公开(公告)号：US6077569A

公开(公告)日：2000-06-20

申请号：US55067

申请日：1998-04-03

申请人： Bradley J. Knapp ,  Fred M. Kimock ,  Rudolph Hugo Petrmichl ,  Norman Donald Galvin ,  Brian Kenneth Daniels

发明人： Bradley J. Knapp ,  Fred M. Kimock ,  Rudolph Hugo Petrmichl ,  Norman Donald Galvin ,  Brian Kenneth Daniels

IPC分类号： B05D7/24 ,  B29C59/16 ,  C23C14/02 ,  C23C16/02 ,  C23C16/30 ,  C23C16/32 ,  C23C16/34 ,  C23C16/44 ,  C23C16/513 ,  G02B1/10 ,  B05D3/06 ,  C23C14/00

CPC分类号： B05D1/62 ,  C08J7/123 ,  C23C14/02 ,  C23C14/024 ,  C23C16/0245 ,  C23C16/0272 ,  C23C16/30 ,  C23C16/308 ,  C23C16/325 ,  C23C16/345 ,  C23C16/513 ,  G02B1/105 ,  B29C59/16 ,  Y10T428/263 ,  Y10T428/31507 ,  Y10T428/31551 ,  Y10T428/31598 ,  Y10T428/31663

摘要： An abrasion-resistant dielectric composite product is described comprising a substrate and an abrasion wear resistant coating material comprising carbon, hydrogen, silicon, and oxygen and a dielectric material. An improved method is provided for the deposition of highly durable and abrasion-resistant multilayer dielectric antireflective coatings and reflective colored mirror coatings onto plastic lenses such as ophthalmic lenses, safety lenses, sunglass lenses, and sports optics. An adhesion-enhancing polymer layer may be deposited onto the plastic substrate prior to deposition of the abrasion-resistant first coating layer. The multilayer dielectric coating structure consists of a transparent, highly abrasion-resistant first coating, and a second dielectric coating composed of at least one layer of dielectric material. The abrasion-resistant first coating layer is deposited by ion-assisted plasma deposition from mixtures of organosiloxane or organosilazane precursor gases and oxygen, and has the properties of Nanoindentation hardness in the range of about 2 GPa to about 5 GPa, a strain to microcracking greater than about 1.5% and less than about 3.5%, a transparency greater than 85% throughout the visible spectrum, and an abrasion resistance greater than or equal to the abrasion resistance of glass. The preferred method for deposition of the abrasion-resistant first coating layer is plasma ion beam deposition using an organosiloxane precursor gas and oxygen. Optimum abrasion-resistance is obtained when the first coating layer thickness is in the range of about 5 microns to about 20 microns. The thickness, refractive index, and number of the dielectric layers in the second coating are chosen to produce the desired optical effects of either antireflection, or reflected color. Optimum environmental durability and abrasion-resistance is obtained by producing highly dense dielectric coatings by ion beam assisted electron beam evaporation, magnetron sputtering, ion beam assisted magnetron sputtering, ion beam sputtering, and ion-assisted plasma deposition, including plasma ion beam deposition, from precursor gases.

公开(公告)号：US5888593A

公开(公告)日：1999-03-30

申请号：US631170

申请日：1996-04-12

申请人： Rudolph Hugo Petrmichl ,  Leonard Joseph Mahoney ,  Ray Hays Venable III ,  Norman Donald Galvin ,  Bradley J. Knapp ,  Fred Michael Kimock

发明人： Rudolph Hugo Petrmichl ,  Leonard Joseph Mahoney ,  Ray Hays Venable III ,  Norman Donald Galvin ,  Bradley J. Knapp ,  Fred Michael Kimock

IPC分类号： C23C16/02 ,  C23C16/30 ,  C23C16/32 ,  C23C16/34 ,  C23C16/36 ,  C23C16/513 ,  H05H1/20 ,  C23C14/00 ,  H05H1/02 ,  H05H1/24

CPC分类号： C23C16/345 ,  C23C16/0245 ,  C23C16/30 ,  C23C16/308 ,  C23C16/325 ,  C23C16/36 ,  C23C16/513

摘要： An ion beam deposition method is provided for manufacturing a coated substrate with improved wear-resistance, and improved lifetime. The substrate is first chemically cleaned to remove contaminants. Secondly, the substrate is inserted into a vacuum chamber onto a substrate holder, and the air therein is evacuated via pump. Then the substrate surface is bombarded with energetic ions from an ion beam source supplied from inert or reactive gas inlets to assist in removing residual hydrocarbons and surface oxides, and activating the surface. After sputter-etching the surface, a protective, wear-resistant coating is deposited by plasma ion beam deposition where a portion of the precursor gases are introduced into the ion beam downstream of the ion source, and hydrogen is introduced directly into the ion source plasma chamber. The plasma ion beam-deposited coating may contain one or more layers. Once the chosen coating thickness is achieved, deposition is terminated, vacuum chamber pressure is increased to atmospheric and the coated substrate products having wear-resistance greater than glass are removed from the chamber. These coated products may be ceramics, architectural glass, analytical instrument windows, automotive windshields, and laser bar code scanners for use in retail stores and supermarkets.

摘要翻译： 提供了一种离子束沉积方法，用于制造具有改善的耐磨性和改善寿命的涂覆基材。 首先对基材进行化学清洗以除去污染物。 其次，将衬底插入到真空室中到衬底保持器上，并且其中的空气经由泵抽真空。 然后用来自惰性或反应性气体入口的离子束源的能量离子轰击衬底表面，以帮助去除残留的烃和表面氧化物，并激活表面。 在溅射蚀刻表面之后，通过等离子体离子束沉积沉积保护性耐磨涂层，其中一部分前体气体被引入到离子源下游的离子束中，并将氢直接引入离子源等离子体 房间。 等离子体离子束沉积涂层可以包含一层或多层。 一旦实现所选择的涂层厚度，沉积终止，真空室压力增加到大气压，并且具有大于玻璃的耐磨性的涂覆的基底产品从腔室中去除。 这些涂层产品可以是用于零售商店和超市的陶瓷，建筑玻璃，分析仪器窗，汽车挡风玻璃和激光条码扫描仪。