公开(公告)号：US20090156452A1

公开(公告)日：2009-06-18

申请号：US12131654

申请日：2008-06-02

申请人： David S.L. Mui ,  Satish Srinivasan ,  Grant Peng ,  Ji Zhu ,  Shih-Chung Kon ,  Dragan Podlesnik ,  Arjun Mendiratta

发明人： David S.L. Mui ,  Satish Srinivasan ,  Grant Peng ,  Ji Zhu ,  Shih-Chung Kon ,  Dragan Podlesnik ,  Arjun Mendiratta

IPC分类号： C11D3/37

CPC分类号： C11D7/5009 ,  C11D3/3723 ,  C11D3/3765 ,  C11D3/3773 ,  C11D7/261 ,  C11D7/3263 ,  C11D7/34 ,  C11D11/0047 ,  H01L21/02057 ,  H01L21/67051 ,  Y10S134/902

摘要： The embodiments of the present invention provide improved materials for cleaning patterned substrates with fine features. The cleaning materials have advantages in cleaning patterned substrates with fine features without substantially damaging the features. The cleaning materials are fluid, either in liquid phase, or in liquid/gas phase, and deform around device features; therefore, the cleaning materials do not substantially damage the device features or reduce damage all together. The cleaning materials containing polymers of a polymeric compound with large molecular weight capture the contaminants on the substrate. In addition, the cleaning materials entrap the contaminants and do not return the contaminants to the substrate surface. The polymers of one or more polymeric compounds with large molecular weight form long polymer chains, which can also be cross-linked to form a network (or polymeric network). The long polymer chains and/or polymer network show superior capabilities of capturing and entrapping contaminants, in comparison to conventional cleaning materials.

摘要翻译： 本发明的实施例提供用于清洁具有精细特征的图案化衬底的改进材料。 清洁材料在清洁具有精细特征的图案化基材上具有优点，而基本上不损坏特征。 清洁材料是流体，液相或液相/气相，并围绕装置特征变形; 因此，清洁材料基本上不会损坏设备特征或将损坏降低在一起。 包含具有大分子量的聚合物的聚合物的清洁材料捕获基底上的污染物。 此外，清洁材料夹带污染物并且不会将污染物返回到基底表面。 一种或多种具有大分子量的聚合物的聚合物形成长的聚合物链，其也可以交联以形成网络（或聚合物网络）。 与传统清洁材料相比，长的聚合物链和/或聚合物网络显示出捕获和捕获污染物的优异性能。

公开(公告)号：US20090151752A1

公开(公告)日：2009-06-18

申请号：US12131660

申请日：2008-06-02

申请人： David S.L. Mui ,  Satish Srinivasan ,  Grant Peng ,  Ji Zhu ,  Shih-Chung Kon ,  Dragan Podlesnik ,  Arjun Mendiratta

发明人： David S.L. Mui ,  Satish Srinivasan ,  Grant Peng ,  Ji Zhu ,  Shih-Chung Kon ,  Dragan Podlesnik ,  Arjun Mendiratta

IPC分类号： B08B3/08

CPC分类号： C11D7/5009 ,  C11D3/3723 ,  C11D3/3765 ,  C11D3/3773 ,  C11D7/261 ,  C11D7/3263 ,  C11D7/34 ,  C11D11/0047 ,  H01L21/02057 ,  H01L21/67051 ,  Y10S134/902

摘要： The embodiments of the present invention provide methods for cleaning patterned substrates with fine features. The methods for cleaning patterned substrate have advantages in cleaning patterned substrates with fine features without substantially damaging the features by using the cleaning materials described. The cleaning materials are fluid, either in liquid phase, or in liquid/gas phase, and deform around device features; therefore, the cleaning materials do not substantially damage the device features or reduce damage all together. The cleaning materials containing polymers of a polymeric compound with large molecular weight capture the contaminants on the substrate. In addition, the cleaning materials entrap the contaminants and do not return the contaminants to the substrate surface. The polymers of one or more polymeric compounds with large molecular weight form long polymer chains, which can also be cross-linked to form a network (or polymeric network). The long polymer chains and/or polymer network show superior capabilities of capturing and entrapping contaminants, in comparison to conventional cleaning materials.

