公开(公告)号：US07110628B2

公开(公告)日：2006-09-19

申请号：US10619203

申请日：2003-07-14

申请人： Chee Wei Wong ,  George Barbastathis ,  Sang-Gook Kim

发明人： Chee Wei Wong ,  George Barbastathis ,  Sang-Gook Kim

IPC分类号： G02B6/12 ,  G02B6/10

CPC分类号： B82Y20/00 ,  G02B6/12007 ,  G02B6/1225 ,  G02F1/011 ,  G02F1/0128

摘要： A microphotonic device is provided. The microphotonic device includes a membrane structure that can experience strain. A waveguide element is formed on the membrane structure so that when the membrane structure is strained, the waveguide element elements are tuned to a selective amount.

摘要翻译： 提供微电子装置。 微电子器件包括可以经受应变的膜结构。 波导元件形成在膜结构上，使得当膜结构变形时，将波导元件元件调谐到选择量。

公开(公告)号：US06975459B2

公开(公告)日：2005-12-13

申请号：US10387026

申请日：2003-03-12

申请人： George Barbastathis ,  Sang-Gook Kim ,  Wei-Chuan Shih ,  Chee Wei Wong ,  Yong-Bae Jeon

发明人： George Barbastathis ,  Sang-Gook Kim ,  Wei-Chuan Shih ,  Chee Wei Wong ,  Yong-Bae Jeon

IPC分类号： G02B5/18 ,  G02B5/32 ,  G02B26/08 ,  G03H1/04 ,  G03H1/22

CPC分类号： G03H1/0248 ,  G02B5/1828 ,  G02B5/32 ,  G02B26/0808 ,  G03H1/0402 ,  G03H1/22 ,  G03H1/2294 ,  G03H2225/13 ,  G03H2225/23 ,  G03H2225/24

摘要： A volume diffractive composite is disclosed for providing illumination at a first output angle. The volume diffractive composite comprises a first plurality of grating elements that are mutually spaced from another in a first position with a first spacing period along a first plane, and an actuation unit for changing at least one of the position or the spacing period of the first plurality of grating elements to a second position or spacing period to provide illumination at a second output angle.

摘要翻译： 公开了用于以第一输出角提供照明的体积衍射复合物。 所述体积衍射复合物包括第一多个光栅元件，所述第一多个光栅元件在第一位置与第一多个光栅元件相互间隔，所述第一多个光栅元件具有沿着第一平面的第一间隔周期;以及致动单元，用于改变所述第一和第二间隔周期的至少一个 多个光栅元件到第二位置或间隔周期以提供第二输出角度的照明。

公开(公告)号：US07092606B2

公开(公告)日：2006-08-15

申请号：US10620072

申请日：2003-07-15

申请人： Chee Wei Wong ,  Steven G. Johnson ,  George Barbastathis ,  Sang-Gook Kim

发明人： Chee Wei Wong ,  Steven G. Johnson ,  George Barbastathis ,  Sang-Gook Kim

IPC分类号： G02B6/10

CPC分类号： B82Y20/00 ,  G02B6/1225 ,  G02F1/011 ,  G02F1/0128

摘要： A photonic bandgap microcavity is provided. The microcavity includes a membrane structure that can experience strain. A photonic bandgap waveguide element is formed on the membrane structure having a defect so that when the membrane structure is strained, the photonic bandgap waveguide element is tuned to a selective amount.

摘要翻译： 提供了光子带隙微腔。 微腔包括可以经受应变的膜结构。 在具有缺陷的膜结构上形成光子带隙波导元件，使得当膜结构变形时，将光子带隙波导元件调谐到选择量。

公开(公告)号：US09256202B2

公开(公告)日：2016-02-09

申请号：US13476768

申请日：2012-05-21

申请人： George Barbastathis ,  Yuan Luo

发明人： George Barbastathis ,  Yuan Luo

IPC分类号： G03H1/10 ,  G03H1/12 ,  G02B5/32 ,  G03H1/00 ,  G03H1/02 ,  G03H1/22 ,  G03H1/28 ,  G03H1/26

CPC分类号： G03H1/0005 ,  G02B5/32 ,  G03H1/0248 ,  G03H1/2286 ,  G03H1/28 ,  G03H2001/2675

摘要： A volume holographic imaging system enables the projection of a two-dimensional (2D) slice of a four-dimensional (4D) object. The 4D source object is illuminated to emit or scatter an optical field. A holographic element having one or more recorded holograms receives and diffracts the optical field into a diffracted plane beam. A phase mask is encoded in one or more multiplexed holographic gratings of the holographic element using a spatial filter. A collector lens focuses the diffracted plane beam to a 2D slice of the 4D probing source object. The focused 2D slice is projected onto a 2D imaging plane. The holographic element may have multiple multiplexed holograms that are arranged to diffract light from a corresponding slice of the 4D probing source object to a non-overlapping region of the detector.

