公开(公告)号：US06809037B2

公开(公告)日：2004-10-26

申请号：US09751979

申请日：2000-12-29

申请人： Atsushi Nishizawa

发明人： Atsushi Nishizawa

IPC分类号： H01L21302

CPC分类号： H01L21/76808 ,  H01L21/31116

摘要： The present invention relates to a method of manufacturing a semiconductor integrated circuit in which a via hole reaching a metal wiring and a concave groove are simultaneously formed in an interlayer film. When the interlayer film and the material of an organic film embedded in the via hole are etched, the etching rate for the material of the organic film with an etching gas is set to be higher than the etching rate for the interlayer film with an etching gas. Thus, plasma etching does not proceed in a state in which the material of the organic film projects from the bottom of the concave groove formed in the interlayer film, and the production of depositions is prevented.

摘要翻译： 本发明涉及一种制造半导体集成电路的方法，其中在中间膜中同时形成到达金属布线和凹槽的通孔。 当蚀刻层间膜和嵌入在通孔中的有机膜的材料时，蚀刻气体的有机膜的材料的蚀刻速率设定为高于具有蚀刻气体的层间膜的蚀刻速率 。 因此，等离子体蚀刻不会在有机膜的材料从形成在中间膜中的凹槽的底部突出的状态下进行，并且防止了沉积的产生。

公开(公告)号：US5661373A

公开(公告)日：1997-08-26

申请号：US403290

申请日：1995-03-13

申请人： Atsushi Nishizawa

发明人： Atsushi Nishizawa

IPC分类号： H04L25/02 ,  H04L25/03 ,  H04L25/493 ,  H04L27/00 ,  H04B3/00

CPC分类号： H04L25/0286 ,  H04L25/0292 ,  H04L25/03834 ,  H04L25/493

摘要： In a binary digital signal transmission system, a transmitter generates a binary digital signal including at least a rise portion where a level of the binary digital signal steeply rises in accordance with inputted binary digital data of a first value, and at least a fall portion where the level of the binary digital signal steeply falls in accordance with the inputted binary digital data of a second value, and then transmits the binary digital signal via a cable to a receiver. On the other hand, the receiver receives the transmitted binary digital signal, and first and second resonance circuits respectively have two resonance frequencies which are even multiples of each other, and extract first and second resonance signals respectively having resonance frequency components of the two resonance frequencies, from the received binary digital signal. Thereafter, a data discriminator discriminates a value of the binary digital data corresponding to the received binary digital signal based on a phase relationship between the extracted first and second resonance signals, and outputs either one of a pulse signal representing the first value and another pulse signal representing the second value.

摘要翻译： 在二进制数字信号传输系统中，发射机产生二进制数字信号，该二进制数字信号包括至少一个上升部分，其中二进制数字信号的电平根据输入的第一值的二进制数字数据急剧上升，至少一个下降部分， 二进制数字信号的电平根据输入的第二值的二进制数字数据急剧下降，然后经由电缆将二进制数字信号发送到接收机。 另一方面，接收器接收发送的二进制数字信号，第一和第二谐振电路分别具有彼此成倍的两个谐振频率，并且提取分别具有两个谐振频率的谐振频率分量的第一和第二谐振信号 ，从接收到的二进制数字信号。 此后，数据鉴别器基于所提取的第一和第二谐振信号之间的相位关系来鉴别与接收的二进制数字信号相对应的二进制数字数据的值，并且输出表示第一值的脉冲信号和另一个脉冲信号 代表第二个值。

公开(公告)号：US06893973B2

公开(公告)日：2005-05-17

申请号：US10405479

申请日：2003-04-03

申请人： Atsushi Nishizawa

发明人： Atsushi Nishizawa

IPC分类号： H01L21/302 ,  H01L21/3065 ,  H01L21/311

CPC分类号： H01L21/31116

摘要： Provided is a method of etching a silicon nitride film, which comprises subjecting the silicon nitride film located on copper to dry etching using a mixture of fluorocarbon gas and an inert gas as the reaction gas, the fluorocarbon gas containing CF4 and CHF3 supplied at flow rates in a ratio of 3:7 to 0:1 or contains CF4 and CH2F2 supplied at flow rates in a ratio of 2.5:1 to 0:1, thereby suppressing the formation of copper fluoride.

