利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

75 条记录 (耗时 0.032 秒)

    Upper layer-forming composition and photoresist patterning method
    2.
    发明授权
    Upper layer-forming composition and photoresist patterning method 有权
    上层形成组合物和光致抗蚀剂图案化方法

    公开(公告)号：US08076053B2

    公开(公告)日：2011-12-13

    申请号：US12091712

    申请日：2006-10-25

    申请人： Atsushi Nakamura ,  Hiroki Nakagawa ,  Hiromitsu Nakashima ,  Takayuki Tsuji ,  Hiroshi Dougauchi ,  Daita Kouno ,  Yukio Nishimura

    发明人： Atsushi Nakamura ,  Hiroki Nakagawa ,  Hiromitsu Nakashima ,  Takayuki Tsuji ,  Hiroshi Dougauchi ,  Daita Kouno ,  Yukio Nishimura

    IPC分类号： G03F7/00 ,  G03F7/004 ,  G03F7/40 ,  G03F7/11

    CPC分类号： G03F7/11 ,  C08F220/18 ,  C08F220/30 ,  G03F7/0046 ,  G03F7/2041

    摘要： An upper layer-forming composition formed on a photoresist while causing almost no intermixing with the photoresist film and a photoresist patterning method are provided. The upper layer-forming composition is stably maintained without being eluted in a medium such as water during liquid immersion lithography and is easily dissolved in an alkaline developer. The upper layer-forming composition covers a photoresist film for forming a pattern by exposure to radiation. The composition comprises a resin dissolvable in a developer for the photoresist film and a solvent in which the resin is dissolved. The solvent has a viscosity of less than 5.2×10−3 Pa·s at 20° C. In addition, the solvent does not cause intermixing of the photoresist film and the upper layer-forming composition. The solvent contains an ether or a hydrocarbon.

    摘要翻译： 提供了形成在光致抗蚀剂上的上层形成组合物，同时几乎不与光致抗蚀剂膜混合，并且提供光致抗蚀剂图案化方法。 上层形成组合物在液浸光刻期间稳定地保持在介质如水中不被洗脱，并容易溶解在碱性显影剂中。 上层形成组合物覆盖用于通过暴露于辐射形成图案的光致抗蚀剂膜。 该组合物包含可溶于光致抗蚀剂膜的显影剂中的树脂和溶解有树脂的溶剂。 溶剂在20℃下的粘度小于5.2×10-3Pa·s。此外，溶剂不会引起光致抗蚀剂膜和上层形成组合物的混合。 溶剂含有醚或烃。

    UPPER LAYER-FORMING COMPOSITION AND PHOTORESIST PATTERNING METHOD
    4.
    发明申请
    UPPER LAYER-FORMING COMPOSITION AND PHOTORESIST PATTERNING METHOD 有权
    上层成型和光电子图案方法

    公开(公告)号：US20100003615A1

    公开(公告)日：2010-01-07

    申请号：US12091712

    申请日：2006-10-25

    申请人： Atsushi Nakamura ,  Hiroki Makagawa ,  Hiromitsu Nakashima ,  Takayuki Tsuji ,  Hiroshi Dougauchi ,  Daita Kouno ,  Yukio Nishimura

    发明人： Atsushi Nakamura ,  Hiroki Makagawa ,  Hiromitsu Nakashima ,  Takayuki Tsuji ,  Hiroshi Dougauchi ,  Daita Kouno ,  Yukio Nishimura

    IPC分类号： G03F7/20 ,  G03F7/004

    CPC分类号： G03F7/11 ,  C08F220/18 ,  C08F220/30 ,  G03F7/0046 ,  G03F7/2041

    摘要： An upper layer-forming composition formed on a photoresist while causing almost no intermixing with the photoresist film and a photoresist patterning method are provided. The upper layer-forming composition is stably maintained without being eluted in a medium such as water during liquid immersion lithography and is easily dissolved in an alkaline developer. The upper layer-forming composition covers a photoresist film for forming a pattern by exposure to radiation. The composition comprises a resin dissolvable in a developer for the photoresist film and a solvent in which the resin is dissolved. The solvent has a viscosity of less than 5.2×10−3 Pa·s at 20° C. In addition, the solvent does not cause intermixing of the photoresist film and the upper layer-forming composition. The solvent contains an ether or a hydrocarbon.

