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    Method of and apparatus for modifying polarity of light
    1.
    发明申请
    Method of and apparatus for modifying polarity of light 失效
    修改光的极性的方法和装置

    公开(公告)号：US20060250694A1

    公开(公告)日：2006-11-09

    申请号：US11123562

    申请日：2005-05-05

    申请人： David Williams ,  Michael Goldstein ,  James Kardach

    发明人： David Williams ,  Michael Goldstein ,  James Kardach

    IPC分类号： G02B27/28

    CPC分类号： G02B27/286

    摘要： A method of modifying polarity of light is provided. The light propagates through a first transverse plane and has known polarization states in respective cells of the first transverse plane. A first retardation compensator having respective waveplates matching the cells then changes the polarity of the light so that light propagating through a second transverse plane is circularly polarized across the entire second transverse plane. A second retardation compensator includes a plurality of quarter waveplates that change the polarization of the circularly polarized light, so that light passing through a third transverse plane is linearly polarized. The crystal alignment of the quarter waveplates and their shape and configuration are selected so that the direction of the polarization is normal to a radius from a single point.

    摘要翻译： 提供了改变光的极性的方法。 光通过第一横向平面传播并且在第一横向平面的相应单元中具有已知的偏振状态。 具有与单元匹配的各个波片的第一延迟补偿器然后改变光的极性，使得通过第二横向平面传播的光在整个第二横向平面上被圆偏振。 第二延迟补偿器包括改变圆偏振光的偏振的多个四分之一波片，使得穿过第三横向平面的光线性偏振。 选择四分之一波片的晶体对准及其形状和结构，使得偏振方向垂直于单个点的半径。

    Free electron laser
    2.
    发明申请
    Free electron laser 审中-公开
    自由电子激光

    公开(公告)号：US20070152171A1

    公开(公告)日：2007-07-05

    申请号：US11322899

    申请日：2005-12-30

    申请人： Michael Goldstein ,  David Williams

    发明人： Michael Goldstein ,  David Williams

    IPC分类号： A61N5/00

    CPC分类号： H01S3/0903 ,  G03F7/70025 ,  G03F9/7065 ,  H05H7/04

    摘要： A free electron laser is disclosed. The free electron laser separates pulse bunching at a first electron energy from light generation stage at a second electron energy. A first wiggler pulse bunches the electrons and a second wiggler generates light. The first wiggler may be an optical buncher with an injected seed wave, and the second wiggler can be a magnetic wiggler, optical wiggler, resonant transition radiator, parametric radiation radiator, Cerenkov radiation radiator or a Smith-Purcell radiation radiator. The disclosed free electron laser is particularly useful for lithography applications at an extreme ultraviolet wavelength range near 13.5 nm.

    摘要翻译： 公开了一种自由电子激光器。 自由电子激光器在第一电子能量处以第二电子能量从光产生级分离脉冲聚束。 第一个摆动脉冲聚束电子，第二个摆动器产生光。 第一摆动器可以是具有注入的种子波的光学聚束器，并且第二摆动器可以是磁性摆动器，光学摆动器，共振转变辐射器，参数辐射辐射器，Cerenkov辐射辐射器或Smith-Purcell辐射辐射器。 所公开的自由电子激光器对于在13.5nm附近的极紫外波长范围内的光刻应用是特别有用的。

    Superconductor-based modulator for extreme ultraviolet (EUV)
    3.
    发明申请
    Superconductor-based modulator for extreme ultraviolet (EUV) 有权
    基于超导体的极紫外（EUV）调制器

    公开(公告)号：US20070076283A1

    公开(公告)日：2007-04-05

    申请号：US11241588

    申请日：2005-09-30

    申请人： David Williams ,  Michael Goldstein

    发明人： David Williams ,  Michael Goldstein

    IPC分类号： G02B26/00

    CPC分类号： G21K1/06 ,  G03F7/70291 ,  G03F7/7055

    摘要： A superconductor-based modulator includes a superconductor coupled to a cold reservoir to receive extreme ultra-violet (EUV) light beams. The light beams are modulated by altering transmission and reflection properties of the superconductor. Magnetic field, temperature, or a combination of both, may be used to control the superconducting properties of the superconductor. The modulator may perform temporal, spatial, and grey-scale modulations. The surface of the superconductor may be patterned with heat or infrared radiation to facilitate light focusing.