摘要翻译： 提供了一种蚀刻氮化硅膜的方法，其包括使用氟碳气体和惰性气体的混合物对位于铜上的氮化硅膜进行干蚀刻作为反应气体，含有CF 4的碳氟化合物气体， 以3：7至0：1的比例以流速提供的SUB和CHF 3 3，或包含CF 4和CH 2， 以2.5:1至0:1的比例以流速提供，从而抑制氟化铜的形成。

公开(公告)号：US06613686B2

公开(公告)日：2003-09-02

申请号：US09739891

申请日：2000-12-20

申请人： Atsushi Nishizawa

发明人： Atsushi Nishizawa

IPC分类号： H01L21302

CPC分类号： H01L21/31116

摘要： Provided is a method of etching a silicon nitride film, which comprises subjecting the silicon nitride film located on copper to dry etching using a mixture of fluorocarbon gas and an inert gas as the reaction gas, the fluorocarbon gas containing CF4 and CHF3 supplied at flow rates in a ratio of 3:7 to 0:1 or contains CF4 and CH2F2 supplied at flow rates in a ratio of 2.5:1 to 0:1, thereby suppressing the formation of copper fluoride.

摘要翻译： 提供了一种蚀刻氮化硅膜的方法，其包括使用氟碳气体和惰性气体的混合物对位于铜上的氮化硅膜进行干蚀刻作为反应气体，含有以流量供应的CF 4和CHF 3的碳氟化合物气体 以3：7至0：1的比例混合，或含有以2.5：1至0：1的比例流过的CF4和CH2F2，从而抑制氟化铜的形成。

公开(公告)号：US5867188A

公开(公告)日：1999-02-02

申请号：US621779

申请日：1996-03-22

申请人： Susumu Murayama ,  Takayuki Okuda ,  Atsushi Nishizawa ,  Satoshi Fujioka ,  Masanori Yoshida

发明人： Susumu Murayama ,  Takayuki Okuda ,  Atsushi Nishizawa ,  Satoshi Fujioka ,  Masanori Yoshida

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J19/06 ,  B41J19/20 ,  B41J25/304 ,  B41J25/34 ,  B41J2/01

CPC分类号： B41J25/34

摘要： The ink jet printer is provided which eliminates play between a carriage supporting an ink jet head and a guide shaft, allows the ink jet head to be releasably attached to the carriage, and provides reliable electrical connection between the ink jet head and the carriage with a reduced number of parts. An embodiment of the ink jet printer of the invention includes a guide shaft extending in a direction orthogonal to a direction in which paper is forwarded. A carriage is slidably mounted on the shaft, moving in reciprocal directions while being guided by the guide shaft. An ink jet head, releasably attached to the carriage, prints ink dots on the paper for forming a printed image by jetting ink out of nozzles. A first electrically connecting portion is arranged on the carriage. A second electrically connecting portion is arranged on the ink jet head so as to come in pressure contact with the first electrically connecting portion. A biasing member provides a pressing force between the first electrically connecting portion and the second electrically connecting portion.

摘要翻译： 提供了一种喷墨打印机，其消除了支撑喷墨头的托架和引导轴之间的间隙，允许喷墨头可释放地附接到托架，并且在喷墨头和托架之间提供可靠的电连接 减少零件数量。 本发明的喷墨打印机的一个实施例包括沿与纸张转向方向正交的方向延伸的引导轴。 托架可滑动地安装在轴上，在由导向轴引导的同时在往复方向上移动。 一个可释放地连接到滑架上的喷墨头在纸上打印墨点，用于通过从喷嘴喷出墨来形成打印图像。 第一电连接部分布置在托架上。 第二电连接部分布置在喷墨头上以与第一电连接部分压力接触。 偏置构件在第一电连接部分和第二电连接部分之间提供按压力。

公开(公告)号：US5997198A

公开(公告)日：1999-12-07

申请号：US956034

申请日：1997-10-22

申请人： Susumu Murayama ,  Atsushi Nishizawa ,  Masaki Shimomura ,  Narihiro Oki ,  Tsuyoshi Tomii ,  Toshikazu Kotaka

发明人： Susumu Murayama ,  Atsushi Nishizawa ,  Masaki Shimomura ,  Narihiro Oki ,  Tsuyoshi Tomii ,  Toshikazu Kotaka

