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公开(公告)号：US06279412B1
公开(公告)日：2001-08-28
申请号：US09314654
申请日：1999-05-19
申请人： David R. Beaulieu , Robert T. Caveney , Tuan Ha
发明人： David R. Beaulieu , Robert T. Caveney , Tuan Ha
IPC分类号： B25J1900
CPC分类号： B25J19/0075 , Y10T74/20305
摘要： A system for shielding a robot arm against being splashed with fluids comprises a protective shell-like cover of thin-walled plastic material impervious to fluids which is removably attached to the robot arm. The protective cover has a contoured shape generally conforming to the configuration of the robot arm and includes an upper member overlying the upwardly facing surfaces of the robot arm and an integral continuous side member proximally overlying the sidewall of the robot arm and extending to a lower rim generally coplanar with the downwardly facing surfaces of the robot arm. The upper member of the protective cover generally overlies the upwardly facing surface of the robot arm while the peripherally extending sidewall generally overlies the outwardly facing surface of the peripherally extending sidewall. In similar fashion, a protective plate of thin-walled plastic material impervious to fluids may also be removably attached to the downwardly facing surfaces of the robot arm and includes a peripheral rim generally coextensive with the peripherally extending sidewall of the link and proximate the lower rim of the protective cover when both the protective cover and the protective plate are so attached. With this construction, any splashing issuing from any direction and directed toward the robot arm is caused to impinge upon the protective cover and the protective plate thereby protecting the link of the robot arm to which it is attached.
摘要翻译： 用于屏蔽机器人臂以防止被流体溅出的系统包括：可移除地附接到机器人手臂的流体不可渗透的薄壁塑料材料的保护壳状盖。 保护罩具有通常符合机器人臂的构造的轮廓形状，并且包括覆盖机器人臂的向上表面的上部构件和向上靠近机器人臂的侧壁并且延伸到下部边缘的一体的连续侧部构件 通常与机器人手臂的朝下的表面共面。 保护罩的上部构件通常覆盖在机器人臂的面向上的表面上，而外围延伸的侧壁通常覆盖在周向延伸的侧壁的面向外的表面上。 以类似的方式，不透液体的薄壁塑料材料的保护板也可以可拆卸地附接到机器人手臂的朝下的表面，并且包括通常与连接件的周向延伸的侧壁共同延伸并且靠近下边缘 当保护盖和保护板都安装在保护盖上时。 通过这种结构，从任何方向发出的指向机器人手臂的飞溅都被撞击在保护盖和保护板上，从而保护与其连接的机器人手臂的连杆。
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公开(公告)号：US20120128450A1
公开(公告)日：2012-05-24
申请号：US13270844
申请日：2011-10-11
IPC分类号： H01L21/677
CPC分类号： B25J9/042 , H01L21/67742
摘要： A robotic transport apparatus including a drive system including at least one harmonic motor assembly, at least one drive shaft coupled to the at least one harmonic motor assembly, at least one robotic arm mounted to the at least one drive shaft, where the robotic arm is located inside a sealed environment, and at least one atmospheric isolation seal seated on an output surface of the drive system and forming an atmospheric barrier disposed so that the at least one drive shaft extends through the atmospheric barrier into the sealed environment and the at least one harmonic motor assembly is located outside the sealed environment, wherein the robotic transport apparatus is a high capacity payload transport apparatus.
