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公开(公告)号:US20210102268A1
公开(公告)日:2021-04-08
申请号:US16940791
申请日:2020-07-28
Applicant: Dai Nippon Printing Co., Ltd.
Inventor: Hiroki OKA , Chikao IKENAGA , Sachiyo MATSUURA , Shogo ENDO , Chiaki HATSUTA , Asako NARITA
Abstract: A method for manufacturing a metal plate, the metal plate including a first surface and a second surface positioned on the opposite side of the first surface, may include a step of rolling a base metal having an iron alloy containing nickel to produce the metal plate. The metal plate may include particles containing as a main component an element other than iron and nickel. In a sample including the first surface and the second surface of the metal plate, the following conditions (1) and (2) regarding the particles may be satisfied: (1) The number of the particles having an equivalent circle diameter of 1 μm or more is 50 or more and 3000 or less per 1 mm3 in the sample, and (2) The number of the particles having an equivalent circle diameter of 3 μm or more is 50 or less per 1 mm3 in the sample.
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公开(公告)号:US20220121115A1
公开(公告)日:2022-04-21
申请号:US17646351
申请日:2021-12-29
Applicant: Dai Nippon Printing Co., Ltd.
Inventor: Hiroki OKA , Sachiyo MATSUURA , Chiaki HATSUTA , Chikao IKENAGA , Hideyuki OKAMOTO , Masato USHIKUSA
Abstract: The metal plate includes a plurality of pits located on the surface of the metal plate. The manufacturing method for a metal plate for use in manufacturing of a deposition mask includes an inspection step of determining a quality of the metal plate based on a sum of volumes of a plurality of pits located at a portion of the surface of the metal plate.
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公开(公告)号:US20250043399A1
公开(公告)日:2025-02-06
申请号:US18918239
申请日:2024-10-17
Applicant: DAI NIPPON PRINTING CO., LTD.
Inventor: Hiroki OKA , Sachiyo MATSUURA , Chiaki HATSUTA , Chikao IKENAGA , Hideyuki OKAMOTO , Masato USHIKUSA
IPC: C22C38/10 , B21B1/22 , C21D6/00 , C21D8/02 , C21D9/46 , C22C38/08 , C23C2/26 , C23C14/04 , C23C14/24 , C25D1/04 , C25D3/56 , G03F7/00 , G03F7/20 , H10K50/11 , H10K59/00 , H10K71/00 , H10K71/16 , H10K77/10
Abstract: A metal plate used for manufacturing a deposition mask has a thickness of equal to or less than 30 μm. An average cross-sectional area of the crystals grains on a cross section of the metal plate is from 0.5 μm2 to 50 μm2. The average cross-sectional area of crystal grains is calculated by analyzing measurement results obtained by an EBSD method, the measuring results being analyzed by an area method under conditions where a portion with a difference in crystal orientation of 5 degrees or more is recognized as a crystal grain boundary.
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公开(公告)号:US20210340665A1
公开(公告)日:2021-11-04
申请号:US17305731
申请日:2021-07-14
Applicant: Dai Nippon Printing Co., Ltd.
Inventor: Yasuhiro UCHIDA , Sachiyo MATSUURA , Chikao IKENAGA
Abstract: A deposition mask includes: a first surface and a second surface, in which a plurality of through-holes are formed; a pair of long side surfaces connected to the first and second surfaces, and defining a profile of the deposition mask in a longitudinal direction of the deposition mask; and a pair of short side surfaces connected to the first and second surfaces, and defining a profile of the deposition mask in a width direction of the deposition mask. The long side surface includes a first portion that is recessed inside and includes a first end portion positioned along the first surface, and a second end portion positioned along the second surface and positioned inside the first end portion. The through-hole includes a first recess formed on the first surface, and a second recess formed on the second surface and connected to the first recess through a hole connection portion.
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公开(公告)号:US20210157232A1
公开(公告)日:2021-05-27
申请号:US17168496
申请日:2021-02-05
Applicant: Dai Nippon Printing Co., Ltd.
Inventor: Chikao IKENAGA , Chiaki HATSUTA , Hiroki OKA , Sachiyo MATSUURA , Hideyuki OKAMOTO , Masato USHIKUSA
Abstract: A metal plate used for manufacturing a deposition mask has a thickness of equal to or less than 30 μm. An average cross-sectional area of the crystals grains on a cross section of the metal plate is from 0.5 μm2 to 50 μm2. The average cross-sectional area of crystal grains is calculated by analyzing measurement results obtained by an EBSD method, the measuring results being analyzed by an area method under conditions where a portion with a difference in crystal orientation of 5 degrees or more is recognized as a crystal grain boundary.
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公开(公告)号:US20230203638A1
公开(公告)日:2023-06-29
申请号:US18175596
申请日:2023-02-28
Applicant: Dai Nippon Printing Co., Ltd.
