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公开(公告)号：US20060250694A1
公开(公告)日：2006-11-09
申请号：US11123562
申请日：2005-05-05
申请人： David Williams , Michael Goldstein , James Kardach
发明人： David Williams , Michael Goldstein , James Kardach
IPC分类号： G02B27/28
CPC分类号： G02B27/286
摘要： A method of modifying polarity of light is provided. The light propagates through a first transverse plane and has known polarization states in respective cells of the first transverse plane. A first retardation compensator having respective waveplates matching the cells then changes the polarity of the light so that light propagating through a second transverse plane is circularly polarized across the entire second transverse plane. A second retardation compensator includes a plurality of quarter waveplates that change the polarization of the circularly polarized light, so that light passing through a third transverse plane is linearly polarized. The crystal alignment of the quarter waveplates and their shape and configuration are selected so that the direction of the polarization is normal to a radius from a single point.
摘要翻译： 提供了改变光的极性的方法。 光通过第一横向平面传播并且在第一横向平面的相应单元中具有已知的偏振状态。 具有与单元匹配的各个波片的第一延迟补偿器然后改变光的极性，使得通过第二横向平面传播的光在整个第二横向平面上被圆偏振。 第二延迟补偿器包括改变圆偏振光的偏振的多个四分之一波片，使得穿过第三横向平面的光线性偏振。 选择四分之一波片的晶体对准及其形状和结构，使得偏振方向垂直于单个点的半径。
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公开(公告)号：US20060193055A1
公开(公告)日：2006-08-31
申请号：US11386496
申请日：2006-03-21
申请人： David Williams , James Kardach , Michael Goldstein
发明人： David Williams , James Kardach , Michael Goldstein
IPC分类号： G02B27/12
CPC分类号： G02B27/286 , G02B27/283 , G02F1/0136 , G02F1/09 , G03F7/70058 , G03F7/7055 , G03F7/70566
摘要： According to one aspect of the invention, a method and apparatus for polarizing electromagnetic radiation is provided. The electromagnetic radiation may be divided into first and second portions, substantially all of the first portion may be linearly polarized in a first direction and substantially all of the second portion may be linearly polarized in a second direction, the first direction being substantially orthogonal to the second direction. The linear polarization of at least one of the first and second portions may be changed such that substantially all of both of the first and second portions are linearly polarized in a third direction. At least one of the first and second portions may be redirected such that substantially all of both the first and second portions are propagating in a fourth direction.
摘要翻译： 根据本发明的一个方面，提供了一种用于偏振电磁辐射的方法和装置。 电磁辐射可以被分成第一和第二部分，基本上所有的第一部分可以在第一方向上线性偏振，并且基本上所有的第二部分可以在第二方向上线性偏振，第一方向基本上与 第二个方向 可以改变第一和第二部分中的至少一个的线性极化，使得第一和第二部分的基本上全部都在第三方向上线性偏振。 第一部分和第二部分中的至少一个可以被重定向，使得第一部分和第二部分基本上全部都在第四方向上传播。
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公开(公告)号：US20060103942A1
公开(公告)日：2006-05-18
申请号：US11314689
申请日：2005-12-20
申请人： David Williams , James Kardach , Michael Goldstein
发明人： David Williams , James Kardach , Michael Goldstein
IPC分类号： G02B27/12
CPC分类号： G02B27/286 , G02B27/283 , G02F1/0136 , G02F1/09 , G03F7/70058 , G03F7/7055 , G03F7/70566
摘要： According to one aspect of the invention, a method and apparatus for polarizing electromagnetic radiation is provided. The electromagnetic radiation may be divided into first and second portions, substantially all of the first portion may be linearly polarized in a first direction and substantially all of the second portion may be linearly polarized in a second direction, the first direction being substantially orthogonal to the second direction. The linear polarization of at least one of the first and second portions may be changed such that substantially all of both of the first and second portions are linearly polarized in a third direction. At least one of the first and second portions may be redirected such that substantially all of both the first and second portions are propagating in a fourth direction.
