公开(公告)号：US20240194475A1

公开(公告)日：2024-06-13

申请号：US18555487

申请日：2022-03-23

Applicant: SCREEN Holdings Co., Ltd. ,  DAIKIN INDUSTRIES, LTD.

Inventor： Takaaki ISHIZU ,  Kenji KOBAYASHI ,  Takashi OTA ,  Takashi NAMIKAWA ,  Kazuki HOSODA

IPC: H01L21/02 ,  H01L21/306 ,  H01L21/67

CPC classification number: H01L21/02057 ,  H01L21/30604 ,  H01L21/67023

Abstract: A substrate processing method includes supplying a chemical solution to a surface of a substrate (step S11), supplying a rinse liquid to the surface of the substrate after step S11 (step S12), bringing a heated dry processing liquid to the surface of the substrate after step S12 (step S14), and drying the substrate by removing the dry processing liquid from the surface of the substrate (step S15). The dry processing liquid has a lower surface tension than the rinse liquid. The boiling point of the dry processing liquid is higher than the boiling point of the rinse liquid. The dry processing liquid that comes in contact with the surface of the substrate in step S14 has a temperature that is a predetermined contact temperature higher than or equal to the boiling point of the rinse liquid and lower than the boiling point of the dry processing liquid.

公开(公告)号：US20240018081A1

公开(公告)日：2024-01-18

申请号：US18372344

申请日：2023-09-25

Applicant: DAIKIN INDUSTRIES, LTD.

Inventor： Atsushi SHIRAI ,  Yoshichika KUROKI ,  Yuusuke ETOU ,  Masayuki KISHIMOTO ,  Takashi NAMIKAWA ,  Sumi ISHIHARA ,  Makoto SUYAMA ,  Kenji ADACHI ,  Yosuke KISHIKAWA

IPC: C07C41/22 ,  C07C231/12 ,  C07C17/087

CPC classification number: C07C41/22 ,  C07C231/12 ,  C07C17/087

Abstract: An object of the present disclosure is to provide a method for producing a fluorinated organic compound, the method being capable of removing a sulfur-containing substance to a high degree, or provide a composition containing a fluorinated organic compound with a low content of a sulfur-containing substance. The present disclosure relates to a method for producing a fluorinated organic compound (pf), the method comprising:



[A] reaction step A of fluorinating an organic sulfur compound (ss) with a fluorinating agent to obtain a composition (α) containing a fluorinated organic compound (pf); and
[B] post-treatment step B of reacting the composition (α) with a nucleophile at a temperature of 40° C. or higher.

公开(公告)号：US20190390009A1

公开(公告)日：2019-12-26

申请号：US16561827

申请日：2019-09-05

Applicant: DAIKIN INDUSTRIES, LTD.

Inventor： Hisashi MITSUHASHI ,  Mayuko TAKANO ,  Takashi NAMIKAWA ,  Takashi NOMURA

IPC: C08G65/336 ,  C09D171/02 ,  C09D5/16 ,  C09K3/18

Abstract: A perfluoro(poly)ether group containing silane compound of formula (1a) or (1b): (Rf-PFPE)β-X—(CRakRblRcm)α  (1a) (RcmRblRakC)α—X-PFPE-X—(CRakRblRcm)α  (1b) wherein the symbols are as defined herein.

公开(公告)号：US20240190105A1

公开(公告)日：2024-06-13

申请号：US18396332

申请日：2023-12-26

Applicant: DAIKIN INDUSTRIES, LTD.

Inventor： Takashi NAMIKAWA ,  Chihiro Nakagawa ,  Takayuki Matsunaga

IPC: B32B7/12 ,  B32B9/04 ,  B32B37/12

CPC classification number: B32B7/12 ,  B32B9/04 ,  B32B37/1284 ,  B32B2250/02 ,  B32B2313/00

Abstract: A method for producing a laminate of two silicon substrates, which includes: (a) providing a first silicon substrate having a first bonding part and a second silicon substrate having a second bonding part, wherein the first bonding part and the second bonding part are portions containing a silicon oxide; and bonding the first bonding part and the second bonding part with a reaction product derived from an organic material reactive with a hydrosilyl group and/or a silanol group. Also disclosed is a laminate including the two silicon substrates.

公开(公告)号：US20190169445A1

公开(公告)日：2019-06-06

申请号：US16321092

申请日：2017-07-28

Applicant: DAIKIN INDUSTRIES, LTD.

Inventor： Mayuko TAKANO ,  Kaori OZAWA ,  Hisashi MITSUHASHI ,  Tsuneo YAMASHITA ,  Takashi NAMIKAWA

IPC: C09D5/16 ,  C09D183/04 ,  C03C17/30

Abstract: An article including a base material and a layer formed from a compound represented by the following formula (1) or from a surface-treating agent comprising the compound: wherein each of symbols is as defined in the description.

公开(公告)号：US20180244844A1

公开(公告)日：2018-08-30

申请号：US15755363

申请日：2016-07-26

Applicant: DAIKIN INDUSTRIES, LTD.