摘要翻译： 体积全息成像系统能够投影四维（4D）物体的二维（2D）切片。 4D源对象被照亮以发射或散射光场。 具有一个或多个记录的全息图的全息元件接收衍射光学衍射到衍射平面光束。 使用空间滤波器将相位掩模编码在全息元件的一个或多个复用全息光栅中。 收集透镜将衍射平面光束聚焦到4D探测源对象的2D切片。 聚焦的2D切片投影到2D成像平面上。 全息元件可以具有多个复用全息图，其被布置成将来自4D探测源对象的相应切片的光衍射到检测器的非重叠区域。

公开(公告)号：US20130025322A1

公开(公告)日：2013-01-31

申请号：US13446053

申请日：2012-04-13

申请人： Hyungryul Choi ,  Chih-Hao Chang ,  Kyoo Chul Park ,  Gareth H. McKinley ,  George Barbastathis ,  Jeong-gil Kim

发明人： Hyungryul Choi ,  Chih-Hao Chang ,  Kyoo Chul Park ,  Gareth H. McKinley ,  George Barbastathis ,  Jeong-gil Kim

IPC分类号： C03C15/00 ,  C03B13/16 ,  C03B13/08

CPC分类号： B81C1/00111 ,  B81C1/00103 ,  B81C2201/0132

摘要： Fabrication method. At least first and second hardmasks are deposited on a substrate, the thickness and materials of the first and second hardmask selected to provided etch selectivity with respect to the substrate. A nanoscale pattern of photoresist is created on the first hardmask and the hardmask is etched through to create the nanoscale pattern on a second hardmask. The second hardmask is etched through to create the desired taper nanocone structures in the substrate. Reactive ion etching is preferred. A glass manufacturing process using a roller imprint module is also disclosed.

摘要翻译： 制作方法。 至少第一和第二硬掩模沉积在衬底上，第一和第二硬掩模的厚度和材料被选择为提供相对于衬底的蚀刻选择性。 在第一硬掩模上形成光刻胶的纳米尺度图案，并且硬掩模被蚀刻穿过以在第二硬掩模上产生纳米尺度图案。 蚀刻第二个硬掩模，以在衬底中产生所需的锥形纳米结构。 反应离子蚀刻是优选的。 还公开了使用辊压印模块的玻璃制造工艺。

公开(公告)号：US07486163B2

公开(公告)日：2009-02-03

申请号：US10979350

申请日：2004-11-02

申请人： Gregory N. Nielson ,  George Barbastathis

发明人： Gregory N. Nielson ,  George Barbastathis

IPC分类号： H01H51/22

CPC分类号： H01H59/0009 ,  H01H47/00 ,  H01H2059/0054

摘要： An electro-mechanical switch structure includes at least one fixed electrode and a free electrode which is movable in the structure with a voltage potential applied between each fixed electrode and the free, movable electrode. The voltage potentials applied between each fixed electrode and the movable electrode are modulated to actuate the electro-mechanical switch structure.

摘要翻译： 机电开关结构包括至少一个固定电极和自由电极，其可在结构中移动，其中施加有电压电位在每个固定电极和自由的可动电极之间。 施加在每个固定电极和可动电极之间的电压被调制以致动机电开关结构。

公开(公告)号：US07477812B2

公开(公告)日：2009-01-13

申请号：US11110511

申请日：2005-04-20

申请人： Gregory N. Nielson ,  George Barbastathis

发明人： Gregory N. Nielson ,  George Barbastathis

IPC分类号： G02B6/26

CPC分类号： G02B6/3508 ,  G02B6/12007 ,  G02B6/2773 ,  G02B6/28 ,  G02B6/3504 ,  G02B6/3536 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3594 ,  G02B6/3596

摘要： A switching system is disclosed for an optical signal. The switching system includes a first optical waveguide coupled to a first electrode, a second electrode, and a second optical waveguide. The second optical waveguide is coupled to a movable electrode. The movable electrode is supported by a support structure and is positioned with respect to the first and second electrodes so that the position of the movable electrode may be selectively placed in either a first closed state or a second open state defined by the first and second electrodes under application of a voltage with respect to one of the first and second electrodes. The first closed state provides that the first and second optical waveguides are sufficiently close to each other to provide optical coupling therebetween while the second open state provides that the first and second optical communication channels are not sufficiently close to each other to provide optical coupling therebetween, or provide some different amount of optical coupling than in the first closed state.