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公开(公告)号：US20060072207A1
公开(公告)日：2006-04-06
申请号：US10956197
申请日：2004-09-30
申请人： David Williams , James Kardach , Michael Goldstein
发明人： David Williams , James Kardach , Michael Goldstein
IPC分类号： G02B27/12
CPC分类号： G02B27/286 , G02B27/283 , G02F1/0136 , G02F1/09 , G03F7/70058 , G03F7/7055 , G03F7/70566
摘要： According to one aspect of the invention, a method and apparatus for polarizing electromagnetic radiation is provided. The electromagnetic radiation may be divided into first and second portions, substantially all of the first portion may be linearly polarized in a first direction and substantially all of the second portion may be linearly polarized in a second direction, the first direction being substantially orthogonal to the second direction. The linear polarization of at least one of the first and second portions may be changed such that substantially all of both of the first and second portions are linearly polarized in a third direction. At least one of the first and second portions may be redirected such that substantially all of both the first and second portions are propagating in a fourth direction.
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公开(公告)号：US07167295B2
公开(公告)日：2007-01-23
申请号：US11314689
申请日：2005-12-20
CPC分类号： G02B27/286 , G02B27/283 , G02F1/0136 , G02F1/09 , G03F7/70058 , G03F7/7055 , G03F7/70566
摘要： According to one aspect of the invention, a method and apparatus for polarizing electromagnetic radiation is provided. The electromagnetic radiation may be divided into first and second portions, substantially all of the first portion may be linearly polarized in a first direction and substantially all of the second portion may be linearly polarized in a second direction, the first direction being substantially orthogonal to the second direction. The linear polarization of at least one of the first and second portions may be changed such that substantially all of both of the first and second portions are linearly polarized in a third direction. At least one of the first and second portions may be redirected such that substantially all of both the first and second portions are propagating in a fourth direction.
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公开(公告)号：US07199936B2
公开(公告)日：2007-04-03
申请号：US11386496
申请日：2006-03-21
CPC分类号： G02B27/286 , G02B27/283 , G02F1/0136 , G02F1/09 , G03F7/70058 , G03F7/7055 , G03F7/70566
摘要： According to one aspect of the invention, a method and apparatus for polarizing electromagnetic radiation is provided. The electromagnetic radiation may be divided into first and second portions, substantially all of the first portion may be linearly polarized in a first direction and substantially all of the second portion may be linearly polarized in a second direction, the first direction being substantially orthogonal to the second direction. The linear polarization of at least one of the first and second portions may be changed such that substantially all of both of the first and second portions are linearly polarized in a third direction. At least one of the first and second portions may be redirected such that substantially all of both the first and second portions are propagating in a fourth direction.
摘要翻译： 根据本发明的一个方面，提供了一种用于偏振电磁辐射的方法和装置。 电磁辐射可以被分成第一和第二部分，基本上所有的第一部分可以在第一方向上线性偏振，并且基本上所有的第二部分可以在第二方向上线性偏振，第一方向基本上与 第二个方向 可以改变第一和第二部分中的至少一个的线性极化，使得第一和第二部分的基本上全部都在第三方向上线性偏振。 第一部分和第二部分中的至少一个可以被重定向，使得第一部分和第二部分基本上全部都在第四方向上传播。
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公开(公告)号：US20070152171A1
公开(公告)日：2007-07-05
申请号：US11322899
申请日：2005-12-30
申请人： Michael Goldstein , David Williams
发明人： Michael Goldstein , David Williams
IPC分类号： A61N5/00
CPC分类号： H01S3/0903 , G03F7/70025 , G03F9/7065 , H05H7/04
摘要： A free electron laser is disclosed. The free electron laser separates pulse bunching at a first electron energy from light generation stage at a second electron energy. A first wiggler pulse bunches the electrons and a second wiggler generates light. The first wiggler may be an optical buncher with an injected seed wave, and the second wiggler can be a magnetic wiggler, optical wiggler, resonant transition radiator, parametric radiation radiator, Cerenkov radiation radiator or a Smith-Purcell radiation radiator. The disclosed free electron laser is particularly useful for lithography applications at an extreme ultraviolet wavelength range near 13.5 nm.
