公开(公告)号：US10043609B2

公开(公告)日：2018-08-07

申请号：US15061857

申请日：2016-03-04

Applicant: CKD CORPORATION ,  NIKON CORPORATION

Inventor： Akihiro Ito ,  Masayuki Kouketsu ,  Shigeru Morimoto ,  Hiromitsu Yoshimoto ,  Koji Tanaka

IPC: H01F7/08 ,  H02K41/02 ,  H02K9/22 ,  H01F5/00 ,  H01F27/16 ,  H01F7/06 ,  H02K3/24 ,  H02K9/19

CPC classification number: H01F7/08 ,  H01F5/00 ,  H01F7/06 ,  H01F27/16 ,  H02K3/24 ,  H02K9/19 ,  H02K9/22 ,  H02K41/02 ,  H02K2201/18

Abstract: A cooling structure for a first electromagnetic coil includes the first electromagnetic coil having a space extending in the direction of a predetermined axis Z; a cooling member attached to an end surface, with respect to the direction of the predetermined axis Z, of the first electromagnetic coil and having a flow path for fluid internally formed; and an inlet pipe and an outlet pipe connected, within the space, to an inlet and outlet, respectively, of the flow path of the cooling member and extending through the space to a region outside the electromagnetic coil.

公开(公告)号：US20130258307A1

公开(公告)日：2013-10-03

申请号：US13769308

申请日：2013-02-16

Applicant: NIKON CORPORATION

Inventor： Chetan Mahadeswaraswamy ,  Michael B. Binnard ,  Shigeru Morimoto

IPC: G03F7/20 ,  H02K41/03

CPC classification number: G03F7/70716 ,  G03F7/70758 ,  H02K41/031 ,  H02K2201/18

Abstract: According to one aspect, a stage apparatus includes a first surface, a second surface, an overall magnet array, and a plurality of coils. The overall magnet array is mounted on the first surface, and includes an X magnet array and a Y magnet array. The coils are mounted on the second surface, and include a first coil that cooperates with the X magnet array to control force on the first surface along an x-axis. The coils also include a second coil that cooperates with the Y magnet array to control force on the first surface along a y-axis. The second coil cooperates with the overall magnet array to control force applied to the first surface in a direction normal to the first surface. The first coil does not cooperate with the overall magnet array to control the force applied in the direction normal to the first surface.

Abstract translation: 根据一个方面，舞台装置包括第一表面，第二表面，整体磁体阵列和多个线圈。 整个磁体阵列安装在第一表面上，并且包括X磁体阵列和Y磁体阵列。 线圈安装在第二表面上，并且包括与X磁体阵列配合以控制沿着x轴的第一表面上的力的第一线圈。 线圈还包括与Y磁体阵列配合以控制沿着y轴的第一表面上的力的第二线圈。 第二线圈与整个磁体阵列配合，以便在垂直于第一表面的方向上控制施加到第一表面的力。 第一线圈不与整体磁体阵列配合，以控制沿垂直于第一表面的方向施加的力。

公开(公告)号：US20130069449A1

公开(公告)日：2013-03-21

申请号：US13621669

申请日：2012-09-17

Applicant: Nikon Corporation

Inventor： Michel Pharand ,  Michael B. Binnard ,  Shigeru Morimoto ,  Chetan Mahadeswaraswamy ,  Rick K. Ingram ,  Christopher Edward Hatch ,  Alex Ka Tim Poon ,  Gaurav Keswani ,  Derek Coon ,  Yeong-Jun Choi

IPC: H02K15/06 ,  H02K41/02

CPC classification number: H02K41/031 ,  H02K3/24 ,  H02K9/19 ,  H02K9/22 ,  H02K2201/18

Abstract: Coil arrays are disclosed for a planar or linear motor. An exemplary coil array includes multiple coil modules. Each coil module includes at least one coil set, respective electrical circuitry to and from the coil set, at least one respective hydraulic cooling device for the coil set, and respective hydraulic conduitry to and from the cooling device. The coil modules are interchangeably mountable relative to each other in the array such that mounting the coil module to the array produces accompanying hydraulic and electrical connections between the array and coil module, and removing the coil module from the array severs the connections.

Abstract translation: 公开了用于平面或线性电动机的线圈阵列。 示例性线圈阵列包括多个线圈模块。 每个线圈组件包括至少一个线圈组，到线圈组和来自线圈组的相应电路，用于线圈组的至少一个相应的液压冷却装置，以及往返于冷却装置的相应的液压导管。 线圈模块相对于阵列中的彼此可互换地安装，使得将线圈模块安装到阵列上产生阵列和线圈模块之间的伴随的液压和电气连接，并且从阵列中去除线圈模块以切断连接。

公开(公告)号：US10459350B2

公开(公告)日：2019-10-29

申请号：US15788745

申请日：2017-10-19

Applicant: NIKON CORPORATION

Inventor： Shigeru Morimoto ,  Tadahiro Kominami

IPC: G03B27/58 ,  G03F7/20 ,  H02K41/03 ,  H02K9/19 ,  H02K9/22 ,  H02K3/47 ,  H02K16/00

Abstract: A linear motor with high heat recovery efficiency that inhibits the rise in surface temperature is offered. The linear motor is disposed in a surrounding member (142) and facing a flow passage (142a) of a liquid for regulating temperature, and is provided with a coil unit (141) having at least a part thereof in contact with the liquid. The coil unit (141) is provided with a coil body (144), a mold layer (143) that covers the coil body and holds it in specific form, and a liquid protection layer (150) that covers the mold layer (143) and has liquid protection properties.

公开(公告)号：US20150241794A1

公开(公告)日：2015-08-27

申请号：US14529904

申请日：2014-10-31

Applicant: Nikon Corporation

Inventor： Pai-Hsueh Yang ,  J. Kyle Wells ,  Michael B. Binnard ,  Tsutomu Ogiwara ,  Shigeru Morimoto ,  Kazuhiro Hirano

IPC: G03F7/20 ,  H02P25/02 ,  H02K41/03

CPC classification number: G03F7/70758 ,  H02K41/031 ,  H02K2201/18 ,  H02P25/06

Abstract: According to one aspect, an apparatus includes a stage, a motor to move the stage, an amplifier, and a controller. The motor has at least a first coil and a second coil, and the amplifier is configured to selectively provide current to either the first coil or the second coil. The controller is configured to control force generated by the motor. When moving the stage, the controller controls the motor force by using the amplifier to provide current to the first coil, smoothly reducing a force generated by the first coil before the stage moves to a predetermined switching location so that the coil is generating substantially no force at the switching location, switching the amplifier so that the amplifier provides current to the second coil, and smoothly increasing a force generated by the second coil after the stage moves past the predetermined switching location.

Abstract translation: 根据一个方面，一种装置包括载物台，用于移动载物台的马达，放大器和控制器。 电动机至少具有第一线圈和第二线圈，并且放大器被配置为选择性地向第一线圈或第二线圈提供电流。 控制器被配置为控制由电动机产生的力。 当移动平台时，控制器通过使用放大器来控制电动机的力，以向第一线圈提供电流，平滑地减少在阶段移动到预定开关位置之前由第一线圈产生的力，使得线圈基本上不产生力 在切换位置，切换放大器，使得放大器向第二线圈提供电流，并且在阶段移动超过预定切换位置之后平滑地增加由第二线圈产生的力。