摘要:
A method of forming a semiconductor structure from a first wafer and a second wafer. A pit or groove is formed in a lower surface of the first wafer. The lower surface of the first wafer is bonded to an upper surface of the second wafer. A groove is then formed on an upper surface of the first wafer, such that an opening is formed in the first wafer that exposes at least one alignment reference target on the upper surface of the second wafer. The bonded first wafer and second wafer is then diced using the exposed at least one alignment reference target to form a semiconductor structure.
摘要:
A filter structure having a plurality of pores through the structure each of the pores having a cross section with a length (L) and a width (W) wherein the dimension of L is greater than the dimension of W. The filter can be used with an improved ink jet printhead having an ink inlet in one of its surfaces, a plurality of nozzles, individual channels connecting the nozzles to an internal ink supplying manifold, the manifold being supplied ink through the ink inlet, and selectively addressable heating elements for expelling ink droplets, the improved ink jet printhead comprising a substantially flat filter having predetermined dimensions and being bonded to the printhead containing the ink inlet, the filter having a plurality of pores, therethrough, each of the pores having a cross section with a length=L and a width=W, wherein the dimension of L is greater than the dimension of W. Also disclosed is a method for fabricating a filter element comprising the steps of positioning a thin polymer film in the output radiation path of an ablating laser, and controlling the laser output so that a plurality of pores are formed in portions of the polymer film, each of the pores having a cross section with a length (L) and a width (W), wherein the dimension of L is greater than the dimension of W.
摘要:
Relatively small fluid handling devices having a filter bonded on the surface containing the fluid inlets. An example of such a device is a thermal ink jet printhead. A substantially flat filter is placed at the ink inlet to the printhead by a fabrication process which laminates a wafer sized filter to the aligned and bonded wafers containing a plurality of printheads. The individual printheads are obtained by a sectioning operation, which cuts through the two or more bonded wafers and the filter. The filter may be a woven mesh screen or, preferably, an electroformed screen with a predetermined pore size. Since the filter covers one entire side of the printhead, the relatively large contact area prevents delamination and enables convenient leak-free sealing. The filter prevents the entrance of contaminants into the relatively large inlets of the printhead at an early stage of assembly and packaging.
摘要:
Disclosed is an ink jet printhead which comprises (i) an upper substrate with a set of parallel grooves for subsequent use as ink channels and a recess for subsequent use as a manifold, the grooves being open at one end for serving as droplet emitting nozzles, and (ii) a lower substrate in which one surface thereof has an array of heating elements and addressing electrodes formed thereon, said lower substrate having an insulative layer deposited on the surface thereof and over the heating elements and addressing electrodes and patterned to form recesses therethrough to expose the heating elements and terminal ends of the addressing electrodes, the upper and lower substrates being aligned, mated, and bonded together to form the printhead with the grooves in the upper substrate being aligned with the heating elements in the lower substrate to form droplet emitting nozzles, said upper substrate comprising a material formed by crosslinking or chain extending a polymer of formula I or II.
摘要:
A printhead with a printhead die, an ink manifold and heat sink substrate has a continuous sealing surface surrounding the printhead die which is formed by the ink manifold, heat sink substrate and filler material disposed therebetween. The filler material acts as caulking to eliminate gaps around the printhead die, particularly between the ink manifold and heat sink substrate, and to provide a smooth surface for abutment with a capping member. A fluid-tight seal is obtained between the capping member and the continuous sealing surface on the printhead, thus preventing the drying out of ink in the nozzles through evaporation of volatile ink components. In some priming nozzle configurations, the leaktight seal also facilitates priming of the printhead.
摘要:
An efficient fluid filtering device is provided for filtering unwanted contaminants from flowing fluid, such as ink flowing into an ink jet printhead. The efficient fluid filtering device includes a generally flat member having a first side and a second side, and a series of fluid flow holes formed through the flat member from the first side to the second side. Importantly, the efficient fluid filtering device also has a series of pillar members, including pillar members defining a trough portion around each fluid flow hole. The pillar members and the trough portions are arranged around each hole so as to efficiently prevent bubbles and contaminants in flowing fluid from impeding fluid flow from the first side through to the second side.
摘要:
Operating an ultrasonic transmitter and receiver includes providing a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members. A first portion of the compliant membrane covers the first and second MEMS transducing members. A second portion of the compliant membrane is anchored to the substrate. Electrical pulses are sent to the first MEMS transducing member which causes the first MEMS transducing member and the compliant membrane to vibrate. The vibrations of the first MEMS transducing member and the compliant membrane are transmitted to an object. Echo signals are received from the object. The received echo signals are converted into electrical signals by the second MEMS transducing member.
摘要:
An inkjet printhead assembly for use in an inkjet printer, the inkjet printhead assembly includes an array of nozzles disposed along a nozzle array direction; an ink chamber including an ink outlet that is fluidly connected to the array of nozzles; and an air-permeable membrane positioned in the ink chamber at an angle that is inclined relative to the nozzle array direction.
摘要:
An inkjet printing system includes a roller for advancing a recording medium along a recording medium advance direction; an inkjet printhead that ejects drops of ink; a carriage for moving the printhead along a carriage scan direction that is substantially perpendicular or perpendicular to the recording medium advance direction; one or more motors for driving the roller and moving the carriage; a two-dimensional sensor mounted on the carriage which two-dimensional sensor is configured to sense either: a) the recording medium; b) the roller and the recording medium; or c) the roller; and a controller for receiving electrical signals from the two-dimensional sensor and for controlling the one or more motors.
摘要:
An internal filter includes a lower substrate and an upper substrate. Fluid passages are formed by etching grooves into the surface(s) of the upper and/or lower substrates, and/or in one or more intermediate layers. The filter pores extending between the fluid passages are formed by etching second grooves that fluidly connect the fluid passages. Two or more sets of the one or two intermediate layers can be implemented to provide additional filter passages and/or pores. Each set can be connected to a separate fluid source and/or a separate microfluidic device. In another internal filter, the inlet and outlet passages and the filter pores are formed on the same upper or lower substrate. The inlet and outlet passages are partially formed in a first step. In a second step, the inlet and outlet passages are completed at the same time that the filter pores are formed.