公开(公告)号：US07352435B2

公开(公告)日：2008-04-01

申请号：US10964816

申请日：2004-10-15

申请人： Bob Streefkerk ,  Johannes Jacobus Matheus Baselmans ,  Adrianus Franciscus Petrus Engelen ,  Jozef Maria Finders ,  Paul Graeupner ,  Johannes Catharinus Hubertus Mulkens ,  Jan Bernard Plechelmus Van Schoot

发明人： Bob Streefkerk ,  Johannes Jacobus Matheus Baselmans ,  Adrianus Franciscus Petrus Engelen ,  Jozef Maria Finders ,  Paul Graeupner ,  Johannes Catharinus Hubertus Mulkens ,  Jan Bernard Plechelmus Van Schoot

IPC分类号： G03B27/42 ,  G03B27/52

CPC分类号： G03F7/70341 ,  G03F7/70333

摘要： In an immersion lithography apparatus or device manufacturing method, the position of focus of the projected image is changed during imaging to increase focus latitude. In an embodiment, the focus may be varied using the liquid supply system of the immersion lithographic apparatus.

摘要翻译： 在浸没光刻设备或设备制造方法中，在成像期间投影图像的焦点位置改变以增加焦点宽度。 在一个实施例中，焦点可以使用浸没式光刻设备的液体供应系统来改变。

公开(公告)号：US08711330B2

公开(公告)日：2014-04-29

申请号：US13102620

申请日：2011-05-06

申请人： Bob Streefkerk ,  Johannes Jacobus Matheus Baselmans ,  Adrianus Franciscus Petrus Engelen ,  Jozef Maria Finders ,  Paul Graeupner ,  Johannes Catharinus Hubertus Mulkens ,  Jan Bernard Plechelmus Van Schoot

发明人： Bob Streefkerk ,  Johannes Jacobus Matheus Baselmans ,  Adrianus Franciscus Petrus Engelen ,  Jozef Maria Finders ,  Paul Graeupner ,  Johannes Catharinus Hubertus Mulkens ,  Jan Bernard Plechelmus Van Schoot

IPC分类号： G03B27/42 ,  G03B27/52

CPC分类号： G03F7/70341 ,  G03F7/70333

摘要： In an immersion lithography apparatus or device manufacturing method, the position of focus of the projected image is changed during imaging to increase focus latitude. In an embodiment, the focus may be varied using the liquid supply system of the immersion lithographic apparatus.

摘要翻译： 在浸没光刻设备或设备制造方法中，在成像期间投影图像的焦点位置改变以增加焦点宽度。 在一个实施例中，焦点可以使用浸没式光刻设备的液体供应系统来改变。

公开(公告)号：US07961293B2

公开(公告)日：2011-06-14

申请号：US12076307

申请日：2008-03-17

申请人： Bob Streefkerk ,  Johannes Jacobus Matheus Baselmans ,  Adrianus Franciscus Petrus Engelen ,  Jozef Maria Finders ,  Paul Graeupner ,  Johannes Catharinus Hebertus Mulkens ,  Jan Bernard Plechelmus Van Schoot

发明人： Bob Streefkerk ,  Johannes Jacobus Matheus Baselmans ,  Adrianus Franciscus Petrus Engelen ,  Jozef Maria Finders ,  Paul Graeupner ,  Johannes Catharinus Hebertus Mulkens ,  Jan Bernard Plechelmus Van Schoot

IPC分类号： G03B27/42 ,  G03B27/52

CPC分类号： G03F7/70341 ,  G03F7/70333

摘要： In an immersion lithography apparatus or device manufacturing method, the position of focus of the projected image is changed during imaging to increase focus latitude. In an embodiment, the focus may be varied using the liquid supply system of the immersion lithographic apparatus.

摘要翻译： 在浸没光刻设备或器件制造方法中，在成像期间投影图像的焦点位置改变以增加焦点宽度。 在一个实施例中，焦点可以使用浸没式光刻设备的液体供应系统来改变。

公开(公告)号：US06809797B2

公开(公告)日：2004-10-26

申请号：US10109038

申请日：2002-03-29

申请人： Johannes Jacobus Matheus Baselmans ,  Adrianus Franciscus Petrus Engelen ,  Hugo Augustinus Joseph Cramer ,  Jozef Maria Finders ,  Carsten Kohler

发明人： Johannes Jacobus Matheus Baselmans ,  Adrianus Franciscus Petrus Engelen ,  Hugo Augustinus Joseph Cramer ,  Jozef Maria Finders ,  Carsten Kohler

