公开(公告)号：US20120214273A1

公开(公告)日：2012-08-23

申请号：US13029840

申请日：2011-02-17

申请人： Benjamin Riordon ,  Nicholas Bateman ,  Atul Gupta

发明人： Benjamin Riordon ,  Nicholas Bateman ,  Atul Gupta

IPC分类号： H01L21/265

CPC分类号： H01L21/26586 ,  H01L21/266 ,  H01L31/068 ,  H01L31/0682 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： An improved method of tilting a mask to perform a pattern implant of a substrate is disclosed. The mask has a plurality of apertures, and is placed between the ion source and the substrate. The mask and substrate are tilted at a first angle relative to the incoming ion beam. After the substrate is exposed to the ion beam, the mask and substrate are tilted at a second angle relative to the ion beam and a subsequent implant step is performed. Through the selection of the aperture size and shape, the cross-section of the mask, the distance between the mask and the substrate and the number of implant steps, a variety of implant patterns may be created. In some embodiments, the implant pattern includes heavily doped horizontal stripes with lighter doped regions between the stripes. In some embodiments, the implant pattern includes a grid of heavily doped regions.

摘要翻译： 公开了一种倾斜掩模以执行衬底的图案植入的改进方法。 掩模具有多个孔，并且被放置在离子源和基底之间。 掩模和基底相对于入射离子束以第一角度倾斜。 在衬底暴露于离子束之后，掩模和衬底相对于离子束以第二角度倾斜，并且执行随后的注入步骤。 通过选择孔径尺寸和形状，掩模的横截面，掩模和衬底之间的距离以及植入步骤的数量，可以产生各种种植体图案。 在一些实施例中，注入图案包括在条纹之间具有较轻掺杂区域的重掺杂水平条纹。 在一些实施例中，植入模式包括重掺杂区域格栅。

公开(公告)号：US20120083102A1

公开(公告)日：2012-04-05

申请号：US12895927

申请日：2010-10-01

申请人： Nicholas Bateman ,  Kevin Daniels ,  Atul Gupta ,  Russell Low ,  Benjamin Riordon ,  Robert Mitchell ,  Steven Anella

发明人： Nicholas Bateman ,  Kevin Daniels ,  Atul Gupta ,  Russell Low ,  Benjamin Riordon ,  Robert Mitchell ,  Steven Anella

IPC分类号： H01L21/71 ,  H01J37/20

CPC分类号： H01L21/677 ,  H01J37/3171 ,  H01J2237/31711 ,  H01L21/68735 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： An improved, lower cost method of processing substrates, such as to create solar cells is disclosed. In addition, a modified substrate carrier is disclosed. The carriers typically used to carry the substrates are modified so as to serve as shadow masks for a patterned implant. In some embodiments, various patterns can be created using the carriers such that different process steps can be performed on the substrate by changing the carrier or the position with the carrier. In addition, since the alignment of the substrate to the carrier is critical, the carrier may contain alignment features to insure that the substrate is positioned properly on the carrier. In some embodiments, gravity is used to hold the substrate on the carrier, and therefore, the ions are directed so that the ion beam travels upward toward the bottom side of the carrier.

摘要翻译： 公开了一种改进的，低成本的处理衬底的方法，例如制造太阳能电池。 此外，公开了改进的基板载体。 通常用于承载衬底的载体被修改为用作图案化植入物的荫罩。 在一些实施例中，可以使用载体创建各种图案，使得可以通过用载体改变载体或位置来在基板上执行不同的工艺步骤。 此外，由于基板与载体的对准是关键的，所以载体可以包含对准特征以确保基板正确地定位在载体上。 在一些实施例中，使用重力来将衬底保持在载体上，因此，引导离子使得离子束朝向载体的底侧向上移动。

公开(公告)号：US20120244692A1

公开(公告)日：2012-09-27

申请号：US13489031

申请日：2012-06-05

申请人： Nicholas Bateman ,  Kevin Daniels ,  Atul Gupta ,  Russell Low ,  Benjamin Riordon ,  Robert Mitchell ,  Steven Anella