摘要翻译： 一种机器人运输装置，其包括驱动系统，该驱动系统包括至少一个谐波马达组件，耦合到所述至少一个谐波马达组件的至少一个驱动轴，安装在所述至少一个驱动轴上的至少一个机器臂， 位于密封环境内，以及至少一个大气隔离密封件，其位于驱动系统的输出表面上并形成大气障碍物，其设置成使得至少一个驱动轴延伸穿过大气屏障进入密封环境，并且至少一个 谐波电动机组件位于密封环境之外，其中机器人运输装置是高容量有效载荷运输装置。
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公开(公告)号：US07988398B2
公开(公告)日：2011-08-02
申请号：US10962787
申请日：2004-10-09
IPC分类号： H01L21/677 , H01L21/306 , B65H1/00 , C23F1/00
CPC分类号： H01L21/677 , H01L21/67161 , H01L21/67167 , H01L21/67173 , H01L21/67184 , H01L21/67709 , H01L21/67724 , H01L21/67727 , H01L21/67742 , H01L21/67766 , Y10S414/139
摘要： Substrate processing apparatus having a chamber, a generally linear array of process modules, a substrate transport, and a drive system. The chamber is capable of being isolated from the outside atmosphere. Each process module of the array is communicably connected to the chamber to allow a substrate to be transferred between the chamber and process module. The substrate transport is located in and is movably supported from the chamber. The transport is capable of moving along a linear path defined by the chamber for transporting the substrate between process modules. The drive system is connected to the chamber for driving and moving the transport along the linear path. The chamber comprises a selectable number of chamber modules serially abutted to defined the chamber. Each module has an integral portion of the drive system.
摘要翻译： 具有室的基板处理装置，大致线性的工艺模块阵列，基板输送和驱动系统。 该室能够与外界气氛隔绝。 阵列的每个处理模块可通信地连接到腔室，以允许衬底在室和过程模块之间传送。 衬底输送器位于腔室中并且可移动地从腔室支撑。 输送器能够沿着由腔室限定的线性路径移动，以在处理模块之间传送基板。 驱动系统连接到室，用于沿着线性路径驱动和移动传送装置。 腔室包括可选数量的腔室模块，其串联地邻接以限定腔室。 每个模块都具有驱动系统的整体部分。
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公开(公告)号：US20110038692A1
公开(公告)日：2011-02-17
申请号：US12542588
申请日：2009-08-17
IPC分类号： H01L21/673 , H01L21/677 , H01L21/67
CPC分类号： H01L21/67742 , H01L21/67196
摘要： A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The transport vehicle is located in the first chamber and is movably supported from the first chamber for moving linearly relative to the first chamber. The transport vehicle includes a base, and an integral semiconductor workpiece transfer arm movably mounted to the base and capable of multi-access movement relative to the base. The other chamber is communicably connected to the first chamber via a closable opening of the first chamber. The opening is sized to allow the transport vehicle to transit between the first chamber and the other chamber through the opening.
摘要翻译： 一种具有第一室，运输车辆和另一室的半导体工件处理设备。 第一个房间能够与外界气氛隔绝。 运输车辆位于第一室中，并且可从第一室移动地支撑，用于相对于第一室线性运动。 运输车辆包括基座和可移动地安装到基座并且能够相对于基座进行多通道移动的整体半导体工件传送臂。 另一个室通过第一室的可关闭的开口可通信地连接到第一室。 开口的尺寸设计成允许运输车辆通过开口在第一室和另一个室之间转运。
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公开(公告)号：US20120141235A1
公开(公告)日：2012-06-07
申请号：US13293717
申请日：2011-11-10
IPC分类号： H01L21/677
摘要： A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.
摘要翻译： 一种基板处理装置，包括框架，第一臂，其在肩部轴线处联接到框架，所述肩部轴线具有第一上臂，第一前臂和彼此串联和可旋转地联接的第一前臂和至少一个基板保持器，第二臂， 所述肩轴线，其中所述臂的旋转的肩部轴线基本上重合，所述第二臂具有第二上臂，第二前臂和彼此串联和可旋转地联接的第二上臂和至少一个基板保持器，以及连接到所述框架的驱动部分， 所述驱动部分被配置为独立地延伸和旋转每个臂，其中所述第一臂的延伸轴线相对于所述第二臂的延伸轴基本上位于所述第一臂的至少一个的每个角位置处成角度 手臂或第二臂。
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公开(公告)号：US20080298944A1
公开(公告)日：2008-12-04
申请号：US12117355
申请日：2008-05-08
IPC分类号： B66C23/00
CPC分类号： B25J11/0095 , B25J9/106 , B25J9/126 , H01L21/67742 , H01L21/68707 , Y10S414/141 , Y10S901/15 , Y10S901/21 , Y10S901/23 , Y10S901/27 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.
