公开(公告)号：US06279412B1

公开(公告)日：2001-08-28

申请号：US09314654

申请日：1999-05-19

申请人： David R. Beaulieu ,  Robert T. Caveney ,  Tuan Ha

发明人： David R. Beaulieu ,  Robert T. Caveney ,  Tuan Ha

IPC分类号： B25J1900

CPC分类号： B25J19/0075 ,  Y10T74/20305

摘要： A system for shielding a robot arm against being splashed with fluids comprises a protective shell-like cover of thin-walled plastic material impervious to fluids which is removably attached to the robot arm. The protective cover has a contoured shape generally conforming to the configuration of the robot arm and includes an upper member overlying the upwardly facing surfaces of the robot arm and an integral continuous side member proximally overlying the sidewall of the robot arm and extending to a lower rim generally coplanar with the downwardly facing surfaces of the robot arm. The upper member of the protective cover generally overlies the upwardly facing surface of the robot arm while the peripherally extending sidewall generally overlies the outwardly facing surface of the peripherally extending sidewall. In similar fashion, a protective plate of thin-walled plastic material impervious to fluids may also be removably attached to the downwardly facing surfaces of the robot arm and includes a peripheral rim generally coextensive with the peripherally extending sidewall of the link and proximate the lower rim of the protective cover when both the protective cover and the protective plate are so attached. With this construction, any splashing issuing from any direction and directed toward the robot arm is caused to impinge upon the protective cover and the protective plate thereby protecting the link of the robot arm to which it is attached.

摘要翻译： 用于屏蔽机器人臂以防止被流体溅出的系统包括：可移除地附接到机器人手臂的流体不可渗透的薄壁塑料材料的保护壳状盖。 保护罩具有通常符合机器人臂的构造的轮廓形状，并且包括覆盖机器人臂的向上表面的上部构件和向上靠近机器人臂的侧壁并且延伸到下部边缘的一体的连续侧部构件 通常与机器人手臂的朝下的表面共面。 保护罩的上部构件通常覆盖在机器人臂的面向上的表面上，而外围延伸的侧壁通常覆盖在周向延伸的侧壁的面向外的表面上。 以类似的方式，不透液体的薄壁塑料材料的保护板也可以可拆卸地附接到机器人手臂的朝下的表面，并且包括通常与连接件的周向延伸的侧壁共同延伸并且靠近下边缘 当保护盖和保护板都安装在保护盖上时。 通过这种结构，从任何方向发出的指向机器人手臂的飞溅都被撞击在保护盖和保护板上，从而保护与其连接的机器人手臂的连杆。

公开(公告)号：US20080142739A1

公开(公告)日：2008-06-19

申请号：US11331545

申请日：2006-01-13

申请人： David R. Beaulieu

发明人： David R. Beaulieu

IPC分类号： G21G5/00

CPC分类号： H01J37/3177 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/70383 ,  G03F7/70391 ,  G03F7/704 ,  H01J2237/31774

摘要： A multi-beam synchronous raster scanning lithography system includes a processor that generates electrical signals representing a desired exposure pattern at an output. A multi-beam source of exposing radiation generates a plurality of exposure beam. A beam modulator receives the electrical signals generated by the processor and modulates the plurality of exposing beams according to the desired exposure pattern. A beam deflector deflects the plurality of exposure beams by a predetermined distance along a first axis, thereby exposing a plurality of pixels along the first axis with the desired exposure pattern. A translation stage moves the substrate a predetermined distance along a second axis to position the substrate for a subsequent exposure of pixels along the first axis that results in a desired overlapping exposure dose profile.

公开(公告)号：US5990915A

公开(公告)日：1999-11-23

申请号：US541945

申请日：1995-10-10

申请人： Radu R. Tenenbaum ,  David R. Beaulieu ,  Peter J. Simone ,  Russ S. Camacho

发明人： Radu R. Tenenbaum ,  David R. Beaulieu ,  Peter J. Simone ,  Russ S. Camacho

IPC分类号： G06K17/00 ,  G07C1/14 ,  G01D15/04 ,  G06K5/00 ,  G06K13/00

CPC分类号： G06K17/00 ,  G07C1/14 ,  G06K2017/0045

摘要： A time recorder receives bar coded time cards, punches time data on the cards and stores the time data in memory. Each card has a bar code at each end corresponding to the same value. For each pay period, a unique bar code and the card on which it is printed are assigned to each employee during an initialization process. A card is inserted upside down into the time recorder for each employee and the bar code is read by the system and assigned to an employee. At the same time, employee information is printed on the card.