摘要翻译： 本发明的实施例提供了用于清洁具有精细特征的图案化衬底的方法。 用于清洁图案化衬底的方法具有通过使用所述清洁材料来清洁具有精细特征的图案化衬底而不会基本上损坏特征的优点。 清洁材料是流体，液相或液相/气相，并围绕装置特征变形; 因此，清洁材料基本上不会损坏设备特征或将损坏降低在一起。 包含具有大分子量的聚合物的聚合物的清洁材料捕获基底上的污染物。 此外，清洁材料夹带污染物并且不会将污染物返回到基底表面。 一种或多种具有大分子量的聚合物的聚合物形成长的聚合物链，其也可以交联以形成网络（或聚合物网络）。 与传统清洁材料相比，长的聚合物链和/或聚合物网络显示出捕获和捕获污染物的优异性能。

公开(公告)号：US20120132234A1

公开(公告)日：2012-05-31

申请号：US13309000

申请日：2011-12-01

申请人： David S.L. Mui ,  Satish Srinivasan ,  Grant Peng ,  Ji Zhu ,  Shih-Chung Kon ,  Dragan Podlesnik ,  Arjun Mendiratta

发明人： David S.L. Mui ,  Satish Srinivasan ,  Grant Peng ,  Ji Zhu ,  Shih-Chung Kon ,  Dragan Podlesnik ,  Arjun Mendiratta

IPC分类号： B08B3/08 ,  B08B3/00 ,  B08B7/04 ,  B08B3/02 ,  B08B5/04

CPC分类号： C11D7/5009 ,  C11D3/3723 ,  C11D3/3765 ,  C11D3/3773 ,  C11D7/261 ,  C11D7/3263 ,  C11D7/34 ,  C11D11/0047 ,  H01L21/02057 ,  H01L21/67051 ,  Y10S134/902

摘要： A cleaning system for removing contaminants on a surface of a patterned substrate for defining integrated circuit devices is provided. The system includes a substrate carrier for supporting edges of the patterned substrate, and a cleaning head positioned over the patterned substrate. The cleaning head includes a plurality of dispensing holes to dispense a cleaning material on the surface the patterned substrate for defining integrated circuit devices, wherein the cleaning material includes polymers of a polymeric compound. The cleaning head is coupled to a storage of the cleaning material, which is coupled to the cleaning material preparation system. A support structure holds the cleaning head in proximity to the surface of the patterned substrate.

摘要翻译： 提供了用于去除用于定义集成电路器件的图案化衬底的表面上的污染物的清洁系统。 该系统包括用于支撑图案化衬底的边缘的衬底载体和位于图案化衬底上的清洁头。 清洁头包括多个分配孔，用于在表面上分配用于限定集成电路器件的图案化衬底的清洁材料，其中清洁材料包括聚合物的聚合物。 清洁头连接到清洁材料的存储器，清洁材料联接到清洁材料制备系统。 支撑结构将清洁头保持在图案化基底的表面附近。

公开(公告)号：US08211846B2

公开(公告)日：2012-07-03

申请号：US12131654

申请日：2008-06-02

申请人： David S. L. Mui ,  Satish Srinivasan ,  Grant Peng ,  Ji Zhu ,  Shih-Chung Kon ,  Dragan Podlesnik ,  Arjun Mendiratta

发明人： David S. L. Mui ,  Satish Srinivasan ,  Grant Peng ,  Ji Zhu ,  Shih-Chung Kon ,  Dragan Podlesnik ,  Arjun Mendiratta

IPC分类号： C11D1/00 ,  C11D3/26 ,  C11D3/37

CPC分类号： C11D7/5009 ,  C11D3/3723 ,  C11D3/3765 ,  C11D3/3773 ,  C11D7/261 ,  C11D7/3263 ,  C11D7/34 ,  C11D11/0047 ,  H01L21/02057 ,  H01L21/67051 ,  Y10S134/902

摘要： The embodiments of the present invention provide improved materials for cleaning patterned substrates with fine features. The cleaning materials have advantages in cleaning patterned substrates with fine features without substantially damaging the features. The cleaning materials are fluid, either in liquid phase, or in liquid/gas phase, and deform around device features; therefore, the cleaning materials do not substantially damage the device features or reduce damage all together. The cleaning materials containing polymers of a polymeric compound with large molecular weight capture the contaminants on the substrate. In addition, the cleaning materials entrap the contaminants and do not return the contaminants to the substrate surface. The polymers of one or more polymeric compounds with large molecular weight form long polymer chains, which can also be cross-linked to form a network (or polymeric network). The long polymer chains and/or polymer network show superior capabilities of capturing and entrapping contaminants, in comparison to conventional cleaning materials.

