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6 条记录 (耗时 0.043 秒)

    QUALITATIVE FAULT DETECTION AND CLASSIFICATION SYSTEM FOR TOOL CONDITION MONITORING AND ASSOCIATED METHODS
    2.
    发明申请
    QUALITATIVE FAULT DETECTION AND CLASSIFICATION SYSTEM FOR TOOL CONDITION MONITORING AND ASSOCIATED METHODS 有权
    用于工具条件监测和相关方法的定性故障检测和分类系统

    公开(公告)号：US20140067324A1

    公开(公告)日：2014-03-06

    申请号：US13603079

    申请日：2012-09-04

    申请人： Chia-Tong Ho ,  Po-Feng Tsai ,  Jung-Chang Chen ,  Tze-Liang Lee ,  Jo Fei Wang ,  Jong-I Mou ,  Chin-Hsiang Lin

    发明人： Chia-Tong Ho ,  Po-Feng Tsai ,  Jung-Chang Chen ,  Tze-Liang Lee ,  Jo Fei Wang ,  Jong-I Mou ,  Chin-Hsiang Lin

    IPC分类号： G06F15/00

    CPC分类号： G05B19/4065 ,  G05B2219/37252 ,  G05B2219/45031

    摘要： The present disclosure provides various methods for tool condition monitoring, including systems for implementing such monitoring. An exemplary method includes receiving data associated with a process performed on wafers by an integrated circuit manufacturing process tool; and monitoring a condition of the integrated circuit manufacturing process tool using the data. The monitoring includes evaluating the data based on an abnormality identification criterion, an abnormality filtering criterion, and an abnormality threshold to determine whether the data meets an alarm threshold. The method may further include issuing an alarm when the data meets the alarm threshold.

    摘要翻译： 本公开提供了用于工具状态监测的各种方法，包括用于实现这种监视的系统。 一种示例性方法包括：通过集成电路制造工艺工具接收与在晶片上执行的处理相关联的数据; 以及使用该数据来监视集成电路制造工艺工具的状态。 监视包括基于异常识别标准，异常过滤标准和异常阈值来评估数据，以确定数据是否满足报警阈值。 该方法还可以包括当数据满足报警阈值时发出报警。

    Thermal fuse for fixing on a circuit board
    4.
    发明授权
    Thermal fuse for fixing on a circuit board 失效
    用于固定在电路板上的热熔丝

    公开(公告)号：US5896080A

    公开(公告)日：1999-04-20

    申请号：US058035

    申请日：1998-04-10

    申请人： Jung-Chang Chen

    发明人： Jung-Chang Chen

    IPC分类号： H01H37/76 ,  H05K1/02 ,  H05K3/34 ,  H01H85/36

    CPC分类号： H05K1/0201 ,  H01H37/761 ,  H01H2037/046 ,  H01H2037/762 ,  H05K2201/10181 ,  H05K2203/176 ,  H05K3/3421

    摘要： A thermal fuse includes a resilient coil portion with a turn of at least 360.degree.. Two spring arms have two upper portions connected to and integrally formed with two ends of the coil portion, and two lower portions extending from the upper portions and formed with two contact locations for connection to two circuit contacts of the circuit board. At least one of the contact locations is to be soldered on the circuit board. During the connection of the contact locations to the circuit contacts, the lower portions are kept in a tensed state by moving the contact locations toward each other so as to generate a biasing force to bias the lower portions away from each other.

    摘要翻译： 热熔丝包括具有至少360°的转弯的弹性线圈部分。 两个弹簧臂具有连接到线圈部分的两端并与其一体形成的两个上部，并且从上部延伸并形成有两个接触位置的两个下部，用于连接到电路板的两个电路触点。 至少一个接触位置要焊接在电路板上。 在接触位置到电路触点的连接期间，通过使接触位置朝向彼此移动而使下部保持在张紧状态，以产生偏压力，以将下部部分彼此偏压。