IPC分类号： B65H3/06 ,  B65H3/52 ,  B41J13/00

CPC分类号： B65H3/5223 ,  B65H3/0607 ,  B65H3/0661 ,  B65H2404/1112

摘要： A sheet feeder, or a printer incorporating the sheet feeder, has separation pads for separating a sheet to be fed by sheet feed rollers from the next sheet and a roller spring which produce urging force smaller than that produced by a spring of the separation pad. Idle rollers are brought into contact with the separation pads by means of the roller spring, thereby preventing the lowering of the next sheet. A sheet reset lever is pivoted so as to return the next sheet to a hopper. As a result, the sheet sheets stacked on the hopper in an inclined state is fed one by one through use of a separation pad method without increasing force for driving rollers and a back tension.

摘要翻译： 片材进给器或包含片材进给器的打印机具有用于分离由下一张纸张供纸辊供给的片材的分离垫和产生比由分离垫的弹簧产生的推力小的推压力的辊弹簧。 通过滚子弹簧使空转辊与分离垫接触，从而防止下一张纸张的下降。 枢轴转动片材复位杆，以将下一张片材返回到料斗。 结果，以倾斜状态堆叠在料斗上的片材片通过使用分离垫方法一个接一个地加载，而不增加用于驱动辊的力和背张力。

公开(公告)号：US5946008A

公开(公告)日：1999-08-31

申请号：US768634

申请日：1996-12-18

申请人： Atsushi Nishizawa ,  Masanori Yoshida

发明人： Atsushi Nishizawa ,  Masanori Yoshida

IPC分类号： B41J2/165

CPC分类号： B41J2/16511 ,  B41J2/1652 ,  B41J2/16538

摘要： An apparatus and method for improving the freedom of movement of a carriage of an ink jet printer while a suction pump of the printer is being driven. The ink jet printer includes a carriage which reciprocates in a direction perpendicular to a direction in which printing paper is conveyed by a paper conveyor, a head, housed on the carriage, for printing characters on the printing paper, and a cap which is joinable tightly to the ink-jet face of the head. The printer further includes a suction pump communicating with the cap, a pump driving mechanism, a motor capable of driving the pump driving mechanism, and a switching gear capable of transferring the motive power of the motor selectively to and away from the pump driving mechanism as controlled by the apparatus. The apparatus includes structure which form paths through which an operating projection movably fitted to the carriage. A changeover holding device has driven portions projecting in the paths in which the operating projection moves, and operates to shift the switching gear to and from a position to enable the motor to drive the suction pump. Specifically, the paths includes operating paths in which the changeover holding device is actuated by the operating projection, and non-operating paths where the changeover holding device is not actuated when the operating projection passes through them.

摘要翻译： 一种用于在打印机的抽吸泵被驱动的同时改善喷墨打印机的托架的移动自由度的装置和方法。 该喷墨打印机包括一个托架，该托架在垂直于通过纸张传送器传送打印纸的方向的方向上往往，容纳在托架上的头部，用于在打印纸上打印字符，以及可紧密连接的盖子 到头部的喷墨面。 该打印机还包括与盖连通的抽吸泵，泵驱动机构，能够驱动泵驱动机构的马达，以及能够选择性地将马达的动力选择性地传递到泵驱动机构和/或远离泵驱动机构的切换齿轮， 由设备控制。 该装置包括形成可移动地装配到滑架的操作突起的路径的结构。 切换保持装置具有在操作突起移动的路径中突出的被驱动部分，并且操作以将切换齿轮移动到一个位置以使其能够驱动该抽吸泵。 具体地，路径包括操作路径，其中切换保持装置由操作突起致动，以及当操作突起经过它们时切换保持装置未被致动的非操作路径。

公开(公告)号：US5934664A

公开(公告)日：1999-08-10

申请号：US882258

申请日：1997-06-25

申请人： Susumu Murayama ,  Atsushi Nishizawa ,  Masaki Shimomura ,  Kenjiro Ishihara

发明人： Susumu Murayama ,  Atsushi Nishizawa ,  Masaki Shimomura ,  Kenjiro Ishihara

