公开(公告)号：US07478558B2

公开(公告)日：2009-01-20

申请号：US11362583

申请日：2006-02-24

申请人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

发明人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

IPC分类号： G01C19/00 ,  B41J2/045 ,  H01L41/04

CPC分类号： H01L41/0815 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1646 ,  B41J2002/14491 ,  B41J2202/03 ,  G01C19/5607 ,  H01L41/1876 ,  H01L41/316 ,  Y10T29/49401

摘要： In a piezoelectric element, an adhesive layer 12 is provided on a substrate 11, a first electrode layer 14 made of a noble metal containing titanium or titanium oxide is provided on the adhesive layer 12, and an orientation control layer 15 that is preferentially oriented along a (100) or (001) plane is provided on the first electrode layer 14. In the vicinity of a surface of the orientation control layer 15 that is closer to the first electrode layer 14, a (100)- or (001)-oriented region extends over titanium or titanium oxide located on one surface of the first electrode layer 14 that is closer to the orientation control layer 15, and the cross-sectional area of the region in the direction perpendicular to the thickness direction gradually increases in the direction away from the first electrode layer 14 toward the opposite side. Further, a piezoelectric layer 16 that is preferentially oriented along a (001) plane is provided on the orientation control layer 15.

摘要翻译： 在压电元件中，在基板11上设置粘合剂层12，在粘合剂层12上设置由含有钛或氧化钛的贵金属构成的第一电极层14，优选的是取向控制层15 在第一电极层14上设置有（100）或（001）面。在取向控制层15的靠近第一电极层14的表面附近，（100） - 或（001） - 位于第一电极层14的靠近取向控制层15的一个表面上的钛或氧化钛上，并且沿与厚度方向垂直的方向的区域的横截面积沿着方向 远离第一电极层14朝向相对侧。 此外，在取向控制层15上设置优选沿（001）面取向的压电体层16。

公开(公告)号：US07083270B2

公开(公告)日：2006-08-01

申请号：US10462358

申请日：2003-06-16

申请人： Hideo Torii ,  Eiji Fujii ,  Atsushi Tomozawa ,  Akiko Murata ,  Ryoichi Takayama ,  Taku Hirasawa

发明人： Hideo Torii ,  Eiji Fujii ,  Atsushi Tomozawa ,  Akiko Murata ,  Ryoichi Takayama ,  Taku Hirasawa

IPC分类号： B41J2/045

CPC分类号： G01P15/0922 ,  B41J2/14233 ,  B41J2/14282 ,  B41J2002/1425 ,  B41J2202/03 ,  G01C19/5607 ,  H01L41/0477 ,  H01L41/0815 ,  H01L41/094 ,  H01L41/0973 ,  H01L41/316 ,  H01L41/319

摘要： In a piezoelectric element 20, a first electrode layer 2 made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal is formed on a silicon substrate 1, and a piezoelectric layer 3 made of a rhombohedral or tetragonal perovskite oxide (e.g., PZT) is formed on the first electrode layer 2 so that the piezoelectric layer 3 is preferentially oriented along the (001) plane.

摘要翻译： 在压电元件20中，在硅基板1上形成由选自钴，镍，铁，锰和铜中的至少一种金属和贵金属构成的第一电极层2， 在第一电极层2上形成由菱方或四方钙钛矿氧化物（例如PZT）制成的层3，使得压电层3优先沿（001）面取向。

公开(公告)号：US20060146097A1

公开(公告)日：2006-07-06

申请号：US11362583

申请日：2006-02-24

申请人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

发明人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

IPC分类号： B41J2/045

CPC分类号： H01L41/0815 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1646 ,  B41J2002/14491 ,  B41J2202/03 ,  G01C19/5607 ,  H01L41/1876 ,  H01L41/316 ,  Y10T29/49401

摘要： In a piezoelectric element, an adhesive layer 12 is provided on a substrate 11, a first electrode layer 14 made of a noble metal containing titanium or titanium oxide is provided on the adhesive layer 12, and an orientation control layer 15 that is preferentially oriented along a (100) or (001) plane is provided on the first electrode layer 14. In the vicinity of a surface of the orientation control layer 15 that is closer to the first electrode layer 14, a (100)- or (001)-oriented region extends over titanium or titanium oxide located on one surface of the first electrode layer 14 that is closer to the orientation control layer 15, and the cross-sectional area of the region in the direction perpendicular to the thickness direction gradually increases in the direction away from the first electrode layer 14 toward the opposite side. Further, a piezoelectric layer 16 that is preferentially oriented along a (001) plane is provided on the orientation control layer 15.

