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公开(公告)号：US20220314177A1
公开(公告)日：2022-10-06
申请号：US17684062
申请日：2022-03-01
发明人： Shinichi Nitta , Hiroshi Itafuji , Mitsuyoshi Ohsaki , Masahide Gunji , Hiroshi Kobayashi , Katsuya Okumura
IPC分类号： B01F33/301 , B01F33/3039 , B01F25/422 , B01F35/00 , B01F35/42
摘要： A micromixer includes: a first channel plate where a first channel and a plurality of first branch channels are each formed by a non-through groove in a front surface, and a first confluence channel is formed by a non-through groove in a rear surface, and includes a first communication channel that communicates the first branch channels with the first confluence channel; a first lid plate that covers the front surface; a second channel plate where a second confluence channel is formed by a non-through groove in the front surface, and a second channel and a plurality of second branch each formed by a non-through groove in the rear surface, and includes a second communication channel that communicates the second branch channels with the second confluence channel; and a second lid plate that covers the rear surface of the second channel plate.
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公开(公告)号：US09234586B2
公开(公告)日：2016-01-12
申请号：US14519426
申请日：2014-10-21
申请人： CKD CORPORATION
发明人： Masayuki Kouketsu , Hiroshi Itafuji
IPC分类号： F16K31/00 , F16K31/02 , F16J1/01 , F16K51/02 , G05D16/10 , F16K31/122 , F16K41/04 , F15B15/14 , G05D16/20
CPC分类号： F16J1/01 , F15B15/1461 , F16K31/1221 , F16K41/04 , F16K51/02 , G05D16/10 , G05D16/2013
摘要： A linear actuator is used with a vacuum chamber in which plasma is generated. The linear actuator comprises a moving member extending between the exterior and the interior of the vacuum chamber through an opening provided in the vacuum chamber so as to be rectilinearly reciprocated, a drive section configured to reciprocate the moving member, a cover that covers the moving member, and a slide seal section that provides a seal between the interior and the exterior of the vacuum chamber while allowing the cover to slide thereon. The cover covers a range of the moving member which is moved into both of the interior and the exterior of the vacuum chamber while the moving member is reciprocated by the drive section, and an outer surface of the cover is smaller in the amount of gas adsorption per unit area than an outer surface of the moving member.
摘要翻译： 线性致动器与其中产生等离子体的真空室一起使用。 线性致动器包括通过设置在真空室中的开口在真空室的外部和内部之间延伸以便直线往复运动的移动构件，构造成使移动构件往复移动的驱动部分，覆盖移动构件的盖 以及滑动密封部分，其在允许盖在其上滑动的同时在真空室的内部和外部之间提供密封。 盖子覆盖移动部件的范围，移动部件移动到真空室的内部和外部，同时移动部件通过驱动部分往复运动，并且盖子的外表面的气体吸附量较小 每单位面积比移动构件的外表面。
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公开(公告)号：US09266130B2
公开(公告)日：2016-02-23
申请号：US13752232
申请日：2013-01-28
申请人： CKD CORPORATION
发明人： Masayuki Kouketsu , Hiroshi Itafuji
摘要： A liquid control apparatus 30 controls a spread mode of a liquid. The liquid control apparatus 30 includes a main body 31 having an upper surface 31c to which the liquid is supplied, and a mesh 47 woven in a net-like shape and provided to be in contact with the upper surface 31c. An inhibiting groove 41 is provided in the upper surface 31c in a portion that is in contact with the mesh 47. An introducing port 33b for introducing a gas from the inside of the main body 31 into the inhibiting groove 41 is provided in the main body 31. The introducing port 33b is formed such that the gas is introduced into the inhibiting groove 41 substantially parallel to the upper surface 31c.