摘要翻译： 时间记录器接收条形码时间卡，打印卡上的时间数据并将时间数据存储在存储器中。 每个卡片的每一端都有一个条码，对应于相同的值。 对于每个付费期间，在初始化过程中分配给独立的条形码和打印在其上的卡。 将一张卡片倒置插入每位员工的时间记录器中，并且系统读取条形码并分配给员工。 同时，员工信息印在卡片上。

公开(公告)号：US5281996A

公开(公告)日：1994-01-25

申请号：US940537

申请日：1992-09-04

申请人： John H. Bruning ,  David R. Beaulieu

发明人： John H. Bruning ,  David R. Beaulieu

IPC分类号： G03F7/20 ,  G03B27/42 ,  G03B27/32

CPC分类号： G03F7/70358 ,  G03F7/70475

摘要： A mask or reticle for a single large microcircuit device is imaged in portions by an axially centered photolithographic reduction lens having a movable mask stage in addition to a movable wafer stage so that the portions of the complete device are imaged in juxtaposed registry on the wafer. This allows a single microcircuit device larger than the image field of the reduction lens to be imaged in a scanning mode or in a succession of steps forming images at the desired resolution range of 0.1-0.50 .mu.m.

摘要翻译： 用于单个大型微电路器件的掩模或掩模版除了可移动的晶片台之外还通过具有可移动掩模级的轴向中心的光刻还原透镜被部分地成像，使得整个器件的部分以并置的注册表被成像在晶片上。 这允许大于缩小透镜的像场的单个微电路器件以扫描模式成像或以0.1-0.50（my）m的期望分辨率范围形成图像的一连串步骤成像。

公开(公告)号：US5101226A

公开(公告)日：1992-03-31

申请号：US601412

申请日：1990-10-22

申请人： David R. Beaulieu ,  John D. Wallace

发明人： David R. Beaulieu ,  John D. Wallace

IPC分类号： G03F9/00

CPC分类号： G03F9/7023

摘要： In the distance and tilt sensing apparatus disclosed herein, an image of a light source is projected by a lens obliquely onto a surface to be sensed. A ring reticle is interposed in the optical path between the light source and the lens at a distance from the lens substantially equal to its focal length. A second lens projects a remote image of the first object image onto a detector. The light projected from the second lens is split into two paths. An aperture reticle is interposed in one of the paths at a distance from the second lens substantially equal to its focal length, an image of the center of the ring reticle being formed on the aperture reticle. A position responsive optical detector aligned with the aperture reticle senses the position of the image of the center of the ring reticle relative to the center of the aperture and that position is indicative of the tilt of the surface around an axis essentially perpendicular to the axis of the incident light.

摘要翻译： 在本文公开的距离和倾斜感测装置中，光源的图像被透镜倾斜地投影到待感测的表面上。 环形掩模版被插入光源和透镜之间的光路中，距透镜的距离基本上等于其焦距。 第二透镜将第一物体图像的远程图像投射到检测器上。 从第二透镜投影的光被分成两条路径。 孔径光罩被放置在与第二透镜相距一定距离的一条路径中，其距离基本上等于其焦距，环形掩模版的中心的图像形成在光阑掩模版上。 与孔径光罩对准的位置响应光学检测器相对于孔的中心感测环形标线片的中心的图像的位置，并且该位置指示表面围绕基本上垂直于 事件光。

公开(公告)号：US07408142B2

公开(公告)日：2008-08-05

申请号：US11532008

申请日：2006-09-14

申请人： David R. Beaulieu ,  Harry F. Lockwood ,  Anton S. Tremsin

发明人： David R. Beaulieu ,  Harry F. Lockwood ,  Anton S. Tremsin

IPC分类号： H01J40/14

CPC分类号： H01J29/023 ,  H01J43/246

摘要： A microchannel amplifier includes an insulating substrate that defines at least one microchannel pore through the substrate from an input surface to an output surface. A conductive layer is formed on an outer surface of the at least one microchannel pore that has a non-uniform resistance as a function of distance through the at least one microchannel pore. The non-uniform resistance is selected to simulate saturation by reducing gain as a function of input current and bias voltage compared with uniform resistance. A first and second electrode is deposited on a respective one of the input and the output surfaces of the insulating substrate. The microchannel amplifier amplifying emissions propagating through the at least one microchannel pore when the first and second electrodes are biased.

