POLISHING SLURRY, METHOD OF PRODUCING SAME, AND METHOD OF POLISHING SUBSTRATE
    2.
    发明申请
    POLISHING SLURRY, METHOD OF PRODUCING SAME, AND METHOD OF POLISHING SUBSTRATE 审中-公开
    抛光浆,其制造方法和抛光底材的方法

    公开(公告)号:US20090100765A1

    公开(公告)日:2009-04-23

    申请号:US12333179

    申请日:2008-12-11

    IPC分类号: C09K3/14

    摘要: Disclosed is a polishing slurry, particularly, a slurry for chemical mechanical polishing, which is used in a chemical mechanical polishing process for flattening a semiconductor laminate. More particularly, the present invention provides a method of producing a slurry which has high removal selectivity to a nitride layer used as a barrier film in a shallow trench isolation CMP process needed to fabricate ultra highly integrated semiconductors of 256 mega D-RAM or more (Design rule of 0.13 μm or less) and which decreases the occurrence of scratches on a flattened surface, and a method of polishing a substrate using the same.

    摘要翻译: 公开了一种抛光浆料,特别是用于化学机械抛光的浆料,其用于化学机械抛光工艺以使半导体层压体变平。 更具体地说,本发明提供一种制备浆料的方法,该方法对于在制造256兆D-RAM或更高的超高度集成半导体所需的浅沟槽隔离CMP工艺中,对用作阻挡膜的氮化物层具有高的去除选择性( 设计规则为0.13μm以下),并且减少了在平坦化表面上的划痕的发生,以及使用其抛光衬底的方法。

    Slurry for CMP and method of polishing substrate using same
    4.
    发明授权
    Slurry for CMP and method of polishing substrate using same 有权
    用于CMP的浆料和使用其的抛光衬底的方法

    公开(公告)号:US07364600B2

    公开(公告)日:2008-04-29

    申请号:US11127441

    申请日:2005-05-11

    IPC分类号: C09G1/02 C09G1/04

    摘要: Disclosed herein is a polishing slurry and a method of producing the same. The polishing slurry has high selectivity in terms of a polishing speed of an oxide layer to that of a nitride layer used in CMP of an STI process which is essential to produce ultra highly integrated semiconductors having a design rule of 256 mega D-RAM or more, for example, a design rule of 0.13 μm or less. A method and a device for pre-treating polishing particles, a dispersing device and a method of operating the dispersing device, a method of adding a chemical additive and an amount added, and a device for transferring samples are properly employed to produce a high performance nano ceria slurry essential to CMP for a process of producing ultra highly integrated semiconductors of 0.13 μm or less, particularly, the STI process.

    摘要翻译: 本文公开了抛光浆料及其制备方法。 抛光浆料在氧化物层的研磨速度与STI工艺的CMP中使用的氮化物层的研磨速度方面具有高选择性,该制造方法对于制造具有256兆D-RAM以上的设计规则的超高度集成半导体是必不可少的 ,例如,0.13mum以下的设计规则。 用于预处理抛光颗粒的方法和装置,分散装置和操作分散装置的方法,添加化学添加剂和添加量的方法以及用于转移样品的装置被适当地用于产生高性能 纳米二氧化铈浆料对于生产0.13毫米或更小的超高度集成半导体的工艺,特别是STI工艺。

    Polishing slurry, method of producing same, and method of polishing substrate
    5.
    发明授权
    Polishing slurry, method of producing same, and method of polishing substrate 有权
    抛光浆料,其制造方法以及抛光底物的方法

    公开(公告)号:US07470295B2

    公开(公告)日:2008-12-30

    申请号:US11078538

    申请日:2005-03-11

    IPC分类号: C09G1/00 C09G1/04 C09G1/02

    摘要: Disclosed herein is a polishing slurry for chemical mechanical polishing. The polishing slurry comprises polishing particles, which have a particle size distribution including separated fine and large polishing particle peaks. The polishing slurry also comprises polishing particles, which have a median size of 50-150 nm. The present invention provides the slurry having an optimum polishing particle size, in which the polishing particle size is controlled and which is useful to produce semiconductors having fine design rules by changing the production conditions of the slurry. The present invention also provides the polishing slurry and a method of producing the same, in which a desirable CMP removal rate is assured and scratches are suppressed by controlling a polishing particle size distribution, and a method of polishing a substrate.

