Co/Ni multilayers with improved out-of-plane anisotropy for magnetic device applications
    2.
    发明授权
    Co/Ni multilayers with improved out-of-plane anisotropy for magnetic device applications 有权
    Co / Ni多层膜,具有改进的磁性器件应用的面外各向异性

    公开(公告)号:US08541855B2

    公开(公告)日:2013-09-24

    申请号:US13068398

    申请日:2011-05-10

    摘要: A MTJ for a spintronic device is disclosed and includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/Ni)n composition or the like where n is from 2 to 30. The seed layer is preferably NiCr, NiFeCr, Hf, or a composite thereof with a thickness from 10 to 100 Angstroms. Furthermore, a magnetic layer such as CoFeB may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. There may be a Ta insertion layer between the CoFeB layer and laminated layer to promote (100) crystallization in the CoFeB layer. The laminated layer may be used as a reference layer, dipole layer, or free layer in a MTJ. Annealing between 300° C. and 400° C. may be used to further enhance PMA in the laminated layer.

    摘要翻译: 公开了一种用于自旋电子器件的MTJ,并且包括薄层种子层,其通过(Co / Ni)n组合物等在上层叠层中提高垂直磁各向异性(PMA),其中n为2至30.种子层 优选为NiCr,NiFeCr,Hf,或其复合物,厚度为10〜100埃。 此外,可以在层压层和隧道势垒层之间形成诸如CoFeB的磁性层,以用作(111)层压体和(100)MgO隧道势垒之间的过渡层。 在CoFeB层和层叠层之间可以存在Ta插入层,以促进CoFeB层中的(100)结晶。 叠层可以用作MTJ中的参考层,偶极子层或自由层。 在300℃和400℃之间的退火可用于进一步增强层压层中的PMA。

    Co/Ni Multilayers with Improved Out-of-Plane Anisotropy for Magnetic Device Applications
    3.
    发明申请
    Co/Ni Multilayers with Improved Out-of-Plane Anisotropy for Magnetic Device Applications 有权
    具有改进的磁性器件应用的平面各向异性的Co / Ni多层

    公开(公告)号:US20140017820A1

    公开(公告)日:2014-01-16

    申请号:US14032599

    申请日:2013-09-20

    IPC分类号: H01L43/12

    摘要: A method for forming a MTJ in a spintronic device is disclosed and includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/Ni)n composition. The seed layer is preferably NiCr, NiFeCr, Hf, or a composite thereof. Furthermore, a magnetic layer such as CoFeB may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. There may be a Ta insertion layer between the CoFeB layer and laminated layer to promote (100) crystallization in the CoFeB layer. The laminated layer may be used as a reference layer, dipole layer, or free layer in a MTJ. Annealing between 300° C. and 400° C. may be used to further enhance PMA in the laminated layer.

    摘要翻译: 公开了一种用于在自旋电子器件中形成MTJ的方法,并且包括在(Co / Ni)n组成的上覆层压层中增强垂直磁各向异性(PMA)的薄籽晶层。 种子层优选为NiCr,NiFeCr,Hf或其复合物。 此外,可以在层压层和隧道势垒层之间形成诸如CoFeB的磁性层,以用作(111)层压体和(100)MgO隧道势垒之间的过渡层。 在CoFeB层和层叠层之间可以存在Ta插入层,以促进CoFeB层中的(100)结晶。 叠层可以用作MTJ中的参考层,偶极子层或自由层。 在300℃和400℃之间的退火可用于进一步增强层压层中的PMA。

    Co/Ni multilayers with improved out-of-plane anisotropy for magnetic device applications
    4.
    发明申请
    Co/Ni multilayers with improved out-of-plane anisotropy for magnetic device applications 有权
    Co / Ni多层膜,具有改进的磁性器件应用的面外各向异性

    公开(公告)号:US20120286382A1

    公开(公告)日:2012-11-15

    申请号:US13068398

    申请日:2011-05-10

    IPC分类号: H01L29/82 H01L21/02

    摘要: A MTJ for a spintronic device is disclosed and includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/Ni)n composition or the like where n is from 2 to 30. The seed layer is preferably NiCr, NiFeCr, Hf, or a composite thereof with a thickness from 10 to 100 Angstroms. Furthermore, a magnetic layer such as CoFeB may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. There may be a Ta insertion layer between the CoFeB layer and laminated layer to promote (100) crystallization in the CoFeB layer. The laminated layer may be used as a reference layer, dipole layer, or free layer in a MTJ. Annealing between 300° C. and 400° C. may be used to further enhance PMA in the laminated layer.

    摘要翻译: 公开了一种用于自旋电子器件的MTJ,并且包括薄层种子层,其通过(Co / Ni)n组合物等在上层叠层中提高垂直磁各向异性(PMA),其中n为2至30.种子层 优选为NiCr,NiFeCr,Hf,或其复合物,厚度为10〜100埃。 此外,可以在层压层和隧道势垒层之间形成诸如CoFeB的磁性层,以用作(111)层压体和(100)MgO隧道势垒之间的过渡层。 在CoFeB层和层叠层之间可以存在Ta插入层,以促进CoFeB层中的(100)结晶。 叠层可以用作MTJ中的参考层,偶极子层或自由层。 在300℃和400℃之间的退火可用于进一步增强层压层中的PMA。

    Co/Ni Multilayers with Improved Out-of-Plane Anisotropy for Magnetic Device Applications
    5.
    发明申请
    Co/Ni Multilayers with Improved Out-of-Plane Anisotropy for Magnetic Device Applications 有权
    具有改进的磁性器件应用的平面各向异性的Co / Ni多层

    公开(公告)号:US20140015079A1

    公开(公告)日:2014-01-16

    申请号:US14032593

    申请日:2013-09-20

    IPC分类号: H01L43/10

    摘要: A MTJ for a spintronic device is disclosed and includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/Ni)n composition or the like where n is from 2 to 30. The seed layer is preferably NiCr, NiFeCr, Hf, or a composite thereof with a thickness from 10 to 100 Angstroms. Furthermore, a magnetic layer such as CoFeB may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. There may be a Ta insertion layer between the CoFeB layer and laminated layer to promote (100) crystallization in the CoFeB layer. The laminated layer may be used as a reference layer, dipole layer, or free layer in a MTJ. Annealing between 300° C. and 400° C. may be used to further enhance PMA in the laminated layer.

    摘要翻译: 公开了一种用于自旋电子器件的MTJ,并且包括薄层种子层,其通过(Co / Ni)n组合物等在上层叠层中提高垂直磁各向异性(PMA),其中n为2至30.种子层 优选为NiCr,NiFeCr,Hf,或其复合物,厚度为10〜100埃。 此外,可以在层压层和隧道势垒层之间形成诸如CoFeB的磁性层,以用作(111)层压体和(100)MgO隧道势垒之间的过渡层。 在CoFeB层和层叠层之间可以存在Ta插入层,以促进CoFeB层中的(100)结晶。 叠层可以用作MTJ中的参考层,偶极子层或自由层。 在300℃和400℃之间的退火可用于进一步增强层压层中的PMA。