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公开(公告)号：US08596094B2
公开(公告)日：2013-12-03
申请号：US12902238
申请日：2010-10-12
CPC分类号： C03B25/02 , C03B19/1453 , C03B2201/07 , C03B2201/075 , C03B2201/22 , C03B2201/23
摘要： A method of making a silica glass having a uniform fictive temperature. The glass article is heated at a target fictive temperature, or heated or cooled at a rate that is less than the rate of change of the fictive temperature, for a time that is sufficient to allow the fictive temperature of the glass to come within 3° C. of the target fictive temperature. The silica glass is then cooled from the target fictive temperature to a temperature below the strain point of the glass at a cooling rate that is greater than the relaxation rate of the glass at the target fictive temperature. The silica glass has a fictive temperature that varies by less than 3° C. after the annealing step. A silica glass made by the method is also described.
摘要翻译： 制造具有均匀的假想温度的二氧化硅玻璃的方法。 将玻璃制品在目标假想温度下加热，或以低于假想温度变化率的速率加热或冷却一段足以使玻璃的假想温度达到3°的时间 C.目标虚构温度。 然后将二氧化硅玻璃从目标假想温度冷却至低于玻璃应变点的温度，其冷却速率大于目标假想温度下玻璃的松弛率。 二氧化硅玻璃具有在退火步骤之后变化小于3℃的假想温度。 还描述了通过该方法制备的二氧化硅玻璃。
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公开(公告)号：US20110092354A1
公开(公告)日：2011-04-21
申请号：US12902238
申请日：2010-10-12
CPC分类号： C03B25/02 , C03B19/1453 , C03B2201/07 , C03B2201/075 , C03B2201/22 , C03B2201/23
摘要： A method of making a silica glass having a uniform fictive temperature. The glass article is heated at a target fictive temperature, or heated or cooled at a rate that is less than the rate of change of the fictive temperature, for a time that is sufficient to allow the fictive temperature of the glass to come within 3° C. of the target fictive temperature. The silica glass is then cooled from the target fictive temperature to a temperature below the strain point of the glass at a cooling rate that is greater than the relaxation rate of the glass at the target fictive temperature. The silica glass has a fictive temperature that varies by less than 3° C. after the annealing step. A silica glass made by the method is also described.
摘要翻译： 制造具有均匀的假想温度的二氧化硅玻璃的方法。 将玻璃制品在目标假想温度下加热，或以低于假想温度变化率的速率加热或冷却一段足以使玻璃的假想温度达到3°的时间 C.目标虚构温度。 然后将二氧化硅玻璃从目标假想温度冷却至低于玻璃应变点的温度，其冷却速率大于目标假想温度下玻璃的松弛率。 二氧化硅玻璃具有在退火步骤之后变化小于3℃的假想温度。 还描述了通过该方法制备的二氧化硅玻璃。
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公开(公告)号：US08541325B2
公开(公告)日：2013-09-24
申请号：US13028472
申请日：2011-02-16
IPC分类号： C03C3/06
CPC分类号： C03C3/06 , B82Y10/00 , B82Y40/00 , C03B19/1407 , C03B19/1415 , C03B19/1453 , C03B2201/21 , C03B2201/23 , C03B2201/42 , C03C4/0071 , C03C4/0085 , C03C2201/21 , C03C2201/23 , C03C2201/42 , C03C2203/40 , C03C2203/52 , G03F1/60 , G03F7/0002 , G03F7/70958
摘要： In one embodiment the present disclosure is directed to a silica-titania glass with an internal transmission of >90%/cm at wavelengths from 340 nm to 840 nm. In another embodiment the internal transmission is >93%/cm at wavelengths from 340 nm to 840 nm. In a further embodiment the internal transmission is >95%/cm at wavelengths from 340 nm to 840 nm. In another embodiment the disclosure is directed to a silica-titania glass with an overall transmission through an optic made of the glass is >84% at wavelengths from 340 nm to 840 nm. In another embodiment overall transmission through an optic made of the glass is >86% at wavelengths from 340 nm to 840 nm. In a further embodiment the overall transmission through an optic made of the glass is >88% at wavelengths from 330 nm to 840 nm. In a further embodiment the silica-titania glass has a Ti+3 concentration level [Ti3+] less than 3 ppm by weight.
