Strain inducing semiconductor regions
    6.
    发明授权
    Strain inducing semiconductor regions 有权
    应变诱导半导体区域

    公开(公告)号:US08530884B2

    公开(公告)日:2013-09-10

    申请号:US13160886

    申请日:2011-06-15

    IPC分类号: H01L29/06 H01L31/072

    摘要: A method to form a strain-inducing semiconductor region is described. In one embodiment, formation of a strain-inducing semiconductor region laterally adjacent to a crystalline substrate results in a uniaxial strain imparted to the crystalline substrate, providing a strained crystalline substrate. In another embodiment, a semiconductor region with a crystalline lattice of one or more species of charge-neutral lattice-forming atoms imparts a strain to a crystalline substrate, wherein the lattice constant of the semiconductor region is different from that of the crystalline substrate, and wherein all species of charge-neutral lattice-forming atoms of the semiconductor region are contained in the crystalline substrate.

    摘要翻译: 描述形成应变诱导半导体区域的方法。 在一个实施方案中,形成横向邻近晶体衬底的应变诱导半导体区域导致赋予晶体衬底的单轴应变,从而提供应变的晶体衬底。 在另一个实施方案中,具有一种或多种电荷 - 中性晶格形成原子的晶格的半导体区域向晶体衬底赋予应变,其中半导体区域的晶格常数与晶体衬底的晶格常数不同,以及 其中所述半导体区域的电荷 - 中性晶格形成原子的所有种类都包含在所述晶体衬底中。

    STRAIN-INDUCING SEMICONDUCTOR REGIONS
    9.
    发明申请
    STRAIN-INDUCING SEMICONDUCTOR REGIONS 有权
    应变诱导半导体区域

    公开(公告)号:US20140103396A1

    公开(公告)日:2014-04-17

    申请号:US14133457

    申请日:2013-12-18

    IPC分类号: H01L29/10 H01L29/78

    摘要: A method to form a strain-inducing semiconductor region is described. In one embodiment, formation of a strain-inducing semiconductor region laterally adjacent to a crystalline substrate results in a uniaxial strain imparted to the crystalline substrate, providing a strained crystalline substrate. In another embodiment, a semiconductor region with a crystalline lattice of one or more species of charge-neutral lattice-forming atoms imparts a strain to a crystalline substrate, wherein the lattice constant of the semiconductor region is different from that of the crystalline substrate, and wherein all species of charge-neutral lattice-forming atoms of the semiconductor region are contained in the crystalline substrate.

    摘要翻译: 描述形成应变诱导半导体区域的方法。 在一个实施方案中,形成横向邻近晶体衬底的应变诱导半导体区域导致赋予晶体衬底的单轴应变,从而提供应变的晶体衬底。 在另一个实施方案中,具有一种或多种电荷 - 中性晶格形成原子的晶格的半导体区域向晶体衬底赋予应变,其中半导体区域的晶格常数与晶体衬底的晶格常数不同,以及 其中所述半导体区域的电荷 - 中性晶格形成原子的所有种类都包含在所述晶体衬底中。