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1.发明授权公开(公告)号：US06486597B1
公开(公告)日：2002-11-26
申请号：US09422630
申请日：1999-10-21
IPC分类号： H01B924
CPC分类号： H01J9/20 , H01J9/146 , H01J31/127 , H01J2329/88 , Y10S977/891 , Y10S977/892 , Y10S977/939
摘要： A diamond-like carbon-containing material useful as a coating for electronic devices including field emission devices and color television tubes, the coatings having both low secondary electron emission coefficients of less than unity and electrical resistivity tunable over a range of from about 10e−2 to about 10e16.
摘要翻译： 可用作包括场致发射器件和彩色电视管的电子器件的涂层的类金刚石的含碳材料，该涂层具有小于1的低二次电子发射系数和在约10e-2的范围内可调的电阻率 至约10e16。
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公开(公告)号：US06468642B1
公开(公告)日：2002-10-22
申请号：US09204441
申请日：1998-12-02
IPC分类号： B32B900
CPC分类号： B26B21/60 , C23C16/0245 , C23C16/0272 , C23C16/26 , Y10T428/24975 , Y10T428/265 , Y10T428/30 , Y10T428/31678
摘要： The invention relates to fluorine-doped coatings which include a diamond-like composition containing carbon, silicon, oxygen, hydrogen, and fluorine on various substrates. Preferred substrates include flexible substrates, precision-edged substrates, and electrosurgical instruments. The present invention also relates to a method of making a substrate coated with a fluorine-doped diamond-like coating which includes positioning the substrate in a vacuum coating chamber and depositing a diamond-like composition containing carbon, silicon, oxygen, hydrogen, and fluorine onto the substrate by co-deposition of clusterless particle beams comprised of ions, atoms, or radicals of the carbon, silicon, oxygen, hydrogen, and fluorine, the mean free path of each particle species being in excess of the distance between its source and the growing particle coating surface of the substrate.
摘要翻译： 本发明涉及氟掺杂涂层，其包括在各种基材上含有碳，硅，氧，氢和氟的类金刚石组合物。 优选的基底包括柔性基底，精密边缘基底和电外科器械。 本发明还涉及一种制备涂覆有氟掺杂的类金刚石涂层的基材的方法，其包括将基材定位在真空涂覆室中并沉积含有碳，硅，氧，氢和氟的金刚石组合物 通过共沉积由碳，硅，氧，氢和氟的离子，原子或自由基组成的无簇粒子束，每个颗粒物质的平均自由程超过其源和 衬底生长的颗粒涂层表面。
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公开(公告)号：US08518553B2
公开(公告)日：2013-08-27
申请号：US10581188
申请日：2004-11-30
IPC分类号： B22F3/00
CPC分类号： C23C16/0272 , C23C16/26 , C23C28/044 , C23C28/046 , C23C28/322 , C23C28/343 , C23C28/347 , F16C2206/04 , Y10T428/12056
摘要： The invention relates to a layered structure comprising a first intermediate layer, said first intermediate layer comprising at least one element of group IVB, group VB or group VIB; a second intermediate layer deposited on top of said first intermediate layer, said second intermediate layer comprising a diamond-like nanocomposite composition; a diamond-like carbon layer deposited on top of said second intermediate layer. The invention further relates to the use of a substrate coated with such a layered structure for high shear and/or high impact applications and to a method to cover a substrate with such a layered structure.
