公开(公告)号：US07915696B2

公开(公告)日：2011-03-29

申请号：US11877786

申请日：2007-10-24

申请人： David Cecil Hays ,  Marco Francesco Aimi ,  Christopher Fred Keimel ,  Glenn Scott Claydon ,  Kanakasabapathi Subramanian ,  Oliver Charles Boomhower

发明人： David Cecil Hays ,  Marco Francesco Aimi ,  Christopher Fred Keimel ,  Glenn Scott Claydon ,  Kanakasabapathi Subramanian ,  Oliver Charles Boomhower

IPC分类号： H01L29/82

CPC分类号： B81B7/007 ,  B81B2207/07 ,  B81B2207/096 ,  H01H1/0036

摘要： An electrical through-connection, or via, that passes through a substrate to a bus on a first surface of the substrate. The via may be configured with an interlock such that the electrically conductive core of the via is constrained to thermally expand towards the second surface, away from the bus, thus preventing damage to the bus. The interlock may be a local constriction or enlargement of the via near the first surface of the substrate. The via may be greater in length along the bus than a unit spacing of beams in a parallel microswitch array actuated in unison along the bus. The via may be narrower in width than in length, and may form a trapezoidal geometry that is larger at the second surface of the substrate than at the first surface.

摘要翻译： 电穿过连接或通孔，其通过基板到基板的第一表面上的总线。 通孔可以配置有互锁，使得通孔的导电芯被约束以朝向第二表面热膨胀，远离总线，从而防止对总线的损坏。 互锁可以是在基板的第一表面附近的通孔的局部收缩或扩大。 沿着母线的通路长度可以大于沿着总线一致致动的平行微动开关阵列中的梁的单位间隔。 通孔的宽度可以比长度窄，并且可以形成在衬底的第二表面处比在第一表面处更大的梯形几何形状。

公开(公告)号：US20090107812A1

公开(公告)日：2009-04-30

申请号：US11877786

申请日：2007-10-24

申请人： David Cecil Hays ,  Marco Francesco Aimi ,  Christopher Fred Keimel ,  Glenn Scott Claydon ,  Kanakasabapathi Subramanian ,  Oliver Charles Boomhower

发明人： David Cecil Hays ,  Marco Francesco Aimi ,  Christopher Fred Keimel ,  Glenn Scott Claydon ,  Kanakasabapathi Subramanian ,  Oliver Charles Boomhower

IPC分类号： H01H57/00

CPC分类号： B81B7/007 ,  B81B2207/07 ,  B81B2207/096 ,  H01H1/0036

摘要： An electrical through-connection, or via, that passes through a substrate to a bus on a first surface of the substrate. The via may be configured with an interlock such that the electrically conductive core of the via is constrained to thermally expand towards the second surface, away from the bus, thus preventing damage to the bus. The interlock may be a local constriction or enlargement of the via near the first surface of the substrate. The via may be greater in length along the bus than a unit spacing of beams in a parallel microswitch array actuated in unison along the bus. The via may be narrower in width than in length, and may form a trapezoidal geometry that is larger at the second surface of the substrate than at the first surface.

摘要翻译： 电穿过连接或通孔，其通过基板到基板的第一表面上的总线。 通孔可以配置有互锁，使得通孔的导电芯被约束以朝向第二表面热膨胀，远离总线，从而防止对总线的损坏。 互锁可以是在基板的第一表面附近的通孔的局部收缩或扩大。 沿着母线的通路长度可以大于沿着总线一致致动的平行微动开关阵列中的梁的单位间隔。 通孔的宽度可以比长度窄，并且可以形成在衬底的第二表面处比在第一表面处更大的梯形几何形状。

公开(公告)号：US20090159410A1

公开(公告)日：2009-06-25

申请号：US11961767

申请日：2007-12-20

申请人： Xuefeng Wang ,  Kanakasabapathi Subramanian ,  Christopher Fred Keimel ,  Marco Francesco Aimi ,  Kuna Venkat Satya Rama Kishore ,  Glenn Scott Claydon ,  Oliver Charles Boomhower ,  Parag Thakre

发明人： Xuefeng Wang ,  Kanakasabapathi Subramanian ,  Christopher Fred Keimel ,  Marco Francesco Aimi ,  Kuna Venkat Satya Rama Kishore ,  Glenn Scott Claydon ,  Oliver Charles Boomhower ,  Parag Thakre

IPC分类号： H01H57/00

CPC分类号： H01H59/0009 ,  H01H2059/0072

摘要： A MEMS switch includes a substrate, a movable actuator coupled to the substrate, a substrate contact, a substrate electrode, and a conductive stopper electrically coupled to the movable actuator and structured to prevent the movable actuator from contacting the substrate electrode while allowing the movable actuator to make contact with the substrate contact.

