公开(公告)号：US10211162B2

公开(公告)日：2019-02-19

申请号：US15879577

申请日：2018-01-25

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Inventor： Guido Rademaker ,  Salim Boutami ,  Jonathan Pradelles

IPC: H01L21/00 ,  H01L23/544 ,  G03F1/78 ,  G03F1/84 ,  G03F7/20 ,  G01B11/27 ,  H01J37/317 ,  H01L21/67 ,  H01L21/68 ,  H01L21/66 ,  G01N21/552

Abstract: This method for measuring the misalignment between a first and a second etching zone includes: producing a plasmonic antenna including a first and a second element that are separate and each delineate a cavity on one respective side, all of the elements of the plasmonic antenna that are situated on a first side of a separating plane being produced entirely inside the first zone and all of the elements of the plasmonic antenna that are situated on the second side of the separating plane being produced entirely inside the second zone, and after the production of the plasmonic antenna, the method includes: measuring the absorption rate of the plasmonic antenna, and determining the magnitude of the misalignment between the first and second zones on the basis of the measured absorption rate and of a predicted value for this absorption rate in the absence of a misalignment.

公开(公告)号：US20180233456A1

公开(公告)日：2018-08-16

申请号：US15879577

申请日：2018-01-25

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Inventor： Guido Rademaker ,  Salim Boutami ,  Jonathan Pradelles

IPC: H01L23/544 ,  H01L21/66 ,  H01L21/68 ,  H01L21/67 ,  H01J37/317 ,  G01B11/27

CPC classification number: H01L23/544 ,  G01B11/272 ,  G01N21/554 ,  G03F1/78 ,  G03F1/84 ,  G03F7/70633 ,  G03F7/70683 ,  H01J37/3174 ,  H01J2237/31798 ,  H01L21/67259 ,  H01L21/68 ,  H01L22/10 ,  H01L2223/5442 ,  H01L2223/54426

Abstract: This method for measuring the misalignment between a first and a second etching zone includes: producing a plasmonic antenna including a first and a second element that are separate and each delineate a cavity on one respective side, all of the elements of the plasmonic antenna that are situated on a first side of a separating plane being produced entirely inside the first zone and all of the elements of the plasmonic antenna that are situated on the second side of the separating plane being produced entirely inside the second zone, and after the production of the plasmonic antenna, the method includes: measuring the absorption rate of the plasmonic antenna, and determining the magnitude of the misalignment between the first and second zones on the basis of the measured absorption rate and of a predicted value for this absorption rate in the absence of a misalignment.