摘要:
Disclosed is a polishing slurry, particularly, a slurry for chemical mechanical polishing, which is used in a chemical mechanical polishing process for flattening a semiconductor laminate. More particularly, the present invention provides a method of producing a slurry which has high removal selectivity to a nitride layer used as a barrier film in a shallow trench isolation CMP process needed to fabricate ultra highly integrated semiconductors of 256 mega D-RAM or more (Design rule of 0.13 μm or less) and which decreases the occurrence of scratches on a flattened surface, and a method of polishing a substrate using the same.
摘要:
Disclosed is a polishing slurry, particularly, a slurry for chemical mechanical polishing, which is used in a chemical mechanical polishing process for flattening a semiconductor laminate. More particularly, the present invention provides a method of producing a slurry which has high removal selectivity to a nitride layer used as a barrier film in a shallow trench isolation CMP process needed to fabricate ultra highly integrated semiconductors of 256 mega D-RAM or more (Design rule of 0.13 μm or less) and which decreases the occurrence of scratches on a flattened surface, and a method of polishing a substrate using the same.
摘要:
Disclosed is a polishing slurry, particularly, a slurry for chemical mechanical polishing, which is used in a chemical mechanical polishing process for flattening a semiconductor laminate. More particularly, the present invention provides a method of producing a slurry which has high removal selectivity to a nitride layer used as a barrier film in a shallow trench isolation CMP process needed to fabricate ultra highly integrated semiconductors of 256 mega D-RAM or more (Design rule of 0.13 μm or less) and which decreases the occurrence of scratches on a flattened surface, and a method of polishing a substrate using the same.
摘要:
Disclosed herein is a polishing slurry and a method of producing the same. The polishing slurry has high selectivity in terms of a polishing speed of an oxide layer to that of a nitride layer used in CMP of an STI process which is essential to produce ultra highly integrated semiconductors having a design rule of 256 mega D-RAM or more, for example, a design rule of 0.13 μm or less. A method and a device for pre-treating polishing particles, a dispersing device and a method of operating the dispersing device, a method of adding a chemical additive and an amount added, and a device for transferring samples are properly employed to produce a high performance nano ceria slurry essential to CMP for a process of producing ultra highly integrated semiconductors of 0.13 μm or less, particularly, the STI process.
摘要:
Disclosed herein is a polishing slurry for chemical mechanical polishing. The polishing slurry comprises polishing particles, which have a particle size distribution including separated fine and large polishing particle peaks. The polishing slurry also comprises polishing particles, which have a median size of 50-150 nm. The present invention provides the slurry having an optimum polishing particle size, in which the polishing particle size is controlled and which is useful to produce semiconductors having fine design rules by changing the production conditions of the slurry. The present invention also provides the polishing slurry and a method of producing the same, in which a desirable CMP removal rate is assured and scratches are suppressed by controlling a polishing particle size distribution, and a method of polishing a substrate.
摘要:
A mobile terminal and controlling method thereof are disclosed, which facilitates a terminal to be used in further consideration of user's convenience. According to at least one of embodiments of the present invention, the present invention includes receiving a transport stream from a broadcasting network, accessing a mobile communication network or a the broadcasting network to receive a broadcast service guide, if a broadcast service guide is receivable, receiving and displaying the broadcast service guide, and if the broadcast service guide is not receivable, extracting broadcast control information from the transport stream, obtaining broadcast service identity information on a broadcast service provided by the broadcasting network from the extracted broadcast control information, and then displaying the obtained broadcast service identity information.
摘要:
A low temperature, low bath ratio, tensionless and short-term dyeing method using microwaves, comprises the steps of: immersing dyed goods in a vessel filled with dye solution comprising water present in an amount twice as much as the goods to be dyed, a disperse dye present in a ratio of disperse dye to goods to be dyed of 1:1000, a dispersing agent present in a ratio of dispersing agent to dye of below 1:100, and irradiating the dyed goods with microwaves below 2450 MHZ in order to heat them to a temperature of 100-130° C.
摘要:
The present invention may provide a method of generating a walking pattern for a humanoid robot. The method of generating the walking pattern for the humanoid includes determining a position of a next Zero Moment Point (ZMP) along a moving direction of the humanoid robot, obtaining a first condition for generating a walking pattern based on the determined ZMP by using a periodic step module, generating trajectories of a ZMP and a Center of Mass (CoM) in an initial step based on the first condition and an initial value obtained from an initial state of the humanoid robot by using a transient step module, generating trajectories of a ZMP and a CoM in a steady step based on the ZMP of two steps by using a steady step module, and generating trajectories of a ZMP and a CoM in a final step by using the transient step module.
摘要:
The present invention may provide a method of generating a walking pattern for a humanoid robot. The method of generating the walking pattern for the humanoid includes determining a position of a next Zero Moment Point (ZMP) along a moving direction of the humanoid robot, obtaining a first condition for generating a walking pattern based on the determined ZMP by using a periodic step module, generating trajectories of a ZMP and a Center of Mass (CoM) in an initial step based on the first condition and an initial value obtained from an initial state of the humanoid robot by using a transient step module, generating trajectories of a ZMP and a CoM in a steady step based on the ZMP of two steps by using a steady step module, and generating trajectories of a ZMP and a CoM in a final step by using the transient step module.
摘要:
A low temperature, low bath ratio, tensionless and short-term dyeing method using microwaves, comprises the steps of: immersing dyed goods in a vessel filled with dye solution comprising water present in an amount twice as much as the goods to be dyed, a disperse dye present in a ratio of disperse dye to goods to be dyed of 1:1000, a dispersing agent present in a ratio of dispersing agent to dye of below 1:100, and irradiating the dyed goods with microwaves below 2450 MHZ in order to heat them to a temperature of 100-130.degree. C.