Single-unit reactor design for combined oxidative, initiated, and plasma-enhanced chemical vapor deposition

    公开(公告)号:US09957618B2

    公开(公告)日:2018-05-01

    申请号:US13407075

    申请日:2012-02-28

    IPC分类号: C23C16/00 C23C16/509

    CPC分类号: C23C16/509

    摘要: Described herein are reactors capable of sequentially or simultaneously depositing thin-film polymers onto a substrate by oxidative chemical vapor deposition (oCVD), initiated chemical vapor deposition (iCVD), and plasma-enhanced chemical vapor deposition (PECVD). The single-unit CVD reactors allow for the use of more than one CVD process on the same substrate without the risk of inadvertently exposing the substrate to ambient conditions when switching processes. Furthermore, the ability to deposit simultaneously polymers made by two different CVD processes allows for the exploration of new materials. In addition to assisting in the deposition of polymer films, plasma processes may be used to pretreat substrate surfaces before polymer deposition, or to clean the internal surfaces of the reactor between experiments.

    Single-Unit Reactor Design for Combined Oxidative, Initiated, and Plasma-Enhanced Chemical Vapor Deposition
    2.
    发明申请
    Single-Unit Reactor Design for Combined Oxidative, Initiated, and Plasma-Enhanced Chemical Vapor Deposition 有权
    用于组合氧化,起始和等离子体增强化学气相沉积的单一单元反应器设计

    公开(公告)号:US20130224380A1

    公开(公告)日:2013-08-29

    申请号:US13407075

    申请日:2012-02-28

    IPC分类号: C23C16/00

    CPC分类号: C23C16/509

    摘要: Described herein are reactors capable of sequentially or simultaneously depositing thin-film polymers onto a substrate by oxidative chemical vapor deposition (oCVD), initiated chemical vapor deposition (iCVD), and plasma-enhanced chemical vapor deposition (PECVD). The single-unit CVD reactors allow for the use of more than one CVD process on the same substrate without the risk of inadvertently exposing the substrate to ambient conditions when switching processes. Furthermore, the ability to deposit simultaneously polymers made by two different CVD processes allows for the exploration of new materials. In addition to assisting in the deposition of polymer films, plasma processes may be used to pretreat substrate surfaces before polymer deposition, or to clean the internal surfaces of the reactor between experiments.

    摘要翻译: 这里描述的是能够通过氧化化学气相沉积(oCVD),起始化学气相沉积(iCVD)和等离子体增强化学气相沉积(PECVD)将薄膜聚合物顺序或同时沉积到基底上的反应器。 单个单元CVD反应器允许在同一衬底上使用多于​​一个CVD工艺,而不会在切换工艺时不经意地将衬底暴露于环境条件的风险。 此外,同时沉积通过两种不同CVD工艺制备的聚合物的能力允许探索新材料。 除了辅助聚合物膜的沉积之外,还可以使用等离子体工艺来在聚合物沉积之前预处理衬底表面,或者在实验之间清洁反应器的内表面。

    Biosensors
    3.
    发明授权
    Biosensors 有权
    生物传感器

    公开(公告)号:US09034659B2

    公开(公告)日:2015-05-19

    申请号:US13548521

    申请日:2012-07-13

    摘要: A chemiresistive biosensor for detecting an analyte can include a high specific surface area substrate conformally coated with a conductive polymer, and a binding reagent immobilized on the conductive polymer, wherein the binding reagent has a specific affinity for the analyte. The conductive polymer can be deposited on a substrate by oCVD.

    摘要翻译: 用于检测分析物的化学生物传感器可以包括由导电聚合物共形涂覆的高比表面积底物和固定在导电聚合物上的结合试剂,其中结合试剂对分析物具有特异性亲和力。 导电聚合物可以通过oCVD沉积在基底上。

    Selenophene-Based Low Band Gap Active Layers by Chemical Vapor Deposition
    4.
    发明申请
    Selenophene-Based Low Band Gap Active Layers by Chemical Vapor Deposition 审中-公开
    基于硒酚的低带隙活性层通过化学气相沉积

    公开(公告)号:US20130089659A1

    公开(公告)日:2013-04-11

    申请号:US13267413

    申请日:2011-10-06

    摘要: Described herein are methods of oxidative chemical vapor deposition of polyselenophene films onto non-conductive surfaces. The methods involve a single, dry step. The polyselenophene films formed by these methods have a lower band gap than the theoretically predicted value. Low-band-gap conjugated polymers are attractive for their applications in many devices including field effect transistors, light-emitting diodes, electrochromic devices, and photovoltaics.

    摘要翻译: 这里描述的是将多硒酚膜氧化化学气相沉积到非导电表面上的方法。 该方法涉及单一干燥步骤。 由这些方法形成的聚硒吩膜具有比理论预测值低的带隙。 低带隙共轭聚合物在许多器件中的应用是有吸引力的,包括场效应晶体管,发光二极管,电致变色器件和光伏器件。

    BIOSENSORS
    5.
    发明申请
    BIOSENSORS 有权
    生物传感器

    公开(公告)号:US20140193925A1

    公开(公告)日:2014-07-10

    申请号:US13548521

    申请日:2012-07-13

    IPC分类号: G01N33/543 G01N33/531

    摘要: A chemiresistive biosensor for detecting an analyte can include a high specific surface area substrate conformally coated with a conductive polymer, and a binding reagent immobilized on the conductive polymer, wherein the binding reagent has a specific affinity for the analyte. The conductive polymer can be deposited on a substrate by oCVD.

    摘要翻译: 用于检测分析物的化学生物传感器可以包括由导电聚合物共形涂覆的高比表面积底物和固定在导电聚合物上的结合试剂,其中结合试剂对分析物具有特异性亲和力。 导电聚合物可以通过oCVD沉积在基底上。

    POLYMERIC FILMS TO ENHANCE CELL GROWTH
    10.
    发明申请
    POLYMERIC FILMS TO ENHANCE CELL GROWTH 审中-公开
    聚合膜增强细胞生长

    公开(公告)号:US20100080987A1

    公开(公告)日:2010-04-01

    申请号:US12568494

    申请日:2009-09-28

    IPC分类号: C08F2/46 B32B5/00

    摘要: The present invention provides a method for creating surface-tailored polymer coating for improved cells proliferation by converting one or more carbonaceous monomers each comprising one or more functional groups to a monomer vapor; contacting the monomer vapor and a substrate; and igniting a radio frequency plasma glow discharge to polymerize the monomer vapor to form surface-tailored polymer coating on the substrate at a thicknesses of between 25 and 300 nm and has a functional group surface density of between 3 and 9%, wherein the surface-tailored polymer coating enhances cell proliferation.

    摘要翻译: 本发明提供了一种用于通过将一种或多种各自包含一个或多个官能团的含碳单体转化为单体蒸气来产生表面定制聚合物涂层以改善细胞增殖的方法; 使单体蒸气和基体接触; 并且点燃射频等离子体辉光放电以使单体蒸汽聚合以在基底上形成表面定制的聚合物涂层,其厚度为25至300nm,并且具有3至9%的官能团表面密度,其中, 定制的聚合物涂层增强细胞增殖。