摘要翻译： 微通道放大器包括绝缘基板，其从输入表面到输出表面限定穿过基板的至少一个微通道孔。 在所述至少一个微通道孔的外表面上形成导电层，所述微通道孔具有通过所述至少一个微通道孔的距离的函数的不均匀电阻。 选择非均匀电阻来模拟饱和，通过减小作为输入电流和偏置电压的函数的增益与均匀电阻相比。 第一和第二电极沉积在绝缘基板的输入和输出表面中的相应一个上。 当第一和第二电极偏置时，微通道放大器放大通过至少一个微通道孔传播的发射。

公开(公告)号：US06719517B2

公开(公告)日：2004-04-13

申请号：US10006263

申请日：2001-12-04

申请人： David R. Beaulieu ,  Douglas R. Adams ,  Mitchell Drew ,  Peter Van Der Meulen

发明人： David R. Beaulieu ,  Douglas R. Adams ,  Mitchell Drew ,  Peter Van Der Meulen

IPC分类号： B65G4907

CPC分类号： H01L21/67167 ,  H01L21/67201 ,  H01L21/67739 ,  Y10S414/139

摘要： A substrate processing apparatus comprising a frame, at least one processing module, and a substrate transport apparatus. The frame defines a first chamber with outer substrate transport openings for transporting substrates between the first chamber and an exterior of the frame. The processing module is connected to the exterior of the frame. The processing module communicates with the first chamber of the frame through at least one of the outer openings. The substrate transport apparatus is connected to the frame for transporting substrates between the first chamber and the processing module exterior to the frame. The frame has a second integral chamber formed therein. The second integral chamber communicates with the first chamber through an internal substrate transport opening of the frame. The second integral chamber of the frame has a selectable configuration from a number of predetermined configurations. The configuration of the second integral chamber to the frame is selected in accordance with a predetermined characteristic of the substrate processing apparatus.

摘要翻译： 一种基板处理装置，包括框架，至少一个处理模块和基板输送装置。 框架限定具有外基板输送开口的第一室，用于在第一室和框架的外部之间输送基板。 处理模块连接到框架的外部。 处理模块通过至少一个外部开口与框架的第一室连通。 基板输送装置连接到框架，用于在第一室和框架外部的处理模块之间输送基板。 框架具有形成在其中的第二整体室。 第二整体室通过框架的内部基板输送开口与第一室连通。 框架的第二整体室具有多个预定构造的可选配置。 根据基板处理装置的预定特性来选择到框架的第二整体室的构造。

公开(公告)号：US5991510A

公开(公告)日：1999-11-23

申请号：US890862

申请日：1997-07-10

申请人： David R. Beaulieu

发明人： David R. Beaulieu

IPC分类号： B25J19/06 ,  B25J9/16 ,  B25J9/18 ,  G05B19/409 ,  G05B19/04

CPC分类号： G05B19/409 ,  B25J9/1602 ,  G05B2219/33119 ,  G05B2219/36114 ,  Y02P90/265 ,  Y10S700/90

摘要： A robot drive has operating and configuration parameters at an installation location stored in an easily removable storage device on the drive, or nearby, so that special data, such as that associated with arm design and system layout, including taught stations, can remain associated with the drive and installation whereby the drive system can be installed or replaced in minimal time since the storage device does not need reprogramming. This removable storage device, in the form of a static memory or Master Key, e.g., a Dallas Key or E Prom or the like, may be affixed to the robot body or off board nearby, and may store arm design parameters, programmed while on the robot body or off-line, and becomes a unique part structured for manufacturing with respect to the arm set design. Further, nominal system layout parameters can be prestored in the Key, and when this Key is affixed to the robot drive, the robot automatically has the information regarding both arm design and system layout, which will help avoid collisions and provide a starting point for the fine teaching of the transfer stations. Additionally, the fine location parameters for each transfer station may be stored in the Key when the robot is installed. Thus, the Key will contain all the information needed to make a robot unique to a unique system, and when a robot drive is replaced, by affixing the original Key to the new robot or nearby, it will assume all of the parameters of the initial robot.