摘要翻译： 在压电元件中，在基板11上设置粘合剂层12，在粘合剂层12上设置由含有钛或氧化钛的贵金属构成的第一电极层14，优选的是取向控制层15 在第一电极层14上设置（100）或（001）面。 在取向控制层15的靠近第一电极层14的表面附近，位于第一电极层14的一个表面上的（100）或（001）取向区域延伸到钛或氧化钛上 更靠近取向控制层15，并且沿与厚度方向正交的方向的区域的横截面积沿远离第一电极层14的方向逐渐增大。 此外，在取向控制层15上设置优选沿（001）面取向的压电体层16。

公开(公告)号：US20050280335A1

公开(公告)日：2005-12-22

申请号：US11204097

申请日：2005-08-15

申请人： Atsushi Tomozawa ,  Eiji Fujii ,  Hideo Torii ,  Akiko Murata ,  Ryoichi Takayama ,  Taku Hirasawa

发明人： Atsushi Tomozawa ,  Eiji Fujii ,  Hideo Torii ,  Akiko Murata ,  Ryoichi Takayama ,  Taku Hirasawa

IPC分类号： B41J2/14 ,  B41J2/16 ,  G01C19/5607 ,  H01L41/047 ,  H01L41/22 ,  H01L41/24

CPC分类号： G01C19/5607 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14491 ,  H01L41/0477 ,  H01L41/0815 ,  H01L41/1876 ,  H01L41/316

摘要： A piezoelectric element includes a first electrode layer 14 provided on a substrate 11 and made of a noble metal to which at least one additive selected from the group consisting of Mg, Ca, Sr, Ba, Al and oxides thereof is added, an orientation control layer 15 provided on the first electrode layer 14 and made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane, and a piezoelectric layer 16 provided on the orientation control layer 15 and made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane.

摘要翻译： 压电元件包括​​：第一电极层14，其设置在基板11上，由添加有Mg，Ca，Sr，Ba，Al及其氧化物的至少一种添加剂的贵金属构成，取向控制 设置在第一电极层14上并由沿（100）或（001）面优先取向的立方或四方晶系钙钛矿氧化物制成的层15，以及设置在取向控制层15上并由菱面体形成的压电层16 或沿（001）面优先取向的四方钙钛矿氧化物。

公开(公告)号：US06886922B2

公开(公告)日：2005-05-03

申请号：US10606977

申请日：2003-06-26

申请人： Taku Hirasawa ,  Akiko Murata ,  Atsushi Tomozawa ,  Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama

发明人： Taku Hirasawa ,  Akiko Murata ,  Atsushi Tomozawa ,  Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama

IPC分类号： B41J2/14 ,  B41J2/16 ,  B41J2/045

CPC分类号： B41J2/1646 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1637 ,  B41J2/1643 ,  B41J2/1645 ,  B41J2002/14266

摘要： In the liquid discharge head for discharging liquid such as ink like the ink jet head, at least a part on a surface of a piezoelectric element on the side of a liquid chamber member (ink chamber member) is composed of a nucleus forming assistance material contained layer containing a material for assisting nucleus forming for growth of plating at the time of forming the liquid chamber member on the surface by means of the electroless plating, and the liquid chamber member is formed on the nucleus forming assistance material contained layer by the electroless plating.

摘要翻译： 在喷墨头等墨液等液体排出头中，液体室部件（墨水室部件）一侧的压电元件表面的至少一部分由形成成核助剂的材料构成， 层，其含有通过无电解电镀在表面上形成液体室部件时辅助成核用于生长电镀的材料，并且液体室部件通过无电解电镀形成在成核助剂材料层上 。

公开(公告)号：US07185540B2

公开(公告)日：2007-03-06

申请号：US11409469

申请日：2006-04-21

申请人： Hideo Torii ,  Eiji Fujii ,  Atsushi Tomozawa ,  Akiko Murata ,  Ryoichi Takayama ,  Taku Hirasawa

发明人： Hideo Torii ,  Eiji Fujii ,  Atsushi Tomozawa ,  Akiko Murata ,  Ryoichi Takayama ,  Taku Hirasawa

IPC分类号： G01P9/04 ,  H01L41/047 ,  H01L41/083

CPC分类号： G01P15/0922 ,  B41J2/14233 ,  B41J2/14282 ,  B41J2002/1425 ,  B41J2202/03 ,  G01C19/5607 ,  H01L41/0477 ,  H01L41/0815 ,  H01L41/094 ,  H01L41/0973 ,  H01L41/316 ,  H01L41/319

摘要： In a piezoelectric element 20, a first electrode layer 2 made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal is formed on a silicon substrate 1, and a piezoelectric layer 3 made of a rhombohedral or tetragonal perovskite oxide (e.g., PZT) is formed on the first electrode layer 2 so that the piezoelectric layer 3 is preferentially oriented along the (001) plane.

摘要翻译： 在压电元件20中，在硅基板1上形成由选自钴，镍，铁，锰和铜中的至少一种金属和贵金属构成的第一电极层2， 在第一电极层2上形成由菱方或四方钙钛矿氧化物（例如PZT）制成的层3，使得压电层3优先沿（001）面取向。

公开(公告)号：US20060187272A1

公开(公告)日：2006-08-24

申请号：US11409469

申请日：2006-04-21

申请人： Hideo Torii ,  Eiji Fujii ,  Atsushi Tomozawa ,  Akiko Murata ,  Ryoichi Takayama ,  Taku Hirasawa

发明人： Hideo Torii ,  Eiji Fujii ,  Atsushi Tomozawa ,  Akiko Murata ,  Ryoichi Takayama ,  Taku Hirasawa

IPC分类号： B41J2/045

CPC分类号： G01P15/0922 ,  B41J2/14233 ,  B41J2/14282 ,  B41J2002/1425 ,  B41J2202/03 ,  G01C19/5607 ,  H01L41/0477 ,  H01L41/0815 ,  H01L41/094 ,  H01L41/0973 ,  H01L41/316 ,  H01L41/319

摘要： In a piezoelectric element 20, a first electrode layer 2 made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal is formed on a silicon substrate 1, and a piezoelectric layer 3 made of a rhombohedral or tetragonal perovskite oxide (e.g., PZT) is formed on the first electrode layer 2 so that the piezoelectric layer 3 is preferentially oriented along the (001) plane.