摘要翻译： 本发明的实施例提供用于清洁具有精细特征的图案化衬底的改进材料。 清洁材料在清洁具有精细特征的图案化基材上具有优点，而基本上不损坏特征。 清洁材料是流体，液相或液相/气相，并围绕装置特征变形; 因此，清洁材料基本上不会损坏设备特征或将损坏降低在一起。 包含具有大分子量的聚合物的聚合物的清洁材料捕获基底上的污染物。 此外，清洁材料夹带污染物并且不会将污染物返回到基底表面。 一种或多种具有大分子量的聚合物的聚合物形成长的聚合物链，其也可以交联以形成网络（或聚合物网络）。 与传统清洁材料相比，长的聚合物链和/或聚合物网络显示出捕获和捕获污染物的优异性能。

公开(公告)号：US20090151757A1

公开(公告)日：2009-06-18

申请号：US12131667

申请日：2008-06-02

申请人： David S. L. Mui ,  Satish Srinivasan ,  Grant Peng ,  Ji Zhu ,  Shih-Chung Kon ,  Dragan Podlesnik ,  Arjun Mendiratta

发明人： David S. L. Mui ,  Satish Srinivasan ,  Grant Peng ,  Ji Zhu ,  Shih-Chung Kon ,  Dragan Podlesnik ,  Arjun Mendiratta

IPC分类号： B08B3/04 ,  C11D17/00

CPC分类号： C11D7/5009 ,  C11D3/3723 ,  C11D3/3765 ,  C11D3/3773 ,  C11D7/261 ,  C11D7/3263 ,  C11D7/34 ,  C11D11/0047 ,  H01L21/02057 ,  H01L21/67051 ,  Y10S134/902

摘要： The embodiments of the present invention provide apparatus for cleaning patterned substrates with fine features with cleaning materials. The apparatus using the cleaning materials has advantages in cleaning patterned substrates with fine features without substantially damaging the features. The cleaning materials are fluid, either in liquid phase, or in liquid/gas phase, and deform around device features; therefore, the cleaning materials do not substantially damage the device features or reduce damage all together. The cleaning materials containing polymers of a polymeric compound with large molecular weight capture the contaminants on the substrate. In addition, the cleaning materials entrap the contaminants and do not return the contaminants to the substrate surface. The polymers of one or more polymeric compounds with large molecular weight form long polymer chains, which can also be cross-linked to form a network (or polymeric network). The long polymer chains and/or polymer network show superior capabilities of capturing and entrapping contaminants, in comparison to conventional cleaning materials.

摘要翻译： 本发明的实施例提供了用清洁材料清洁具有精细特征的图案化衬底的设备。 使用清洁材料的设备具有清洁具有精细特征的图案化基材而不会显着损害特征的优点。 清洁材料是流体，液相或液相/气相，并围绕装置特征变形; 因此，清洁材料基本上不会损坏设备特征或将损坏降低在一起。 包含具有大分子量的聚合物的聚合物的清洁材料捕获基底上的污染物。 此外，清洁材料夹带污染物并且不会将污染物返回到基底表面。 一种或多种具有大分子量的聚合物的聚合物形成长的聚合物链，其也可以交联以形成网络（或聚合物网络）。 与传统清洁材料相比，长的聚合物链和/或聚合物网络显示出捕获和捕获污染物的优异性能。

公开(公告)号：US08226775B2

公开(公告)日：2012-07-24

申请号：US12131660

申请日：2008-06-02

申请人： David S. L. Mui ,  Satish Srinivasan ,  Grant Peng ,  Ji Zhu ,  Shih-Chung Kon ,  Dragan Podlesnik ,  Arjun Mendiratta

发明人： David S. L. Mui ,  Satish Srinivasan ,  Grant Peng ,  Ji Zhu ,  Shih-Chung Kon ,  Dragan Podlesnik ,  Arjun Mendiratta

IPC分类号： B08B3/00 ,  B08B1/00 ,  B08B1/02 ,  C23G1/36

CPC分类号： C11D7/5009 ,  C11D3/3723 ,  C11D3/3765 ,  C11D3/3773 ,  C11D7/261 ,  C11D7/3263 ,  C11D7/34 ,  C11D11/0047 ,  H01L21/02057 ,  H01L21/67051 ,  Y10S134/902

摘要： The embodiments of the present invention provide methods for cleaning patterned substrates with fine features. The methods for cleaning patterned substrate have advantages in cleaning patterned substrates with fine features without substantially damaging the features by using the cleaning materials described. The cleaning materials are fluid, either in liquid phase, or in liquid/gas phase, and deform around device features; therefore, the cleaning materials do not substantially damage the device features or reduce damage all together. The cleaning materials containing polymers of a polymeric compound with large molecular weight capture the contaminants on the substrate. In addition, the cleaning materials entrap the contaminants and do not return the contaminants to the substrate surface. The polymers of one or more polymeric compounds with large molecular weight form long polymer chains, which can also be cross-linked to form a network (or polymeric network). The long polymer chains and/or polymer network show superior capabilities of capturing and entrapping contaminants, in comparison to conventional cleaning materials.