IPC分类号： G02B2768

CPC分类号： G03F7/705 ,  G03F7/706

摘要： A device manufacturing method is disclosed in which the aberration of the projection system of a lithographic projection apparatus is obtained in terms of the Zernike expansion. The field distribution of displacement error and focal plane distortion of the projected image are calculated on the basis of the Zernike aberration and sensitivity coefficients which quantify the relationship between Zernike aberration components and the error in the image. A calculation is then performed to determine the compensation to apply to the apparatus in order to minimize the error in the image. The compensation is then applied to the apparatus. The compensation may comprise increasing one component of aberration of the apparatus in order to decrease the effect of another aberration, such that, on balance, the image quality as a whole is improved.

摘要翻译： 公开了一种装置制造方法，其中光泽投影装置的投影系统的像差取得Zernike扩展。 基于Zernike像差和灵敏度系数计算投影图像的位移误差和焦平面失真的场分布，Zernike像差和灵敏度系数量化了Zernike像差分量与图像中的误差之间的关系。 然后执行计算以确定应用于装置的补偿，以使图像中的误差最小化。 然后将补偿应用于该装置。 补偿可以包括增加装置的像差的一个分量，以便减小另一个像差的影响，从而平衡地改善了整体上的图像质量。

公开(公告)号：US09250536B2

公开(公告)日：2016-02-02

申请号：US12076732

申请日：2008-03-21

申请人： Heine Melle Mulder ,  Johannes Jacobus Matheus Baselmans ,  Adrianus Franciscus Petrus Engelen ,  Markus Franciscus Antonius Eurlings ,  Hendrikus Robertus Marie Greevenbroek ,  Patricius Aloysius Jacobus Tinnemans ,  Paul Van Der Veen ,  Wilfred Edward Endendijk

发明人： Heine Melle Mulder ,  Johannes Jacobus Matheus Baselmans ,  Adrianus Franciscus Petrus Engelen ,  Markus Franciscus Antonius Eurlings ,  Hendrikus Robertus Marie Greevenbroek ,  Patricius Aloysius Jacobus Tinnemans ,  Paul Van Der Veen ,  Wilfred Edward Endendijk

IPC分类号： G03B27/42 ,  G03F7/20

CPC分类号： G03F7/70058 ,  G03F7/70116 ,  G03F7/702 ,  G03F7/70216

摘要： A device manufacturing method includes conditioning a beam of radiation using an illumination system. The conditioning includes controlling an array of individually controllable elements and associated optical components of the illumination system to convert the radiation beam into a desired illumination mode, the controlling including allocating different individually controllable elements to different parts of the illumination mode in accordance with an allocation scheme, the allocation scheme selected to provide a desired modification of one or more properties of the illumination mode, the radiation beam or both. The method also includes patterning the radiation beam having the desired illumination mode with a pattern in its cross-section to form a patterned beam of radiation, and projecting the patterned radiation beam onto a target portion of a substrate.

公开(公告)号：US08937706B2

公开(公告)日：2015-01-20

申请号：US11729960

申请日：2007-03-30

申请人： Heine Melle Mulder ,  Johannes Jacobus Matheus Baselmans ,  Adrianus Franciscus Petrus Engelen ,  Markus Franciscus Antonius Eurlings ,  Hendrikus Robertus Marie Van Greevenbroek ,  Paul Van Der Veen

发明人： Heine Melle Mulder ,  Johannes Jacobus Matheus Baselmans ,  Adrianus Franciscus Petrus Engelen ,  Markus Franciscus Antonius Eurlings ,  Hendrikus Robertus Marie Van Greevenbroek ,  Paul Van Der Veen

IPC分类号： G03B27/42 ,  G03F7/20

CPC分类号： G03F7/70291 ,  G03F7/70116 ,  G03F7/702 ,  G03F7/70516

摘要： A device manufacturing method includes conditioning a beam of radiation using an illumination system. The conditioning includes controlling an array of individually controllable elements and associated optical components of the illumination system to convert the radiation beam into a desired illumination mode, the controlling including allocating different individually controllable elements to different parts of the illumination mode in accordance with an allocation scheme, the allocation scheme selected to provide a desired modification of one or more properties of the illumination mode, the radiation beam or both. The method also includes patterning the radiation beam with a pattern in its cross-section to form a patterned beam of radiation, and projecting the patterned radiation beam onto a target portion of a substrate.