摘要翻译： 在一个实施方案中，本公开涉及在340nm至840nm的波长下具有> 90％/ cm 3的内透射率的二氧化硅 - 二氧化钛玻璃。 在另一个实施例中，在340nm至840nm的波长下，内透射率> 93％/ cm。 在另一个实施方案中，在340nm至840nm的波长下，内透射率> 95％/ cm。 在另一个实施方案中，本发明涉及一种二氧化硅 - 二氧化钛玻璃，其透射率通过玻璃制成的光学透镜在340nm至840nm的波长处> 84％。 在另一个实施例中，通过由玻璃制成的光学器件的整个透射在340nm至840nm的波长处为> 86％。 在另一实施例中，通过由玻璃制成的光学器件的整体透射在330nm至840nm的波长处为> 88％。 在另一个实施方案中，二氧化硅 - 二氧化钛玻璃具有小于3ppm重量的Ti + 3浓度水平[Ti 3+]。
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公开(公告)号：US08263511B2
公开(公告)日：2012-09-11
申请号：US12644563
申请日：2009-12-22
CPC分类号： C03B25/02 , C03B19/1453 , C03B2201/03 , C03B2201/04 , C03C3/06 , C03C2201/22 , C03C2201/23
摘要： A fused silica glass article having a low absolute refractive index and low concentrations of hydroxyl groups, halogens, and metal having a low absolute refractive index. The glass article contains less than about 10 ppm protium-containing and deuterium-containing hydroxyl groups by weight and less than about 20 ppm halogens by weight. The silica glass article also has an absolute refractive index (ARI) less than or equal to 1.560820. In one embodiment, the ARI of the fused silica article is achieved by lowering the fictive temperature of the fused silica. A method of lowering the fictive temperature is also described.
摘要翻译： 具有低绝对折射率和低浓度羟基，卤素和具有低绝对折射率的金属的熔融石英玻璃制品。 玻璃制品含有重量少于约10ppm含氘羟基和重量小于约20ppm的卤素。 石英玻璃制品的绝对折射率（ARI）也小于或等于1.560820。 在一个实施方案中，熔融二氧化硅制品的ARI通过降低熔融二氧化硅的假想温度来实现。 还描述了降低虚构温度的方法。
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公开(公告)号：US20110207593A1
公开(公告)日：2011-08-25
申请号：US13028516
申请日：2011-02-16
CPC分类号： C03B19/1407 , C03B19/1453 , C03B2201/23 , C03B2201/42 , C03C3/06 , C03C3/076 , C03C2201/20
摘要： This disclosure is directed to tailoring and improving the expansivity of low thermal expansion silica-titania glass through changes in the [OH] content and fictive temperature of the glasses. The [OH] concentration in the glass can be in the range of 600-2500 ppm. The fictive temperature, TF is less than 900° C.
摘要翻译： 本发明旨在通过玻璃的[OH]含量和假想温度的变化来定制和改善低热膨胀二氧化硅 - 二氧化钛玻璃的膨胀性。 玻璃中的[OH]浓度可以在600-2500ppm的范围内。 假想温度，TF低于900℃
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公开(公告)号：US20110207592A1
公开(公告)日：2011-08-25
申请号：US13028472
申请日：2011-02-16
IPC分类号： C03C3/06
CPC分类号： C03C3/06 , B82Y10/00 , B82Y40/00 , C03B19/1407 , C03B19/1415 , C03B19/1453 , C03B2201/21 , C03B2201/23 , C03B2201/42 , C03C4/0071 , C03C4/0085 , C03C2201/21 , C03C2201/23 , C03C2201/42 , C03C2203/40 , C03C2203/52 , G03F1/60 , G03F7/0002 , G03F7/70958
摘要： In one embodiment the present disclosure is directed to a silica-titania glass with an internal transmission of >90%/cm at wavelengths from 340 nm to 840 nm. In another embodiment the internal transmission is >93%/cm at wavelengths from 340 nm to 840 nm. In a further embodiment the internal transmission is >95%/cm at wavelengths from 340 nm to 840 nm. In another embodiment the disclosure is directed to a silica-titania glass with an overall transmission through an optic made of the glass is >84% at wavelengths from 340 nm to 840 nm. In another embodiment overall transmission through an optic made of the glass is >86% at wavelengths from 340 nm to 840 nm. In a further embodiment the overall transmission through an optic made of the glass is >88% at wavelengths from 330 nm to 840 nm. In a further embodiment the silica-titania glass has a Ti+3 concentration level [Ti3+] less than 3 ppm by weight.
摘要翻译： 在一个实施方案中，本公开涉及在340nm至840nm的波长下具有> 90％/ cm 3的内透射率的二氧化硅 - 二氧化钛玻璃。 在另一个实施例中，在340nm至840nm的波长下，内透射率> 93％/ cm。 在另一个实施方案中，在340nm至840nm的波长下，内透射率> 95％/ cm。 在另一个实施方案中，本公开涉及一种二氧化硅 - 二氧化钛玻璃，其透射率通过玻璃制成的光学器件在340nm至840nm的波长处为> 84％。 在另一个实施例中，通过由玻璃制成的光学器件的整个透射在340nm至840nm的波长处为> 86％。 在另一实施例中，通过由玻璃制成的光学器件的整体透射在330nm至840nm的波长处为> 88％。 在另一个实施方案中，二氧化硅 - 二氧化钛玻璃具有小于3ppm重量的Ti + 3浓度水平[Ti 3+]。
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公开(公告)号：US20110048075A1
公开(公告)日：2011-03-03
申请号：US12868934
申请日：2010-08-26
摘要： The disclosure describes a method by which the Tzc of a silica-titania glass article, for example, a EUVL mirror substrate, can be tuned to within a specification range by means of a selected final anneal that shifts Tzc of the article or substrate to the desired Tzc value. In addition, since different mirrors in a set can be specified at different values of Tzc, this process can be on used glass samples or pieces from a single glass boule to make parts with different Tzc values, thus reducing the number of separate boules required to fill an order.
