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公开(公告)号：US08501277B2
公开(公告)日：2013-08-06
申请号：US12151323
申请日：2008-05-05
IPC分类号： C23C16/00
CPC分类号： H01L23/564 , B81B3/0075 , B81B2207/115 , B81C1/00206 , B81C1/0038 , H01L21/02126 , H01L21/02164 , H01L21/02214 , H01L21/02271 , H01L21/02304 , H01L21/3127 , H01L21/3141 , H01L21/31604 , H01L21/31612 , H01L21/3162 , H01L23/29 , H01L2924/0002 , H01L2924/12044 , H01L2924/00
摘要： A method of providing a durable protective coating structure which comprises at least three layers, and which is stable at temperatures in excess of 400° C., where the method includes vapor depositing a first layer deposited on a substrate, wherein the first layer is a metal oxide adhesion layer selected from the group consisting of an oxide of a Group IIIA metal element, a Group IVB metal element, a Group VB metal element, and combinations thereof; vapor depositing a second layer upon said first layer, wherein said second layer includes a silicon-containing layer selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride; and vapor depositing a third layer upon said second layer, wherein said third layer is a functional organic-comprising layer. Numerous articles useful in electronics, MEMS, nanoimprinting lithography, and biotechnology applications can be fabricated using the method.
摘要翻译： 一种提供耐久保护涂层结构的方法，其包括至少三层，并且在超过400℃的温度下是稳定的，其中所述方法包括气相沉积沉积在基底上的第一层，其中所述第一层为 金属氧化物粘附层，其选自由IIIA族金属元素的氧化物，IVB族金属元素，VB族金属元素及其组合组成的组中; 在所述第一层上气相沉积第二层，其中所述第二层包括选自氧化硅，氮化硅和氮氧化硅的含硅层; 并在所述第二层上气相沉积第三层，其中所述第三层是含功能的有机物层。 可以使用该方法制造在电子，MEMS，纳米压印光刻和生物技术应用中有用的许多制品。
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公开(公告)号：US20080299288A1
公开(公告)日：2008-12-04
申请号：US12151323
申请日：2008-05-05
CPC分类号： H01L23/564 , B81B3/0075 , B81B2207/115 , B81C1/00206 , B81C1/0038 , H01L21/02126 , H01L21/02164 , H01L21/02214 , H01L21/02271 , H01L21/02304 , H01L21/3127 , H01L21/3141 , H01L21/31604 , H01L21/31612 , H01L21/3162 , H01L23/29 , H01L2924/0002 , H01L2924/12044 , H01L2924/00
摘要： A method of providing a durable protective coating structure which comprises at least three layers, and which is stable at temperatures in excess of 400° C., where the method includes vapor depositing a first layer deposited on a substrate, wherein the first layer is a metal oxide adhesion layer selected from the group consisting of an oxide of a Group IIIA metal element, a Group IVB metal element, a Group VB metal element, and combinations thereof; vapor depositing a second layer upon said first layer, wherein said second layer includes a silicon-containing layer selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride; and vapor depositing a third layer upon said second layer, wherein said third layer is a functional organic-comprising layer. Numerous articles useful in electronics, MEMS, nanoimprinting lithography, and biotechnology applications can be fabricated using the method.
摘要翻译： 一种提供耐久保护涂层结构的方法，其包括至少三层，并且在超过400℃的温度下是稳定的，其中所述方法包括气相沉积沉积在基底上的第一层，其中所述第一层为 金属氧化物粘附层，其选自由IIIA族金属元素的氧化物，IVB族金属元素，VB族金属元素及其组合组成的组中; 在所述第一层上气相沉积第二层，其中所述第二层包括选自氧化硅，氮化硅和氮氧化硅的含硅层; 并在所述第二层上气相沉积第三层，其中所述第三层是含功能的有机物层。 可以使用该方法制造在电子，MEMS，纳米压印光刻和生物技术应用中有用的许多制品。
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3.发明申请Vapor-deposited biocompatible coatings which adhere to various plastics and metal 审中-公开气相沉积的生物相容性涂层，粘附在各种塑料和金属上公开(公告)号：US20080312356A1
公开(公告)日：2008-12-18
申请号：US12157427
申请日：2008-06-09
CPC分类号： C23C14/12 , A61L27/34 , A61L27/50 , B05D1/60 , B05D3/142 , B05D2201/00 , B05D2202/00 , C08L71/02
摘要： A method of providing a biocompatible PEG-comprising coating on a substrate, without the use of an underlying adhesion layer. The coating is vapor deposited onto the substrate from a precursor which includes a PEG-derived moiety and an amino silane-containing functional group which reacts with the substrate. The substrate may be metal or plastic, where plastic excludes polyimide and polycarbonate. The substrate may be plasma treated prior to deposition of the PEG-comprising coating.
摘要翻译： 在基材上提供生物相容的含PEG涂层的方法，而不使用下面的粘附层。 涂层从包含PEG衍生部分的前体和与基底反应的含氨基硅烷的官能团气相沉积到基底上。 基材可以是金属或塑料，其中塑料不包括聚酰亚胺和聚碳酸酯。 可以在沉积包含PEG的涂层之前对衬底进行等离子体处理。
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公开(公告)号：US20080193772A1
公开(公告)日：2008-08-14
申请号：US11773839
申请日：2007-07-05
申请人： Yury Agroskin , Michael T. Grimes
发明人： Yury Agroskin , Michael T. Grimes
CPC分类号： G01N1/405 , G01N1/2813 , G01N2001/2826 , H01J49/0418 , Y10T428/3154
摘要： This invention provides a mass spectrometry probe including a substrate having a surface and a hydrophobic coating that coats the surface. The hydrophobic coating includes openings that define features for the presentation of an analyte. The hydrophobic coating also has a lower surface tension that the features on the substrate surface, and has a water contact angle between 115° and 140°.
摘要翻译： 本发明提供了一种质谱探针，其包括具有表面的底物和涂覆该表面的疏水涂层。 疏水涂层包括限定用于呈现分析物的特征的开口。 疏水涂层还具有较低的表面张力，其特征在于基底表面，并具有115°至140°之间的水接触角。
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