摘要翻译： 装置制造方法包括使用照明系统来调节辐射束。 调节包括控制照明系统的独立可控元件阵列和相关联的光学部件，以将辐射束转换成期望的照明模式，该控制包括根据分配方案将不同的单独可控元件分配到照明模式的不同部分 ，所述分配方案被选择以提供照明模式，辐射束或两者的一个或多个属性的期望修改。 该方法还包括以其横截面中的图案图案化辐射束以形成图案化的辐射束，并将图案化的辐射束投影到基板的目标部分上。

公开(公告)号：US20080239268A1

公开(公告)日：2008-10-02

申请号：US11729960

申请日：2007-03-30

申请人： Heine Melle Mulder ,  Johannes Jacobus Matheus Baselmans ,  Adrianus Franciscus Petrus Engelen ,  Markus Franciscus Antonius Eurlings ,  Hendrikus Robertus Marie Van Greevenbroek ,  Paul Van Der Veen

发明人： Heine Melle Mulder ,  Johannes Jacobus Matheus Baselmans ,  Adrianus Franciscus Petrus Engelen ,  Markus Franciscus Antonius Eurlings ,  Hendrikus Robertus Marie Van Greevenbroek ,  Paul Van Der Veen

IPC分类号： G03B27/52

CPC分类号： G03F7/70291 ,  G03F7/70116 ,  G03F7/702 ,  G03F7/70516

摘要： A device manufacturing method includes conditioning a beam of radiation using an illumination system. The conditioning includes controlling an array of individually controllable elements and associated optical components of the illumination system to convert the radiation beam into a desired illumination mode, the controlling including allocating different individually controllable elements to different parts of the illumination mode in accordance with an allocation scheme, the allocation scheme selected to provide a desired modification of one or more properties of the illumination mode, the radiation beam or both. The method also includes patterning the radiation beam with a pattern in its cross-section to form a patterned beam of radiation, and projecting the patterned radiation beam onto a target portion of a substrate.

摘要翻译： 装置制造方法包括使用照明系统来调节辐射束。 调节包括控制照明系统的独立可控元件阵列和相关联的光学部件，以将辐射束转换成期望的照明模式，该控制包括根据分配方案将不同的单独可控元件分配到照明模式的不同部分 ，所述分配方案被选择以提供照明模式，辐射束或两者的一个或多个属性的期望修改。 该方法还包括以其横截面中的图案图案化辐射束以形成图案化的辐射束，并将图案化的辐射束投影到基板的目标部分上。

公开(公告)号：US07724351B2

公开(公告)日：2010-05-25

申请号：US11341894

申请日：2006-01-30

申请人： Erik Roelof Loopstra ,  Adrianus Franciscus Petrus Engelen ,  Bernardus Antonius Johannes Luttikhuis ,  Maria Johanna Agnes Rubingh ,  Johannes Martinus Andreas Hazenberg ,  Laurentius Catrinus Jorritsma ,  Johannes Wilhelmus De Klerk ,  Bernhard Geuppert ,  Aart Adrianus Van Beuzekom ,  Petrus Franciscus Wilhelmus Maria Mandigers ,  Franz Sorg ,  Peter Deufel ,  Peter Schaap

发明人： Erik Roelof Loopstra ,  Adrianus Franciscus Petrus Engelen ,  Bernardus Antonius Johannes Luttikhuis ,  Maria Johanna Agnes Rubingh ,  Johannes Martinus Andreas Hazenberg ,  Laurentius Catrinus Jorritsma ,  Johannes Wilhelmus De Klerk ,  Bernhard Geuppert ,  Aart Adrianus Van Beuzekom ,  Petrus Franciscus Wilhelmus Maria Mandigers ,  Franz Sorg ,  Peter Deufel ,  Peter Schaap

IPC分类号： G03B27/54 ,  G03B27/72 ,  G03B27/52

CPC分类号： G03F7/70308 ,  G03F7/70825 ,  G03F7/70933

摘要： A lithographic apparatus has an assembly to exchange optical elements in a pupil plane of its projection system. The optical elements may be pupil filters and may conform to the physical dimensions specified for a reticle standard, e.g. having sides substantially equal to 5, 6 or 9 inches.

摘要翻译： 光刻设备具有在其投影系统的光瞳平面中交换光学元件的组件。 光学元件可以是光瞳滤光器，并且可以符合对于掩模版标准规定的物理尺寸，例如。 侧面基本上等于5,6或9英寸。