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公开(公告)号:US20120244704A1
公开(公告)日:2012-09-27
申请号:US13489137
申请日:2012-06-05
申请人: Chien-Teh KAO , Jing-Pei(Connie) CHOU , Chiukin(Steven) LAI , Sal UMOTOY , Joel M. HUSTON , Son TRINH , Mei CHANG , Xiaoxiong (John) YUAN , Yu CHANG , Xinliang LU , Wei W. WANG , See-Eng PHAN
发明人: Chien-Teh KAO , Jing-Pei(Connie) CHOU , Chiukin(Steven) LAI , Sal UMOTOY , Joel M. HUSTON , Son TRINH , Mei CHANG , Xiaoxiong (John) YUAN , Yu CHANG , Xinliang LU , Wei W. WANG , See-Eng PHAN
IPC分类号: H01L21/3205
CPC分类号: H01L21/02104 , C23C14/022 , C23C14/50 , C23C14/541 , H01J37/32082 , H01J37/32357 , H01J37/3244 , H01J37/32522 , H01J37/32541 , H01J37/32568 , H01J37/32862 , H01J2237/2001 , H01L21/67069 , H01L21/67109 , H01L2924/0002 , H01L2924/00
摘要: A method for removing native oxides from a substrate surface is provided. In one embodiment, the method comprises positioning a substrate having an oxide layer into a processing chamber, exposing the substrate to a gas mixture while forming a volatile film on the substrate and maintaining the substrate at a temperature below 65° C., heating the substrate to a temperature of at least about 75° C. to sublimate the volatile film and remove the oxide layer, and depositing a first layer on the substrate after heating the substrate.
摘要翻译: 提供了从衬底表面去除天然氧化物的方法。 在一个实施例中,该方法包括将具有氧化物层的衬底定位到处理室中,将衬底暴露于气体混合物,同时在衬底上形成挥发性膜并将衬底保持在低于65℃的温度下,加热衬底 达到至少约75℃的温度以使挥发性膜升华并去除氧化物层,并且在加热基材之后在基板上沉积第一层。
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2.
公开(公告)号:US20140066609A1
公开(公告)日:2014-03-06
申请号:US13604353
申请日:2012-09-05
申请人: Kuei-Lin LU , Yu CHANG , Cheng-Fang HSU , Mei-Hui WANG , Wuu-Jyh LIN
发明人: Kuei-Lin LU , Yu CHANG , Cheng-Fang HSU , Mei-Hui WANG , Wuu-Jyh LIN
IPC分类号: C07H15/04
摘要: A novel synthesis method of Glyco-drug radiotracer precursor is revealed. After completing synthesis of Z-Gly-ah (main structure), galactosamine GalNAc(OAc)4 is added to have coupling reaction. Then a product is separated directly from dichloromethane. Thus loss of galactosamine during extraction with liquid chromatography is reduced. Moreover, instead of trifluoroacetyl group, carbobenzoxy (abbreviated as Cbz or Z) is used as a protecting group to ensure uniformity of the phase. The cost and synthesis time are also dramatically reduced.
摘要翻译: 揭示了一种新型的糖 - 放射性示踪剂前体的合成方法。 完成Z-Gly-ah(主要结构)合成后,加入半乳糖胺GalNAc(OAc)4进行偶联反应。 然后将产物直接从二氯甲烷中分离出来。 因此,用液相色谱法提取过程中半乳糖胺的损失降低。 此外,代替三氟乙酰基,使用苄氧羰基(缩写为Cbz或Z)作为保护基,以确保相的均匀性。 成本和合成时间也大大降低。
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