摘要翻译： 一种基板输送装置，其特征在于，包括：第一无转矩回转马达，其具有第一定子和第一转子，所述第一定子线性分布，所述第一转子与第一臂连结，第二无轴旋转马达，包括第二定子和第二转子， 第二定子是线性分布的，第二转子耦合到第二臂，第二臂连接到第一臂，第一衬底支撑件联接到第一和第二臂中的至少一个，其中第一定子和第二定子 被构造成使得第一和第二臂和第一基板支撑件在定子内部，并且在第一和第二无轴旋转马达之间的连接处的马达输出和第一和第二臂中的相应的一个是合力设置在 第一和第二臂。
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公开(公告)号：US06769861B2
公开(公告)日：2004-08-03
申请号：US10267465
申请日：2002-10-08
申请人： Robert T. Caveney
发明人： Robert T. Caveney
IPC分类号： B65G4907
CPC分类号： H01L21/6835 , H01L21/68707 , Y10S414/136 , Y10S414/141
摘要： The effector of a robot is constructed with positioning pads at its distal end. The pads provide an accurate registration surface for engagement of the substrate. A pair of idler rollers, which slide along the longitudinal axis of the effector, is moved by an actuator into engagement with the substrate and the assembly urges the substrate against the positioning pads. A pair of wheels is mounted on a platform independent of the effector with one of the wheels driven by a motor. An optical sensor mounted with the wheels detects an orientation mark on the edge of the substrate and allows the driven wheel to rotate the substrate to its specified angular position.
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公开(公告)号：US06265803B1
公开(公告)日：2001-07-24
申请号：US09437628
申请日：1999-11-10
申请人： Robert T. Caveney
发明人： Robert T. Caveney
IPC分类号： H01R3900
摘要： A coaxial drive employs a base member which is secured to a housing and is open to atmosphere and mounts rotatably an interior drive shaft about said base member so that rotation of the drive member in either direction in a full 360° circle. An electrical slip ring is provided between the base and the drive member with a ferrofluidic seal disposed proximate the lower end of the interior drive shaft such that atmospheric pressure passing through the base member and through the electrical slip ring is blocked by the ferrofluidic seal which has an opposite end disposed to the vacuum in the central processing apparatus.
摘要翻译： 同轴驱动器采用固定在壳体上并且对大气开放并且可旋转地安装在所述基座构件周围的内部驱动轴的基座构件，使得驱动构件在完整360°圆中的任一方向上的旋转。 在底座和驱动构件之间设置电滑环，其中氟铁磁性密封件设置在内部驱动轴的下端附近，使得通过基座构件并通过电滑环的大气压力被铁磁流体密封件阻挡， 设置在中央处理装置中的真空的相对端。
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公开(公告)号：US6123502A
公开(公告)日：2000-09-26
申请号：US889516
申请日：1997-07-08
IPC分类号： G03F7/20 , H01L21/683
CPC分类号： G03F7/70725 , H01L21/6838 , Y10S414/141
摘要： A substrate processing apparatus having a substrate transport with substrate holders. The holders are adapted to vacuum hold substrates and thereby allow for rapid movement of the substrates without risk that the substrates will move off of the holders. If vacuum holding of a substrate on a holder fails, the movement of the substrate holder is automatically changed to provide a less rapid gravity only holding of the substrate on the holder.
摘要翻译： 一种基板处理装置，具有基板保持器的基板输送。 保持器适于真空保持基板，从而允许基板的快速移动，而不会使基板从保持器移开的风险。 如果保持器上的基板的真空保持器失效，则基板保持器的移动被自动地改变，以提供不太快的重力，仅将基板保持在保持器上。
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公开(公告)号：US09623555B2
公开(公告)日：2017-04-18
申请号：US13293717
申请日：2011-11-10
IPC分类号： B25J9/04
摘要： A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.
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