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    Spatial light modulator with integrated optical compensation structure
    1.
    发明申请
    Spatial light modulator with integrated optical compensation structure 有权
    具有集成光学补偿结构的空间光调制器

    公开(公告)号：US20050179977A1

    公开(公告)日：2005-08-18

    申请号：US11036965

    申请日：2005-01-14

    申请人： Clarence Chui ,  Jeffrey Sampsell ,  William Cummings ,  Ming-Hau Tung

    发明人： Clarence Chui ,  Jeffrey Sampsell ,  William Cummings ,  Ming-Hau Tung

    IPC分类号： G02B26/00 ,  G02F1/1335 ,  G02F1/136

    CPC分类号： G02F1/21 ,  G02B26/001 ,  G02F1/1335 ,  G02F2001/13356

    摘要： A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.

    摘要翻译： 空间光调制器包括集成的光学补偿结构，例如，布置在基板和多个可单独寻址的光调制元件之间的光学补偿结构，或位于光调制元件的相对侧上的光学补偿结构 基质。 可单独寻址的光调制元件被配置为调制透射通过或从透明基板反射的光。 制造这种空间光调制器的方法包括在衬底上制造光学补偿结构，并在光学补偿结构上制造多个单独可寻址的光调制元件。 光学补偿结构可以是无源光学补偿结构。 光学补偿结构可以包括补充前照明光源，漫射器，黑色掩模，衍射光学元件，滤色器，抗反射层，散射光的结构，微透镜阵列和全息图中的一个或多个 电影。

    SPATIAL LIGHT MODULATOR WITH INTEGRATED OPTICAL COMPENSATION STRUCTURE
    2.
    发明申请
    SPATIAL LIGHT MODULATOR WITH INTEGRATED OPTICAL COMPENSATION STRUCTURE 失效

    公开(公告)号：US20080112039A1

    公开(公告)日：2008-05-15

    申请号：US12014657

    申请日：2008-01-15

    申请人： Clarence Chui ,  Jeffrey Sampsell ,  William Cummings ,  Ming-Hau Tung

    发明人： Clarence Chui ,  Jeffrey Sampsell ,  William Cummings ,  Ming-Hau Tung

    IPC分类号： G02B26/00

    CPC分类号： G02F1/21 ,  G02B26/001 ,  G02F1/1335 ,  G02F2001/13356

    摘要： A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.

    MEMS devices having support structures and methods of fabricating the same
    3.
    发明申请
    MEMS devices having support structures and methods of fabricating the same 有权
    具有支撑结构的MEMS器件及其制造方法

    公开(公告)号：US20070047900A1

    公开(公告)日：2007-03-01

    申请号：US11491490

    申请日：2006-07-21

    申请人： Jeffrey Sampsell ,  Clarence Chui ,  Manish Kothari ,  Mark Miles ,  Teruo Sasagawa ,  Wonsuk Chung ,  Ming-Hau Tung

    发明人： Jeffrey Sampsell ,  Clarence Chui ,  Manish Kothari ,  Mark Miles ,  Teruo Sasagawa ,  Wonsuk Chung ,  Ming-Hau Tung

    IPC分类号： G02B6/00

    CPC分类号： G02B26/001 ,  B81B3/007 ,  B81B2201/047 ,  B81B2203/0307 ,  B81B2203/053

    摘要： Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, both rivets and posts may be used. In certain embodiments, these support structures are formed from rigid inorganic materials, such as metals or oxides. In certain embodiments, etch barriers may also be deposited to facilitate the use of materials in the formation of support structures which are not selectively etchable with respect to other components within the MEMS device.

    摘要翻译： MEMS器件的实施例包括通过间隙与导电固定层间隔开的导电可移动层，并且由导电可移动层中的上凹部的刚性支撑结构或铆钉支撑，或由导电可移动层中的凹陷下方的柱支撑。 在某些实施例中，可以使用铆钉和柱。 在某些实施方案中，这些支撑结构由诸如金属或氧化物的刚性无机材料形成。 在某些实施例中，还可以沉积蚀刻阻挡层以促进材料在形成相对于MEMS器件内的其它部件不能选择性蚀刻的支撑结构的形成中的使用。

    Spatial light modulator with integrated optical compensation structure
    10.
    发明授权
    Spatial light modulator with integrated optical compensation structure 有权
    具有集成光学补偿结构的空间光调制器

    公开(公告)号：US09019590B2

    公开(公告)日：2015-04-28

    申请号：US13337494

    申请日：2011-12-27

    申请人： Clarence Chui ,  Jeffrey B. Sampsell ,  William J. Cummings ,  Ming-Hau Tung

    发明人： Clarence Chui ,  Jeffrey B. Sampsell ,  William J. Cummings ,  Ming-Hau Tung

    IPC分类号： G02B26/00 ,  G02F1/1335

    CPC分类号： G02F1/21 ,  G02B26/001 ,  G02F1/1335 ,  G02F2001/13356

    摘要： A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.

    摘要翻译： 空间光调制器包括集成的光学补偿结构，例如，布置在基板和多个可单独寻址的光调制元件之间的光学补偿结构，或位于光调制元件的相对侧上的光学补偿结构 基质。 可单独寻址的光调制元件被配置为调制透射通过或从透明基板反射的光。 制造这种空间光调制器的方法包括在衬底上制造光学补偿结构，并在光学补偿结构上制造多个单独可寻址的光调制元件。 光学补偿结构可以是无源光学补偿结构。 光学补偿结构可以包括补充前照明光源，漫射器，黑色掩模，衍射光学元件，滤色器，抗反射层，散射光的结构，微透镜阵列和全息图中的一个或多个 电影。