    摘要翻译： 提供了形成在光致抗蚀剂上的上层形成组合物，同时几乎不与光致抗蚀剂膜混合，并且提供光致抗蚀剂图案化方法。 上层形成组合物在液浸光刻期间稳定地保持在介质如水中不被洗脱，并容易溶解在碱性显影剂中。 上层形成组合物覆盖用于通过暴露于辐射形成图案的光致抗蚀剂膜。 该组合物包含可溶于光致抗蚀剂膜的显影剂中的树脂和溶解有树脂的溶剂。 溶剂在20℃时的粘度小于5.2×10 -3 Pa.s。此外，溶剂不会引起光致抗蚀剂膜和上层形成组合物的混合。 溶剂含有醚或烃。

    LIQUID IMMERSION LITHOGRAPHY
    5.
    发明申请
    LIQUID IMMERSION LITHOGRAPHY 审中-公开
    液体渗透光刻

    公开(公告)号：US20090305161A1

    公开(公告)日：2009-12-10

    申请号：US12094493

    申请日：2006-11-20

    申请人： Atsushi Nakamura ,  Yong Wang ,  Takayuki Tsuji

    发明人： Atsushi Nakamura ,  Yong Wang ,  Takayuki Tsuji

    IPC分类号： G03F7/004

    CPC分类号： G03F7/2041 ,  G03F7/0397

    摘要： A radiation-sensitive resin composition for liquid immersion lithography which produces an excellent pattern profile, exhibits excellent resolution, provides sufficient focal depth allowance, and elutes only the minimal amount in the liquid when brought in contact with the liquid during exposure to radiation. The radiation-sensitive resin composition forms a photoresist film in liquid immersion lithography, in which radiation is emitted through a liquid for use in liquid immersion lithography having a refractive index larger than 1.44 and smaller than 1.85 at a wavelength of 193 nm, existing between a lens and a photoresist, the composition comprising a resin having a recurring unit with a lactone structure, which is insoluble or scarcely soluble in alkali, but becomes soluble in alkali by the action of an acid, and a radiation-sensitive acid generator.

    摘要翻译： 用于液浸光刻的辐射敏感性树脂组合物，其产生优异的图案轮廓，显示出优异的分辨率，提供足够的焦点深度余量，并且在暴露于辐射期间与液体接触时仅洗脱液体中的最小量。 辐射敏感树脂组合物在液浸光刻中形成光致抗蚀剂膜，其中辐射通过用于液体浸渍光刻的液体发射，其在193nm波长处的折射率大于1.44且小于1.85，存在于 透镜和光致抗蚀剂，该组合物包含具有内酯结构的重复单元的树脂，其不溶于或几乎不溶于碱，但通过酸的作用变得可溶于碱，并且具有辐射敏感性的酸产生剂。

    Object type determination apparatus, vehicle, object type determination method, and program for determining object type
    6.
    发明授权
    Object type determination apparatus, vehicle, object type determination method, and program for determining object type 有权
    对象类型确定装置，车辆，对象类型确定方法和用于确定对象类型的程序

    公开(公告)号：US08306263B2

    公开(公告)日：2012-11-06

    申请号：US12218517

    申请日：2008-07-16

    申请人： Nobuharu Nagaoka ,  Makoto Aimura ,  Takayuki Tsuji

    发明人： Nobuharu Nagaoka ,  Makoto Aimura ,  Takayuki Tsuji

    IPC分类号： G06K9/00

    CPC分类号： G06K9/00369 ,  G06K9/00805

    摘要： An object type determination apparatus, an object type determination method, a vehicle, and a program for determining an object type, capable of accurately determining the type of the object by appropriately determining periodicity in movement of the object from images, are provided. The object type determination apparatus includes an object area extracting means (11) for extracting an area of an object from an image picked up by an image pick-up means (2R, 2L), an object end point extracting means (12) for extracting an end point of an image portion of the object from the extracted object area, an object periodicity determination means (13) for calculating time series data of a feature value representing a size of the object using the end point of the image portion of the object extracted by the object end point extracting means (12) from the area of the object extracted by the object area extracting means (11) for respective ones of time series images picked up by the image pick-up means (2R, 2L) to determine whether the feature value changes with prescribed periodicity, and a living body determination means (14) for determining the object having the feature value determined to change with periodicity as a living body.

    摘要翻译： 提供了一种对象类型确定装置，对象类型确定方法，车辆和用于确定对象类型的程序，能够通过从图像适当地确定对象的移动周期来精确地确定对象的类型。 对象类型确定装置包括：对象区域提取装置，用于从由图像拾取装置（2R，2L）拾取的图像中提取对象的区域;对象终点提取装置（12），用于提取 来自提取的对象区域的对象的图像部分的终点;对象周期性确定装置（13），用于使用对象的图像部分的终点来计算表示对象的大小的特征值的时间序列数据 由对象终点提取装置（12）从由对象区域提取装置（11）提取的对象区域针对由图像拾取装置（2R，2L）拾取的各个时间序列图像提取出来，以确定 所述特征值是否以规定的周期性变化，以及生物体确定装置（14），用于确定被确定为周期性变化的特征值的物体作为活体。

    Vehicle surroundings monitoring apparatus
    8.
    发明授权
    Vehicle surroundings monitoring apparatus 有权
    车辆周边监控装置