摘要翻译： 本发明的实施例提供了用于清洁具有精细特征的图案化衬底的方法。 用于清洁图案化衬底的方法具有通过使用所述清洁材料来清洁具有精细特征的图案化衬底而不会基本上损坏特征的优点。 清洁材料是流体，液相或液相/气相，并围绕装置特征变形; 因此，清洁材料基本上不会损坏设备特征或将损坏降低在一起。 包含具有大分子量的聚合物的聚合物的清洁材料捕获基底上的污染物。 此外，清洁材料夹带污染物并且不会将污染物返回到基底表面。 一种或多种具有大分子量的聚合物的聚合物形成长的聚合物链，其也可以交联以形成网络（或聚合物网络）。 与传统清洁材料相比，长的聚合物链和/或聚合物网络显示出捕获和捕获污染物的优异性能。

公开(公告)号：US08084406B2

公开(公告)日：2011-12-27

申请号：US12131667

申请日：2008-06-02

申请人： David S. L. Mui ,  Satish Srinivasan ,  Grant Peng ,  Ji Zhu ,  Shih-Chung Kon ,  Dragan Podlesnik ,  Arjun Mendiratta

发明人： David S. L. Mui ,  Satish Srinivasan ,  Grant Peng ,  Ji Zhu ,  Shih-Chung Kon ,  Dragan Podlesnik ,  Arjun Mendiratta

IPC分类号： C11D17/00

CPC分类号： C11D7/5009 ,  C11D3/3723 ,  C11D3/3765 ,  C11D3/3773 ,  C11D7/261 ,  C11D7/3263 ,  C11D7/34 ,  C11D11/0047 ,  H01L21/02057 ,  H01L21/67051 ,  Y10S134/902

摘要： The embodiments of the present invention provide apparatus for cleaning patterned substrates with fine features with cleaning materials. The apparatus using the cleaning materials has advantages in cleaning patterned substrates with fine features without substantially damaging the features. The cleaning materials are fluid, either in liquid phase, or in liquid/gas phase, and deform around device features; therefore, the cleaning materials do not substantially damage the device features or reduce damage all together. The cleaning materials containing polymers of a polymeric compound with large molecular weight capture the contaminants on the substrate. In addition, the cleaning materials entrap the contaminants and do not return the contaminants to the substrate surface. The polymers of one or more polymeric compounds with large molecular weight form long polymer chains, which can also be cross-linked to form a network (or polymeric network). The long polymer chains and/or polymer network show superior capabilities of capturing and entrapping contaminants, in comparison to conventional cleaning materials.

摘要翻译： 本发明的实施例提供了用清洁材料清洁具有精细特征的图案化衬底的设备。 使用清洁材料的设备具有清洁具有精细特征的图案化基材而不会显着损害特征的优点。 清洁材料是流体，液相或液相/气相，并围绕装置特征变形; 因此，清洁材料基本上不会损坏设备特征或将损坏降低在一起。 包含具有大分子量的聚合物的聚合物的清洁材料捕获基底上的污染物。 此外，清洁材料夹带污染物并且不会将污染物返回到基底表面。 一种或多种具有大分子量的聚合物的聚合物形成长的聚合物链，其也可以交联以形成网络（或聚合物网络）。 与传统清洁材料相比，长的聚合物链和/或聚合物网络显示出捕获和捕获污染物的优异性能。

公开(公告)号：US20100108093A1

公开(公告)日：2010-05-06

申请号：US12262094

申请日：2008-10-30

申请人： Grant Peng ,  David Mui ,  Shih-Chung Kon

发明人： Grant Peng ,  David Mui ,  Shih-Chung Kon

IPC分类号： B08B3/12

CPC分类号： H01L21/67051

摘要： A method for cleaning a substrate is provided that includes applying a liquid medium to a surface of the substrate such that the liquid medium substantially covers a portion of the substrate that is being cleaned. One or more transducers are used to generate acoustic energy. The generated acoustic energy is applied to the substrate and the liquid medium meniscus such that the applied acoustic energy to the liquid medium prevents cavitation within the liquid medium. The acoustic energy applied to the substrate provides maximum acoustic wave displacement to acoustic waves introduced into the liquid medium. The acoustic energy introduced into the substrate and the liquid medium enables dislodging of the particle contaminant from the surface of the substrate. The dislodged particle contaminants become entrapped within the liquid medium and are carried away from the surface of the substrate by the liquid medium.

