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公开(公告)号:US20220153632A1
公开(公告)日:2022-05-19
申请号:US17439541
申请日:2020-03-20
申请人: CORNING INCORPORATED
发明人: Patrick Scott Leslie
IPC分类号: C03C15/00 , C03C23/00 , B23K26/382 , B23K26/402
摘要: A method of forming a through hole in a glass substrate is provided. The method includes irradiating a surface of a glass substrate with a mid-infrared or far-infrared laser to form a pilot hole including a plurality of cracks extending radially outward from the pilot hole. The pilot hole is etched to expand a diameter of the pilot hole to at least encompass the plurality of cracks to form a through hole having a through hole entry diameter of about 200 micrometers to about 1.5 millimeters.
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公开(公告)号:US20230339042A1
公开(公告)日:2023-10-26
申请号:US18011875
申请日:2021-06-18
申请人: CORNING INCORPORATED
IPC分类号: B23K26/0622 , B23K26/06 , B23K26/55
CPC分类号: B23K26/0622 , B23K26/0648 , B23K26/55
摘要: A method of laser processing a transparent workpiece (160) includes directing a laser beam (112) into the transparent workpiece (160) wherein a portion of the laser beam (112) directed into the transparent workpiece (160) includes a laser beam focal column (113) and generates an induced absorption to produce a defect column (172) within the transparent workpiece (160), the laser beam focal column (113) having a radius of maximum beam intensity that is variable along a length of the laser beam focal column (113) such that the radius of maximum beam intensity has at least two non-zero angles of propagation with respect to a center line of the laser beam focal column (113) along the length of the laser beam focal column (113).
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公开(公告)号:US20230207385A1
公开(公告)日:2023-06-29
申请号:US17928363
申请日:2021-06-14
申请人: CORNING INCORPORATED
IPC分类号: H01L21/768 , B23K26/0622 , B23K26/06 , B23K26/386 , H01L21/48 , H01L23/498
CPC分类号: H01L21/76825 , B23K26/386 , B23K26/0624 , B23K26/0648 , H01L21/486 , H01L23/49827 , B23K2101/40
摘要: Systems, devices, and techniques for creating blind annular vias for metallized vias are described. For example, a vortex beam may be applied to an optically transmissive substrate, where the vortex beam may modify a portion of the substrate in an annular shape. The annular shape may extend from a surface of the substrate to a depth that is less than a thickness of the substrate, and the annular shape may have an annular width (e.g., a ring width) that is the same for various diameters of the annular shape. A blind annular via may be formed by etching the modified portion of the substrate, where the blind annular via may include a pillar comprising the same material as the surrounding substrate. In addition, a metallized annular via may be created by filling the blind annular via with a conductive material, and removing a portion of the substrate opposite the surface.
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公开(公告)号:US20220057561A1
公开(公告)日:2022-02-24
申请号:US17421176
申请日:2020-01-07
申请人: Corning Incorporated
发明人: Patrick Scott Leslie , Shenping Li , Leonard Thomas Masters , Johannes Moll , Craig John Mancusi Ungaro
IPC分类号: F21V8/00
摘要: Apparatus can comprise a light source and a light guide plate. The light guide plate can comprise a plurality of features within an interior of the light guide plate. A feature of the plurality of features can comprise a first refractive index that is different from a refractive index of the light guide plate. A spacing between a pair of adjacent features of the plurality of features can be from about 20 micrometers to about 200 micrometers. The apparatus can be used to direct light out of the light guide plate with a peak radiance oriented from 0° to 30° from a direction normal to the first major surface of the light guide plate. Methods of making the apparatus can comprise emitting a burst of pulses from a laser. Methods can comprise focusing the burst of pulses into a line focus within the light guide plate.
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公开(公告)号:US20210359185A1
公开(公告)日:2021-11-18
申请号:US17286271
申请日:2019-10-09
申请人: Corning Incorporated
发明人: Sean Matthew Garner , Patrick Scott Leslie , Barada Kanta Nayak , Michael Lesley Sorensen , Rajesh Vaddi
摘要: A device includes a glass substrate, a plurality of electronic components, a metallization layer, and a plurality of vias. The plurality of electronic components are on a first surface of the glass substrate. The metallization layer is on a second surface of the glass substrate opposite to the first surface. The plurality of vias extend through the glass substrate. At least one via is in electrical communication with an electronic component and the metallization layer.
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