发明人： Nicholas Bateman ,  Kevin Daniels ,  Atul Gupta ,  Russell Low ,  Benjamin Riordon ,  Robert Mitchell ,  Steven Anella

IPC分类号： H01L21/266

CPC分类号： H01L21/677 ,  H01J37/3171 ,  H01J2237/31711 ,  H01L21/68735 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： An improved, lower cost method of processing substrates, such as to create solar cells is disclosed. In addition, a modified substrate carrier is disclosed. The carriers typically used to carry the substrates are modified so as to serve as shadow masks for a patterned implant. In some embodiments, various patterns can be created using the carriers such that different process steps can be performed on the substrate by changing the carrier or the position with the carrier. In addition, since the alignment of the substrate to the carrier is critical, the carrier may contain alignment features to insure that the substrate is positioned properly on the carrier. In some embodiments, gravity is used to hold the substrate on the carrier, and therefore, the ions are directed so that the ion beam travels upward toward the bottom side of the carrier.

摘要翻译： 公开了一种改进的，低成本的处理衬底的方法，例如制造太阳能电池。 此外，公开了改进的基板载体。 通常用于承载衬底的载体被修改为用作图案化植入物的荫罩。 在一些实施例中，可以使用载体创建各种图案，使得可以通过用载体改变载体或位置来在基板上执行不同的工艺步骤。 此外，由于基板与载体的对准是关键的，所以载体可以包含对准特征以确保基板正确地定位在载体上。 在一些实施例中，使用重力来将衬底保持在载体上，因此，引导离子使得离子束朝向载体的底侧向上移动。

公开(公告)号：US08765583B2

公开(公告)日：2014-07-01

申请号：US13029840

申请日：2011-02-17

申请人： Benjamin Riordon ,  Nicholas Bateman ,  Atul Gupta

发明人： Benjamin Riordon ,  Nicholas Bateman ,  Atul Gupta

IPC分类号： H01L21/331 ,  H01L21/425 ,  H01L21/265

CPC分类号： H01L21/26586 ,  H01L21/266 ,  H01L31/068 ,  H01L31/0682 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： An improved method of tilting a mask to perform a pattern implant of a substrate is disclosed. The mask has a plurality of apertures, and is placed between the ion source and the substrate. The mask and substrate are tilted at a first angle relative to the incoming ion beam. After the substrate is exposed to the ion beam, the mask and substrate are tilted at a second angle relative to the ion beam and a subsequent implant step is performed. Through the selection of the aperture size and shape, the cross-section of the mask, the distance between the mask and the substrate and the number of implant steps, a variety of implant patterns may be created. In some embodiments, the implant pattern includes heavily doped horizontal stripes with lighter doped regions between the stripes. In some embodiments, the implant pattern includes a grid of heavily doped regions.

摘要翻译： 公开了一种倾斜掩模以执行衬底的图案植入的改进方法。 掩模具有多个孔，并且被放置在离子源和基底之间。 掩模和基底相对于入射离子束以第一角度倾斜。 在衬底暴露于离子束之后，掩模和衬底相对于离子束以第二角度倾斜，并且执行随后的注入步骤。 通过选择孔径尺寸和形状，掩模的横截面，掩模和衬底之间的距离以及植入步骤的数量，可以产生各种种植体图案。 在一些实施例中，注入图案包括在条纹之间具有较轻掺杂区域的重掺杂水平条纹。 在一些实施例中，植入模式包括重掺杂区域格栅。

公开(公告)号：US08216923B2

公开(公告)日：2012-07-10

申请号：US12895927

申请日：2010-10-01

申请人： Nicholas Bateman ,  Kevin Daniels ,  Atul Gupta ,  Russell Low ,  Benjamin Riordon ,  Robert Mitchell ,  Steven Anella

发明人： Nicholas Bateman ,  Kevin Daniels ,  Atul Gupta ,  Russell Low ,  Benjamin Riordon ,  Robert Mitchell ,  Steven Anella

IPC分类号： H01L21/425

CPC分类号： H01L21/677 ,  H01J37/3171 ,  H01J2237/31711 ,  H01L21/68735 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： An improved, lower cost method of processing substrates, such as to create solar cells is disclosed. In addition, a modified substrate carrier is disclosed. The carriers typically used to carry the substrates are modified so as to serve as shadow masks for a patterned implant. In some embodiments, various patterns can be created using the carriers such that different process steps can be performed on the substrate by changing the carrier or the position with the carrier. In addition, since the alignment of the substrate to the carrier is critical, the carrier may contain alignment features to insure that the substrate is positioned properly on the carrier. In some embodiments, gravity is used to hold the substrate on the carrier, and therefore, the ions are directed so that the ion beam travels upward toward the bottom side of the carrier.