    公开(公告)号：US07969466B2

    公开(公告)日：2011-06-28

    申请号：US11287872

    申请日：2005-11-28

    申请人： Nobuharu Nagaoka ,  Takayuki Tsuji

    发明人： Nobuharu Nagaoka ,  Takayuki Tsuji

    IPC分类号： H04N7/18 ,  H04N5/228

    CPC分类号： G06K9/00805 ,  B60K35/00 ,  B60W30/08 ,  B60W2050/143 ,  B60W2050/146 ,  B60W2420/403 ,  B60W2520/10 ,  B60W2520/105 ,  B60W2520/14 ,  B60W2540/12 ,  B60W2550/20 ,  G01S11/12 ,  G06K9/00369 ,  G06T7/41 ,  G06T2207/10048 ,  G06T2207/30261 ,  G08G1/161

    摘要： A vehicle surroundings monitoring apparatus that extracts a body present in the surroundings of a vehicle as an object, based on an image captured by an infrared imaging device, including a binarized object extraction device that extracts a binarized object from image data obtained by binarizing a gray scale image of the image; a search region setting device that sets a search region at the lower part of the binarized object extracted by the binarized object extraction device; a vertical edge detection device that detects a vertical edge in the search region set by the search region setting device; and an object type determination device that determines a type of object based on a detection result of the vertical edge detection device.

    摘要翻译： 一种车辆环境监视装置，其基于由红外成像装置拍摄的图像，提取作为对象的车辆周围的身体，所述图像包括二值化对象提取装置，所述二值化对象提取装置从通过二值化灰色获得的图像数据中提取二值化对象 图像的尺度图像; 搜索区域设置装置，其在由二值化对象提取装置提取的二值化对象的下部设置搜索区域; 垂直边缘检测装置，其检测由搜索区域设置装置设置的搜索区域中的垂直边缘; 以及对象类型确定装置，其基于垂直边缘检测装置的检测结果来确定对象的类型。

    Vehicle surroundings monitoring apparatus, vehicle surroundings monitoring method, and vehicle surroundings monitoring program
    10.
    发明授权
    Vehicle surroundings monitoring apparatus, vehicle surroundings monitoring method, and vehicle surroundings monitoring program 有权
    车辆环境监测装置，车辆周边监测方法和车辆环境监测程序

    公开(公告)号：US07671725B2

    公开(公告)日：2010-03-02

    申请号：US11717565

    申请日：2007-03-13

    申请人： Takayuki Tsuji ,  Nobuharu Nagaoka ,  Yoichi Sugimoto ,  Morimichi Nishigaki

    发明人： Takayuki Tsuji ,  Nobuharu Nagaoka ,  Yoichi Sugimoto ,  Morimichi Nishigaki

    IPC分类号： B60Q1/00

    CPC分类号： G06K9/00369 ,  G06K9/00791

    摘要： A vehicle surroundings monitoring apparatus, a vehicle surroundings monitoring method, and a vehicle surroundings monitoring program which can rapidly determine an object such as a pedestrian to be avoided which must be avoided from coming into contact with the vehicle from an image of the surroundings of the vehicle and can provide information to a driver or control the vehicle behaviors. The vehicle surroundings monitoring apparatus includes an object extraction process unit (11) which extracts objects existing around a vehicle (10) from images taken by infrared cameras (2R, 2L), a pedestrian extraction process unit (12) which extracts a pedestrian from the extracted objects, a posture determination process unit (13) which determines the posture of the extracted pedestrian, an object-to-be-avoided determination process unit (14) which determines whether the extracted object is an object to be avoided which must be avoided from coming into contact with the vehicle (10) by executing a determination algorithm including at least a first determination process on the posture of the pedestrian determined by the posture determination process unit (13), and a vehicle equipment control process unit (15) which controls equipment of the vehicle (10) at least according to the determination result of the object-to-be-avoided determination process unit (14).

    摘要翻译： 一种车辆周边监视装置，车辆环境监视方法以及车辆周边监视程序，其能够快速地确定要避免的对象，所述对象应当避免与所述车辆的环境的图像接触而与车辆接触 车辆，并可向驾驶员提供信息或控制车辆行为。 车辆周边监视装置包括从红外线摄像机（2R，2L）拍摄的图像中提取车辆（10）周围存在的物体的物体提取处理单元（11），从步行者提取处理单元（12） 提取的对象，确定所提取的行人的姿势的姿势确定处理单元（13），确定提取的对象是否必须避免的对象的避免对象的确定处理单元（14） 通过执行至少包括由姿势判定处理单元（13）确定的行人姿势的第一确定处理的确定算法，以及车辆设备控制处理单元（15），与车辆（10）接触，车辆设备控制处理单元 至少根据对象对象确定处理单元（14）的确定结果控制车辆（10）的设备。