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公开(公告)号：US5729261A
公开(公告)日：1998-03-17
申请号：US623081
申请日：1996-03-28
CPC分类号： B41J2/1606 , B41J2/14129 , B41J2202/03
摘要： An ink jet printhead has improved resistance to the corrosive effects of ink by coating the surface of a photo-imageable polymer with an ink resistant film. In one described embodiment, a thermal ink jet element is formed by bonding together a channel plate and a heater plate. Resistors and electrical connections are formed in the heater plate. A polyimide layer is formed so as to overlie the heater plate to protect the electrical elements while providing pit structure for the heater and for ink flow bypass. A tantalum film is formed on the surface of the polyimide layer to protect the layer from the effects of corrosive ink. In another embodiment, the ink resistant film is amorphous carbon or silicon nitride.
摘要翻译： 喷墨打印头通过用耐墨膜涂覆可光成像聚合物的表面而改善了对油墨腐蚀作用的抵抗力。 在一个描述的实施例中，通过将通道板和加热器板接合在一起形成热喷墨元件。 电阻器和电气连接形成在加热器板中。 形成聚酰亚胺层以覆盖加热板以保护电气元件，同时为加热器和墨水旁路提供凹坑结构。 在聚酰亚胺层的表面上形成钽膜以保护层免受腐蚀性墨水的影响。 在另一个实施方案中，耐油膜是无定形碳或氮化硅。
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2.发明授权Method for improving substrate adhesion in fluoropolymer deposition processes 失效改善含氟聚合物沉积工艺中基材粘附性的方法
公开(公告)号：US5900288A
公开(公告)日：1999-05-04
申请号：US722517
申请日：1996-09-27
IPC分类号： B08B7/00 , B41J2/16 , C23C16/02 , C23C16/44 , C23F4/00 , C23G5/00 , H01L21/304 , C23C14/02 , C08J7/18 , H05H1/24
CPC分类号： B41J2/1635 , B41J2/1601 , B41J2/1606 , B41J2/1628 , B41J2/1629 , B41J2/164 , C23C16/0245 , C23C16/4405 , B41J2202/03
摘要： A method of cleaning a substrate, in particular, the front face of a thermal ink jet printing device, to improve subsequent thin film deposition in a single chamber plasma processing system containing fluorine-containing deposits, involves treating the substrate with a hydrogen plasma. A front face coating for a thermal ink jet device may be formed by a method involving (1) treating a substrate of the thermal ink jet device with a hydrogen plasma; (2) optionally coating the cleaned substrate with an amorphous carbon layer; and (3) coating the substrate or amorphous carbon layer with a fluoropolymer layer.
摘要翻译： 一种清洗基板，特别是热喷墨打印装置的正面以改善随后在含有含氟沉积物的单室等离子体处理系统中的薄膜沉积的方法涉及用氢等离子体处理该基板。 用于热喷墨装置的前面涂层可以通过以下方法形成：（1）用氢等离子体处理热喷墨装置的基板; （2）任选地用无定形碳层涂覆清洁的基材; 和（3）用含氟聚合物层涂覆基材或无定形碳层。
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公开(公告)号：US5545283A
公开(公告)日：1996-08-13
申请号：US385234
申请日：1995-02-08
CPC分类号： H01L21/67144 , B29C43/32
摘要： An apparatus and method for bonding wafer pairs. The apparatus includes a heated platen surrounded by a pressurization vessel. The heated platen includes channels connected to a hole which runs through the heated platen. Wafer pairs are placed on the top surface of the platen, a rubber mat is placed over the top of the wafer pairs, and a vacuum is drawn through the hole and the channels. The rubber mat compresses the wafer pairs. The platen is heated for the bonding process. The pressurization chamber is pressurized supplying additional bonding pressure to the wafer pair. Once sufficiently heated, the heated platen is liquid cooled completing the bonding process.
摘要翻译： 一种用于接合晶片对的装置和方法。 该装置包括被加压容器包围的加热台。 加热的压板包括连接到穿过加热压板的孔的通道。 晶片对放置在压板的顶表面上，橡胶垫放置在晶片对的顶部上，并且通过孔和通道抽取真空。 橡胶垫压缩晶圆对。 加热压板以进行粘合工艺。 加压室被加压，为晶片对提供附加的结合压力。 一旦被充分加热，加热的压板是完成粘合过程的液体冷却。
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公开(公告)号：US5073785A
公开(公告)日：1991-12-17
申请号：US516660
申请日：1990-04-30
申请人： Frank Jansen , Daniel E. Kuhman
发明人： Frank Jansen , Daniel E. Kuhman
CPC分类号： C23C16/26 , B41J2/1606
摘要： A process for minimizing or avoiding drop deflection in ink jet devices which involves coating the ink jet head components with amorphous carbon and subsequently subjecting the amorphous carbon to fluorination in which results in a fluorine surface layer present on the amorphous carbon coating to prevent ink drop deflection.
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公开(公告)号：US4885220A
公开(公告)日：1989-12-05
申请号：US198359
申请日：1988-05-25
CPC分类号： G03G5/08221 , G03G5/0217 , G03G5/08214
摘要： An electroreceptor comprised of a supporting substrate and hydrogenated amorphous silicon carbide with from about 10 to about 60 atomic percent of carbon, from about 10 to about 60 atomic percent of hydrogen, and from about 10 to about 80 atomic percent of silicon.