Inventor： Mayuko TAKANO ,  Takashi NAMIKAWA ,  Hisashi MITSUHASHI

IPC: C08G65/336 ,  C08K5/5419 ,  C08K5/5435 ,  C09D5/16 ,  C09D171/00

CPC classification number: C08G65/336 ,  C08G2650/48 ,  C08K5/5419 ,  C08K5/5435 ,  C08L71/02 ,  C09D5/16 ,  C09D5/165 ,  C09D171/00 ,  C09D183/08 ,  C09K3/18

Abstract: The present invention provides a perfluoro(poly)ether group containing silane compound of the formula (1): XRaαRbβRcγ  (1) wherein each symbols are as defined in the description.

公开(公告)号：US20210380836A1

公开(公告)日：2021-12-09

申请号：US17288130

申请日：2019-10-31

Applicant: Tokyo Electron Limited ,  Daikin Industries, Ltd.

Inventor： Takashi FUSE ,  Takashi NAMIKAWA

IPC: C09D171/00 ,  B05D1/00

Abstract: A film forming method is a method of forming a film on a substrate top face including a first region in which a metal or a semiconductor is exposed and a second region in which an insulator is exposed. The method includes a SAM forming process of forming a self-assembled monolayer film of a perfluoropolyether group-containing compound on the first region and a film growth process of forming a predetermined film on the second region after execution of SAM forming process.

公开(公告)号：US20180186820A1

公开(公告)日：2018-07-05

申请号：US15739915

申请日：2016-06-21

Applicant: DAIKIN INDUSTRIES, LTD.

Inventor： Kenichi KATSUKAWA ,  Hisashi MITSUHASHI ,  Tomohiro YOSHIDA ,  Masatoshi NOSE ,  Takashi NAMIKAWA

IPC: C07F7/18 ,  C09D5/16 ,  C09D183/06 ,  C09K3/18 ,  C03C17/30

Abstract: A surface-treating agent including at least one perfluoro(poly)ether group containing silane compound of the formula (1): wherein each of symbols is as defined herein, wherein a number average molecular weight of the perfluoro(poly)ether group containing silane compound is 3000 or more and 6000 or less, and wherein 80 mol % or more of the perfluoro(poly)ether group containing silane compound contained in the surface-treating agent is a compound wherein g is 2 or more.

公开(公告)号：US20160318842A1

公开(公告)日：2016-11-03

申请号：US15107204

申请日：2014-12-26

Applicant: DAIKIN INDUSTRIES, LTD.

Inventor： Akihiro GOTOU ,  Manaho MIYAZAKI ,  Sumi ISHIHARA ,  Takashi NAMIKAWA ,  Tatsuya OHTSUKA ,  Yosuke KISHIKAWA

IPC: C07C67/36

CPC classification number: C07C67/36 ,  C07C69/653 ,  C07C69/65

Abstract: An object of the present invention is to provide a process for producing α-fluoroacrylic acid esters at a high starting material conversion and a high yield.The present invention provides, as a means to achieve the object, a process for producing a compound represented by formula (1): wherein R2 and R2 are the same or different and each represent alkyl, fluoroalkyl, aryl optionally substituted with at least one substituent, halogen, or hydrogen; and R3 represents alkyl, fluoroalkyl, or aryl optionally substituted with at least one substituent, the process comprising step A of reacting a compound represented by formula (2): wherein the symbols are as defined above, with carbon monoxide and an alcohol represented by formula (3): R3—OH   (3) wherein the symbol is as defined above, in the presence of a transition metal complex catalyst containing at least one bidentate phosphine ligand and a base to thereby obtain the compound represented by formula (1).

Abstract translation: 本发明的目的是提供一种在高原料转化率和高产率下生产± - 氟代丙烯酸酯的方法。 本发明提供作为实现该目标的手段，制备由式（1）表示的化合物的方法：其中R 1和R 2相同或不同，并且各自表示烷基，氟烷基，任选被至少取代的芳基 一个取代基，卤素或氢; 并且R 3表示任选被至少一个取代基取代的烷基，氟代烷基或芳基，所述方法包括步骤A，使式（2）表示的化合物：其中符号如上定义，与一氧化碳和以 公式（3）：€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒR3 -OH€ƒ€ƒ€ƒ€ƒ（3）其中符号如上所述，在存在 含有至少一个二齿膦配体和碱的过渡金属络合物催化剂，由此得到式（1）所示的化合物。

公开(公告)号：US20240169749A1

公开(公告)日：2024-05-23

申请号：US18549657

申请日：2022-03-18

Applicant: DAIKIN INDUSTRIES, LTD.

Inventor： Shogo KAWAI ,  Naomi YOSHIMURA ,  Aoi GOTO ,  Wakana TAKANO ,  Ryuichiro OTO ,  Shotaro MAEDA ,  Mirei KANETAKE ,  Takashi NAMIKAWA ,  Shiho WATANABE

IPC: G06V20/69 ,  G01N1/38 ,  G06V10/70

CPC classification number: G06V20/693 ,  G01N1/38 ,  G06V10/70 ,  G06V20/698

Abstract: An sure, an inspection system and an inspection method that reduce the time required to inspect environmental microorganisms, are provided. The inspection system inspection system is for inspecting a microorganism or mold that is generated in an indoor environment or a device, and the inspection system includes an imaging unit configured to directly capture a sample collected from the indoor environment or the device; and an output unit configured to inspect the microorganism or the mold in image data captured by the imaging unit, and output an inspection result.