摘要翻译： 公开了一种用于光信号的交换系统。 开关系统包括耦合到第一电极，第二电极和第二光波导的第一光波导。 第二光波导耦合到可动电极。 可移动电极由支撑结构支撑并且相对于第一和第二电极定位，使得可动电极的位置可以选择性地放置在由第一和第二电极限定的第一闭合状态或第二开放状态 在相对于所述第一和第二电极之一施加电压的情况下。 第一闭合状态规定，第一和第二光波导彼此充分接近以在其间提供光耦合，而第二开放状态规定第一和第二光通信通道彼此之间不足够靠近以提供光耦合， 或提供与第一关闭状态相比不同量的光耦合。

公开(公告)号：US07250837B2

公开(公告)日：2007-07-31

申请号：US10979706

申请日：2004-11-02

申请人： Gregory N. Nielson ,  George Barbastathis

发明人： Gregory N. Nielson ,  George Barbastathis

IPC分类号： H01H51/22

CPC分类号： H01H59/0009 ,  H01H2001/0042 ,  H01H2057/006 ,  H01H2059/0036 ,  H01H2059/0063

摘要： The electro-mechanical micro-switch device includes first and second fixed electrodes. A movable electrode is positioned with respect to the first and second fixed electrodes so that the position of the movable electrode can be selectively placed in one of two opposing states defined by the fixed electrodes. The stored elastic potential energy of the movable electrode and its flexible supporting structure is used for switching between the two states. An electrostatic hold voltage is used to hold the movable electrode in the two switch states.

摘要翻译： 机电微开关装置包括第一和第二固定电极。 可移动电极相对于第一固定电极和第二固定电极定位，使得可动电极的位置可以选择性地放置在由固定电极限定的两个相对状态之一中。 可动电极及其柔性支撑结构的储能弹性势能用于两种状态之间的切换。 静电保持电压用于将可动电极保持在两个开关状态。

公开(公告)号：US20060186355A1

公开(公告)日：2006-08-24

申请号：US11347138

申请日：2006-02-03

申请人： Henry Smith ,  George Barbastathis ,  Rajesh Menon

发明人： Henry Smith ,  George Barbastathis ,  Rajesh Menon

IPC分类号： G21K5/10

CPC分类号： G03F7/70291 ,  G03F7/70275 ,  G03F7/70283 ,  G03F7/70316 ,  G03F7/70358

摘要： A lithography system includes a source of radiation energy and a zone plate array to focus the radiation energy to create an array of images in order to produce a permanent pattern on a substrate. A phase-shift mask is optically located between the source of radiation energy and the zone plate array. The modulated wavefront produced by the phase-shift mask alters the field diffracted by the zone plate array, and the center lobe of the point-spread function narrows as a result.

摘要翻译： 光刻系统包括辐射能量源和区板阵列，以聚焦辐射能量以产生图像阵列，以便在衬底上产生永久性图案。 相移掩模光学地位于辐射能源和区板阵列之间。 由相移掩模产生的调制波前改变由区域阵列衍射的场，结点是扩散函数的中心波瓣变窄。

公开(公告)号：US06433911B1

公开(公告)日：2002-08-13

申请号：US09574267

申请日：2000-05-19

申请人： Dye-Zone A. Chen ,  George Barbastathis

发明人： Dye-Zone A. Chen ,  George Barbastathis

IPC分类号： G02B2608

CPC分类号： G02B6/3522 ,  G02B6/29307 ,  G02B6/2931 ,  G02B6/29311 ,  G02B6/29383 ,  G02B6/29395 ,  G02B6/3516 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/4215 ,  G02B26/02

摘要： A micro-opto-electro-mechanical systems (MOEMS) modulator based on the phenomenon of frustrated total internal reflection (FTIR). The modulator effects amplitude and phase modulation at the boundary of a waveguide. Wavelength-specific switching is achieved by spatially separating the wavelength channels by dispersing a broadband input signal into its wavelength components through a grating. In exemplary embodiments, an array of micro-fabricated actuators is used to switch or modulate wavelengths individually. Applications include wavelength and space-resolved phase and amplitude modulation of optical beams, and re-configurable add/drop switching of dense wavelength-division multiplexed (DWDM) optical communication signals.

摘要翻译： 基于沮丧全内反射（FTIR）现象的微光机电系统（MOEMS）调制器。 调制器在波导的边界处实现幅度和相位调制。 通过通过光栅将宽带输入信号分散到其波长分量中，通过空间分离波长信道来实现波长特定的切换。 在示例性实施例中，微制造致动器的阵列用于单独地切换或调制波长。 应用包括光束的波长和空间分辨相位和幅度调制，以及密集波分复用（DWDM）光通信信号的可重新配置的分插交换。