公开(公告)号：US09450140B2

公开(公告)日：2016-09-20

申请号：US12869830

申请日：2010-08-27

申请人： Chang-Mog Jo ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

发明人： Chang-Mog Jo ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

IPC分类号： B05D5/06 ,  C23C16/00 ,  B05D1/32 ,  H01L21/00 ,  H01L33/00 ,  C23C14/04 ,  C23C14/12 ,  C23C14/24 ,  C23C14/56 ,  H01L21/67 ,  H01L21/683 ,  H01L51/00 ,  H01L51/56 ,  H01L27/32

CPC分类号： H01L33/005 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  C23C14/246 ,  C23C14/568 ,  H01L21/67173 ,  H01L21/67225 ,  H01L21/67236 ,  H01L21/6831 ,  H01L27/3211 ,  H01L51/001 ,  H01L51/0011 ,  H01L51/56

摘要： A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus includes a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit passes through the chamber when passing through the deposition unit.

摘要翻译： 一种薄膜沉积装置，用于大规模制造大型基板并允许高分辨率图案化，以及制造使用其的有机发光显示装置的方法，该装置包括将基板固定在静电上的装载单元 卡盘 沉积单元，其包括保持在真空状态的室和设置在所述室中的薄膜沉积组件，其与所述基板隔开预定距离，以在固定在所述静电卡盘上的所述基板上沉积薄膜; 从所述静电卡盘将分离完成了沉积处理的基板的卸载单元; 顺序地将固定有基板的静电卡盘移动到加载单元，沉积单元和卸载单元的第一循环单元; 以及第二循环单元，其将从所述基板分离的所述静电卡盘从所述卸载单元返回到所述装载单元，其中所述第一循环单元在通过所述沉积单元时通过所述室。

公开(公告)号：US20130298829A1

公开(公告)日：2013-11-14

申请号：US13943221

申请日：2013-07-16

申请人： Chang-Mog Jo ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

发明人： Chang-Mog Jo ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

IPC分类号： H01L33/00

CPC分类号： H01L33/005 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  C23C14/246 ,  C23C14/568 ,  H01L21/67173 ,  H01L21/67225 ,  H01L21/67236 ,  H01L21/6831 ,  H01L27/3211 ,  H01L51/001 ,  H01L51/0011 ,  H01L51/56

摘要： A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus inclues a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit passes through the chamber when passing through the deposition unit.

摘要翻译： 一种薄膜沉积装置，用于大规模制造大型基板并允许高分辨率图案化，以及制造使用其的有机发光显示装置的方法，该装置包括将基板固定在静电上的装载单元 卡盘 沉积单元，其包括保持在真空状态的室和设置在所述室中的薄膜沉积组件，其与所述基板隔开预定距离，以在固定在所述静电卡盘上的所述基板上沉积薄膜; 从所述静电卡盘将分离完成了沉积处理的基板的卸载单元; 顺序地将固定有基板的静电卡盘移动到加载单元，沉积单元和卸载单元的第一循环单元; 以及第二循环单元，将从所述基板分离的所述静电卡盘从所述卸载单元返回到所述装载单元，其中，所述第一循环单元在通过所述沉积单元时通过所述室。

公开(公告)号：US20110052791A1

公开(公告)日：2011-03-03

申请号：US12869830

申请日：2010-08-27

申请人： Chang-Mog JO ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

发明人： Chang-Mog JO ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

IPC分类号： C23C16/52 ,  B05C11/00 ,  B05D3/00 ,  B05D5/00

CPC分类号： H01L33/005 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  C23C14/246 ,  C23C14/568 ,  H01L21/67173 ,  H01L21/67225 ,  H01L21/67236 ,  H01L21/6831 ,  H01L27/3211 ,  H01L51/001 ,  H01L51/0011 ,  H01L51/56

摘要： A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus includes a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit passes through the chamber when passing through the deposition unit.

摘要翻译： 一种薄膜沉积装置，用于大规模制造大型基板并允许高分辨率图案化，以及制造使用其的有机发光显示装置的方法，该装置包括将基板固定在静电上的装载单元 卡盘 沉积单元，其包括保持在真空状态的室和设置在所述室中的薄膜沉积组件，其与所述基板隔开预定距离，以在固定在所述静电卡盘上的所述基板上沉积薄膜; 从所述静电卡盘将分离完成了沉积处理的基板的卸载单元; 顺序地将固定有基板的静电卡盘移动到加载单元，沉积单元和卸载单元的第一循环单元; 以及第二循环单元，其将从所述基板分离的所述静电卡盘从所述卸载单元返回到所述装载单元，其中所述第一循环单元在通过所述沉积单元时通过所述室。

公开(公告)号：US20110165320A1

公开(公告)日：2011-07-07

申请号：US12820355

申请日：2010-06-22

申请人： Yong-Sup CHOI ,  Hee-Cheol Kang ,  Young-Mook Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

发明人： Yong-Sup CHOI ,  Hee-Cheol Kang ,  Young-Mook Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

IPC分类号： B05D5/06 ,  C23C16/00 ,  C23C16/44

CPC分类号： C23C14/243 ,  C23C14/12 ,  H01L51/0008 ,  H01L51/56

摘要： A deposition source, a thin film deposition apparatus, and a method of manufacturing an organic light-emitting display apparatus, the deposition source including: a crucible to hold a deposition material; a heater to heat the deposition material; a nozzle unit disposed at a side of the crucible; a first connector disposed between the crucible and the nozzle unit; a first valve disposed on the first connector to control the flow of the deposition material to the nozzle unit; a deposition material recovery unit to collect the deposition material; a second connector to connect the first connector to the deposition material recovery unit; and a second valve to control the flow of the deposition material through the second connector.