公开(公告)号：US06969157B2

公开(公告)日：2005-11-29

申请号：US10445349

申请日：2003-05-23

申请人： Atsushi Tomozawa ,  Eiji Fujii ,  Hideo Torii ,  Akiko Murata ,  Ryoichi Takayama ,  Taku Hirasawa

发明人： Atsushi Tomozawa ,  Eiji Fujii ,  Hideo Torii ,  Akiko Murata ,  Ryoichi Takayama ,  Taku Hirasawa

IPC分类号： B41J2/14 ,  B41J2/16 ,  G01C19/5607 ,  H01L41/047 ,  H01L41/22 ,  H01L41/24 ,  B41J2/045

CPC分类号： G01C19/5607 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14491 ,  H01L41/0477 ,  H01L41/0815 ,  H01L41/1876 ,  H01L41/316

摘要： A piezoelectric element includes a first electrode layer 14 provided on a substrate 11 and made of a noble metal to which at least one additive selected from the group consisting of Mg, Ca, Sr, Ba, Al and oxides thereof is added, an orientation control layer 15 provided on the first electrode layer 14 and made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane, and a piezoelectric layer 16 provided on the orientation control layer 15 and made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane.

公开(公告)号：US07033001B2

公开(公告)日：2006-04-25

申请号：US10472589

申请日：2002-12-12

申请人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

发明人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

IPC分类号： B41J2/045 ,  H01L41/04

CPC分类号： H01L41/0815 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1646 ,  B41J2002/14491 ,  B41J2202/03 ,  G01C19/5607 ,  H01L41/1876 ,  H01L41/316 ,  Y10T29/49401

摘要： In a piezoelectric element, an adhesive layer 12 is provided on a substrate 11, a first electrode layer 14 made of a noble metal containing titanium or titanium oxide is provided on the adhesive layer 12, and an orientation control layer 15 that is preferentially oriented along a (100) or (001) plane is provided on the first electrode layer 14. In the vicinity of a surface of the orientation control layer 15 that is closer to the first electrode layer 14, a (100)- or (001)-oriented region extends over titanium or titanium oxide located on one surface of the first electrode layer 14 that is closer to the orientation control layer 15, and the cross-sectional area of the region in the direction perpendicular to the thickness direction gradually increases in the direction away from the first electrode layer 14 toward the opposite side. Further, a piezoelectric layer 16 that is preferentially oriented along a (001) plane is provided on the orientation control layer 15.

摘要翻译： 在压电元件中，在基板11上设置粘合剂层12，在粘合剂层12上设置由含有钛或氧化钛的贵金属构成的第一电极层14，优选的是取向控制层15 在第一电极层14上设置（100）或（001）面。 在取向控制层15的靠近第一电极层14的表面附近，位于第一电极层14的一个表面上的（100）或（001）取向区域延伸到钛或氧化钛上 更靠近取向控制层15，并且沿与厚度方向正交的方向的区域的横截面积沿远离第一电极层14的方向逐渐增大。 此外，在取向控制层15上设置优选沿（001）面取向的压电体层16。

公开(公告)号：US20050184363A1

公开(公告)日：2005-08-25

申请号：US11064999

申请日：2005-02-25

申请人： Hideo Torii ,  Eiji Fujii ,  Taku Hirasawa ,  Atsushi Tomozawa

发明人： Hideo Torii ,  Eiji Fujii ,  Taku Hirasawa ,  Atsushi Tomozawa

IPC分类号： C01B13/02 ,  C25D1/00 ,  H01L21/31 ,  H01L23/58

CPC分类号： C01B13/0251 ,  C25D1/003

摘要： A first electrode thin film is formed on an upper surface of the oxygen ion conductive thin film so as to have a through hole. A resistor is formed on part of the upper surface of the oxygen conductive thin film located in the through hole. Thus, the oxygen ion conductive thin film can be directly heated by the resistor, so that oxygen ions can be speedily transferred with a low power. Therefore, the oxygen ion conductivity of the oxygen ion conductive thin film can be improved.

摘要翻译： 第一电极薄膜形成在氧离子传导性薄膜的上表面上以具有通孔。 在位于通孔中的导电薄膜的上表面的一部分上形成电阻器。 因此，可以通过电阻器直接加热氧离子传导性薄膜，能够以低功率快速地转移氧离子。 因此，能够提高氧离子传导性薄膜的氧离子传导性。