公开(公告)号：US5559358A

公开(公告)日：1996-09-24

申请号：US247911

申请日：1994-05-23

申请人： David W. Burns ,  Henry Guckel ,  James D. Zook

发明人： David W. Burns ,  Henry Guckel ,  James D. Zook

IPC分类号： G01D21/00 ,  G01J1/02 ,  G01J5/44 ,  G01K7/32 ,  G01K11/26 ,  G01L9/00 ,  G01P15/093 ,  G01P15/097 ,  G01P15/10 ,  G02B26/00 ,  G02B26/08 ,  H01L31/00 ,  H01L31/10 ,  H01L29/82

CPC分类号： H01L31/00 ,  G01J5/44 ,  G01L9/002 ,  G01P15/093 ,  G01P15/097 ,  G02B26/001 ,  G02B26/0833 ,  G01P2015/0828

摘要： The present invention relates to microstructures fabricated from semiconductor material and having a flexible member which is excited into various modes of resonance and in which such resonance is read optically. By coupling the microstructure to a surface or material of interest, a drive means will excite the flexible member into a characteristic resonance which when read optically gives indication of certain physical phenomena influencing the surface or material of interest. The microstructures of the present invention may be configured to self-resonate, as a so-called active device, under certain conditions. Many different physical phenomena may be quantified using the device of the present invention.

摘要翻译： 本发明涉及由半导体材料制成的微结构，并且具有被激发成各种谐振模式并且其中这种共振被光学读出的柔性元件。 通过将微结构耦合到感兴趣的表面或材料，驱动装置将使柔性构件激发成特征共振，其在光学读出时指示影响感兴趣的表面或材料的某些物理现象。 本发明的微结构可以被配置为在某些条件下作为所谓的有源器件自谐振。 可以使用本发明的装置量化许多不同的物理现象。

公开(公告)号：US5275055A

公开(公告)日：1994-01-04

申请号：US937068

申请日：1992-08-31

申请人： James D. Zook ,  David W. Burns

发明人： James D. Zook ,  David W. Burns

IPC分类号： G01P15/10 ,  G01B7/16 ,  G01L1/18 ,  G01L9/00 ,  G01L9/08 ,  G01P15/08 ,  G01P15/097

CPC分类号： G01P15/097 ,  G01B7/16 ,  G01L1/183 ,  G01L9/0019 ,  Y10S73/01

摘要： A resonant strain gauge includes a silicon substrate, a polysilicon flexure beam attached at both ends to the substrate, and a polysilicon rigid cover cooperating with the substrate to enclose the flexure beam within a sealed vacuum chamber. An upper bias electrode is formed on the cover, and a lower bias electrode is formed on the substrate directly beneath and spaced apart from the flexure beam. A drive electrode is formed in or on the beam, centered between the upper and lower bias electrodes transversely with respect to the direction of beam elongation. The upper and lower electrodes are biased at constant voltage levels, of equal magnitude and opposite polarity. The drive electrode, ordinarily biased at ground, is selectively charged by applying an oscillating drive voltage, to cause mechanical oscillation of the beam. A piezoresistor element, formed on the beam, senses beam oscillation and provides a position indicating input to the oscillator circuit that drives the beam. The beam tends to oscillate at its natural resonant frequency. The piezoresistor thus provides the natural resonant frequency to the oscillating circuit, adjusting the frequency of the beam drive signal toward coincidence with the natural resonant frequency. A shield electrode can be formed on the flexure beam between the piezoresistor and the drive electrode, to insure against parasitic capacitance. In alternative embodiments, the drive signal is applied to one of the bias electrodes to oscillate the beam, and beam oscillation is sensed capacitively.

摘要翻译： 共振应变计包括硅衬底，在两端附着到衬底的多晶硅弯曲梁和与衬底配合的多晶硅刚性盖，以将挠曲梁封闭在密封的真空室内。 在盖上形成上部偏置电极，并且在基板上直接形成下部偏置电极，并将其与挠曲梁间隔开。 驱动电极形成在梁上或梁上，中心在上偏置电极和下偏置电极之间横向相对于光束伸长方向。 上电极和下电极以恒定的电压电平被偏置，具有相等的幅度和相反的极性。 通常施加在地面上的驱动电极通过施加振荡驱动电压来选择性地充电，以引起光束的机械振荡。 形成在光束上的压敏电阻元件感测光束振荡，并提供指示输入到驱动光束的振荡器电路的位置。 光束倾向于以其固有谐振频率振荡。 因此，压电晶体管向振荡电路提供固有谐振频率，从而将光束驱动信号的频率调整为与固有谐振频率一致。 可以在压敏电阻和驱动电极之间的挠曲束上形成屏蔽电极，以确保寄生电容。 在替代实施例中，将驱动信号施加到偏置电极之一以振荡该光束，并且电容地感测光束振荡。

公开(公告)号：US5483387A

公开(公告)日：1996-01-09

申请号：US279762

申请日：1994-07-22

申请人： Paul E. Bauhahn ,  Thomas Ohnstein ,  James D. Zook

发明人： Paul E. Bauhahn ,  Thomas Ohnstein ,  James D. Zook

IPC分类号： G02B5/20 ,  G02B5/28 ,  G02B5/18 ,  G02B5/22

CPC分类号： G02B5/204

摘要： A microstructure device having a array of deep lamellar structures resembling parallel plates has sharp high pass cut-off behavior associated with incident TE polarized radiation. When two such microstructures are disposed in an orthogonal orientation, they act like a 2-D array of rectangular waveguides with the cut-off behavior determined by the separation of the respective parallel plates. Another embodiment of the present invention employs a linear drive to articulate the array of coupled parallel plates to tune the filter to the operative incident radiation relatively independent of the angle of incidence. The microstructure finds application placed proximate the focal plane of an array of radiation sensitive material so that very high resolution multispectral images may be generated. When the array is articulated by a linear actuator, a preselected cut-off frequency may be tuned so that multispectral imaging occurs independent of the imaging technology employed, with applications for remote sensing of chemical agents, satellite surveys of agricultural resources, meteorological conditions, or environmental quality. When disposed in a gas absorption cell, opposing an IR source and proximate an IR detector the tunable filter can be used for gas analysis.

摘要翻译： 具有类似于平行板的深层状结构的阵列的微结构器件具有与入射TE偏振辐射相关的尖锐的高通过截止行为。 当两个这样的微结构以正交方向设置时，它们的作用类似于矩形波导的2-D阵列，具有由相应的平行板的分离确定的截止行为。 本发明的另一个实施例采用线性驱动器来连接耦合的平行板的阵列，以将滤波器调谐到相对独立于入射角的操作入射辐射。 微结构发现应用放置在辐射敏感材料阵列的焦平面附近，使得可以产生非常高分辨率的多光谱图像。 当阵列由线性致动器铰接时，可以调整预选的截止频率，使得多光谱成像独立于所使用的成像技术，应用于化学试剂的遥感，农业资源的卫星调查，气象条件或 环境质量。 当设置在气体吸收单元中时，与IR源相对并且靠近IR检测器，可调谐滤波器可用于气体分析。