摘要翻译： 沉积源，薄膜沉积设备和制造有机发光显示设备的方法，所述沉积源包括：用于保持沉积材料的坩埚; 用于加热沉积材料的加热器; 布置在所述坩埚的一侧的喷嘴单元; 设置在所述坩埚和所述喷嘴单元之间的第一连接器; 设置在所述第一连接器上以控制所述沉积材料流到所述喷嘴单元的第一阀; 沉积材料回收单元，用于收集沉积材料; 将第一连接器连接到沉积材料回收单元的第二连接器; 以及第二阀，以控制通过第二连接器的沉积材料的流动。

公开(公告)号：US08696815B2

公开(公告)日：2014-04-15

申请号：US12873689

申请日：2010-09-01

申请人： Young-Mook Choi ,  Chang-Mog Jo ,  Hee-Cheol Kang ,  Hyun-Sook Park

发明人： Young-Mook Choi ,  Chang-Mog Jo ,  Hee-Cheol Kang ,  Hyun-Sook Park

IPC分类号： C23C16/00

CPC分类号： C23C16/52 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  H01L51/0011 ,  H01L51/56

摘要： A thin film deposition apparatus that forms a thin film on a substrate includes: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits; and a blocking member that is disposed between the substrate and the deposition source, wherein the thin film deposition apparatus is separated from the substrate by a predetermined distance, the substrate is moved relative to the thin film deposition apparatus, and the blocking member is moved along with the substrate to screen at least one portion of the substrate.

摘要翻译： 在衬底上形成薄膜的薄膜沉积装置包括：放电沉积材料的沉积源; 沉积源喷嘴单元，其设置在所述沉积源的一侧并且包括多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对设置并且包括多个图案化缝隙; 以及设置在所述基板和所述沉积源之间的阻挡构件，其中所述薄膜沉积设备与所述基板分离预定距离，所述基板相对于所述薄膜沉积设备移动，并且所述阻挡构件沿着 其中所述衬底筛选所述衬底的至少一部分。

公开(公告)号：US08486737B2

公开(公告)日：2013-07-16

申请号：US12856942

申请日：2010-08-16

申请人： Yun-Mi Lee ,  Yong-Sup Choi ,  Hyun-Sook Park ,  Jong-Heon Kim ,  Jae-Kwang Ryu ,  Young-Mook Choi

发明人： Yun-Mi Lee ,  Yong-Sup Choi ,  Hyun-Sook Park ,  Jong-Heon Kim ,  Jae-Kwang Ryu ,  Young-Mook Choi

IPC分类号： H01L21/00 ,  H01L21/31 ,  H01L21/469 ,  B05B15/02 ,  B05B15/04 ,  C23C16/00

CPC分类号： C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  H01L27/3244 ,  H01L51/0005 ,  H01L51/56

摘要： A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device by using the same, and more particularly, to a thin film deposition apparatus that can remove a deposition material deposited on a patterning slit sheet without performing an additional cleaning process, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.

摘要翻译： 一种薄膜沉积装置及其制造方法，更具体地说涉及一种薄膜沉积装置，其能够除去沉积在图案化缝隙片上的沉积材料，而不进行额外的清洁处理 以及使用该薄膜沉积装置制造有机发光显示装置的方法。

公开(公告)号：US20110053296A1

公开(公告)日：2011-03-03

申请号：US12856942

申请日：2010-08-16

申请人： Yun-Mi Lee ,  Yong-Sup Choi ,  Hyun-Sook Park ,  Jong-Heon Kim ,  Jae-Kwang Ryu ,  Young-Mook Choi

发明人： Yun-Mi Lee ,  Yong-Sup Choi ,  Hyun-Sook Park ,  Jong-Heon Kim ,  Jae-Kwang Ryu ,  Young-Mook Choi

IPC分类号： H01L51/56

CPC分类号： C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  H01L27/3244 ,  H01L51/0005 ,  H01L51/56

摘要： A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device by using the same, and more particularly, to a thin film deposition apparatus that can remove a deposition material deposited on a patterning slit sheet without performing an additional cleaning process, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.