摘要翻译： 本发明涉及包括第一中间层的分层结构，所述第一中间层包含IVB族，VB族或VIB族的至少一种元素; 沉积在所述第一中间层顶部的第二中间层，所述第二中间层包含类金刚石纳米复合组合物; 沉积在所述第二中间层顶部上的类金刚石碳层。 本发明还涉及涂覆有这种层状结构的基底用于高剪切和/或高冲击应用的用途以及用这种分层结构覆盖基底的方法。
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公开(公告)号：US09692325B2
公开(公告)日：2017-06-27
申请号：US13818339
申请日：2011-09-08
申请人： David Suuronen , Lyudmila Stone , Julian Blake , Dale K. Stone , Richard A. Cooke , Steven Donnell , Chandra Venkatraman
发明人： David Suuronen , Lyudmila Stone , Julian Blake , Dale K. Stone , Richard A. Cooke , Steven Donnell , Chandra Venkatraman
IPC分类号： H01L21/683 , H02N13/00 , B23Q3/152
CPC分类号： H02N13/00 , B23Q3/152 , H01L21/6831 , H01L21/6833
摘要： In accordance with an embodiment of the invention, there is provided an electrostatic chuck comprising a conductive path covering at least a portion of a workpiece-contacting surface of a gas seal ring of the electrostatic chuck, the conductive path comprising at least a portion of an electrical path to ground; and a main field area of a workpiece-contacting surface of the electrostatic chuck comprising a surface resistivity in the range of from about 108 to about 1012 ohms per square.
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公开(公告)号：US20090142599A1
公开(公告)日：2009-06-04
申请号：US12302133
申请日：2007-05-31
IPC分类号： H01L21/683 , B05D5/12 , H01B1/04
CPC分类号： C23C14/0605 , C23C16/26 , H01L21/68757 , Y10T428/30
摘要： The invention relates to a method to increase the wettability of a substrate by providing said substrate at least partially with a conductive, metal free, hydrophilic carbon based coating. The carbon based coating is doped with nitrogen and has an electrical resistivity lower than 108 ohm-cm. The invention further relates to a substrate coated at least partially with a conductive metal free, hydrophilic carbon based coating.
摘要翻译： 本发明涉及通过至少部分地提供导电的，无金属的亲水性碳基涂层来提高基底的润湿性的方法。 碳基涂层掺杂氮气，电阻率低于108欧姆 - 厘米。 本发明还涉及至少部分地涂覆有导电金属的亲水性碳基涂层的基材。
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公开(公告)号：US20130155569A1
公开(公告)日：2013-06-20
申请号：US13818339
申请日：2011-09-08
申请人： David Suuronen , Lyudmila Stone , Julian Blake , Dale K. Stone , Richard A. Cooke , Steven Donnell , Chandra Venkatraman
发明人： David Suuronen , Lyudmila Stone , Julian Blake , Dale K. Stone , Richard A. Cooke , Steven Donnell , Chandra Venkatraman
IPC分类号： H02N13/00
CPC分类号： H02N13/00 , B23Q3/152 , H01L21/6831 , H01L21/6833
摘要： In accordance with an embodiment of the invention, there is provided an electrostatic chuck comprising a conductive path covering at least a portion of a workpiece-contacting surface of a gas seal ring of the electrostatic chuck, the conductive path comprising at least a portion of an electrical path to ground; and a main field area of a workpiece-contacting surface of the electrostatic chuck comprising a surface resistivity in the range of from about 108 to about 1012 ohms per square.
摘要翻译： 根据本发明的实施例，提供了一种静电卡盘，其包括覆盖静电卡盘的气体密封环的工件接触表面的至少一部分的导电路径，该导电路径包括至少一部分 电路到地面; 以及静电卡盘的工件接触表面的主场区域，其表面电阻率范围为约108至约1012欧姆/平方。
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公开(公告)号：US06998636B2
公开(公告)日：2006-02-14
申请号：US10239493
申请日：2001-03-20
IPC分类号： H01L35/24
CPC分类号： H01L21/3122 , C23C14/10 , C23C16/30 , C23C16/401 , H01L21/02126 , H01L21/02216 , H01L21/02274 , H01L21/0228 , H01L21/02301 , H01L21/02315
摘要： The invention relates to a material including carbon, oxygen, silicon and hydrogen and having a dielectric constant of from about 2.1 to about 3.0 where an FTIR scan of the material includes at least two major peaks signifying Si—CH3 bonding. The invention further relates to a material which has a variable dielectric constant through the thickness of the material. Another aspect of the invention is the method of making the material.