摘要翻译： MEMS开关包括衬底，耦合到衬底的可移动致动器，衬底接触件，衬底电极和电耦合到可移动致动器的导电阻塞件，并被构造成防止可动致动器接触衬底电极，同时允许可动致动器 与基板接触。

公开(公告)号：US07609136B2

公开(公告)日：2009-10-27

申请号：US11961767

申请日：2007-12-20

申请人： Xuefeng Wang ,  Kanakasabapathi Subramanian ,  Christopher Fred Keimel ,  Marco Francesco Aimi ,  Kuna Venkat Satya Rama Kishore ,  Glenn Scott Claydon ,  Oliver Charles Boomhower ,  Parag Thakre

发明人： Xuefeng Wang ,  Kanakasabapathi Subramanian ,  Christopher Fred Keimel ,  Marco Francesco Aimi ,  Kuna Venkat Satya Rama Kishore ,  Glenn Scott Claydon ,  Oliver Charles Boomhower ,  Parag Thakre

IPC分类号： H01H51/22

CPC分类号： H01H59/0009 ,  H01H2059/0072

摘要： A MEMS switch includes a substrate, a movable actuator coupled to the substrate, a substrate contact, a substrate electrode, and a conductive stopper electrically coupled to the movable actuator and structured to prevent the movable actuator from contacting the substrate electrode while allowing the movable actuator to make contact with the substrate contact.

摘要翻译： MEMS开关包括衬底，耦合到衬底的可移动致动器，衬底接触件，衬底电极和电耦合到可移动致动器的导电阻塞件，并被构造成防止可动致动器接触衬底电极，同时允许可动致动器 与基板接触。

公开(公告)号：US08610519B2

公开(公告)日：2013-12-17

申请号：US11961737

申请日：2007-12-20

申请人： Christopher Fred Keimel ,  Xuefeng Wang ,  Marco Francesco Aimi ,  Kanakasabapathi Subramanian

发明人： Christopher Fred Keimel ,  Xuefeng Wang ,  Marco Francesco Aimi ,  Kanakasabapathi Subramanian

IPC分类号： H01H51/22

CPC分类号： H01H59/0009 ,  H01H9/40 ,  H01H2001/0084 ,  H01H2057/006

摘要： In accordance with one aspect of the present invention, a MEMS switch is provided. The MEMS switch includes a substrate, a first and a second actuating element electrically coupled together, an anchor mechanically coupled to the substrate and supporting at least one of the first and second actuating elements, and a gate driver configured to actuate the first and second actuating elements.

摘要翻译： 根据本发明的一个方面，提供一种MEMS开关。 MEMS开关包括基板，电耦合在一起的第一和第二致动元件，机械耦合到基板并支撑第一和第二致动元件中的至少一个的锚固件，以及配置成致动第一和第二致动元件的栅极驱动器 元素。

公开(公告)号：US07928333B2

公开(公告)日：2011-04-19

申请号：US12541321

申请日：2009-08-14

申请人： Xuefeng Wang ,  Marco Francesco Aimi ,  Shubhra Bansal ,  Christopher Fred Keimel ,  Kuna Venkat Satya Rama Kishore ,  Kanakasabapathi Subramanian

发明人： Xuefeng Wang ,  Marco Francesco Aimi ,  Shubhra Bansal ,  Christopher Fred Keimel ,  Kuna Venkat Satya Rama Kishore ,  Kanakasabapathi Subramanian

IPC分类号： H01H57/00

CPC分类号： H01H59/0009 ,  H01H2001/0084

摘要： A device, such as a switch structure, is provided, the device including a contact and a conductive element. The conductive element can be configured to be selectively moveable between a non-contacting position, in which the conductive element is separated from the contact (in some cases by a distance less than or equal to about 4 μm, and in others by less than or equal to about 1 μm), and a contacting position, in which the conductive element contacts and establishes electrical communication with the contact. When the conductive element is disposed in the non-contacting position, the contact and the conductive element can be configured to support an electric field therebetween with a magnitude of greater than 320 V μm−1 and/or a potential difference of about 330 V or more.