摘要翻译： 机器人驱动器在安装位置处具有存储在驱动器或附近的容易移动的存储设备中的操作和配置参数，使得诸如与臂设计和系统布局（包括教师站）相关联的特殊数据可以保持与 由于存储设备不需要重新编程，驱动系统可以在最短的时间内安装或更换驱动系统。 这种以静态存储器或主密钥（例如达拉斯钥匙或E等等）的形式的可移动存储设备可以被附加到机器人主体或离开板附近，并且可以存储在设计的臂设计参数 机器人身体或离线，并且成为相对于手臂组设计制造的独特部件。 此外，标称系统布局参数可以预先存入密钥，当该密钥附加到机器人驱动器上时，机器人自动获得有关臂设计和系统布局的信息，这将有助于避免碰撞并提供起点 转运站的优良教学。 此外，当安装机器人时，每个传送站的精细位置参数可以存储在密钥中。 因此，Key将包含使独特系统独特的机器人所需的所有信息，并且当更换机器人驱动器时，通过将原始密钥附加到新的机器人或附近，它将承担初始的所有参数 机器人。

公开(公告)号：US08454293B2

公开(公告)日：2013-06-04

申请号：US12723837

申请日：2010-03-15

申请人： Ulysses Gilchrist ,  David R. Beaulieu ,  Peter F. Van der Meulen

发明人： Ulysses Gilchrist ,  David R. Beaulieu ,  Peter F. Van der Meulen

IPC分类号： B65G49/07

CPC分类号： B65G49/00 ,  H01L21/67772 ,  Y10S414/135 ,  Y10S414/14

摘要： A substrate processing apparatus having a station for loading and unloading substrates from the apparatus, includes an aperture closure for sealing a loading and unloading aperture of the station, a fluidic magazine door drive for removing a door of a substrate magazine and thus opening the substrate magazine and for operating the aperture closure to open the aperture, and sensor for mapping vertical locations of substrates mounted to the magazine door of the drive. The fluidic magazine door drive may include an encoder different from the sensor, the encoder being configured for determining the vertical location of the sensor.

摘要翻译： 具有用于从设备装载和卸载基板的基站的基板处理装置包括用于密封工位的装载和卸载孔的孔盖，用于移除基板仓的门的流体仓门驱动器，从而打开基板仓 并且用于操作孔径封闭件以打开孔径，以及用于映射安装到驱动器的仓库门的基板的垂直位置的传感器。 流体杂志门驱动器可以包括与传感器不同的编码器，编码器被配置用于确定传感器的垂直位置。

公开(公告)号：US20100172721A1

公开(公告)日：2010-07-08

申请号：US12723837

申请日：2010-03-15

申请人： Ulysses Gilchrist ,  David R. Beaulieu ,  Peter Van der Meulen

发明人： Ulysses Gilchrist ,  David R. Beaulieu ,  Peter Van der Meulen

IPC分类号： H01L21/677

CPC分类号： B65G49/00 ,  H01L21/67772 ,  Y10S414/135 ,  Y10S414/14

摘要： A substrate processing apparatus having a station for loading and unloading substrates from the apparatus, includes an aperture closure for sealing a loading and unloading aperture of the station, a fluidic magazine door drive for removing a door of a substrate magazine and thus opening the substrate magazine and for operating the aperture closure to open the aperture, and sensor for mapping vertical locations of substrates mounted to the magazine door of the drive. The fluidic magazine door drive may include an encoder different from the sensor, the encoder being configured for determining the vertical location of the sensor.

摘要翻译： 具有用于从设备装载和卸载基板的基站的基板处理装置包括用于密封工位的装载和卸载孔的孔盖，用于移除基板仓的门的流体仓门驱动器，从而打开基板仓 并且用于操作孔径封闭件以打开孔径，以及用于映射安装到驱动器的仓库门的基板的垂直位置的传感器。 流体杂志门驱动器可以包括与传感器不同的编码器，编码器被配置用于确定传感器的垂直位置。