    摘要翻译: 本文公开了用于化学机械抛光的抛光浆料。 抛光浆料包括抛光颗粒,其具有包括分离的精细和大的抛光颗粒峰的粒度分布。 抛光浆料还包括中值粒径为50-150nm的抛光颗粒。 本发明提供了具有最佳抛光粒度的浆料,其中抛光粒度被控制,并且通过改变浆料的生产条件,可用于制备具有精细设计规则的半导体。 本发明还提供了研磨浆料及其制造方法,其中通过控制抛光粒度分布来确保理想的CMP去除速率和抑制刮痕,以及抛光基材的方法。

    Mobile terminal that displays obtained broadcast service identity information when broadcast service guide is not available and method of controlling mobile terminal
    6.
    发明授权
    Mobile terminal that displays obtained broadcast service identity information when broadcast service guide is not available and method of controlling mobile terminal 有权
    当广播服务指南不可用时显示获得的广播服务身份信息的移动终端和控制移动终端的方法

    公开(公告)号:US08571590B2

    公开(公告)日:2013-10-29

    申请号:US13010718

    申请日:2011-01-20

    申请人: Seok Min Hong

    发明人: Seok Min Hong

    IPC分类号: H04B7/00

    CPC分类号: H04H60/72 H04H20/57 H04H60/91

    摘要: A mobile terminal and controlling method thereof are disclosed, which facilitates a terminal to be used in further consideration of user's convenience. According to at least one of embodiments of the present invention, the present invention includes receiving a transport stream from a broadcasting network, accessing a mobile communication network or a the broadcasting network to receive a broadcast service guide, if a broadcast service guide is receivable, receiving and displaying the broadcast service guide, and if the broadcast service guide is not receivable, extracting broadcast control information from the transport stream, obtaining broadcast service identity information on a broadcast service provided by the broadcasting network from the extracted broadcast control information, and then displaying the obtained broadcast service identity information.

    摘要翻译: 公开了一种移动终端及其控制方法,其便于终端进一步考虑用户的便利性。 根据本发明的至少一个实施例,本发明包括如果可以接收广播服务指南,则接收来自广播网络的传输流,接入移动通信网络或广播网络以接收广播服务指南, 接收并显示广播服务指南,如果无法接收广播业务指南,则从传输流中提取广播控制信息,从所提取的广播控制信息获取由广播网提供的广播服务的广播服务身份信息,然后 显示所获得的广播服务身份信息。

    Low temperature, low bath ratio, tensionless, and short-term dyeing device using microwaves
    7.
    发明授权
    Low temperature, low bath ratio, tensionless, and short-term dyeing device using microwaves 失效
    低温,低浴比,无张力和使用微波的短期染色装置

    公开(公告)号:US06381995B1

    公开(公告)日:2002-05-07

    申请号:US09519765

    申请日:2000-03-06

    申请人: Seok Min Hong

    发明人: Seok Min Hong

    IPC分类号: D06B312

    摘要: A low temperature, low bath ratio, tensionless and short-term dyeing method using microwaves, comprises the steps of: immersing dyed goods in a vessel filled with dye solution comprising water present in an amount twice as much as the goods to be dyed, a disperse dye present in a ratio of disperse dye to goods to be dyed of 1:1000, a dispersing agent present in a ratio of dispersing agent to dye of below 1:100, and irradiating the dyed goods with microwaves below 2450 MHZ in order to heat them to a temperature of 100-130° C.

    摘要翻译: 使用微波的低温,低浴比,无张力和短期染色方法包括以下步骤:将染色的商品浸入装满染料​​溶液的容器中,所述染料溶液的含量是待染色商品的两倍, 以分散染料的比例分散染料与待染色的商品的比例为1:1000,以分散剂与染料的比例以低于1:100的比例存在的分散剂,并将染色的物品照射到低于2450MHZ的微波,以便 将其加热至100-130℃的温度

    Method of generating a walking pattern for a humanoid robot
    8.
    发明授权
    Method of generating a walking pattern for a humanoid robot 有权
    生成人形机器人步行图案的方法

    公开(公告)号:US08126594B2

    公开(公告)日:2012-02-28

    申请号:US12260173

    申请日:2008-10-29

    IPC分类号: G05B19/04 G05B19/18

    CPC分类号: B62D57/032

    摘要: The present invention may provide a method of generating a walking pattern for a humanoid robot. The method of generating the walking pattern for the humanoid includes determining a position of a next Zero Moment Point (ZMP) along a moving direction of the humanoid robot, obtaining a first condition for generating a walking pattern based on the determined ZMP by using a periodic step module, generating trajectories of a ZMP and a Center of Mass (CoM) in an initial step based on the first condition and an initial value obtained from an initial state of the humanoid robot by using a transient step module, generating trajectories of a ZMP and a CoM in a steady step based on the ZMP of two steps by using a steady step module, and generating trajectories of a ZMP and a CoM in a final step by using the transient step module.