摘要翻译： 公开了一种改进的，低成本的处理衬底的方法，例如制造太阳能电池。 此外，公开了改进的基板载体。 通常用于承载衬底的载体被修改为用作图案化植入物的荫罩。 在一些实施例中，可以使用载体创建各种图案，使得可以通过用载体改变载体或位置来在基板上执行不同的工艺步骤。 此外，由于基板与载体的对准是关键的，所以载体可以包含对准特征以确保基板正确地定位在载体上。 在一些实施例中，使用重力来将衬底保持在载体上，因此，引导离子使得离子束朝向载体的底侧向上移动。

公开(公告)号：US20120064661A1

公开(公告)日：2012-03-15

申请号：US13300075

申请日：2011-11-18

申请人： Benjamin Riordon ,  Russel Low ,  Atul Gupta ,  William Weaver

发明人： Benjamin Riordon ,  Russel Low ,  Atul Gupta ,  William Weaver

IPC分类号： H01L31/18

CPC分类号： H01L31/022425 ,  H01L21/266 ,  H01L31/022433 ,  H01L31/068 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： An improved, lower cost method of processing substrates, such as to create solar cells, is disclosed. The doped regions are created on the substrate, using a mask or without the use of lithography or masks. After the implantation is complete, visual recognition is used to determine the exact region that was implanted. This information can then be used by subsequent process steps to crate a suitable metallization layer and provide alignment information. These techniques can also be used in other ion implanter applications. In another aspect, a dot pattern selective emitter is created, and imaging is used to determine the appropriate metallization layer.

摘要翻译： 公开了一种改进的，低成本的处理衬底的方法，例如制造太阳能电池。 使用掩模或不使用光刻或掩模在衬底上产生掺杂区域。 植入完成后，使用视觉识别来确定植入的确切区域。 然后可以通过随后的工艺步骤来使用该信息来对合适的金属化层进行包装并提供对准信息。 这些技术也可用于其他离子注入机应用。 在另一方面，创建点图案选择性发射器，并且使用成像来确定合适的金属化层。

公开(公告)号：US08084293B2

公开(公告)日：2011-12-27

申请号：US12754712

申请日：2010-04-06

申请人： Benjamin Riordon ,  Russell Low ,  Atul Gupta ,  William Weaver

发明人： Benjamin Riordon ,  Russell Low ,  Atul Gupta ,  William Weaver

IPC分类号： H01L21/00

CPC分类号： H01L31/022425 ,  H01L21/266 ,  H01L31/022433 ,  H01L31/068 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： An improved, lower cost method of processing substrates, such as to create solar cells, is disclosed. The doped regions are created on the substrate, using a mask or without the use of lithography or masks. After the implantation is complete, visual recognition is used to determine the exact region that was implanted. This information can then be used by subsequent process steps to crate a suitable metallization layer and provide alignment information. These techniques can also be used in other ion implanter applications. In another aspect, a dot pattern selective emitter is created and imaging is used to determine the appropriate metallization layer.

摘要翻译： 公开了一种改进的，低成本的处理衬底的方法，例如制造太阳能电池。 使用掩模或不使用光刻或掩模在衬底上产生掺杂区域。 植入完成后，使用视觉识别来确定植入的确切区域。 然后可以通过随后的工艺步骤来使用该信息来对合适的金属化层进行包装并提供对准信息。 这些技术也可用于其他离子注入机应用。 在另一方面，产生点图案选择性发射体，并且使用成像来确定合适的金属化层。