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公开(公告)号：US06444275B1
公开(公告)日：2002-09-03
申请号：US09699413
申请日：2000-10-31
IPC分类号： C08J718
CPC分类号： B41J2/1606
摘要： A thermal ink jet printhead contains, on a front face, a remote plasma deposited fluoropolymer film. The fluoropolymer film has a high fluorine to carbon ratio. The film also possesses excellent mechanical durability. The film may be prepared by forming a remote plasma from precursor gases containing flurocarbons and depositing from the remote plasma onto a front face of a thermal ink jet printhead
摘要翻译： 热喷墨打印头在正面上包含远程等离子体沉积的氟聚合物膜。 氟聚合物膜具有高的氟碳比。 该膜还具有优异的机械耐久性。 可以通过从含有氟碳的前体气体形成远程等离子体并从远程等离子体沉积到热喷墨打印头的前面来制备膜
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公开(公告)号：US06436793B1
公开(公告)日：2002-08-20
申请号：US09749692
申请日：2000-12-28
申请人： Gary A. Kneezel , Daniel E. Kuhman , Brian T. Ormond , Ackerman C. John , Almon P. Fisher , Allan F. Camp , Lawrence H. Herko
发明人： Gary A. Kneezel , Daniel E. Kuhman , Brian T. Ormond , Ackerman C. John , Almon P. Fisher , Allan F. Camp , Lawrence H. Herko
IPC分类号： H01L2130
CPC分类号： B41J2/1635 , B41J2/1601 , B41J2/1623 , B41J2/1626 , B41J2/1631 , H01L21/78
摘要： A method of forming a semiconductor structure from a first wafer and a second wafer. A pit or groove is formed in a lower surface of the first wafer. The lower surface of the first wafer is bonded to an upper surface of the second wafer. A groove is then formed on an upper surface of the first wafer, such that an opening is formed in the first wafer that exposes at least one alignment reference target on the upper surface of the second wafer. The bonded first wafer and second wafer is then diced using the exposed at least one alignment reference target to form a semiconductor structure.
摘要翻译： 一种从第一晶片和第二晶片形成半导体结构的方法。 在第一晶片的下表面形成凹坑或凹槽。 第一晶片的下表面结合到第二晶片的上表面。 然后在第一晶片的上表面上形成凹槽，使得在第一晶片中形成开口，该第一晶片在第二晶片的上表面上露出至少一个对准基准对象。 然后使用暴露的至少一个对准参考目标切割接合的第一晶片和第二晶片以形成半导体结构。
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公开(公告)号：US06243112B1
公开(公告)日：2001-06-05
申请号：US08673535
申请日：1996-07-01
IPC分类号： B41J2135
CPC分类号： B41J2/1606
摘要： A thermal ink jet printhead contains, on a front face, a remote plasma deposited fluoropolymer film. The fluoropolymer film has a high fluorine to carbon ratio. The film also possesses excellent mechanical durability. The film may be prepared by forming a remote plasma from precursor gases containing fluorocarbons and depositing from the remote plasma onto a front face of a thermal ink jet printhead.
摘要翻译： 热喷墨打印头在正面上包含远程等离子体沉积的氟聚合物膜。 氟聚合物膜具有高的氟碳比。 该膜还具有优异的机械耐久性。 可以通过从含有碳氟化合物的前体气体形成远距离等离子体并从远程等离子体沉积到热喷墨打印头的前面来制备膜。
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9.发明授权Low surface energy coating to maintain clean surfaces of optical components in a document reproduction machine 失效低表面能涂层，以保持文件复印机中光学元件的清洁表面
公开(公告)号：US5570161A
公开(公告)日：1996-10-29
申请号：US343145
申请日：1994-11-21
CPC分类号： G02B1/10 , B41J2/471 , G03G15/04045 , H04N1/29
摘要： A document reproduction machine having an optical component which is coated with a low surface energy transparent coating to reduce the adhesion of particles on the optical component. During the forming of the coating the lateral conductivity of the coating is modified so as to dissipate electrical charge build up on the coating.
摘要翻译： 一种具有光学部件的文件再现机，其涂覆有低表面能透明涂层，以减少颗粒在光学部件上的粘附。 在形成涂层期间，改变涂层的横向电导率，以便消散在涂层上积累的电荷。
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10.发明授权
公开(公告)号：US5461406A
公开(公告)日：1995-10-24
申请号：US176379
申请日：1994-01-03
CPC分类号： B41J2/1433 , B41J2/1604 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1642 , B41J2202/11 , Y10T29/49401
摘要： An apparatus and method for ejecting ink droplets from a plurality of nozzles located in the front face of a printhead controls front face geometries to ensure consistent image quality. A front face dicing angle and a thick film insulative layer etchback are controlled to maintain a Spot Aspect Ratio of each of the droplets ejected from the printhead within a predetermined acceptable range. The Spot Aspect Ratio may be maintained by control of an effective meniscus tilt angle.
摘要翻译： 用于从位于打印头前面的多个喷嘴喷出墨滴的装置和方法控制正面几何形状，以确保一致的图像质量。 控制前面切割角度和厚膜绝缘层回蚀，以将从打印头喷射的每个液滴的斑点长宽比保持在预定的可接受范围内。 可以通过控制有效的弯液面倾斜角来维持点宽比。
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