    摘要翻译: 本发明可以提供一种生成人形机器人的步行图案的方法。 用于生成人形生物的步行图案的方法包括确定沿类人形机器人的移动方向的下一个零时刻点(ZMP)的位置,通过使用周期性的方法获得基于所确定的ZMP产生步行模式的第一条件 基于第一条件在初始步骤中产生ZMP和质量中心(CoM)的轨迹,以及通过使用瞬态步进模块从人形机器人的初始状态获得的初始值,生成ZMP的轨迹 以及通过使用稳定的步进模块基于两步的ZMP在稳定步骤中的CoM,并且通过使用瞬态步骤模块在最终步骤中生成ZMP和CoM的轨迹。

    METHOD OF GENERATING A WALKING PATTERN FOR A HUMANOID ROBOT
    9.
    发明申请
    METHOD OF GENERATING A WALKING PATTERN FOR A HUMANOID ROBOT 有权
    生成人类机器人运动模式的方法

    公开(公告)号:US20090271037A1

    公开(公告)日:2009-10-29

    申请号:US12260173

    申请日:2008-10-29

    IPC分类号: G06F19/00

    CPC分类号: B62D57/032

    摘要: The present invention may provide a method of generating a walking pattern for a humanoid robot. The method of generating the walking pattern for the humanoid includes determining a position of a next Zero Moment Point (ZMP) along a moving direction of the humanoid robot, obtaining a first condition for generating a walking pattern based on the determined ZMP by using a periodic step module, generating trajectories of a ZMP and a Center of Mass (CoM) in an initial step based on the first condition and an initial value obtained from an initial state of the humanoid robot by using a transient step module, generating trajectories of a ZMP and a CoM in a steady step based on the ZMP of two steps by using a steady step module, and generating trajectories of a ZMP and a CoM in a final step by using the transient step module.

    摘要翻译: 本发明可以提供一种生成人形机器人的步行图案的方法。 用于生成人形生物的步行图案的方法包括确定沿类人形机器人的移动方向的下一个零时刻点(ZMP)的位置,通过使用周期性的方法获得基于所确定的ZMP产生步行模式的第一条件 基于第一条件在初始步骤中产生ZMP和质量中心(CoM)的轨迹,以及通过使用瞬态步进模块从人形机器人的初始状态获得的初始值,生成ZMP的轨迹 以及通过使用稳定的步进模块基于两步的ZMP在稳定步骤中的CoM,并且通过使用瞬态步骤模块在最终步骤中生成ZMP和CoM的轨迹。

    Low temperature, low bath ratio, tensionless, and short-term dyeing
method and device using microwaves
    10.
    发明授权
    Low temperature, low bath ratio, tensionless, and short-term dyeing method and device using microwaves 失效
    低温,低浴比,无张力和短期染色方法和使用微波的装置

    公开(公告)号:US6129767A

    公开(公告)日:2000-10-10

    申请号:US100419

    申请日:1998-06-20

    申请人: Seok Min Hong

    发明人: Seok Min Hong

    摘要: A low temperature, low bath ratio, tensionless and short-term dyeing method using microwaves, comprises the steps of: immersing dyed goods in a vessel filled with dye solution comprising water present in an amount twice as much as the goods to be dyed, a disperse dye present in a ratio of disperse dye to goods to be dyed of 1:1000, a dispersing agent present in a ratio of dispersing agent to dye of below 1:100, and irradiating the dyed goods with microwaves below 2450 MHZ in order to heat them to a temperature of 100-130.degree. C.

    摘要翻译: 使用微波的低温,低浴比,无张力和短期染色方法包括以下步骤:将染色的商品浸入装满染料​​溶液的容器中,所述染料溶液的含量是待染色商品的两倍, 以分散染料的比例分散染料与待染色的商品的比例为1:1000,以分散剂与染料的比例以低于1:100的比例存在的分散剂,并将染色的物品照射到低于2450MHZ的微波,以便 将其加热至100-130℃的温度。