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1.发明授权Bulk acoustic wave resonator filter being digitally reconfigurable, with process 有权具有数字可重构的体声波谐振器滤波器，具有过程公开(公告)号：US08665038B2
公开(公告)日：2014-03-04
申请号：US12371415
申请日：2009-02-13
摘要： A filtering circuit with BAW type acoustic resonators having at least a first quadripole and a second quadripole connected in cascade, each quadripole having a branch series with a first acoustic resonator of type BAW and a branch parallel with each branch having an acoustic resonator of type BAW, the first acoustic resonator having a frequency of resonance series approximately equal to the frequency of parallel resonance of the second acoustic resonator, the branch parallel of the first quadripole having a first capacitance connected in series with the second resonator and, in parallel with the capacitance, a first switching transistor to short circuit the capacitance.
摘要翻译： 具有至少具有级联连接的第一四极和第二四极的BAW型声谐振器的滤波电路，每个四极具有与BAW类型的第一声谐振器的分支系列和与具有BAW型声谐振器的每个分支并联的分支 所述第一声谐振器具有大致等于所述第二声谐振器的并联谐振频率的共振频率，所述第一四极杆的分支并联具有与所述第二谐振器串联连接的第一电容器，并且与所述电容器 第一个开关晶体管使电容短路。
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2.发明申请BULK ACOUSTIC WAVE RESONATOR FILTER BEING DIGITALLY RECONFIGURABLE, WITH PROCESS 有权大容量波形谐振器滤波器数字可重新配置，具有过程公开(公告)号：US20090251235A1
公开(公告)日：2009-10-08
申请号：US12371415
申请日：2009-02-13
IPC分类号： H03H9/02
摘要： A filtering circuit with BAW type acoustic resonators having at least a first quadripole and a second quadripole connected in cascade, each quadripole having a branch series with a first acoustic resonator of type BAW and a branch parallel with each branch having an acoustic resonator of type BAW, the first acoustic resonator having a frequency of resonance series approximately equal to the frequency of parallel resonance of the second acoustic resonator, the branch parallel of the first quadripole having a first capacitance connected in series with the second resonator and, in parallel with the capacitance, a first switching transistor to short circuit the capacitance.
摘要翻译： 具有至少具有级联连接的第一四极和第二四极的BAW型声谐振器的滤波电路，每个四极具有与BAW类型的第一声谐振器的分支系列和与具有BAW型声谐振器的每个分支并联的分支 所述第一声谐振器具有大致等于所述第二声谐振器的并联谐振频率的共振频率，所述第一四极杆的分支并联具有与所述第二谐振器串联连接的第一电容器，并且与所述电容器 第一个开关晶体管使电容短路。
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公开(公告)号：US07868517B2
公开(公告)日：2011-01-11
申请号：US12255426
申请日：2008-10-21
申请人： Didier Belot , Andreia Cathelin , Alexandre Augusto Shirakawa , Jean-Marie Pham , Pierre Jary , Eric Kerherve
发明人： Didier Belot , Andreia Cathelin , Alexandre Augusto Shirakawa , Jean-Marie Pham , Pierre Jary , Eric Kerherve
IPC分类号： H01L41/04
CPC分类号： H03H9/17 , H03H9/02228
摘要： A Lamb wave resonator includes a piezoelectric layer, and a first electrode against a first face of the piezoelectric layer. The first electrode includes fingers and a contact arm, with each finger including a first side in contact with the contact arm and two other sides parallel to one another. Portions of the piezoelectric layer are at least partially etched between the two fingers to form a recess. The fingers are spaced apart from one another by a distance W calculated according to the following equation: W = n · va lateral f , with n ∈ N where, valateral is an acoustic propagation speed of Lamb waves, n is an order of a resonance mode of the Lamb waves, f is a resonance frequency of the Lamb wave resonator.
摘要翻译： 兰姆波谐振器包括压电层和抵靠压电层的第一面的第一电极。 第一电极包括指状物和接触臂，每个指状物包括与接触臂接触的第一侧和彼此平行的两个另外的边。 在两个手指之间至少部分蚀刻压电层的一部分以形成凹部。 手指按照以下等式计算的距离W彼此间隔开：W = n·va横向f，其中n n为N，其中，侧向是兰姆波的声传播速度，n是 Lamb波的谐振模式，f是兰姆波谐振器的谐振频率。
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公开(公告)号：US08188811B2
公开(公告)日：2012-05-29
申请号：US12371468
申请日：2009-02-13
申请人： Andrea Cathelin , Didier Belot , Alexandre Augusto Shirakawa , Eric Kerherve , Jean-Marie Pham , Pierre Jary
发明人： Andrea Cathelin , Didier Belot , Alexandre Augusto Shirakawa , Eric Kerherve , Jean-Marie Pham , Pierre Jary
CPC分类号： H03H9/584 , H03H9/589 , Y10T29/42 , Y10T29/49005
摘要： A filter with coupled resonator having a substrate; an acoustic mirror intended to support acoustic resonators, and to isolate these resonators from the substrate; a first structure with an upper resonator and a lower resonator coupled to one another through at least one layer of acoustic coupling; a second structure with an upper resonator and a lower resonator coupled to one another through at least one layer of acoustic coupling; the lower resonators of the first and second structure having the same electrodes. The first and second structures are connected via a fifth resonator for which electrodes and the piezoelectric layer of the lower resonators are of the first and second structure.