摘要翻译： 液体控制装置30控制液体的扩散模式。 液体控制装置30包括具有供给液体的上表面31c的主体31和网状47，网47形成为与上表面31c接触。 在上表面31c中设置有与网47接触的部分的抑制槽41.用于将主体31内部的气体引入抑制槽41的引入口33b设置在主体 引入口33b形成为使得气体基本上平行于上表面31c引入到抑制槽41中。
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4.发明授权Target supply apparatus, control system, control apparatus and control circuit thereof 有权目标供应装置，控制系统，控制装置及其控制电路公开(公告)号：US09192038B2
公开(公告)日：2015-11-17
申请号：US14047895
申请日：2013-10-07
申请人： Gigaphoton, Inc. , CKD Corporation
发明人： Takanobu Ishihara , Hiroshi Itafuji
CPC分类号： H05G2/006 , G03F7/70033 , H05G2/003 , H05G2/008
摘要： A target supply apparatus includes a tank for storing a liquid target material, a nozzle for outputting the liquid target material in the tank, and a gas supply source for supplying gas into the tank, and controls a gas pressure inside the tank with a pressure of the gas supplied from the gas supply source which is provided with a pressure regulator. The target supply apparatus also includes a pressure-decrease gas passage of which one end is connected to the tank and the other end forms an exhaust port, a pressure-decrease valve provided on the pressure-decrease gas passage, and a controller for controlling open/close of the pressure-decrease valve. The controller, when the target material is caused not to output from the nozzle, opens the pressure-decrease valve and decreases the pressure inside the tank.
摘要翻译： 目标供给装置包括用于储存液体目标材料的罐，用于在罐中输出液体目标材料的喷嘴和用于将气体供应到罐中的气体供应源，并且以 从设置有压力调节器的气体供给源供给的气体。 目标供给装置还包括其一端连接到罐并且另一端形成排气口的减压气体通道，设置在减压气体通道上的减压阀，以及用于控制开路的控制器 /关闭减压阀。 当目标材料不从喷嘴输出时，控制器打开减压阀并降低罐内的压力。
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5.外观设计公开(公告)号：USD742494S1
公开(公告)日：2015-11-03
申请号：US29441795
申请日：2013-01-09
申请人： CKD CORPORATION
设计人： Masayuki Kouketsu , Hiroshi Itafuji , Masayo Okada
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公开(公告)号：US09234595B2
公开(公告)日：2016-01-12
申请号：US13957299
申请日：2013-08-01
申请人： CKD CORPORATION
发明人： Masayuki Kouketsu , Hiroshi Itafuji
CPC分类号： F16K3/06 , F16J1/01 , F16K31/1262 , F16K51/02 , H01L21/67017
摘要： A vacuum control valve connected between a vacuum chamber and a vacuum pump includes a control valve main body having a valve seat formed in a vacuum flow passage, a valve body that manipulates the valve opening by performing a linear motion to adjust a lift, a rod that transmits driving force from a linear driving unit that generates the driving force, a sliding/sealing member that seals the vacuum flow passage while allowing the rod to slide, and a cylindrical member that covers a sliding range of the rod. The sliding range includes a range movable from a valve body flow passage side to an exterior side. The cylindrical member has an outer peripheral surface, a working fluid absorption amount per unit area of the outer peripheral surface being smaller than that of an outer surface of the rod.
摘要翻译： 连接在真空室和真空泵之间的真空控制阀包括具有形成在真空流路中的阀座的控制阀主体，通过执行线性运动来调节升程来操纵阀开口的阀体，杆 其从产生驱动力的线性驱动单元传递驱动力，在允许杆滑动的同时密封真空流路的滑动/密封构件以及覆盖杆的滑动范围的圆筒构件。 滑动范围包括从阀体流路侧向外侧移动的范围。 圆柱形构件具有外周面，外周面的每单位面积的工作流体吸收量小于杆的外表面的工作流体吸收量。
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公开(公告)号：USD742493S1
公开(公告)日：2015-11-03
申请号：US29441788
申请日：2013-01-09
申请人： CKD CORPORATION
设计人： Masayuki Kouketsu , Hiroshi Itafuji , Masayo Okada
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公开(公告)号：US09022366B2
公开(公告)日：2015-05-05
申请号：US13940102
申请日：2013-07-11
申请人： CKD Corporation
发明人： Masayuki Kouketsu , Hiroshi Itafuji , Masayo Okada
摘要： A liquid vaporizer includes a first housing having a liquid-supplied surface to which a chemical solution is supplied, a heater, a mesh, a first holder and a second holder attached to the outer edge portions of the mesh, the outer edge portions opposing each other in a direction of spreading of the mesh, first cover bolts, stems supported by the first housing so as to be movable along a specific direction inclined with respect to the liquid-supplied surface, second cover bolts, coil springs biasing the stems along the specific direction and bring the mesh into intimate contact with the liquid-supplied surface, and a lid member covering the mesh from a side of the liquid-supplied surface to seal a space around the liquid-supplied surface with the first housing.
