摘要:
A method of forming a metal interconnect within a fluorinated silica glass dielectric layer while preventing outgassing from the FSG dielectric layer, comprising the following steps. A semiconductor structure having a metal structure, with an overlying liner layer, formed thereover is provided. A FSG dielectric layer is formed over the liner layer. The FSG dielectric layer having an exposed upper surface. The FSG dielectric layer is treated with a first nitrogen gas/plasma treatment to form a fluorine depleted upper capping layer from the exposed surface of the FSG dielectric layer. A TEOS oxide layer is formed over the upper capping layer. The TEOS oxide layer is planarized to form a planarized TEOS oxide layer. The planarized TEOS oxide layer, the upper capping layer, the treated FSG dielectric layer, and the liner layer are patterned to form a via hole therethrough, exposing a portion of the metal structure and exposing sidewalls of the patterned treated FSG dielectric layer within the via opening. At least the exposed sidewalls of the patterned treated fluorinated silicon glass dielectric layer within the via opening is treated with a second nitrogen gas/plasma treatment to form a fluorine depleted sidewall capping layer from the exposed sidewalls of the patterned treated fluorinated silicon glass dielectric layer, wherein the upper and sidewall capping layers prevent the outgassing from the patterned FSG dielectric layer. A metal interconnect is formed within the via opening.
摘要:
An intermetal dielectric structure for integrated circuits is provided having a premetal dielectric and a metal line thereon, with a SRO liner on the premetal dielectric layer and the metal lines, a FGS dielectric layer over the SRO liner, a SRO film over the FGS dielectric layer, and a TEOS dielectric layer over the SRO film. Vias through the FGS dielectric layer are treated to have fluorine-free regions around the vias. The structure is not subject to fluorine attack on the metal lines or vias while having a stable FGS dielectric layer with less fluorine out-gassing and out-diffusion.
摘要:
An intermetal dielectric structure for integrated circuits and a manufacturing method therefore is provided having a premetal dielectric and a metal line thereon, with a SRO liner on the premetal dielectric layer and the metal lines, a FGS dielectric layer over the SRO liner, a SRO film over the FGS dielectric layer, and a TEOS dielectric layer over the SRO film. Vias through the FGS dielectric layer are treated to have fluorine-free regions around the vias. The structure is not subject to fluorine attack on the metal lines or vias while having a stable FGS dielectric layer with less fluorine out-gassing and out-diffusion.
摘要:
A communication system comprises a set of specialized backend servers 100 and groups of terminals (210, 220) connected through the Internet. Users of the communication system can make video calls and share text messages, images and video clips through the terminals (210, 220). The terminals in this system are organized into private terminal groups 200 of varying sizes. Each group has only one controller terminal 210 and one or more display terminals 220. Both types of terminals provide an easy-to-use graphic user interface for the user to access the communication services provided by the system. Communication and information sharing between any display terminals must be pre-authorized by their controllers. This communication system, while ensuring security and privacy, addresses the needs of caregiver groups that include caregiver professionals, family members and care receivers, to facilitate private conference calls, information sharing and caring activity coordination.
摘要:
Embodiments provide methods and systems wherein analyte concentration readings taken over a first period of time are collected and processed to determine one or more analyte concentration averages. The methods include collecting samples with a measurement system (e.g., a Blood Glucose Meter) over a first period of time, dividing the first period of time into smaller time increments, and calculating an average analyte concentration based on first sub-averages obtained from each of the smaller time increments. Systems for carrying out the analyte concentration averages are described, as are other aspects.
摘要:
A receiver-driven streaming method is provided. The method includes receiving an original coded video stream from a transmitter 102 at a receiver 104. An available bit rate is measured at the receiver 104. A request for a different coded video stream and a switching stream is sent from the receiver 104 to the transmitter 102 based on the available bit rate. The requested switching stream is received from the transmitter 102 at the receiver 104. The requested coded video stream is received from the transmitter 102 at the receiver 104. According to one embodiment, switching streams 132a-132f are stored separately from coded video streams 130a-130c, and each switching stream 132a-132f and coded video stream 130a-130c is stored in a separate track from each other. In this way, switching streams 132a-132f maybe generated offline. Also, the receiver 104 controls the streams provided by the transmitter 102 by requesting specific switching streams 132a-132f and coded video streams 130a-103c.
摘要:
A so-called “Virtual Clock” with varying frequency is provided for used by a multimedia streaming server to adapt its transmission rate dynamically to changing network conditions. The “Virtual Clock” system and method of the present invention compensates for a potential limitation of the Internet Real-time Transmission Protocol (RTP), that stamps every packet it delivers with a timestamp and expects the server using this timestamp to schedule the transmission of this particular packet accordingly. Consequently, the transmission rate is pre-determined by the encoded multimedia content when RPT is used. Using the “Virtual Clock” of the present invention, the streaming server has a mechanism to overcome this RTP limitation and can conduct transmission rate adaptation in a way that can balance the bandwidth requirement of the content with the bandwidth availability of the network.
摘要:
A circular buffer, i.e., a chain of buffers forming a circle, is provided for managing packet loss detection in Internet streaming. The detection latency is determined by the size of the buffer chain, which can be dynamically adapted to network conditions and application requirements. The present invention can achieve reasonable detection accuracy.
摘要:
A switch mode power supply (SMPS) and method are provided. In particular, the present invention provides an SMPS in which data is encoded by manipulating voltage pulses on a primary side. The manipulated voltage pulses are then transferred over a transformer to a secondary side. Secondary side pulses generated in response to the primary side pulses are sensed and decoded by a detector. The present invention allows data to be transferred from the primary side to the secondary side without affecting output voltages.
摘要:
A method for reducing harmonic distortions and switching losses in a power factor correction circuit of a quasi-resonant voltage converter, wherein using data derived from the sensing a voltage impressed on the switching device in the power converter, a multitude of event times can be calculated that will align the timings of the drive circuitry of the power converter to those of the natural resonance transitions of reactive elements of the converter. An over-sampling of the voltage impressed on the switching device voltage allows accurate sensing of a “zero-current” cross-over condition in an inductance of the converter.