Package structures
    3.
    发明授权
    Package structures 有权
    包装结构

    公开(公告)号:US08237253B2

    公开(公告)日:2012-08-07

    申请号:US12946930

    申请日:2010-11-16

    IPC分类号: H01L25/07

    摘要: A package structure includes a substrate, a first die and at least one second die. The substrate includes a first pair of parallel edges and a second pair of parallel edges. The first die is mounted over the substrate. The first die includes a third pair of parallel edges and a fourth pair of parallel edges, wherein the third pair of parallel edges and the fourth pair of parallel edges are not parallel to the first pair of parallel edges and the second pair of parallel edges, respectively. The at least one second die is mounted over the first die.

    摘要翻译: 封装结构包括衬底,第一管芯和至少一个第二管芯。 衬底包括第一对平行边缘和第二对平行边缘。 第一个模具安装在基板上。 第一管芯包括第三对平行边缘和第四对平行边缘,其中第三对平行边缘和第四对平行边缘不平行于第一对平行边缘和第二对平行边缘, 分别。 至少一个第二管芯安装在第一管芯上。

    Package structures
    4.
    发明授权
    Package structures 有权
    包装结构

    公开(公告)号:US07859092B2

    公开(公告)日:2010-12-28

    申请号:US11619095

    申请日:2007-01-02

    IPC分类号: H01L23/02

    摘要: A package structure includes a substrate, a first die and at least one second die. The substrate includes a first pair of parallel edges and a second pair of parallel edges. The first die is mounted over the substrate. The first die includes a third pair of parallel edges and a fourth pair of parallel edges, wherein the third pair of parallel edges and the fourth pair of parallel edges are not parallel to the first pair of parallel edges and the second pair of parallel edges, respectively. The at least one second die is mounted over the first die.

    摘要翻译: 封装结构包括衬底,第一管芯和至少一个第二管芯。 衬底包括第一对平行边缘和第二对平行边缘。 第一个模具安装在基板上。 第一管芯包括第三对平行边缘和第四对平行边缘,其中第三对平行边缘和第四对平行边缘不平行于第一对平行边缘和第二对平行边缘, 分别。 至少一个第二管芯安装在第一管芯上。

    AIR GAP STRUCTURE DESIGN FOR ADVANCED INTEGRATED CIRCUIT TECHNOLOGY
    6.
    发明申请
    AIR GAP STRUCTURE DESIGN FOR ADVANCED INTEGRATED CIRCUIT TECHNOLOGY 审中-公开
    高级集成电路技术的空气隙结构设计

    公开(公告)号:US20090081862A1

    公开(公告)日:2009-03-26

    申请号:US11860122

    申请日:2007-09-24

    IPC分类号: H01L21/4763

    CPC分类号: H01L21/7682 H01L21/76831

    摘要: A method for forming air gaps between interconnect structures in semiconductor devices provides a sacrificial layer formed over a dielectric and within openings formed therein. The sacrificial layer is a blanket layer that is converted to a material that is consumable in an etchant composition that the dielectric material and a subsequently formed interconnect material are resistant to. After the interconnect material is deposited a planarized surface including portions of the dielectric material, vertical sections of the converted material and portions of the interconnect material is produced. The etchant composition then removes the converted material thereby forming voids. A capping layer is formed over the structure resulting in air gaps. A sidewall protection layer may be optionally formed between the interconnect structure and the sacrificial material. In some embodiments an ARC layer may be formed over the dielectric and form part of the planar surface.

    摘要翻译: 用于在半导体器件中的互连结构之间形成气隙的方法提供了形成在电介质上并在其内形成的开口内的牺牲层。 牺牲层是覆盖层,其被转化为在蚀刻剂组合物中消耗的材料,电介质材料和随后形成的互连材料是耐受的。 在互连材料沉积之后,包括介电材料的部分的平坦化表面,产生转换材料的垂直部分和互连材料的部分。 然后蚀刻剂组合物去除转化的材料,从而形成空隙。 在结构上形成覆盖层,导致气隙。 侧壁保护层可以可选地形成在互连结构和牺牲材料之间。 在一些实施例中,可以在电介质上形成ARC层并形成平面表面的一部分。

    Package structures
    7.
    发明授权
    Package structures 有权
    包装结构

    公开(公告)号:US08618673B2

    公开(公告)日:2013-12-31

    申请号:US13539775

    申请日:2012-07-02

    IPC分类号: H01L23/52 H01L23/48 H01L29/40

    摘要: A package structure includes a substrate, a first die and at least one second die. The substrate includes a first pair of parallel edges and a second pair of parallel edges. The first die is mounted over the substrate. The first die includes a third pair of parallel edges and a fourth pair of parallel edges, wherein the third pair of parallel edges and the fourth pair of parallel edges are not parallel to the first pair of parallel edges and the second pair of parallel edges, respectively. The at least one second die is mounted over the first die.

    摘要翻译: 封装结构包括衬底,第一管芯和至少一个第二管芯。 衬底包括第一对平行边缘和第二对平行边缘。 第一个模具安装在基板上。 第一管芯包括第三对平行边缘和第四对平行边缘,其中第三对平行边缘和第四对平行边缘不平行于第一对平行边缘和第二对平行边缘, 分别。 至少一个第二管芯安装在第一管芯上。

    PACKAGE STRUCTURES
    8.
    发明申请
    PACKAGE STRUCTURES 有权
    包装结构

    公开(公告)号:US20080157315A1

    公开(公告)日:2008-07-03

    申请号:US11619095

    申请日:2007-01-02

    IPC分类号: H01L23/02

    摘要: A package structure includes a substrate, a first die and at least one second die. The substrate includes a first pair of parallel edges and a second pair of parallel edges. The first die is mounted over the substrate. The first die includes a third pair of parallel edges and a fourth pair of parallel edges, wherein the third pair of parallel edges and the fourth pair of parallel edges are not parallel to the first pair of parallel edges and the second pair of parallel edges, respectively. The at least one second die is mounted over the first die.

    摘要翻译: 封装结构包括衬底,第一管芯和至少一个第二管芯。 衬底包括第一对平行边缘和第二对平行边缘。 第一个模具安装在基板上。 第一管芯包括第三对平行边缘和第四对平行边缘,其中第三对平行边缘和第四对平行边缘不平行于第一对平行边缘和第二对平行边缘, 分别。 至少一个第二管芯安装在第一管芯上。

    PACKAGE STRUCTURES
    10.
    发明申请
    PACKAGE STRUCTURES 有权
    包装结构

    公开(公告)号:US20110062597A1

    公开(公告)日:2011-03-17

    申请号:US12946930

    申请日:2010-11-16

    IPC分类号: H01L25/07

    摘要: A package structure includes a substrate, a first die and at least one second die. The substrate includes a first pair of parallel edges and a second pair of parallel edges. The first die is mounted over the substrate. The first die includes a third pair of parallel edges and a fourth pair of parallel edges, wherein the third pair of parallel edges and the fourth pair of parallel edges are not parallel to the first pair of parallel edges and the second pair of parallel edges, respectively. The at least one second die is mounted over the first die.

    摘要翻译: 封装结构包括衬底,第一管芯和至少一个第二管芯。 衬底包括第一对平行边缘和第二对平行边缘。 第一个模具安装在基板上。 第一管芯包括第三对平行边缘和第四对平行边缘,其中第三对平行边缘和第四对平行边缘不平行于第一对平行边缘和第二对平行边缘, 分别。 至少一个第二管芯安装在第一管芯上。