Inventor: Yasuhiro UCHIDA , Sachiyo MATSUURA , Chikao IKENAGA
CPC classification number: C23C14/042 , C23F1/02 , H10K71/00 , H10K71/166 , B05C21/005
Abstract: A deposition mask includes: a first surface and a second surface, in which a plurality of through-holes are formed; a pair of long side surfaces connected to the first and second surfaces, and defining a profile of the deposition mask in a longitudinal direction of the deposition mask; and a pair of short side surfaces connected to the first and second surfaces, and defining a profile of the deposition mask in a width direction of the deposition mask. The long side surface includes a first portion that is recessed inside and includes a first end portion positioned along the first surface, and a second end portion positioned along the second surface and positioned inside the first end portion. The through-hole includes a first recess formed on the first surface, and a second recess formed on the second surface and connected to the first recess through a hole connection portion.
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公开(公告)号:US20210108312A1
公开(公告)日:2021-04-15
申请号:US17070127
申请日:2020-10-14
Applicant: Dai Nippon Printing Co., Ltd.
Inventor: Hiroki OKA , Chikao IKENAGA , Sachiyo MATSUURA , Shogo ENDO , Chiaki HATSUTA , Asako NARITA
IPC: C23C16/458 , H01L51/56
Abstract: A method for manufacturing a metal plate, the metal plate including a first surface and a second surface positioned on the opposite side of the first surface, may include a step of rolling a base metal having an iron alloy containing nickel to produce the metal plate. The metal plate may include particles containing as a main component an element other than iron and nickel. In a sample including the first surface and the second surface of the metal plate, the following conditions (1) and (2) regarding the particles may be satisfied: (1) The number of the particles having an equivalent circle diameter of 1 μm or more is 50 or more and 3000 or less per 1 mm3 in the sample, and (2) The number of the particles having an equivalent circle diameter of 3 μm or more is 50 or less per 1 mm3 in the sample.
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公开(公告)号:US20190256965A1
公开(公告)日:2019-08-22
申请号:US16372661
申请日:2019-04-02
Applicant: Dai Nippon Printing Co., Ltd.
Inventor: Chikao IKENAGA , Takanori MARUOKA , Sachiyo MATSUURA
Abstract: A deposition mask in which deformation of long sides is restrained is manufactured. A manufacturing method of a deposition mask includes a step of preparing a metal plate; a processing step of processing the metal plate into an intermediate product comprising: a plurality of deposition mask portions each including a pair of long sides and a pair of short sides, and having a plurality of through-holes formed therein; and a support portion that surrounds the plurality of deposition mask portions, and is partially connected to the short sides of the plurality of deposition mask portions; and a separation step of separating the deposition mask portions from the support portion to obtain the deposition mask. In the intermediate product, the long sides of the deposition mask portions are not connected to the support portion.
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公开(公告)号:US20220205077A1
公开(公告)日:2022-06-30
申请号:US17655388
申请日:2022-03-18
Applicant: Dai Nippon Printing Co., Ltd.
Inventor: Chikao IKENAGA , Takanori MARUOKA , Sachiyo MATSUURA
IPC: C23C14/04 , C23F1/28 , H05B33/10 , H01L51/50 , C23F1/02 , C23C14/24 , C23C14/12 , B05C21/00 , C30B25/04 , C23C16/04 , H05K3/14 , B05B12/20
Abstract: A deposition mask in which deformation of long sides is restrained is manufactured. A manufacturing method of a deposition mask includes a step of preparing a metal plate; a processing step of processing the metal plate into an intermediate product comprising: a plurality of deposition mask portions each including a pair of long sides and a pair of short sides, and having a plurality of through-holes formed therein; and a support portion that surrounds the plurality of deposition mask portions, and is partially connected to the short sides of the plurality of deposition mask portions; and a separation step of separating the deposition mask portions from the support portion to obtain the deposition mask. In the intermediate product, the long sides of the deposition mask portions are not connected to the support portion.
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公开(公告)号:US20210214837A1
公开(公告)日:2021-07-15
申请号:US17218609
申请日:2021-03-31
Applicant: Dai Nippon Printing Co., Ltd.
Inventor: Chikao IKENAGA , Takanori MARUOKA , Sachiyo MATSUURA
Abstract: A deposition mask in which deformation of long sides is restrained is manufactured. A manufacturing method of a deposition mask includes a step of preparing a metal plate; a processing step of processing the metal plate into an intermediate product comprising: a plurality of deposition mask portions each including a pair of long sides and a pair of short sides, and having a plurality of through-holes formed therein; and a support portion that surrounds the plurality of deposition mask portions, and is partially connected to the short sides of the plurality of deposition mask portions; and a separation step of separating the deposition mask portions from the support portion to obtain the deposition mask. In the intermediate product, the long sides of the deposition mask portions are not connected to the support portion.
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