摘要翻译： 本公开内容描述了一种通过选择的最终退火将二氧化硅 - 二氧化钛玻璃制品的Tzc（例如EUVL反射镜基板）调谐到规定范围内的方法，该最终退火将制品或基材的Tzc移动到 期望的Tzc值。 另外，由于可以在不同的Tzc值中指定一组中的不同反射镜，所以该过程可以是来自单个玻璃棒的玻璃样品或碎片以制备具有不同Tzc值的部件，从而减少了需要的单独的毛坯的数量 填写订单。
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公开(公告)号：US08713969B2
公开(公告)日：2014-05-06
申请号：US12868934
申请日：2010-08-26
IPC分类号： C03B25/00
摘要： The disclosure describes a method by which the Tzc of a silica-titania glass article, for example, a EUVL mirror substrate, can be tuned to within a specification range by means of a selected final anneal that shifts Tzc of the article or substrate to the desired Tzc value. In addition, since different mirrors in a set can be specified at different values of Tzc, this process can be on used glass samples or pieces from a single glass boule to make parts with different Tzc values, thus reducing the number of separate boules required to fill an order.
摘要翻译： 本公开内容描述了一种通过选择的最终退火将二氧化硅 - 二氧化钛玻璃制品的Tzc（例如EUVL反射镜基板）调谐到规定范围内的方法，该最终退火将制品或基材的Tzc移动到 期望的Tzc值。 另外，由于可以在不同的Tzc值中指定一组中的不同反射镜，所以该过程可以是来自单个玻璃棒的玻璃样品或碎片以制备具有不同Tzc值的部件，从而减少了需要的单独的毛坯的数量 填写订单。
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公开(公告)号：US20100162759A1
公开(公告)日：2010-07-01
申请号：US12644563
申请日：2009-12-22
IPC分类号： C03B27/012 , C03C3/04
CPC分类号： C03B25/02 , C03B19/1453 , C03B2201/03 , C03B2201/04 , C03C3/06 , C03C2201/22 , C03C2201/23
摘要： A fused silica glass article having a low absolute refractive index and low concentrations of hydroxyl groups, halogens, and metal having a low absolute refractive index. The glass article contains less than about 10 ppm protium-containing and deuterium-containing hydroxyl groups by weight and less than about 20 ppm halogens by weight. The silica glass article also has an absolute refractive index (ARI) less than or equal to 1.560820. In one embodiment, the ARI of the fused silica article is achieved by lowering the fictive temperature of the fused silica. A method of lowering the fictive temperature is also described.
摘要翻译： 具有低绝对折射率和低浓度羟基，卤素和具有低绝对折射率的金属的熔融石英玻璃制品。 玻璃制品含有重量少于约10ppm含氘羟基和重量小于约20ppm的卤素。 石英玻璃制品的绝对折射率（ARI）也小于或等于1.560820。 在一个实施方案中，熔融二氧化硅制品的ARI通过降低熔融二氧化硅的假想温度来实现。 还描述了降低虚构温度的方法。
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公开(公告)号：US07506521B2
公开(公告)日：2009-03-24
申请号：US11148504
申请日：2005-06-08
申请人： Dana Craig Bookbinder , Richard Michael Fiacco , Kenneth Edward Hrdina , Lisa Anne Moore , Susan Lee Schiefelbein
发明人： Dana Craig Bookbinder , Richard Michael Fiacco , Kenneth Edward Hrdina , Lisa Anne Moore , Susan Lee Schiefelbein
CPC分类号： C03C3/06 , C03B19/1453 , C03B19/1469 , C03B2201/03 , C03B2201/04 , C03B2201/07 , C03B2201/075 , C03B2201/21 , C03B2201/23 , C03C2201/11 , C03C2201/21 , C03C2201/23 , C03C2203/40 , C03C2203/54 , G03F7/70958
摘要： Disclosed are high purity synthetic silica material having an internal transmission at 193 nm of at least 99.65%/cm and method of preparing such material. The material is also featured by a high compositional homogeneity in a plane transverse to the intended optical axis. The soot-to-glass process for making the material includes a step of consolidating the soot preform in the presence of H2O and/or O2.
摘要翻译： 公开了具有193nm以上的内透射率为至少99.65％/ cm 3的高纯度合成二氧化硅材料及其制备方法。 该材料的特征还在于横向于预期光轴的平面中具有高的组成均匀性。 用于制造该材料的烟灰 - 玻璃工艺包括在H 2 O和/或O 2存在下固化烟灰预制件的步骤。
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