摘要翻译： 提供诸如开关结构的装置，该装置包括接触件和导电元件。 导电元件可以被配置为在非接触位置之间选择性地移动，在非接触位置中，导电元件与接触件分离（在一些情况下，距离小于或等于约4μm，而另一些距离小于或等于约4μm， 等于约1μm），以及接触位置，其中导电元件接触并建立与接触件的电连通。 当导电元件设置在非接触位置时，触点和导电元件可被配置为支撑其间具有大于320Vμm-1的大小和/或约330V的电位差的电场，或 更多。

公开(公告)号：US07692519B2

公开(公告)日：2010-04-06

申请号：US11962178

申请日：2007-12-21

申请人： William James Premerlani ,  Christopher Fred Keimel ,  Kanakasabapathi Subramanian ,  Xuefeng Wang ,  Marco Francesco Aimi

发明人： William James Premerlani ,  Christopher Fred Keimel ,  Kanakasabapathi Subramanian ,  Xuefeng Wang ,  Marco Francesco Aimi

IPC分类号： H01P1/10 ,  H01H57/00

CPC分类号： H01H59/0009 ,  H01H1/0036

摘要： A MEMS switch is provided including a substrate, a movable actuator coupled to the substrate and having a first side and a second side, a first fixed electrode coupled to the substrate and positioned on the first side of the movable actuator to generate a first actuation force to pull the movable actuator toward a conduction state, and a second fixed electrode coupled to the substrate and positioned on the second side of the movable actuator to generate a second actuation force to pull the movable actuator toward a non-conducting state.

摘要翻译： 提供一种MEMS开关，其包括基板，耦合到基板并具有第一侧和第二侧的可移动致动器，耦合到基板并定位在可移动致动器的第一侧上的第一固定电极，以产生第一致动力 将可动致动器拉向导通状态，以及第二固定电极，其连接到基板并且定位在可动致动器的第二侧上，以产生第二致动力，以将可动致动器拉向非导通状态。

公开(公告)号：US08354899B2

公开(公告)日：2013-01-15

申请号：US12565127

申请日：2009-09-23

申请人： Christopher Fred Keimel ,  Marco Francesco Aimi ,  Shubhra Bansal ,  Reed Roeder Corderman ,  Kuna Venkat Satya Rama Kishore ,  Eddula Sudhakar Reddy ,  Atanu Saha ,  Kanakasabapathi Subramanian ,  Parag Thakre ,  Alex David Corwin

发明人： Christopher Fred Keimel ,  Marco Francesco Aimi ,  Shubhra Bansal ,  Reed Roeder Corderman ,  Kuna Venkat Satya Rama Kishore ,  Eddula Sudhakar Reddy ,  Atanu Saha ,  Kanakasabapathi Subramanian ,  Parag Thakre ,  Alex David Corwin

IPC分类号： H01H51/22

CPC分类号： H01H1/0036 ,  H01H59/0009 ,  H01H2001/0052 ,  H01H2001/0084 ,  Y10T29/49105

摘要： Provided is a device, such as a switch structure, that includes a contact and a conductive element that is configured to be deformable between a first position in which the conductive element is separated from the contact and a second position in which the conductive element contacts the contact. The conductive element can be formed substantially of metallic material configured to inhibit time-dependent deformation. For example, the metallic material may be configured to exhibit a maximum steady-state plastic strain rate of less than 10−12 s−1 when subject to a stress of at least about 25 percent of a yield strength of the metallic material and a temperature less than or equal to about half of a melting temperature of the metallic material. The contact and the conductive element may be part of a microelectromechanical device or a nanoelectromechanical device. Associated methods are also provided.