摘要翻译： 一种薄膜沉积装置及其制造方法，更具体地说涉及一种薄膜沉积装置，其能够除去沉积在图案化缝隙片上的沉积材料，而不进行额外的清洁处理 以及使用该薄膜沉积装置制造有机发光显示装置的方法。

公开(公告)号：US20110220022A1

公开(公告)日：2011-09-15

申请号：US13014225

申请日：2011-01-26

申请人： Jong-Won HONG ,  Seok-Rak Chang ,  Chang-Mog Jo ,  Young-Mook Choi ,  Jae-Kwang Ryu

发明人： Jong-Won HONG ,  Seok-Rak Chang ,  Chang-Mog Jo ,  Young-Mook Choi ,  Jae-Kwang Ryu

IPC分类号： B05C11/00 ,  B05B1/28 ,  B05C11/11

CPC分类号： C23C16/52 ,  C23C14/042 ,  C23C14/243 ,  C23C14/54 ,  C23C14/568 ,  C23C16/042 ,  H01L51/5253 ,  H01L51/56

摘要： A thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in the first direction; a position detection member that detects a relative position of the substrate to the patterning slit sheet; and an alignment control member that controls a relative position of the patterning slit sheet to the substrate by using the relative position of the substrate detected by the position detection member, wherein the thin film deposition apparatus and the substrate are separated from each other, and the thin film deposition apparatus and the substrate are moved relative to each other.

摘要翻译： 薄膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的多个图案化狭缝; 位置检测构件，其检测所述基板与所述图案化缝隙片的相对位置; 以及对准控制部件，其通过使用由所述位置检测部件检测出的所述基板的相对位置来控制所述图案化狭缝片材与所述基板的相对位置，其中所述薄膜沉积设备和所述基板彼此分离， 薄膜沉积设备和基板相对于彼此移动。

公开(公告)号：US08973525B2

公开(公告)日：2015-03-10

申请号：US13014225

申请日：2011-01-26

申请人： Jong-Won Hong ,  Seok-Rak Chang ,  Chang-Mog Jo ,  Young-Mook Choi ,  Jae-Kwang Ryu

发明人： Jong-Won Hong ,  Seok-Rak Chang ,  Chang-Mog Jo ,  Young-Mook Choi ,  Jae-Kwang Ryu

IPC分类号： C23C16/00 ,  B05C11/00 ,  C23C14/04 ,  C23C14/24 ,  C23C14/54 ,  C23C14/56 ,  H01L51/52 ,  H01L51/56

CPC分类号： C23C16/52 ,  C23C14/042 ,  C23C14/243 ,  C23C14/54 ,  C23C14/568 ,  C23C16/042 ,  H01L51/5253 ,  H01L51/56

摘要： A thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in the first direction; a position detection member that detects a relative position of the substrate to the patterning slit sheet; and an alignment control member that controls a relative position of the patterning slit sheet to the substrate by using the relative position of the substrate detected by the position detection member, wherein the thin film deposition apparatus and the substrate are separated from each other, and the thin film deposition apparatus and the substrate are moved relative to each other.

摘要翻译： 薄膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的多个图案化狭缝; 位置检测构件，其检测所述基板与所述图案化缝隙片的相对位置; 以及对准控制部件，其通过使用由所述位置检测部件检测出的所述基板的相对位置来控制所述图案化狭缝片材与所述基板的相对位置，其中所述薄膜沉积设备和所述基板彼此分离， 薄膜沉积设备和基板相对于彼此移动。

公开(公告)号：US09234270B2

公开(公告)日：2016-01-12

申请号：US13466886

申请日：2012-05-08

申请人： Young-Mook Choi ,  Jong-Heon Kim ,  Mu-Hyun Kim ,  Beohm Rock Choi

发明人： Young-Mook Choi ,  Jong-Heon Kim ,  Mu-Hyun Kim ,  Beohm Rock Choi

IPC分类号： B05D5/12 ,  C23C14/24 ,  H01J9/22 ,  C23C14/50 ,  H01L21/67 ,  H01L21/683

CPC分类号： C23C14/24 ,  C23C14/243 ,  C23C14/50 ,  H01J9/221 ,  H01L21/67173 ,  H01L21/6831

摘要： An electrostatic chuck, a thin film deposition apparatus including the electrostatic chuck, and a method of manufacturing an organic light emitting display apparatus using the thin film deposition apparatus. The electrostatic chuck includes: a first plate; a first common wire disposed on the first plate and electrically connected to a plus terminal of an electric power source; first electrode patterns electrically connected to the first common wire, separated by a distance from each other, and extending from the first common wire; a second common wire disposed on the first plate and electrically connected to a minus terminal of the electric power source; second electrode patterns electrically connected to the second common wire, separated by a distance from each other, and extending from the second common wire; a first additional wire electrically connected to the first common wire; and a second additional wire electrically connected to the second common wire.

摘要翻译： 一种静电吸盘，包括静电吸盘的薄膜沉积设备，以及使用该薄膜沉积设备制造有机发光显示设备的方法。 静电卡盘包括：第一板; 布置在第一板上并电连接到电源的正端的第一公共线; 第一电极图案，电连接到第一公共线，彼此间隔一段距离，并从第一公共线延伸; 第二公共线，设置在所述第一板上并电连接到所述电源的负端子; 电连接到第二公共线的第二电极图案彼此隔开一段距离，并从第二公共线延伸; 电连接到第一公共线的第一附加线; 以及电连接到第二公共线的第二附加线。