Redirecting optical mask for creating re-entrant nozzles
    4.
    发明授权
    Redirecting optical mask for creating re-entrant nozzles 失效
    重定向光学掩模以创建入口喷嘴

    公开(公告)号:US06387575B2

    公开(公告)日:2002-05-14

    申请号:US09865986

    申请日:2001-05-25

    IPC分类号: G03F900

    摘要: A method for manufacturing ink-jet printheads having nozzles with re-entrant profiles has the following steps. A source of electromagnetic energy is created which is then used with an optical system to produce a source of energy having a constant illumination angle on an process plane. A substrate is then exposed with the electromagnetic source to define the nozzles having the re-entrant profile. Also, apparatus for creating the constant illumination angle include an optical deflecting mask and an afocal optical system.

    摘要翻译: 用于制造具有带入口轮廓的喷嘴的喷墨打印头的方法具有以下步骤。 产生电磁能源,然后与光学系统一起使用以在处理平面上产生具有恒定照明角度的能量源。 然后用电磁源将衬底暴露以限定具有入口轮廓的喷嘴。 此外,用于产生恒定照明角度的装置包括光学偏转掩模和无焦光学系统。

    Apparatus for creating re-entrant nozzles
    5.
    发明授权
    Apparatus for creating re-entrant nozzles 失效
    用于创建入口喷嘴的装置

    公开(公告)号:US06583382B2

    公开(公告)日:2003-06-24

    申请号:US09866076

    申请日:2001-05-25

    IPC分类号: B23K2636

    摘要: A method for manufacturing ink-jet printheads having nozzles with re-entrant profiles has the following steps. A source of electromagnetic energy is created which is then used with an optical system to produce a source of energy having a constant illumination angle on an process plane. A substrate is then exposed with the electromagnetic source to define the nozzles having the re-entrant profile. Also, apparatus for creating the constant illumination angle include an optical deflecting mask and an afocal optical system.

    摘要翻译: 用于制造具有带入口轮廓的喷嘴的喷墨打印头的方法具有以下步骤。 产生电磁能源,然后与光学系统一起使用以在处理平面上产生具有恒定照明角度的能量源。 然后用电磁源将衬底暴露以限定具有入口轮廓的喷嘴。 此外,用于产生恒定照明角度的装置包括光学偏转掩模和无焦光学系统。

    Method for manufacturing a printhead with re-entrant nozzles
    6.
    发明授权
    Method for manufacturing a printhead with re-entrant nozzles 有权
    制造带有喷嘴的打印头的方法

    公开(公告)号:US06261742B1

    公开(公告)日:2001-07-17

    申请号:US09243650

    申请日:1999-02-01

    IPC分类号: B41J214

    摘要: A method for manufacturing ink-jet printheads having nozzles with re-entrant profiles has the following steps. A source of electromagnetic energy is created which is then used with an optical system to produce a source of energy having a constant illumination angle on an process plane. A substrate is then exposed with the electromagnetic source to define the nozzles having the re-entrant profile. Also, apparatus for creating the constant illumination angle include an optical deflecting mask and an afocal optical system.

    摘要翻译: 用于制造具有带入口轮廓的喷嘴的喷墨打印头的方法具有以下步骤。 产生电磁能源,然后与光学系统一起使用以在处理平面上产生具有恒定照明角度的能量源。 然后用电磁源将衬底暴露以限定具有入口轮廓的喷嘴。 此外,用于产生恒定照明角度的装置包括光学偏转掩模和无焦光学系统。