摘要翻译： 提供了一种诸如开关结构的装置，其包括触点和导电元件，导电元件被配置为可在导电元件与触点分离的第一位置和导电元件接触的第二位置之间变形 联系。 导电元件可以基本上由配置成抑制时间变形的金属材料形成。 例如，当受到金属材料的屈服强度的至少约25％的应力和金属材料的屈服强度的应力时，金属材料可以被配置为表现出小于10-12s -1的最大稳态塑性应变速率 小于或等于金属材料的熔融温度的大约一半。 接触和导电元件可以是微机电装置或纳米机电装置的一部分。 还提供了相关的方法。

公开(公告)号：US20110067983A1

公开(公告)日：2011-03-24

申请号：US12565127

申请日：2009-09-23

申请人： Christopher Fred Keimel ,  Marco Francesco Aimi ,  Shubhra Bansal ,  Reed Roeder Corderman ,  Kuna Venkat Satya Rama Kishore ,  Eddula Sudhakar Reddy ,  Atanu Saha ,  Kanakasabapathi Subramanian ,  Parag Thakre ,  Alex David Corwin

发明人： Christopher Fred Keimel ,  Marco Francesco Aimi ,  Shubhra Bansal ,  Reed Roeder Corderman ,  Kuna Venkat Satya Rama Kishore ,  Eddula Sudhakar Reddy ,  Atanu Saha ,  Kanakasabapathi Subramanian ,  Parag Thakre ,  Alex David Corwin

IPC分类号： H01H57/00 ,  H01H11/00

CPC分类号： H01H1/0036 ,  H01H59/0009 ,  H01H2001/0052 ,  H01H2001/0084 ,  Y10T29/49105

摘要： Provided is a device, such as a switch structure, that includes a contact and a conductive element that is configured to be deformable between a first position in which the conductive element is separated from the contact and a second position in which the conductive element contacts the contact. The conductive element can be formed substantially of metallic material configured to inhibit time-dependent deformation. For example, the metallic material may be configured to exhibit a maximum steady-state plastic strain rate of less than 10−12 s−1 when subject to a stress of at least about 25 percent of a yield strength of the metallic material and a temperature less than or equal to about half of a melting temperature of the metallic material. The contact and the conductive element may be part of a microelectromechanical device or a nanoelectromechanical device. Associated methods are also provided.

摘要翻译： 提供了一种诸如开关结构的装置，其包括触点和导电元件，导电元件被配置为可在导电元件与触点分离的第一位置和导电元件接触的第二位置之间变形 联系。 导电元件可以基本上由配置成抑制时间变形的金属材料形成。 例如，当受到金属材料的屈服强度的至少约25％的应力和金属材料的屈服强度的应力时，金属材料可以被配置为表现出小于10-12s -1的最大稳态塑性应变速率 小于或等于金属材料的熔融温度的大约一半。 接触和导电元件可以是微机电装置或纳米机电装置的一部分。 还提供了相关的方法。

公开(公告)号：US20090160584A1

公开(公告)日：2009-06-25

申请号：US11962178

申请日：2007-12-21

申请人： William James Premerlani ,  Christopher Fred Keimel ,  Kanakasabapathi Subramanian ,  Xuefeng Wang ,  Marco Francesco Aimi

发明人： William James Premerlani ,  Christopher Fred Keimel ,  Kanakasabapathi Subramanian ,  Xuefeng Wang ,  Marco Francesco Aimi

IPC分类号： H01P1/10

CPC分类号： H01H59/0009 ,  H01H1/0036

摘要： A MEMS switch is provided including a substrate, a movable actuator coupled to the substrate and having a first side and a second side, a first fixed electrode coupled to the substrate and positioned on the first side of the movable actuator to generate a first actuation force to pull the movable actuator toward a conduction state, and a second fixed electrode coupled to the substrate and positioned on the second side of the movable actuator to generate a second actuation force to pull the movable actuator toward a non-conducting state.

摘要翻译： 提供一种MEMS开关，其包括基板，耦合到基板并具有第一侧和第二侧的可移动致动器，耦合到基板并定位在可移动致动器的第一侧上的第一固定电极，以产生第一致动力 将可动致动器拉向导通状态，以及第二固定电极，其连接到基板并且定位在可动致动器的第二侧上，以产生第二致动力，以将可动致动器拉向非导通状态。