IPC分类号： B65H3/52 ,  B65H3/06

CPC分类号： B65H3/5223

摘要： A paper feeding apparatus and a printer wherein an idle roller is brought into contact with a separation pad by a roller spring for generating urging force smaller than that of a separation pad for separating a paper sheet to be fed by a paper feeding roller having a D-shape side cross section from a next paper sheet; a restraining pin for restraining movement of the separation pad toward the paper feeding roller when the paper sheet is not held between the separation pad and the paper feeding roller is provided; a pair of conveying rollers are temporarily and inversely rotated after the leading end of the paper sheet has passed through a nipping portion between the pair of the conveying rollers and in a state where the paper sheet is not held between the separation pad and a circular-arc portion of the paper feeding roller so as to arrange the leading end of the paper sheet along the nipping portion so that diagonal conveyance of the paper sheet is smoothly prevented and the load acting on the fed paper sheet is reduced.

摘要翻译： 一种送纸装置和打印机，其中空转辊通过辊弹簧与分离垫接触，用于产生比用于分离由具有D的进纸辊供纸的纸张的分离垫的推力小的推力 从下一张纸张形成侧面横截面; 提供了当纸张没有被保持在分离垫和给纸辊之间时限制分离垫朝着给纸辊移动的限制销; 在纸张的前端通过一对输送辊之间的夹持部分之后，并且在没有将纸张保持在分离垫和圆形纸张之间的状态下，一对输送辊暂时反向旋转， 使得纸张的前端沿着夹持部布置，从而平滑地防止纸张的对角输送，并且作用在进给纸张上的负荷减小。

公开(公告)号：US5530466A

公开(公告)日：1996-06-25

申请号：US308936

申请日：1994-09-20

申请人： Satoshi Fujioka ,  Hiromu Hirabayashi ,  Nobuhisa Takayashi ,  Atsushi Nishizawa ,  Kiyoto Komuro

发明人： Satoshi Fujioka ,  Hiromu Hirabayashi ,  Nobuhisa Takayashi ,  Atsushi Nishizawa ,  Kiyoto Komuro

IPC分类号： B41J11/00 ,  B41J2/01 ,  B41J13/076

CPC分类号： B41J11/002

摘要： In an ink jet printer having a sheet conveying mechanism which changes the speed of conveyance of a recording sheet in accordance with the density of characters or a pattern to be printed to intermittently convey the recording sheet in such a manner that all printed portions are properly dried before the sheet is conveyed to a subsequent position. The recording head of the printer performs a printing operation while pushing the front end portion of the recording sheet against the platen with a sheet retaining lever.

摘要翻译： 在具有片材传送机构的喷墨打印机中，该片材传送机构根据字符的密度或要印刷的图案来改变记录片材的传送速度以间歇地传送记录片材，使得所有印刷部分被适当地干燥 在纸张被传送到随后的位置之前。 打印机的记录头执行打印操作，同时用片材保持杆将记录纸张的前端部压靠在台板上。

公开(公告)号：US08164196B2

公开(公告)日：2012-04-24

申请号：US12941254

申请日：2010-11-08

申请人： Atsushi Nishizawa

发明人： Atsushi Nishizawa

IPC分类号： H01L23/48

CPC分类号： H01L21/76808 ,  H01L21/02063 ,  H01L21/76804 ,  H01L21/76814 ,  H01L21/76831

摘要： A semiconductor device includes a substrate, a low dielectric constant layer formed on the substrate, a first protection insulating layer formed on the low dielectric constant layer, and a trench with an interconnect embedded in formed in the first protection insulating layer and the low dielectric constant layer. The sidewall of the trench has a structure that the surface of the first protection insulating layer protrudes from the surface of the low dielectric constant layer, a second protection insulating layer formed by a chemical vapor deposition technique is embedded at the surface of the low dielectric constant layer in an area below the first protection insulating layer, and the sidewall of the trench is constituted by the second protection insulating layer and the first protection insulating layer.

摘要翻译： 半导体器件包括：衬底，形成在衬底上的低介电常数层，形成在低介电常数层上的第一保护绝缘层和嵌入在第一保护绝缘层中的互连的沟槽和低介电常数 层。 沟槽的侧壁具有第一保护绝缘层的表面从低介电常数层的表面突出的结构，通过化学气相沉积技术形成的第二保护绝缘层嵌入在低介电常数的表面 在第一保护绝缘层下面的区域中，沟槽的侧壁由第二保护绝缘层和第一保护绝缘层构成。