Method and apparatus for reactive plasma atomization
    7.
    发明授权
    Method and apparatus for reactive plasma atomization 失效
    反应等离子体雾化的方法和装置

    公开(公告)号:US5939151A

    公开(公告)日:1999-08-17

    申请号:US956548

    申请日:1997-10-23

    IPC分类号: H05H1/48 H05H1/24

    CPC分类号: H05H1/48

    摘要: A method and apparatus for producing AlN powder employing a vacuum chamber with a nozzle thereon having a hollow center crucible of graphite with a small feed hole in the bottom thereof. A device is provided for heating and melting aluminum in the crucible. A plasma gun connected to a source of argon and nitrogen is ignited below said feed hole, and melted aluminum moves into the plume of said plasma gun. The melted aluminum is atomized in the plume, and the droplets of aluminum are vaporized and react to the nitrogen in the plume, to create AlN which is collected in a collecting chamber.

    摘要翻译: 使用具有喷嘴的真空室制造AlN粉末的方法和装置,其中底部具有一个具有小进料孔的石墨中空坩​​埚。 提供了用于在坩埚中加热和熔化铝的装置。 连接到氩气和氮气源的等离子体枪在所述进料孔的下方被点燃,并且熔融的铝移动到所述等离子体枪的羽流中。 熔融的铝在羽流中被雾化,并且铝的液滴蒸发并与羽流中的氮反应,以产生收集在收集室中的AlN。