    摘要翻译： 基于超导体的调制器包括耦合到冷存储器以接收极紫外（EUV）光束的超导体。 通过改变超导体的透射和反射特性来调制光束。 磁场，温度或两者的组合可用于控制超导体的超导特性。 调制器可以执行时间，空间和灰度调制。 超导体的表面可以用热或红外辐射图案化以便于光聚焦。

    Method and apparatus for polarizing electromagnetic radiation
    4.
    发明申请
    Method and apparatus for polarizing electromagnetic radiation 失效

    公开(公告)号：US20060103942A1

    公开(公告)日：2006-05-18

    申请号：US11314689

    申请日：2005-12-20

    申请人： David Williams ,  James Kardach ,  Michael Goldstein

    发明人： David Williams ,  James Kardach ,  Michael Goldstein

    IPC分类号： G02B27/12

    CPC分类号： G02B27/286 ,  G02B27/283 ,  G02F1/0136 ,  G02F1/09 ,  G03F7/70058 ,  G03F7/7055 ,  G03F7/70566

    摘要： According to one aspect of the invention, a method and apparatus for polarizing electromagnetic radiation is provided. The electromagnetic radiation may be divided into first and second portions, substantially all of the first portion may be linearly polarized in a first direction and substantially all of the second portion may be linearly polarized in a second direction, the first direction being substantially orthogonal to the second direction. The linear polarization of at least one of the first and second portions may be changed such that substantially all of both of the first and second portions are linearly polarized in a third direction. At least one of the first and second portions may be redirected such that substantially all of both the first and second portions are propagating in a fourth direction.

    Method and apparatus for polarizing electromagnetic radiation
    5.
    发明申请
    Method and apparatus for polarizing electromagnetic radiation 审中-公开

    公开(公告)号：US20060072207A1

    公开(公告)日：2006-04-06

    申请号：US10956197

    申请日：2004-09-30

    申请人： David Williams ,  James Kardach ,  Michael Goldstein

    发明人： David Williams ,  James Kardach ,  Michael Goldstein

    IPC分类号： G02B27/12

    CPC分类号： G02B27/286 ,  G02B27/283 ,  G02F1/0136 ,  G02F1/09 ,  G03F7/70058 ,  G03F7/7055 ,  G03F7/70566

    摘要： According to one aspect of the invention, a method and apparatus for polarizing electromagnetic radiation is provided. The electromagnetic radiation may be divided into first and second portions, substantially all of the first portion may be linearly polarized in a first direction and substantially all of the second portion may be linearly polarized in a second direction, the first direction being substantially orthogonal to the second direction. The linear polarization of at least one of the first and second portions may be changed such that substantially all of both of the first and second portions are linearly polarized in a third direction. At least one of the first and second portions may be redirected such that substantially all of both the first and second portions are propagating in a fourth direction.

    Method and apparatus for polarizing electromagnetic radiation
    6.
    发明申请
    Method and apparatus for polarizing electromagnetic radiation 有权
    用于偏振电磁辐射的方法和装置

    公开(公告)号：US20060193055A1

    公开(公告)日：2006-08-31

    申请号：US11386496

    申请日：2006-03-21

    申请人： David Williams ,  James Kardach ,  Michael Goldstein

    发明人： David Williams ,  James Kardach ,  Michael Goldstein

    IPC分类号： G02B27/12

    CPC分类号： G02B27/286 ,  G02B27/283 ,  G02F1/0136 ,  G02F1/09 ,  G03F7/70058 ,  G03F7/7055 ,  G03F7/70566

    摘要： According to one aspect of the invention, a method and apparatus for polarizing electromagnetic radiation is provided. The electromagnetic radiation may be divided into first and second portions, substantially all of the first portion may be linearly polarized in a first direction and substantially all of the second portion may be linearly polarized in a second direction, the first direction being substantially orthogonal to the second direction. The linear polarization of at least one of the first and second portions may be changed such that substantially all of both of the first and second portions are linearly polarized in a third direction. At least one of the first and second portions may be redirected such that substantially all of both the first and second portions are propagating in a fourth direction.