公开(公告)号：US20110244625A1

公开(公告)日：2011-10-06

申请号：US12754712

申请日：2010-04-06

申请人： Benjamin Riordon ,  Russell Low ,  Atul Gupta ,  William Weaver

发明人： Benjamin Riordon ,  Russell Low ,  Atul Gupta ,  William Weaver

IPC分类号： H01L31/18

CPC分类号： H01L31/022425 ,  H01L21/266 ,  H01L31/022433 ,  H01L31/068 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： An improved, lower cost method of processing substrates, such as to create solar cells, is disclosed. The doped regions are created on the substrate, using a mask or without the use of lithography or masks. After the implantation is complete, visual recognition is used to determine the exact region that was implanted. This information can then be used by subsequent process steps to crate a suitable metallization layer and provide alignment information. These techniques can also be used in other ion implanter applications. In another aspect, a dot pattern selective emitter is created and imaging is used to determine the appropriate metallization layer.

摘要翻译： 公开了一种改进的，低成本的处理衬底的方法，例如制造太阳能电池。 使用掩模或不使用光刻或掩模在衬底上产生掺杂区域。 植入完成后，使用视觉识别来确定植入的确切区域。 然后可以通过随后的工艺步骤来使用该信息来对合适的金属化层进行包装并提供对准信息。 这些技术也可用于其他离子注入机应用。 在另一方面，产生点图案选择性发射体，并且使用成像来确定合适的金属化层。

公开(公告)号：US09190548B2

公开(公告)日：2015-11-17

申请号：US13270290

申请日：2011-10-11

申请人： John Graff ,  Nicholas Bateman ,  Joseph Olson ,  Benjamin Riordon

发明人： John Graff ,  Nicholas Bateman ,  Joseph Olson ,  Benjamin Riordon

IPC分类号： H01L31/0224 ,  H01L31/068 ,  H01L21/266 ,  H01L31/18

CPC分类号： H01L31/0682 ,  H01J2237/31711 ,  H01L21/266 ,  H01L31/022441 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： An improved method of fabricating an interdigitated back contact (IBC) solar cell is disclosed. A first mask is used to perform a patterned ion implantation of n-type dopant to create the back surface field. A second mask is then used to create the p-type emitter on the same surface. The second mask may be aligned to the n-type implant, and may be used in a plurality of orientations to create the desired p-type emitter. In some embodiments, a p-type blanket implant is performed as well. In some embodiments, a doping gradient is created.

摘要翻译： 公开了一种制造交错背接触（IBC）太阳能电池的改进方法。 使用第一掩模来执行n型掺杂剂的图案化离子注入以产生背表面场。 然后使用第二个掩模在相同的表面上创建p型发射器。 第二掩模可以对准n型植入物，并且可以以多个取向使用以产生所需的p型发射体。 在一些实施例中，还执行p型覆盖植入。 在一些实施例中，产生掺杂梯度。

公开(公告)号：US20130087189A1

公开(公告)日：2013-04-11

申请号：US13270290

申请日：2011-10-11

申请人： John Graff ,  Nicholas Bateman ,  Joseph Olson ,  Benjamin Riordon

发明人： John Graff ,  Nicholas Bateman ,  Joseph Olson ,  Benjamin Riordon

IPC分类号： H01L31/0224 ,  H01L31/18

CPC分类号： H01L31/0682 ,  H01J2237/31711 ,  H01L21/266 ,  H01L31/022441 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： An improved method of fabricating an interdigitated back contact (IBC) solar cell is disclosed. A first mask is used to perform a patterned ion implantation of n-type dopant to create the back surface field. A second mask is then used to create the p-type emitter on the same surface. The second mask may be aligned to the n-type implant, and may be used in a plurality of orientations to create the desired p-type emitter. In some embodiments, a p-type blanket implant is performed as well. In some embodiments, a doping gradient is created.

摘要翻译： 公开了一种制造交错背接触（IBC）太阳能电池的改进方法。 使用第一掩模来执行n型掺杂剂的图案化离子注入以产生背表面场。 然后使用第二个掩模在相同的表面上创建p型发射器。 第二掩模可以对准n型植入物，并且可以以多个取向使用以产生所需的p型发射体。 在一些实施例中，还执行p型覆盖植入。 在一些实施例中，产生掺杂梯度。