摘要翻译： 本发明涉及包括碳，氧，硅和氢的材料，其介电常数为约2.1至约3.0，其中材料的FTIR扫描包括表示Si-CH 3的至少两个主峰 >粘接。 本发明还涉及通过材料的厚度具有可变介电常数的材料。 本发明的另一方面是制造该材料的方法。
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公开(公告)号：US6083313A
公开(公告)日：2000-07-04
申请号：US361006
申请日：1999-07-27
IPC分类号： C08J7/04 , C09D201/06 , C09D201/10
CPC分类号： C08J7/047 , C08J2483/00 , Y10T428/31507 , Y10T428/31663
摘要： The present invention relates to a unique hard coating that provides the necessary characteristics for flat panel display plastic substrates because the coating is amorphous and is comprised of C, H, Si and O. The coating of the present invention is hard, optically transparent, scratch and abrasion resistant and hydrophobic. It is deposited by a low density, low temperature plasma enhanced chemical vapor deposition (PECVD) process and exhibits excellent barrier protection and reduced permeability to moisture, oxygen, helium and other vapors.
摘要翻译： 本发明涉及一种独特的硬涂层，其为平板显示塑料基材提供必要的特性，因为涂层是无定形的并且由C，H，Si和O组成。本发明的涂层是硬的，光学透明的，划痕的 耐磨性和疏水性。 它通过低密度，低温等离子体增强化学气相沉积（PECVD）工艺沉积，并显示出优异的屏障保护和降低对湿气，氧气，氦气和其他蒸气的渗透性。
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公开(公告)号：US20080166287A1
公开(公告)日：2008-07-10
申请号：US10581188
申请日：2004-11-30
CPC分类号： C23C16/0272 , C23C16/26 , C23C28/044 , C23C28/046 , C23C28/322 , C23C28/343 , C23C28/347 , F16C2206/04 , Y10T428/12056
摘要： The invention relates to a layered structure comprising a first intermediate layer, said first intermediate layer comprising at least one element of group IVB, group VB or group VIB; a second intermediate layer deposited on top of said first intermediate layer, said second intermediate layer comprising a diamond-like nanocomposite composition; a diamond-like carbon layer deposited on top of said second intermediate layer. The invention further relates to the use of a substrate coated with such a layered structure for high shear and/or high impact applications and to a method to cover a substrate with such a layered structure.
摘要翻译： 本发明涉及包括第一中间层的分层结构，所述第一中间层包含IVB族，VB族或VIB族的至少一种元素; 沉积在所述第一中间层顶部的第二中间层，所述第二中间层包含类金刚石纳米复合组合物; 沉积在所述第二中间层顶部上的类金刚石碳层。 本发明还涉及涂覆有这种层状结构的基底用于高剪切和/或高冲击应用的用途以及用这种分层结构覆盖基底的方法。
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公开(公告)号：US07300461B2
公开(公告)日：2007-11-27
申请号：US10333975
申请日：2001-07-17
IPC分类号： A61F2/06
CPC分类号： A61F2/82 , A61F2310/0058 , A61F2310/0061 , A61L31/084
摘要： An intravascular stent (26) has a surface coated with a biocompatible layer. The layer contains a diamond like nanocomposite material. This nanocomposite material comprises carbon, hydrogen, silicon and oxygen as constituent elements. The layer has a stress which is less than 150 MPa in order to ensure a high degree of flexibility and a complete expandability. This lower stress is obtained by the inclusion of relatively large amounts of Si:O bonds. In a preferable embodiment the layer with diamond like nanocomposite material covers the stent (26) for 100%. This is obtained by allowing the stent to move freely along a wire during CAVD deposition.
摘要翻译： 血管内支架（26）具有涂覆有生物相容性层的表面。 该层含有类似金刚石的纳米复合材料。 该纳米复合材料包含碳，氢，硅和氧作为构成元素。 该层具有小于150MPa的应力，以确保高度的柔性和完全的可扩展性。 这种较低的应力通过包含相对大量的Si：O键来获得。 在优选实施例中，具有金刚石状纳米复合材料的层覆盖支架（26）100％。 这是通过允许支架在CAVD沉积期间沿导线自由移动而获得的。
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