摘要翻译： 具有耦合谐振器的滤波器，具有基板; 用于支撑声谐振器的声反射镜，并将这些谐振器与基板隔离; 具有通过至少一个声耦合层彼此耦合的上谐振器和下谐振器的第一结构; 具有通过至少一个声耦合层彼此耦合的上谐振器和下谐振器的第二结构; 第一和第二结构的下部谐振器具有相同的电极。 第一和第二结构通过电极和下部谐振器的压电层具有第一和第二结构的第五谐振器连接。
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公开(公告)号：US20090256650A1
公开(公告)日：2009-10-15
申请号：US12371468
申请日：2009-02-13
申请人： Andrea Cathelin , Didier Belot , Alexandre Augusto Shirakawa , Eric Kerherve , Jean-Marie Pham , Pierre Jary
发明人： Andrea Cathelin , Didier Belot , Alexandre Augusto Shirakawa , Eric Kerherve , Jean-Marie Pham , Pierre Jary
CPC分类号： H03H9/584 , H03H9/589 , Y10T29/42 , Y10T29/49005
摘要： A filter with coupled resonator having a substrate; an acoustic mirror intended to support acoustic resonators, and to isolate these resonators from the substrate; a first structure with an upper resonator and a lower resonator coupled to one another through at least one layer of acoustic coupling; a second structure with an upper resonator and a lower resonator coupled to one another through at least one layer of acoustic coupling; the lower resonators of the first and second structure having the same electrodes. The first and second structures are connected via a fifth resonator for which electrodes and the piezoelectric layer of the lower resonators are of the first and second structure.
摘要翻译： 具有耦合谐振器的滤波器，具有基板; 用于支撑声谐振器的声反射镜，并将这些谐振器与基板隔离; 具有通过至少一个声耦合层彼此耦合的上谐振器和下谐振器的第一结构; 具有通过至少一个声耦合层彼此耦合的上谐振器和下谐振器的第二结构; 第一和第二结构的下部谐振器具有相同的电极。 第一和第二结构通过电极和下部谐振器的压电层具有第一和第二结构的第五谐振器连接。
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公开(公告)号：US08575820B2
公开(公告)日：2013-11-05
申请号：US13074094
申请日：2011-03-29
IPC分类号： H01L41/047 , H03H9/15
CPC分类号： H03H3/02 , H03H9/132 , H03H9/585 , H03H2003/0428
摘要： A stacked bulk acoustic resonator includes a first piezoelectric layer stacked on a first electrode, a second electrode stacked on the first piezoelectric layer; a second piezoelectric layer stacked on the second electrode, and a third electrode stacked on the second piezoelectric layer. The stacked bulk acoustic resonator further includes an inner raised region formed in an inner portion on a surface of at least one of the first, second and third electrodes, and an outer raised region formed along an outer perimeter on the surface of the at least one of the first, second or third electrodes. The outer raised region surrounds the inner raised region and defines a gap between the inner raised region and the outer raised region.
摘要翻译： 层叠的体声波谐振器包括堆叠在第一电极上的第一压电层，堆叠在第一压电层上的第二电极; 堆叠在第二电极上的第二压电层和堆叠在第二压电层上的第三电极。 层叠的体声波谐振器还包括形成在第一，第二和第三电极中的至少一个的表面上的内部的内部凸起区域，以及沿着至少一个的表面上的外周边形成的外部凸起区域 的第一，第二或第三电极。 外部凸起区域围绕内部凸起区域并且在内部升高区域和外部凸起区域之间限定间隙。
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公开(公告)号：US20120248941A1
公开(公告)日：2012-10-04
申请号：US13074094
申请日：2011-03-29
IPC分类号： H03H9/17 , H01L41/047
CPC分类号： H03H3/02 , H03H9/132 , H03H9/585 , H03H2003/0428
摘要： A stacked bulk acoustic resonator includes a first piezoelectric layer stacked on a first electrode, a second electrode stacked on the first piezoelectric layer; a second piezoelectric layer stacked on the second electrode, and a third electrode stacked on the second piezoelectric layer. The stacked bulk acoustic resonator includes further includes an inner raised region formed in an inner portion on a surface of at least one of the first, second and third electrodes, and an outer raised region formed along an outer perimeter on the surface of the at least one of the first, second or third electrodes. The outer raised region surrounds the inner raised region and defines a gap between the inner raised region and the outer raised region.
摘要翻译： 层叠的体声波谐振器包括堆叠在第一电极上的第一压电层，堆叠在第一压电层上的第二电极; 堆叠在第二电极上的第二压电层和堆叠在第二压电层上的第三电极。 所述层叠的体声波谐振器还包括形成在所述第一，第二和第三电极中的至少一个的表面上的内部部分中的内部凸起区域，以及沿所述至少一个表面上的外周边形成的外部凸起区域 第一，第二或第三电极之一。 外部凸起区域围绕内部凸起区域并且在内部升高区域和外部凸起区域之间限定间隙。
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