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    Thin film deposition apparatus
    1.
    发明授权
    Thin film deposition apparatus 有权
    薄膜沉积装置

    公开(公告)号：US08973525B2

    公开(公告)日：2015-03-10

    申请号：US13014225

    申请日：2011-01-26

    申请人： Jong-Won Hong ,  Seok-Rak Chang ,  Chang-Mog Jo ,  Young-Mook Choi ,  Jae-Kwang Ryu

    发明人： Jong-Won Hong ,  Seok-Rak Chang ,  Chang-Mog Jo ,  Young-Mook Choi ,  Jae-Kwang Ryu

    IPC分类号： C23C16/00 ,  B05C11/00 ,  C23C14/04 ,  C23C14/24 ,  C23C14/54 ,  C23C14/56 ,  H01L51/52 ,  H01L51/56

    CPC分类号： C23C16/52 ,  C23C14/042 ,  C23C14/243 ,  C23C14/54 ,  C23C14/568 ,  C23C16/042 ,  H01L51/5253 ,  H01L51/56

    摘要： A thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in the first direction; a position detection member that detects a relative position of the substrate to the patterning slit sheet; and an alignment control member that controls a relative position of the patterning slit sheet to the substrate by using the relative position of the substrate detected by the position detection member, wherein the thin film deposition apparatus and the substrate are separated from each other, and the thin film deposition apparatus and the substrate are moved relative to each other.

    摘要翻译： 薄膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的多个图案化狭缝; 位置检测构件，其检测所述基板与所述图案化缝隙片的相对位置; 以及对准控制部件，其通过使用由所述位置检测部件检测出的所述基板的相对位置来控制所述图案化狭缝片材与所述基板的相对位置，其中所述薄膜沉积设备和所述基板彼此分离， 薄膜沉积设备和基板相对于彼此移动。

    THIN FILM DEPOSITION APPARATUS
    2.
    发明申请
    THIN FILM DEPOSITION APPARATUS 有权
    薄膜沉积装置

    公开(公告)号：US20110220022A1

    公开(公告)日：2011-09-15

    申请号：US13014225

    申请日：2011-01-26

    申请人： Jong-Won HONG ,  Seok-Rak Chang ,  Chang-Mog Jo ,  Young-Mook Choi ,  Jae-Kwang Ryu

    发明人： Jong-Won HONG ,  Seok-Rak Chang ,  Chang-Mog Jo ,  Young-Mook Choi ,  Jae-Kwang Ryu

    IPC分类号： B05C11/00 ,  B05B1/28 ,  B05C11/11

    CPC分类号： C23C16/52 ,  C23C14/042 ,  C23C14/243 ,  C23C14/54 ,  C23C14/568 ,  C23C16/042 ,  H01L51/5253 ,  H01L51/56

    摘要： A thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in the first direction; a position detection member that detects a relative position of the substrate to the patterning slit sheet; and an alignment control member that controls a relative position of the patterning slit sheet to the substrate by using the relative position of the substrate detected by the position detection member, wherein the thin film deposition apparatus and the substrate are separated from each other, and the thin film deposition apparatus and the substrate are moved relative to each other.

    摘要翻译： 薄膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的多个图案化狭缝; 位置检测构件，其检测所述基板与所述图案化缝隙片的相对位置; 以及对准控制部件，其通过使用由所述位置检测部件检测出的所述基板的相对位置来控制所述图案化狭缝片材与所述基板的相对位置，其中所述薄膜沉积设备和所述基板彼此分离， 薄膜沉积设备和基板相对于彼此移动。

    Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
    6.
    发明授权
    Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same 有权
    薄膜沉积装置及使用该有机发光显示装置的方法

    公开(公告)号：US08865252B2

    公开(公告)日：2014-10-21

    申请号：US13031756

    申请日：2011-02-22

    申请人： Yong Sup Choi ,  Myeng-Woo Nam ,  Jong-Won Hong ,  Seok-Rak Chang ,  Eun-Sun Choi

    发明人： Yong Sup Choi ,  Myeng-Woo Nam ,  Jong-Won Hong ,  Seok-Rak Chang ,  Eun-Sun Choi