    摘要翻译： 根据本发明的一个方面，提供了一种用于偏振电磁辐射的方法和装置。 电磁辐射可以被分成第一和第二部分，基本上所有的第一部分可以在第一方向上线性偏振，并且基本上所有的第二部分可以在第二方向上线性偏振，第一方向基本上与 第二个方向 可以改变第一和第二部分中的至少一个的线性极化，使得第一和第二部分的基本上全部都在第三方向上线性偏振。 第一部分和第二部分中的至少一个可以被重定向，使得第一部分和第二部分基本上全部都在第四方向上传播。

    Method of and apparatus for modifying polarity of light
    8.
    发明授权
    Method of and apparatus for modifying polarity of light 失效
    修改光的极性的方法和装置

    公开(公告)号：US07760431B2

    公开(公告)日：2010-07-20

    申请号：US11123562

    申请日：2005-05-05

    申请人： David L. Williams ,  Michael Goldstein ,  James P. Kardach

    发明人： David L. Williams ,  Michael Goldstein ,  James P. Kardach

    IPC分类号： G02B27/28

    CPC分类号： G02B27/286

    摘要： A method of modifying polarity of light is provided. The light propagates through a first transverse plane and has known polarization states in respective cells of the first transverse plane. A first retardation compensator having respective waveplates matching the cells then changes the polarity of the light so that light propagating through a second transverse plane is circularly polarized across the entire second transverse plane. A second retardation compensator includes a plurality of quarter waveplates that change the polarization of the circularly polarized light, so that light passing through a third transverse plane is linearly polarized. The crystal alignment of the quarter waveplates and their shape and configuration are selected so that the direction of the polarization is normal to a radius from a single point.

    摘要翻译： 提供了改变光的极性的方法。 光通过第一横向平面传播并且在第一横向平面的相应单元中具有已知的偏振状态。 具有与单元匹配的各个波片的第一延迟补偿器然后改变光的极性，使得通过第二横向平面传播的光在整个第二横向平面上被圆偏振。 第二延迟补偿器包括改变圆偏振光的偏振的多个四分之一波片，使得穿过第三横向平面的光线性偏振。 选择四分之一波片的晶体对准及其形状和结构，使得偏振方向垂直于单个点的半径。

    Composite metal films and carbon nanotube fabrication
    9.
    发明申请
    Composite metal films and carbon nanotube fabrication 有权
    复合金属薄膜和碳纳米管制作

    公开(公告)号：US20070196575A1

    公开(公告)日：2007-08-23

    申请号：US11359165

    申请日：2006-02-21

    申请人： Juan Dominguez ,  Valery Dubin ,  Florian Gstrein ,  Michael Goldstein

    发明人： Juan Dominguez ,  Valery Dubin ,  Florian Gstrein ,  Michael Goldstein

    IPC分类号： C23C16/00 ,  C01B31/02

    CPC分类号： B82Y40/00 ,  B82Y30/00 ,  C01B32/162 ,  Y10S977/742

    摘要： Embodiments of the present invention provide methods for the fabrication of carbon nanotubes using composite metal films. A composite metal film is fabricated to provide uniform catalytic sites to facilitate the uniform growth of carbon nanotubes. Further embodiments provide embedded nanoparticles for carbon nanotube fabrication. Embodiments of the invention are capable of maintaining the integrity of the catalytic sites at temperatures used in carbon nanotube fabrication processes, 600 to 1100° C.

    摘要翻译： 本发明的实施例提供了使用复合金属膜制造碳纳米管的方法。 制造复合金属膜以提供均匀的催化位点以促进碳纳米管的均匀生长。 另外的实施方案提供用于碳纳米管制造的嵌入式纳米颗粒。 本发明的实施方案能够在碳纳米管制造工艺中使用的温度下维持催化部位的完整性，其温度为600至1100℃