摘要翻译： 提供一种用于清洁衬底的方法，其包括将液体介质施加到衬底的表面，使得液体介质基本上覆盖正被清洁的衬底的一部分。 使用一个或多个换能器来产生声能。 产生的声能被施加到衬底和液体介质弯液面，使得向液体介质施加的声能防止液体介质内的气蚀。 施加到衬底的声能提供了引入到液体介质中的声波的最大声波位移。 引入到基底和液体介质中的声能使得能够从基底表面移除颗粒污染物。 脱落的颗粒污染物被捕获在液体介质中，并通过液体介质从基板的表面带走。

公开(公告)号：US08585825B2

公开(公告)日：2013-11-19

申请号：US12262094

申请日：2008-10-30

申请人： Grant Peng ,  David Mui ,  Shih-Chung Kon

发明人： Grant Peng ,  David Mui ,  Shih-Chung Kon

IPC分类号： B08B3/00 ,  B08B5/04

CPC分类号： H01L21/67051

摘要： A method for cleaning a substrate is provided that includes applying a liquid medium to a surface of the substrate such that the liquid medium substantially covers a portion of the substrate that is being cleaned. One or more transducers are used to generate acoustic energy. The generated acoustic energy is applied to the substrate and the liquid medium meniscus such that the applied acoustic energy to the liquid medium prevents cavitation within the liquid medium. The acoustic energy applied to the substrate provides maximum acoustic wave displacement to acoustic waves introduced into the liquid medium. The acoustic energy introduced into the substrate and the liquid medium enables dislodging of the particle contaminant from the surface of the substrate. The dislodged particle contaminants become entrapped within the liquid medium and are carried away from the surface of the substrate by the liquid medium.

摘要翻译： 提供一种用于清洁衬底的方法，其包括将液体介质施加到衬底的表面，使得液体介质基本上覆盖正被清洁的衬底的一部分。 使用一个或多个换能器来产生声能。 产生的声能被施加到衬底和液体介质弯液面，使得向液体介质施加的声能防止液体介质内的气蚀。 施加到衬底的声能提供了引入到液体介质中的声波的最大声波位移。 引入到基底和液体介质中的声能使得能够从基底表面移除颗粒污染物。 脱落的颗粒污染物被捕获在液体介质中，并通过液体介质从基板的表面带走。

公开(公告)号：US20080038448A1

公开(公告)日：2008-02-14

申请号：US11731075

申请日：2007-03-30

申请人： Arnold Kholodenko ,  Wing Cheng ,  Helen Cheng ,  Mark Mardelboym ,  Grant Peng ,  Katrina Mikhaylichenko

发明人： Arnold Kholodenko ,  Wing Cheng ,  Helen Cheng ,  Mark Mardelboym ,  Grant Peng ,  Katrina Mikhaylichenko

IPC分类号： B05C11/00 ,  B05D3/00

CPC分类号： H01L21/67051 ,  H01L21/6719

摘要： In one embodiment a chamber body enabling semiconductor processing equipment to be at least partially housed in the chamber body, the semiconductor processing equipment being configured to process a substrate using fluids is disclosed. The chamber body being comprised of a base material implemented to form the chamber body, the chamber body defined by at least a bottom surface and wall surfaces that are integrally connected to the bottom surface to enable capture of overflows of fluids during the processing of the substrate over the chamber body. Additionally, the base material is metallic. The chamber body also has a primer coat material disposed over and on the base material. The primer coat material has metallic constituents to define an integrated bond with the base material along with non-metallic constituents. The chamber body further includes a main coat material disposed over and on the primer coat material. The main coat material being defined from non-metallic constituents, the non-metallic constituents of the main coat material defining an integrated bond with the primer coat material. The main coat material defined to completely overlie all the metallic constituents of the primer coat.

摘要翻译： 在一个实施例中，公开了使半导体处理设备能够至少部分地容纳在室主体中的室主体，半导体处理设备被配置为使用流体处理衬底。 腔室主体包括被实施成形成腔室主体的基底材料，至少由底部表面限定的腔体主体和与底部表面一体连接的壁表面，以在衬底的处理期间捕获流体溢出物 在房间的身体。 另外，基材是金属的。 腔室主体还具有设置在基底材料上方的底漆涂层材料。 底涂层材料具有金属成分，以与非金属组分一起界定与基材的整体结合。 室主体还包括设置在底漆涂层材料上和之上的主涂层材料。 主涂层材料由非金属组分定义，主涂层材料的非金属组分限定与底漆涂层材料的整体结合。 主涂层材料被定义为完全覆盖底漆涂层的所有金属成分。