    IPC分类号： C23C16/00 ,  B05D5/06 ,  H01L21/677 ,  H01L51/56 ,  H01L21/67 ,  H01L21/673 ,  H01L21/687

    CPC分类号： H01L21/6776 ,  H01L21/67173 ,  H01L21/6732 ,  H01L21/68764 ,  H01L51/56

    摘要： A thin film deposition apparatus that can be easily used to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus. The thin film deposition apparatus includes: a loading unit to place a substrate, which is a deposition target, on an electrostatic chuck; a deposition unit including a chamber, and a thin film deposition assembly that is disposed in the chamber and forms a thin film on the substrate placed on the electrostatic chuck; an unloading unit to separate the substrate on which deposition is completed from the electrostatic chuck; a first conveyor unit to sequentially move the electrostatic chuck having the substrate thereon to the loading unit, to the deposition unit, and finally, to the unloading unit, wherein the first conveyor unit includes: one pair of first guide rails and one pair of second guide rails disposed in parallel; at least one first guide block engaged with the first guide rails, respectively; and at least one second guide block engaged with the second guide rails, respectively.

    摘要翻译： 可以容易地用于大规模制造大尺寸显示装置并提高制造成品率的薄膜沉积装置，以及通过使用薄膜沉积装置制造有机发光显示装置的方法。 薄膜沉积装置包括：装载单元，将作为沉积靶的基板放置在静电卡盘上; 包括室的沉积单元和设置在室中并在放置在静电卡盘上的基板上形成薄膜的薄膜沉积组件; 卸载单元，用于将其上完成了沉积的基板从静电卡盘分离; 第一传送单元，其顺序地将其上具有基板的静电卡盘移动到装载单元，到沉积单元，最后到达卸载单元，其中第一传送单元包括：一对第一导轨和一对第二传送单元 平行布置的导轨; 分别与所述第一导轨接合的至少一个第一引导块; 以及分别与第二导轨接合的至少一个第二引导块。

    THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME
    9.
    发明申请
    THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME 有权
    薄膜沉积装置及使用其制造有机发光显示装置的方法

    公开(公告)号：US20110244120A1

    公开(公告)日：2011-10-06

    申请号：US13031756

    申请日：2011-02-22

    申请人： Yong Sup CHOI ,  Myeng-Woo Nam ,  Jong-Won Hong ,  Seok-Rak Chang ,  Eun-Sun Choi

    发明人： Yong Sup CHOI ,  Myeng-Woo Nam ,  Jong-Won Hong ,  Seok-Rak Chang ,  Eun-Sun Choi

    IPC分类号： B05D5/06 ,  B05C13/00 ,  B05B1/00 ,  B05B15/04

    CPC分类号： H01L21/6776 ,  H01L21/67173 ,  H01L21/6732 ,  H01L21/68764 ,  H01L51/56

    摘要： A thin film deposition apparatus that can be easily used to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus. The thin film deposition apparatus includes: a loading unit to place a substrate, which is a deposition target, on an electrostatic chuck; a deposition unit including a chamber, and a thin film deposition assembly that is disposed in the chamber and forms a thin film on the substrate placed on the electrostatic chuck; an unloading unit to separate the substrate on which deposition is completed from the electrostatic chuck; a first conveyor unit to sequentially move the electrostatic chuck having the substrate thereon to the loading unit, to the deposition unit, and finally, to the unloading unit, wherein the first conveyor unit includes: one pair of first guide rails and one pair of second guide rails disposed in parallel; at least one first guide block engaged with the first guide rails, respectively; and at least one second guide block engaged with the second guide rails, respectively.

    摘要翻译： 可以容易地用于大规模制造大尺寸显示装置并提高制造成品率的薄膜沉积装置，以及通过使用薄膜沉积装置制造有机发光显示装置的方法。 薄膜沉积装置包括：装载单元，将作为沉积靶的基板放置在静电卡盘上; 包括室的沉积单元和设置在室中并在放置在静电卡盘上的基板上形成薄膜的薄膜沉积组件; 卸载单元，用于将其上完成了沉积的基板从静电卡盘分离; 第一传送单元，其顺序地将其上具有基板的静电卡盘移动到装载单元，到沉积单元，最后到达卸载单元，其中第一传送单元包括：一对第一导轨和一对第二传送单元 平行布置的导轨; 分别与所述第一导轨接合的至少一个第一引导块; 以及分别与第二导轨接合的至少一个第二引导块。