摘要翻译： 公开了一种自由电子激光器。 自由电子激光器在第一电子能量处以第二电子能量从光产生级分离脉冲聚束。 第一个摆动脉冲聚束电子，第二个摆动器产生光。 第一摆动器可以是具有注入的种子波的光学聚束器，并且第二摆动器可以是磁性摆动器，光学摆动器，共振转变辐射器，参数辐射辐射器，Cerenkov辐射辐射器或Smith-Purcell辐射辐射器。 所公开的自由电子激光器对于在13.5nm附近的极紫外波长范围内的光刻应用是特别有用的。
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公开(公告)号：US20070076283A1
公开(公告)日：2007-04-05
申请号：US11241588
申请日：2005-09-30
申请人： David Williams , Michael Goldstein
发明人： David Williams , Michael Goldstein
IPC分类号： G02B26/00
CPC分类号： G21K1/06 , G03F7/70291 , G03F7/7055
摘要： A superconductor-based modulator includes a superconductor coupled to a cold reservoir to receive extreme ultra-violet (EUV) light beams. The light beams are modulated by altering transmission and reflection properties of the superconductor. Magnetic field, temperature, or a combination of both, may be used to control the superconducting properties of the superconductor. The modulator may perform temporal, spatial, and grey-scale modulations. The surface of the superconductor may be patterned with heat or infrared radiation to facilitate light focusing.
摘要翻译： 基于超导体的调制器包括耦合到冷存储器以接收极紫外（EUV）光束的超导体。 通过改变超导体的透射和反射特性来调制光束。 磁场，温度或两者的组合可用于控制超导体的超导特性。 调制器可以执行时间，空间和灰度调制。 超导体的表面可以用热或红外辐射图案化以便于光聚焦。
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公开(公告)号：US08068129B2
公开(公告)日：2011-11-29
申请号：US11932502
申请日：2007-10-31
IPC分类号： H04N13/00
CPC分类号： H04N9/045 , A61B1/00193 , A61B1/041 , G02B21/22 , G02B23/2415 , G02B27/2214 , G03B35/00 , H04N5/23248 , H04N13/10 , H04N13/161 , H04N13/189 , H04N13/194 , H04N13/207 , H04N13/211 , H04N13/214 , H04N13/218 , H04N13/225 , H04N13/229 , H04N13/232 , H04N13/239 , H04N13/254 , H04N13/257 , H04N13/296 , H04N13/305 , H04N13/307 , H04N13/324 , H04N13/334 , H04N13/337 , H04N13/339 , H04N13/341 , H04N13/344 , H04N13/365 , H04N13/398 , H04N2005/2255 , H04N2013/0081
摘要： Stereoscopic device including an image directing assembly, an image differentiator and an image detector, the image directing assembly having a first light inlet for receiving a first image and a second light inlet for receiving a second image, the first light inlet being spaced apart from the second light inlet, the image differentiator differentiating between the first image and the second image, wherein the image directing assembly directs the first image to the image detector via a common path, and wherein the image directing assembly directs the second image to the image detector via the common path.
摘要翻译： 所述立体设备包括图像引导组件，图像微分器和图像检测器，所述图像引导组件具有用于接收第一图像的第一光入口和用于接收第二图像的第二光入口，所述第一光入口与 第二光入口，区分第一图像和第二图像之间的图像微分器，其中图像引导组件经由公共路径将第一图像引导到图像检测器，并且其中图像引导组件将第二图像引导到图像检测器，经由 共同的道路。
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公开(公告)号：US07760431B2
公开(公告)日：2010-07-20
申请号：US11123562
申请日：2005-05-05
IPC分类号： G02B27/28
CPC分类号： G02B27/286
摘要： A method of modifying polarity of light is provided. The light propagates through a first transverse plane and has known polarization states in respective cells of the first transverse plane. A first retardation compensator having respective waveplates matching the cells then changes the polarity of the light so that light propagating through a second transverse plane is circularly polarized across the entire second transverse plane. A second retardation compensator includes a plurality of quarter waveplates that change the polarization of the circularly polarized light, so that light passing through a third transverse plane is linearly polarized. The crystal alignment of the quarter waveplates and their shape and configuration are selected so that the direction of the polarization is normal to a radius from a single point.
摘要翻译： 提供了改变光的极性的方法。 光通过第一横向平面传播并且在第一横向平面的相应单元中具有已知的偏振状态。 具有与单元匹配的各个波片的第一延迟补偿器然后改变光的极性，使得通过第二横向平面传播的光在整个第二横向平面上被圆偏振。 第二延迟补偿器包括改变圆偏振光的偏振的多个四分之一波片，使得穿过第三横向平面的光线性偏振。 选择四分之一波片的晶体对准及其形状和结构，使得偏振方向垂直于单个点的半径。
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