01R33/0286

摘要： A gradient sensor of a component of a magnetic field comprising at least one elementary sensor comprising a deformable mass (31) equipped with a permanent magnet (32) having a magnetization direction substantially colinear to the direction of the gradient of the component of the magnetic field to be acquired by the sensor. The deformable mass (31) is able to deform under the effect of a force exerted on the magnet by the gradient, the effect of this force being to shift it, by dragging the deformable mass (31), in a direction substantially colinear to the component of the magnetic field for which the sensor has to acquire the gradient. The deformable mass (31) is anchored to a fixed support device (33) in at least two anchoring points (36) substantially opposite relative to the mass (31). The elementary sensor also comprises measuring means (35, 35.1, 35.2, 35.3) of at least one electric variable translating deformation or stress of the deformable mass (31) engendered by the gradient.

摘要翻译： 磁场分量的梯度传感器包括至少一个元件传感器，该至少一个元件传感器包括具有永磁体（32）的可变形质量块（31），该永磁体具有与磁场分量梯度方向大致共线的磁化方向 由传感器采集。 可变形质量块（31）能够在施加在磁体上的力的作用下通过梯度变形，该力的作用是通过将可变形的质量块（31）沿基本上共线的方向 传感器必须获取梯度的磁场分量。 可变形质量块（31）在至少两个相对于质量块（31）相对的固定点（36）中锚固到固定支撑装置（33）。 基本传感器还包括至少一个电可变的测量装置（35,35.1,35.2,35.3），该电可变平移由该梯度产生的可变形质量块（31）的变形或应力。