Processing chamber
    5.
    发明授权
    Processing chamber 失效
    加工室

    公开(公告)号:US06627038B2

    公开(公告)日:2003-09-30

    申请号:US09845283

    申请日:2001-05-01

    申请人: Takashi Nakahara

    发明人: Takashi Nakahara

    IPC分类号: C23F100

    CPC分类号: C23C16/4412

    摘要: A processing chamber is provided which comprises an upper chamber having a stage, a lower chamber which is connectable to and separable from the upper chamber, and an exhaust path, wherein the exhaust path has a separator with an exhaust port which is connectable to and separable from a connector of an exhaust duct, and the separator is configured so as to be able to move together with the lower chamber.

    摘要翻译: 提供了一种处理室,其包括具有平台的上室,可连接并可与上室分离的下室,以及排气路径,其中排气路径具有分离器,该分离器具有可连接并可分离的排气口 从排气管道的连接器,分离器构造成能够与下室一起移动。

    Substrate conveying system in semiconductor manufacturing apparatus

    公开(公告)号:US06438458B1

    公开(公告)日:2002-08-20

    申请号:US09493230

    申请日:2000-01-28

    IPC分类号: G05B1904

    摘要: A substrate conveying system wherein, at a substrate transfer position of a conveyance robot, a robot arm is moved upwardly at a normal speed from its lowermost position, and wherein the movement speed is changed to a lower speed at a predetermined position. During upward motion at the lower speed, the substrate is received and, while continuing the upward motion, the movement speed is changed back to the normal speed, at a second predetermined position. The robot arm continues its upward motion to its topmost position, with this normal speed.

    Preparation of compounded rubber composition from bubble-containing
ethylene/.alpha.-olefin rubber
    7.
    发明授权
    Preparation of compounded rubber composition from bubble-containing ethylene/.alpha.-olefin rubber 失效
    由含气泡的乙烯/α-烯烃橡胶制备复合橡胶组合物

    公开(公告)号:US5346987A

    公开(公告)日:1994-09-13

    申请号:US947972

    申请日:1992-09-21

    IPC分类号: C08J9/12 C08C4/00 C08F236/20

    摘要: In accordance with the present invention, there is provided a bubble-containing ethylene/.alpha.-olefin rubber excellent in kneadability, characterized in that the ethylene/.alpha.-olefin rubber prepared by copolymerization of 50-95 mol % of ethylene, 5-50 mol % of .alpha.-olefin having at least 3 carbon atoms and 0-10 mol % of non-conjugated polyene contains 5-1000 parts by volume, based on 100 parts by volume of said rubber, of bubbles and has a water absorption volume as measured in accordance with ASTM D 1506 of less than 20% by volume of the total bubble volume.

    摘要翻译: 根据本发明,提供了一种混炼性优异的含气泡的乙烯/α-烯烃橡胶,其特征在于,乙烯/α-烯烃橡胶通过共聚合50-95mol%的乙烯,5-50mol 具有至少3个碳原子的α-烯烃和0-10摩尔%的非共轭多烯的百分比含有5-1000体积份,基于100体积份的所述橡胶,并且具有测量的吸水量 根据ASTM D 1506的总气泡体积小于20体积%。

    Bubble-containing ethylene/.alpha.-olefin rubber
    8.
    发明授权
    Bubble-containing ethylene/.alpha.-olefin rubber 失效
    含乙烯乙烯/(ALPHA) - 橡胶

    公开(公告)号:US5068256A

    公开(公告)日:1991-11-26

    申请号:US420883

    申请日:1989-10-13

    IPC分类号: C08J9/12

    摘要: In accordance with the present invention, there is provided a bubble-containing ehtylene/.alpha.-olefin rubber excellent in kneadability, characterized in that the ethylene/.alpha.-olefin rubber prepared by copolymerization of 50-95 mol% of ethylene, 5-50 mol% of .alpha.-olefin having at least 3 carbon atoms and 0-10 mol% of non-conjugated polyene contains 5-1000 parts by volume, based on 100 parts by volume of said rubber, of bubbles and has a water absorption volume as measured in accordance with ASTM D 1506 of less than 20% by volume of the total bubble volume.

    Card including rotatory system optical recording medium
    10.
    发明授权
    Card including rotatory system optical recording medium 失效
    卡包括旋转系统光记录介质

    公开(公告)号:US4903256A

    公开(公告)日:1990-02-20

    申请号:US110282

    申请日:1987-10-20

    申请人: Takashi Nakahara

    发明人: Takashi Nakahara

    IPC分类号: G06K19/02 G11B7/0033

    摘要: A card including a rotatory system optical recording medium, comprises a rotatory system optical recording medium, a case body having a holding space which holds said optical recording medium freely detachably and a protective cover which protects the surface of said optical recording medium held on said case body, said case body being provided with an opening means for the protective cover so that said optical recording medium can be detached from said holding space.A recording and/or reproducing device for a card including a rotatory system optical recording medium comprises a means for releasing from a case body a rotatory system optical recording medium held on the case body having a protective cover by utilizing the opening formed by removal of the protective cover, a means for rotating said optical recording medium and a means for returning said optical recording medium to the holding space after recording and/or reproduction.

    摘要翻译: 一种包括旋转系统光学记录介质的卡,包括旋转系统光学记录介质,具有可自由拆卸地保持所述光学记录介质的保持空间的壳体,以及保护保持在所述壳体上的所述光学记录介质的表面的保护盖 所述壳体设置有用于所述保护盖的开启装置,使得所述光学记录介质可以从所述保持空间分离。 一种用于包括旋转系统光学记录介质的卡的记录和/或再现装置,包括用于通过利用通过移除所述旋转系统光学记录介质形成的开口,从壳体释放保持在具有保护盖的壳体上的旋转系统光学记录介质的装置 保护盖,用于旋转所述光记录介质的装置和用于在记录和/或再现之后将所述光记录介质返回到保持空间的装置。