摘要翻译： 液体蒸发器包括：第一壳体，其具有供应化学溶液的液体供应表面，加热器，网状物，第一保持器和附接到网状物的外边缘部分的第二保持器， 第一盖螺栓，由第一壳体支撑的杆，沿着相对于液体供应表面倾斜的特定方向可移动;第二盖螺栓，螺旋弹簧，其沿着所述第一壳体的方向倾斜， 使所述网状物与所述液体供给面紧密接触，以及从所述液体供给面的一侧覆盖所述网状物的盖部件，以利用所述第一壳体密封所述液体供给面周围的空间。
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公开(公告)号：US09338869B2
公开(公告)日：2016-05-10
申请号：US14875166
申请日：2015-10-05
申请人： Gigaphoton, Inc. , CKD Corporation
发明人： Takanobu Ishihara , Hiroshi Itafuji
CPC分类号： H05G2/006 , G03F7/70033 , H05G2/003 , H05G2/008
摘要： A target supply apparatus includes a tank for storing a liquid target material, a nozzle for outputting the liquid target material in the tank, and a gas supply source for supplying gas into the tank, and controls a gas pressure inside the tank with a pressure of the gas supplied from the gas supply source which is provided with a pressure regulator. The target supply apparatus also includes a pressure-decrease gas passage of which one end is connected to the tank and the other end forms an exhaust port, a pressure-decrease valve provided on the pressure-decrease gas passage, and a controller for controlling open/close of the pressure-decrease valve. The controller, when the target material is caused not to output from the nozzle, opens the pressure-decrease valve and decreases the pressure inside the tank.
摘要翻译： 目标供给装置包括用于储存液体目标材料的罐，用于在罐中输出液体目标材料的喷嘴和用于将气体供应到罐中的气体供应源，并且以 从设置有压力调节器的气体供给源供给的气体。 目标供给装置还包括其一端连接到罐并且另一端形成排气口的减压气体通道，设置在减压气体通道上的减压阀，以及用于控制开路的控制器 /关闭减压阀。 当目标材料不从喷嘴输出时，控制器打开减压阀并降低罐内的压力。
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公开(公告)号：US09243720B2
公开(公告)日：2016-01-26
申请号：US14024458
申请日：2013-09-11
申请人： CKD CORPORATION
发明人： Hiroshi Itafuji , Masayuki Kouketsu
CPC分类号： F16K27/003 , F16K27/0236 , Y10T137/4259 , Y10T137/8158 , Y10T137/87249 , Y10T137/87925
摘要： A chemical liquid circuit apparatus includes a main circuit member, a sub-circuit member, and a frame member. The main circuit member has a chemical liquid channel for flowing a chemical fluid, and a main opening formed on an end of the chemical liquid channel. The sub-circuit member is mounted on and in contact with the main circuit member and applies a first load to the main circuit member. The sub-circuit member has a sealing surface for sealing the main opening from outside of the apparatus. The frame member has a storing portion for storing the main circuit member, and a connecting opening disposed in a position in communication with the main opening of the main circuit member stored in the storing portion. The shape of the frame member allows a reaction force of the first load to be transferred from the storing portion to the main circuit member.
摘要翻译： 化学液体回路装置包括主电路部件，副电路部件和框架部件。 主电路构件具有用于使化学流体流动的药液通道和形成在药液通道的端部上的主开口。 副电路构件安装在主电路构件上并与主电路构件接触，并向主电路构件施加第一负载。 副回路构件具有用于从设备外部密封主开口的密封表面。 框架构件具有用于存储主电路构件的存储部分和设置在与存储在存储部分中的主电路构件的主开口连通的位置的连接开口。 框架构件的形状允许第一负载的反作用力从存储部分传递到主电路构件。
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